JPS614179B2 - - Google Patents
Info
- Publication number
- JPS614179B2 JPS614179B2 JP59250543A JP25054384A JPS614179B2 JP S614179 B2 JPS614179 B2 JP S614179B2 JP 59250543 A JP59250543 A JP 59250543A JP 25054384 A JP25054384 A JP 25054384A JP S614179 B2 JPS614179 B2 JP S614179B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25054384A JPS60143633A (en) | 1984-11-29 | 1984-11-29 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25054384A JPS60143633A (en) | 1984-11-29 | 1984-11-29 | Manufacture of semiconductor device |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4771476A Division JPS6012779B2 (en) | 1976-04-28 | 1976-04-28 | Manufacturing method of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60143633A JPS60143633A (en) | 1985-07-29 |
JPS614179B2 true JPS614179B2 (en) | 1986-02-07 |
Family
ID=17209469
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP25054384A Granted JPS60143633A (en) | 1984-11-29 | 1984-11-29 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60143633A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6158574U (en) * | 1984-09-21 | 1986-04-19 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100233293B1 (en) * | 1996-11-26 | 1999-12-01 | 김영환 | A method for forming field oxide layer in semiconductor device |
KR100233266B1 (en) * | 1996-11-26 | 1999-12-01 | 김영환 | Method of forming a device isolation film of semiconductor device |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5036075A (en) * | 1973-05-17 | 1975-04-04 | ||
JPS5039876A (en) * | 1973-08-11 | 1975-04-12 |
-
1984
- 1984-11-29 JP JP25054384A patent/JPS60143633A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5036075A (en) * | 1973-05-17 | 1975-04-04 | ||
JPS5039876A (en) * | 1973-08-11 | 1975-04-12 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6158574U (en) * | 1984-09-21 | 1986-04-19 |
Also Published As
Publication number | Publication date |
---|---|
JPS60143633A (en) | 1985-07-29 |