JPS5740650B2 - - Google Patents

Info

Publication number
JPS5740650B2
JPS5740650B2 JP8964773A JP8964773A JPS5740650B2 JP S5740650 B2 JPS5740650 B2 JP S5740650B2 JP 8964773 A JP8964773 A JP 8964773A JP 8964773 A JP8964773 A JP 8964773A JP S5740650 B2 JPS5740650 B2 JP S5740650B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8964773A
Other versions
JPS5039876A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8964773A priority Critical patent/JPS5740650B2/ja
Priority to US05/495,678 priority patent/US3984301A/en
Publication of JPS5039876A publication Critical patent/JPS5039876A/ja
Publication of JPS5740650B2 publication Critical patent/JPS5740650B2/ja
Expired legal-status Critical Current

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Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP8964773A 1973-08-11 1973-08-11 Expired JPS5740650B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP8964773A JPS5740650B2 (ja) 1973-08-11 1973-08-11
US05/495,678 US3984301A (en) 1973-08-11 1974-08-08 Sputter-etching method employing fluorohalogenohydrocarbon etching gas and a planar electrode for a glow discharge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8964773A JPS5740650B2 (ja) 1973-08-11 1973-08-11

Publications (2)

Publication Number Publication Date
JPS5039876A JPS5039876A (ja) 1975-04-12
JPS5740650B2 true JPS5740650B2 (ja) 1982-08-28

Family

ID=13976546

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8964773A Expired JPS5740650B2 (ja) 1973-08-11 1973-08-11

Country Status (1)

Country Link
JP (1) JPS5740650B2 (ja)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1544172A (en) * 1976-03-03 1979-04-11 Int Plasma Corp Gas plasma reactor and process
JPS52114444A (en) * 1976-03-22 1977-09-26 Nippon Telegraph & Telephone Plasma etching method
JPS52123938A (en) * 1976-04-13 1977-10-18 Fujitsu Ltd Spatter etching method
JPS55175095U (ja) * 1979-05-29 1980-12-15
JPS5635775A (en) * 1980-08-06 1981-04-08 Fujitsu Ltd Ion beam etching method
JPS60143633A (ja) * 1984-11-29 1985-07-29 Hitachi Ltd 半導体装置の製造方法
DE69923437T2 (de) 1999-06-15 2006-03-30 Fujikoki Corp. Regelventil für Taumelscheibenkompressor mit veränderlicher Förderleistung und Verfahren für den Zusammenbau
JP4858916B2 (ja) * 2007-09-07 2012-01-18 東都積水株式会社 沈降装置、沈殿処理システム及び沈降装置の製造方法
JP4926206B2 (ja) * 2009-05-18 2012-05-09 磯村豊水機工株式会社 傾斜管ユニット及びその製造方法

Also Published As

Publication number Publication date
JPS5039876A (ja) 1975-04-12

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