JPS51143583A - Method for regulating gas-phase chemical reaction - Google Patents

Method for regulating gas-phase chemical reaction

Info

Publication number
JPS51143583A
JPS51143583A JP50067645A JP6764575A JPS51143583A JP S51143583 A JPS51143583 A JP S51143583A JP 50067645 A JP50067645 A JP 50067645A JP 6764575 A JP6764575 A JP 6764575A JP S51143583 A JPS51143583 A JP S51143583A
Authority
JP
Japan
Prior art keywords
chemical reaction
phase chemical
regulating gas
regulating
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50067645A
Other languages
English (en)
Other versions
JPS5518783B2 (ja
Inventor
Tadashi Suda
Katsumi Takami
Akira Shintani
Shinobu Hase
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50067645A priority Critical patent/JPS51143583A/ja
Priority to DE2625360A priority patent/DE2625360C3/de
Priority to US05/693,312 priority patent/US4072767A/en
Priority to NLAANVRAGE7606191,A priority patent/NL171757C/xx
Publication of JPS51143583A publication Critical patent/JPS51143583A/ja
Publication of JPS5518783B2 publication Critical patent/JPS5518783B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP50067645A 1975-06-06 1975-06-06 Method for regulating gas-phase chemical reaction Granted JPS51143583A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP50067645A JPS51143583A (en) 1975-06-06 1975-06-06 Method for regulating gas-phase chemical reaction
DE2625360A DE2625360C3 (de) 1975-06-06 1976-06-04 Verfahren zum Regeln des chemischen Niederschiagens von Oberflächenüberzügen aus der Dampfphase und seine Verwendung
US05/693,312 US4072767A (en) 1975-06-06 1976-06-07 Method for controlling chemical vapor deposition
NLAANVRAGE7606191,A NL171757C (nl) 1975-06-06 1976-06-08 Werkwijze voor het aanbrengen van dunne lagen van een gegeven samenstelling op een substraat door een geregelde chemische dampafzetting.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50067645A JPS51143583A (en) 1975-06-06 1975-06-06 Method for regulating gas-phase chemical reaction

Publications (2)

Publication Number Publication Date
JPS51143583A true JPS51143583A (en) 1976-12-09
JPS5518783B2 JPS5518783B2 (ja) 1980-05-21

Family

ID=13350945

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50067645A Granted JPS51143583A (en) 1975-06-06 1975-06-06 Method for regulating gas-phase chemical reaction

Country Status (4)

Country Link
US (1) US4072767A (ja)
JP (1) JPS51143583A (ja)
DE (1) DE2625360C3 (ja)
NL (1) NL171757C (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6216515A (ja) * 1985-07-16 1987-01-24 Ulvac Corp プラズマ装置用監視装置

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2718184C2 (de) * 1977-04-23 1982-10-14 Philips Patentverwaltung Gmbh, 2000 Hamburg Verfahren und Vorrichtung zum kontinuierlichen Beschichten eines langgestreckten Körpers
JPS5694751A (en) * 1979-12-28 1981-07-31 Fujitsu Ltd Vapor growth method
US4292341A (en) * 1980-02-26 1981-09-29 Bell Telephone Laboratories, Incorporated Method of controlling the index profile of optical fiber preforms
US6342453B1 (en) * 1999-12-03 2002-01-29 Applied Materials, Inc. Method for CVD process control for enhancing device performance
FI20090319A0 (fi) 2009-09-03 2009-09-03 Beneq Oy Prosessinsäätömenetelmä

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4930319B1 (ja) * 1969-08-29 1974-08-12
US3607378A (en) * 1969-10-27 1971-09-21 Texas Instruments Inc Technique for depositing silicon dioxide from silane and oxygen
US3662605A (en) * 1970-05-13 1972-05-16 Nl Industries Inc Method and means for automating computer-controlled production of particulate materials
DE2156498C3 (de) * 1971-11-13 1982-07-22 Klöckner-Humboldt-Deutz AG, 5000 Köln Verfahren zur Herstellung einer unveränderten Mischung einzelner Komponenten mit vorbestimmten Mengenanteilen dieser Komponenten aus mehreren Grundstoffen und Regeleinrichtung zur Durchführung des Verfahrens 4

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6216515A (ja) * 1985-07-16 1987-01-24 Ulvac Corp プラズマ装置用監視装置

Also Published As

Publication number Publication date
DE2625360A1 (de) 1976-12-09
NL171757B (nl) 1982-12-01
JPS5518783B2 (ja) 1980-05-21
NL171757C (nl) 1983-05-02
NL7606191A (nl) 1976-12-08
DE2625360C3 (de) 1980-09-04
DE2625360B2 (de) 1979-12-20
US4072767A (en) 1978-02-07

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