JPS5039876A - - Google Patents

Info

Publication number
JPS5039876A
JPS5039876A JP8964773A JP8964773A JPS5039876A JP S5039876 A JPS5039876 A JP S5039876A JP 8964773 A JP8964773 A JP 8964773A JP 8964773 A JP8964773 A JP 8964773A JP S5039876 A JPS5039876 A JP S5039876A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8964773A
Other languages
Japanese (ja)
Other versions
JPS5740650B2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8964773A priority Critical patent/JPS5740650B2/ja
Priority to US05/495,678 priority patent/US3984301A/en
Publication of JPS5039876A publication Critical patent/JPS5039876A/ja
Publication of JPS5740650B2 publication Critical patent/JPS5740650B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP8964773A 1973-08-11 1973-08-11 Expired JPS5740650B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP8964773A JPS5740650B2 (en) 1973-08-11 1973-08-11
US05/495,678 US3984301A (en) 1973-08-11 1974-08-08 Sputter-etching method employing fluorohalogenohydrocarbon etching gas and a planar electrode for a glow discharge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8964773A JPS5740650B2 (en) 1973-08-11 1973-08-11

Publications (2)

Publication Number Publication Date
JPS5039876A true JPS5039876A (en) 1975-04-12
JPS5740650B2 JPS5740650B2 (en) 1982-08-28

Family

ID=13976546

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8964773A Expired JPS5740650B2 (en) 1973-08-11 1973-08-11

Country Status (1)

Country Link
JP (1) JPS5740650B2 (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52114444A (en) * 1976-03-22 1977-09-26 Nippon Telegraph & Telephone Plasma etching method
JPS52116785A (en) * 1976-03-03 1977-09-30 Int Plasma Corp Method and apparatus for gas plasma reaction
JPS52123938A (en) * 1976-04-13 1977-10-18 Fujitsu Ltd Spatter etching method
JPS55175095U (en) * 1979-05-29 1980-12-15
JPS5635775A (en) * 1980-08-06 1981-04-08 Fujitsu Ltd Ion beam etching method
JPS60143633A (en) * 1984-11-29 1985-07-29 Hitachi Ltd Manufacture of semiconductor device
EP1061257A1 (en) 1999-06-15 2000-12-20 Fujikoki Corporation Regulating valve for variable displacement swash plate compressor and its assembly method
JP2009061407A (en) * 2007-09-07 2009-03-26 Toto Sekisui Kk Settling apparatus, flocculating system and manufacturing method of settling apparatus
JP2010264409A (en) * 2009-05-18 2010-11-25 Isomura Hosui Kiko Co Ltd Tilting tube unit and method of producing the same

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52116785A (en) * 1976-03-03 1977-09-30 Int Plasma Corp Method and apparatus for gas plasma reaction
JPS5347664B2 (en) * 1976-03-03 1978-12-22
JPS559464B2 (en) * 1976-03-22 1980-03-10
JPS52114444A (en) * 1976-03-22 1977-09-26 Nippon Telegraph & Telephone Plasma etching method
JPS5614151B2 (en) * 1976-04-13 1981-04-02
JPS52123938A (en) * 1976-04-13 1977-10-18 Fujitsu Ltd Spatter etching method
JPS55175095U (en) * 1979-05-29 1980-12-15
JPS5635775A (en) * 1980-08-06 1981-04-08 Fujitsu Ltd Ion beam etching method
JPS572788B2 (en) * 1980-08-06 1982-01-18
JPS60143633A (en) * 1984-11-29 1985-07-29 Hitachi Ltd Manufacture of semiconductor device
JPS614179B2 (en) * 1984-11-29 1986-02-07 Hitachi Ltd
EP1061257A1 (en) 1999-06-15 2000-12-20 Fujikoki Corporation Regulating valve for variable displacement swash plate compressor and its assembly method
JP2009061407A (en) * 2007-09-07 2009-03-26 Toto Sekisui Kk Settling apparatus, flocculating system and manufacturing method of settling apparatus
JP2010264409A (en) * 2009-05-18 2010-11-25 Isomura Hosui Kiko Co Ltd Tilting tube unit and method of producing the same

Also Published As

Publication number Publication date
JPS5740650B2 (en) 1982-08-28

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