JPS50131469A - - Google Patents

Info

Publication number
JPS50131469A
JPS50131469A JP3696774A JP3696774A JPS50131469A JP S50131469 A JPS50131469 A JP S50131469A JP 3696774 A JP3696774 A JP 3696774A JP 3696774 A JP3696774 A JP 3696774A JP S50131469 A JPS50131469 A JP S50131469A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3696774A
Other versions
JPS5924361B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP49036967A priority Critical patent/JPS5924361B2/ja
Publication of JPS50131469A publication Critical patent/JPS50131469A/ja
Publication of JPS5924361B2 publication Critical patent/JPS5924361B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
  • Inking, Control Or Cleaning Of Printing Machines (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP49036967A 1974-04-03 1974-04-03 ２次元画像比較検査装置 Expired JPS5924361B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49036967A JPS5924361B2 (ja) 1974-04-03 1974-04-03 ２次元画像比較検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49036967A JPS5924361B2 (ja) 1974-04-03 1974-04-03 ２次元画像比較検査装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP59036034A Division JPS59167782A (ja) 1984-02-29 1984-02-29 ２次元画像比較検査装置

Publications (2)

Publication Number Publication Date
JPS50131469A true JPS50131469A (ja) 1975-10-17
JPS5924361B2 JPS5924361B2 (ja) 1984-06-08

Family

ID=12484493

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49036967A Expired JPS5924361B2 (ja) 1974-04-03 1974-04-03 ２次元画像比較検査装置

Country Status (1)

Country Link
JP (1) JPS5924361B2 (ja)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52119844A (en) * 1976-04-02 1977-10-07 Hitachi Ltd Comparative examination method for two-dimensional picture
JPS57196530A (en) * 1981-05-28 1982-12-02 Fujitsu Ltd Inspection of pattern
JPS57198851A (en) * 1981-05-30 1982-12-06 Nippon Kogaku Kk <Nikon> Inspecting device for defect of pattern
JPS57210627A (en) * 1981-06-19 1982-12-24 Hitachi Ltd Detecting method for defect of pattern
JPS5833835A (ja) * 1981-08-24 1983-02-28 Hitachi Ltd パタ−ン検査方法
JPS58145139A (ja) * 1982-02-24 1983-08-29 Hitachi Ltd 半導体回路等のパターンの比較検査装置
JPS5911638A (ja) * 1982-07-12 1984-01-21 Hitachi Ltd パタ−ン欠陥検出装置
JPH06229942A (ja) * 1993-02-03 1994-08-19 Nippondenso Co Ltd ピンホール検査装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3321575A (en) * 1964-02-11 1967-05-23 Jolew Corp Television inspection apparatus adapted for measurement and comparison purposes
JPS4898886A (ja) * 1972-03-29 1973-12-14

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3321575A (en) * 1964-02-11 1967-05-23 Jolew Corp Television inspection apparatus adapted for measurement and comparison purposes
JPS4898886A (ja) * 1972-03-29 1973-12-14

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS617670B2 (ja) * 1976-04-02 1986-03-07 Hitachi Ltd
JPS52119844A (en) * 1976-04-02 1977-10-07 Hitachi Ltd Comparative examination method for two-dimensional picture
JPS57196530A (en) * 1981-05-28 1982-12-02 Fujitsu Ltd Inspection of pattern
JPS6239811B2 (ja) * 1981-05-28 1987-08-25 Fujitsu Ltd
JPS57198851A (en) * 1981-05-30 1982-12-06 Nippon Kogaku Kk <Nikon> Inspecting device for defect of pattern
JPS6239813B2 (ja) * 1981-06-19 1987-08-25 Hitachi Ltd
JPS57210627A (en) * 1981-06-19 1982-12-24 Hitachi Ltd Detecting method for defect of pattern
JPS5833835A (ja) * 1981-08-24 1983-02-28 Hitachi Ltd パタ−ン検査方法
JPS58145139A (ja) * 1982-02-24 1983-08-29 Hitachi Ltd 半導体回路等のパターンの比較検査装置
JPS6337500B2 (ja) * 1982-02-24 1988-07-26 Hitachi Ltd
JPS5911638A (ja) * 1982-07-12 1984-01-21 Hitachi Ltd パタ−ン欠陥検出装置
JPH0358178B2 (ja) * 1982-07-12 1991-09-04 Hitachi Ltd
JPH06229942A (ja) * 1993-02-03 1994-08-19 Nippondenso Co Ltd ピンホール検査装置

Also Published As

Publication number Publication date
JPS5924361B2 (ja) 1984-06-08

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