JPS51132959A - Electron beam radiation equipment - Google Patents

Electron beam radiation equipment

Info

Publication number
JPS51132959A
JPS51132959A JP50057982A JP5798275A JPS51132959A JP S51132959 A JPS51132959 A JP S51132959A JP 50057982 A JP50057982 A JP 50057982A JP 5798275 A JP5798275 A JP 5798275A JP S51132959 A JPS51132959 A JP S51132959A
Authority
JP
Japan
Prior art keywords
electron beam
beam radiation
radiation equipment
equipment
fogging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50057982A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5422638B2 (cs
Inventor
Kazuhiro Ueda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP50057982A priority Critical patent/JPS51132959A/ja
Publication of JPS51132959A publication Critical patent/JPS51132959A/ja
Publication of JPS5422638B2 publication Critical patent/JPS5422638B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP50057982A 1975-05-15 1975-05-15 Electron beam radiation equipment Granted JPS51132959A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50057982A JPS51132959A (en) 1975-05-15 1975-05-15 Electron beam radiation equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50057982A JPS51132959A (en) 1975-05-15 1975-05-15 Electron beam radiation equipment

Publications (2)

Publication Number Publication Date
JPS51132959A true JPS51132959A (en) 1976-11-18
JPS5422638B2 JPS5422638B2 (cs) 1979-08-08

Family

ID=13071206

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50057982A Granted JPS51132959A (en) 1975-05-15 1975-05-15 Electron beam radiation equipment

Country Status (1)

Country Link
JP (1) JPS51132959A (cs)

Also Published As

Publication number Publication date
JPS5422638B2 (cs) 1979-08-08

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