JPS51118393A - Semicondector unit - Google Patents

Semicondector unit

Info

Publication number
JPS51118393A
JPS51118393A JP4397475A JP4397475A JPS51118393A JP S51118393 A JPS51118393 A JP S51118393A JP 4397475 A JP4397475 A JP 4397475A JP 4397475 A JP4397475 A JP 4397475A JP S51118393 A JPS51118393 A JP S51118393A
Authority
JP
Japan
Prior art keywords
semicondector
unit
oxydized
film
protect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4397475A
Other languages
Japanese (ja)
Inventor
Takamichi Wada
Hiroshi Kuroda
Shiro Horiuchi
Takeshi Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP4397475A priority Critical patent/JPS51118393A/en
Publication of JPS51118393A publication Critical patent/JPS51118393A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To protect from cutting and short in multi layer wiring by utilizing heat oxydized film of poly silicon and low temperature oxydized film.
COPYRIGHT: (C)1976,JPO&Japio
JP4397475A 1975-04-10 1975-04-10 Semicondector unit Pending JPS51118393A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4397475A JPS51118393A (en) 1975-04-10 1975-04-10 Semicondector unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4397475A JPS51118393A (en) 1975-04-10 1975-04-10 Semicondector unit

Publications (1)

Publication Number Publication Date
JPS51118393A true JPS51118393A (en) 1976-10-18

Family

ID=12678678

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4397475A Pending JPS51118393A (en) 1975-04-10 1975-04-10 Semicondector unit

Country Status (1)

Country Link
JP (1) JPS51118393A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62290180A (en) * 1977-01-26 1987-12-17 モステツク・コ−ポレイシヨン Manufacture of semiconductor device
JPH02312244A (en) * 1989-05-26 1990-12-27 Mitsubishi Electric Corp Manufacture of semiconductor device
JPH0590289A (en) * 1991-09-30 1993-04-09 Semiconductor Energy Lab Co Ltd Semiconductor integrated circuit and manufacture thereof
JPH0590292A (en) * 1991-09-30 1993-04-09 Semiconductor Energy Lab Co Ltd Semiconductor integrated circuit and manufacture thereof
US5668028A (en) * 1993-11-30 1997-09-16 Sgs-Thomson Microelectronics, Inc. Method of depositing thin nitride layer on gate oxide dielectric

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS48102983A (en) * 1972-04-06 1973-12-24
JPS49116987A (en) * 1972-06-01 1974-11-08

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS48102983A (en) * 1972-04-06 1973-12-24
JPS49116987A (en) * 1972-06-01 1974-11-08

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62290180A (en) * 1977-01-26 1987-12-17 モステツク・コ−ポレイシヨン Manufacture of semiconductor device
JPH098299A (en) * 1977-01-26 1997-01-10 Sgs Thomson Microelectron Inc Semiconductor device and manufacture thereof
JPH0918003A (en) * 1977-01-26 1997-01-17 Sgs Thomson Microelectron Inc Manufacture of field effect transistor
JPH02312244A (en) * 1989-05-26 1990-12-27 Mitsubishi Electric Corp Manufacture of semiconductor device
JPH0590289A (en) * 1991-09-30 1993-04-09 Semiconductor Energy Lab Co Ltd Semiconductor integrated circuit and manufacture thereof
JPH0590292A (en) * 1991-09-30 1993-04-09 Semiconductor Energy Lab Co Ltd Semiconductor integrated circuit and manufacture thereof
US5668028A (en) * 1993-11-30 1997-09-16 Sgs-Thomson Microelectronics, Inc. Method of depositing thin nitride layer on gate oxide dielectric
US5710453A (en) * 1993-11-30 1998-01-20 Sgs-Thomson Microelectronics, Inc. Transistor structure and method for making same
US6780718B2 (en) 1993-11-30 2004-08-24 Stmicroelectronics, Inc. Transistor structure and method for making same
US7459758B2 (en) 1993-11-30 2008-12-02 Stmicroelectronics, Inc. Transistor structure and method for making same
US7704841B2 (en) 1993-11-30 2010-04-27 Stmicroelectronics, Inc. Transistor structure and method for making same

Similar Documents

Publication Publication Date Title
JPS51144183A (en) Semiconductor element containing surface protection film
JPS51118393A (en) Semicondector unit
JPS5378789A (en) Manufacture of semiconductor integrated circuit
JPS5272582A (en) Production of semiconductor device
JPS5258579A (en) Temperature detector
JPS51140528A (en) Magnetic bubble module
JPS51112193A (en) Processing method of semiconductor equipment
JPS5236980A (en) Heat sink for semiconductor devices
JPS51145267A (en) Manufacture of semiconductor device
JPS5228879A (en) Semiconductor device and method for its production
JPS52131455A (en) Semiconductor device
JPS5269571A (en) Thermal oxidation method for semiconductor wafer
JPS51139788A (en) Photosemiconductor device
JPS52131462A (en) Manufacture of semiconductor device
JPS5221781A (en) Semiconductor unit producing system
JPS52147065A (en) Semiconductor device
JPS5367498A (en) Gas detector
JPS5239848A (en) Cooling apparatus
JPS5267981A (en) Manufacture of semiconductor unit
JPS51132762A (en) Heat-treatment method of semiconductor device
JPS52147980A (en) Manufacture of semiconductor device
JPS5220007A (en) Locating method
JPS51134083A (en) Method to manufacture the insulation film
JPS54871A (en) Manufacture of semiconductor device
JPS5338991A (en) Semiconductor device