JPS5422638B2 - - Google Patents
Info
- Publication number
- JPS5422638B2 JPS5422638B2 JP5798275A JP5798275A JPS5422638B2 JP S5422638 B2 JPS5422638 B2 JP S5422638B2 JP 5798275 A JP5798275 A JP 5798275A JP 5798275 A JP5798275 A JP 5798275A JP S5422638 B2 JPS5422638 B2 JP S5422638B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50057982A JPS51132959A (en) | 1975-05-15 | 1975-05-15 | Electron beam radiation equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50057982A JPS51132959A (en) | 1975-05-15 | 1975-05-15 | Electron beam radiation equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51132959A JPS51132959A (en) | 1976-11-18 |
| JPS5422638B2 true JPS5422638B2 (cs) | 1979-08-08 |
Family
ID=13071206
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50057982A Granted JPS51132959A (en) | 1975-05-15 | 1975-05-15 | Electron beam radiation equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51132959A (cs) |
-
1975
- 1975-05-15 JP JP50057982A patent/JPS51132959A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51132959A (en) | 1976-11-18 |