JPS4983706A - - Google Patents

Info

Publication number
JPS4983706A
JPS4983706A JP48130836A JP13083673A JPS4983706A JP S4983706 A JPS4983706 A JP S4983706A JP 48130836 A JP48130836 A JP 48130836A JP 13083673 A JP13083673 A JP 13083673A JP S4983706 A JPS4983706 A JP S4983706A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP48130836A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4983706A publication Critical patent/JPS4983706A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/52—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbon, e.g. graphite
    • C04B35/522—Graphite
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/52—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbon, e.g. graphite
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5053—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials non-oxide ceramics
    • C04B41/5057—Carbides
    • C04B41/5059—Silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C04B41/87—Ceramics
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C23C16/325—Silicon carbide
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/10—Rotary anodes; Arrangements for rotating anodes; Cooling rotary anodes
    • H01J35/108—Substrates for and bonding of emissive target, e.g. composite structures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/083—Bonding or fixing with the support or substrate
    • H01J2235/084—Target-substrate interlayers or structures, e.g. to control or prevent diffusion or improve adhesion
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/025—Deposition multi-step
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/073—Hollow body
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/134—Remelt
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/148—Silicon carbide
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Carbon And Carbon Compounds (AREA)
JP48130836A 1972-11-24 1973-11-22 Pending JPS4983706A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US309591A US3925577A (en) 1972-11-24 1972-11-24 Silicon carbide coated graphite members and process for producing the same

Publications (1)

Publication Number Publication Date
JPS4983706A true JPS4983706A (ja) 1974-08-12

Family

ID=23198854

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48130836A Pending JPS4983706A (ja) 1972-11-24 1973-11-22

Country Status (9)

Country Link
US (1) US3925577A (ja)
JP (1) JPS4983706A (ja)
BE (1) BE807699A (ja)
CA (1) CA1013213A (ja)
DE (1) DE2357814A1 (ja)
FR (1) FR2207883B1 (ja)
GB (1) GB1452773A (ja)
IT (1) IT997220B (ja)
SE (1) SE394421B (ja)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58148039U (ja) * 1982-03-31 1983-10-05 日立化成工業株式会社 ＳｉＣ−黒鉛複合材治具
JPS62145726A (ja) * 1985-12-20 1987-06-29 Hitachi Chem Co Ltd エピタキシヤル成長用サセプタ−
JPH01249679A (ja) * 1988-03-29 1989-10-04 Toyo Tanso Kk 黒鉛一炭化珪素複合体並びにその製造法
JPH02164783A (ja) * 1988-12-15 1990-06-25 Hitachi Chem Co Ltd ＳｉＣ黒鉛複合材の製造法
JPH0590184A (ja) * 1991-09-27 1993-04-09 Mitsui Eng & Shipbuild Co Ltd 半導体拡散炉用ウエハボートの製造方法
JP2000109989A (ja) * 1998-10-05 2000-04-18 Tokai Carbon Co Ltd プラズマ処理装置の内壁保護部材
KR20200104370A (ko) * 2017-12-27 2020-09-03 어플라이드 머티어리얼스, 인코포레이티드 탄화규소 코팅된 몸체를 제조하기 위한 프로세스
JP2021508660A (ja) * 2017-12-27 2021-03-11 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 炭化ケイ素コーティング体を製造するためのプロセス
JP2021508662A (ja) * 2017-12-27 2021-03-11 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 炭化ケイ素コーティング体を製造するためのプロセス
JP2021508661A (ja) * 2017-12-27 2021-03-11 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 炭化ケイ素コーティング体を製造するためのプロセス

Families Citing this family (76)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1490347A (en) * 1974-02-08 1977-11-02 Dunlop Ltd Friction members
US3961997A (en) * 1975-05-12 1976-06-08 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Fabrication of polycrystalline solar cells on low-cost substrates
US4068037A (en) * 1976-01-02 1978-01-10 Avco Corporation Silicon carbide filaments and method
SE439496B (sv) * 1976-06-25 1985-06-17 Kubota Ltd Anvendning av ett adamitmaterial till valsar for valsverk
GB1599810A (en) * 1977-04-23 1981-10-07 Kernforschungsanlage Juelich Graphite or similar mouldings with corrosion-resistant protective layer
US4226914A (en) * 1978-05-19 1980-10-07 Ford Motor Company Novel spraying composition, method of applying the same and article produced thereby
US4288495A (en) * 1978-05-19 1981-09-08 Ford Motor Company Article coated with beta silicon carbide and silicon
US4221831A (en) * 1978-07-31 1980-09-09 Kostikov Valery I Method of making antifriction products
US4275095A (en) * 1979-07-31 1981-06-23 Warren Consultants, Inc. Composite article and method of making same
US4397901A (en) * 1979-07-31 1983-08-09 Warren James W Composite article and method of making same
US4617232A (en) * 1982-04-15 1986-10-14 Kennecott Corporation Corrosion and wear resistant graphite material
US4621017A (en) * 1982-04-15 1986-11-04 Kennecott Corporation Corrosion and wear resistant graphite material and method of manufacture
US4871587A (en) * 1982-06-22 1989-10-03 Harry Levin Process for coating an object with silicon carbide
US4900531A (en) * 1982-06-22 1990-02-13 Harry Levin Converting a carbon preform object to a silicon carbide object
US5045398A (en) * 1982-06-22 1991-09-03 Harry Levin Silicon carbide product
US4472476A (en) * 1982-06-24 1984-09-18 United Technologies Corporation Composite silicon carbide/silicon nitride coatings for carbon-carbon materials
US4476178A (en) * 1982-06-24 1984-10-09 United Technologies Corporation Composite silicon carbide coatings for carbon-carbon materials
US4515860A (en) * 1982-09-10 1985-05-07 Dart Industries Inc. Self protecting carbon bodies and method for making same
US4613522A (en) * 1982-09-29 1986-09-23 Avco Corporation Oxidation resistant carbon-carbon composites
JPS59106572A (ja) * 1982-12-06 1984-06-20 信越化学工業株式会社 炭素繊維の表面処理方法
FR2567874B1 (fr) * 1984-07-20 1987-01-02 Europ Propulsion Procede de fabrication d'un materiau composite a renfort fibreux refractaire et matrice ceramique, et structure telle qu'obtenue par ce procede
US4582751A (en) * 1984-09-04 1986-04-15 Avco Corporation Oxidation protection for carbon composite materials
JPS6169116A (ja) * 1984-09-13 1986-04-09 Toshiba Ceramics Co Ltd シリコンウエハ−の連続ｃｖｄコ−テイング用サセプター
US4623228A (en) * 1984-10-25 1986-11-18 United Technologies Corporation Composite mirror substrate
IT1182433B (it) * 1985-02-12 1987-10-05 Gevipi Ag Organi di tenuta in materiale duro aventi basso coefficiente di attrito
US4935313A (en) * 1985-02-12 1990-06-19 Masco Corporation Of Indiana Process of manufacturing seal members having a low friction coefficient
FR2594119B1 (fr) * 1986-02-10 1988-06-03 Europ Propulsion Installation pour l'infiltration chimique en phase vapeur d'un materiau refractaire autre que le carbone
DE3616499A1 (de) * 1986-05-16 1987-11-19 Reimbold & Strick Mit silicium elektrisch leitfaehig und oxidationsbestaendig beschichtete graphit-elektrode und verfahren zu ihrer herstellung
JPS6395158A (ja) * 1986-10-09 1988-04-26 大阪セメント株式会社 炭化珪素および炭素よりなる成形体の製造方法
GB8804174D0 (en) * 1988-02-23 1988-03-23 T & N Technology Ltd Coatings
US5284685A (en) * 1988-08-31 1994-02-08 Aerospatiale Societe Nationale Industrielle Composite material with carbon reinforced fibers and its production
DE3920450A1 (de) * 1989-06-22 1991-01-10 Schunk Kohlenstofftechnik Gmbh Gegen oxidation geschuetzte kohlenstoffkoerper und verfahren zum herstellen des oxidationsschutzes
US5114749A (en) * 1989-08-01 1992-05-19 Nkk Corporation Method for manufacturing carbon material having good resistance to oxidation by coating the carbon material with an inorganic polysilazane and then heating
JPH0791660B2 (ja) * 1989-08-30 1995-10-04 株式会社日立製作所 環境遮断用耐熱壁を備えた地上機器
JPH03153876A (ja) * 1989-11-10 1991-07-01 Shin Etsu Chem Co Ltd 炭化珪素質部材
IL98530A (en) * 1990-06-25 1996-06-18 Lanxide Technology Co Ltd Methods for creating self-supporting compound bodies and objects produced by them using parent metals in the form of vapors and elemental oxidants
US5242710A (en) * 1990-06-25 1993-09-07 Lanxide Technology Company, Lp Methods for making self-supporting composite bodies and articles produced thereby
US5674562A (en) * 1990-06-25 1997-10-07 Lanxide Technology Company, Lp Method for making self supporting composite bodies
US6113982A (en) * 1990-06-25 2000-09-05 Lanxide Technology Company, Lp Composite bodies and methods for making same
DE69229007T2 (de) * 1991-01-16 1999-10-21 Sgl Carbon Composites Inc Verbundwerkstoffe aus siliciumcarbidfaserarmiertem Kohlenstoff
US5198263A (en) * 1991-03-15 1993-03-30 The United States Of America As Represented By The United States Department Of Energy High rate chemical vapor deposition of carbon films using fluorinated gases
DE4127693A1 (de) * 1991-08-21 1993-02-25 Huels Chemische Werke Ag Verfahren zum herstellen eines formkoerpers aus graphit
US5294489A (en) * 1992-04-02 1994-03-15 General Electric Company Protective coating with reactive interlayer on reinforcement in silicon carbide composite
US5332601A (en) * 1992-12-10 1994-07-26 The United States As Represented By The United States Department Of Energy Method of fabricating silicon carbide coatings on graphite surfaces
US5855955A (en) * 1995-06-07 1999-01-05 Lanxide Technology Company L.P. Method for making self-supporting composite bodies
US5968653A (en) * 1996-01-11 1999-10-19 The Morgan Crucible Company, Plc Carbon-graphite/silicon carbide composite article
DE29610498U1 (de) * 1996-06-14 1996-08-29 Zornik Miklavz Fahrzeugbrems- bzw. Fahrzeugkupplungsscheibe aus C-C/SiC-Werkstoff
JP2000319080A (ja) * 1999-05-07 2000-11-21 Tokai Carbon Co Ltd 炭化珪素被覆黒鉛部材
US6206531B1 (en) * 1999-05-25 2001-03-27 Ultramet Lightweight precision optical mirror substrate and method of making
US20050003195A1 (en) * 1999-12-02 2005-01-06 Joseph Brian E. Carbon foam composite tooling and methods for using the same
US7147713B2 (en) * 2003-04-30 2006-12-12 Cree, Inc. Phase controlled sublimation
US7247513B2 (en) * 2003-05-08 2007-07-24 Caracal, Inc. Dissociation of silicon clusters in a gas phase during chemical vapor deposition homo-epitaxial growth of silicon carbide
DE602005020781D1 (de) * 2004-03-01 2010-06-02 Pebble Bed Modular Reactor Pty Verfahren zur herstellung von nuklearem brennmaterial
FR2872072B1 (fr) * 2004-06-24 2006-09-29 Snecma Propulsion Solide Sa Procede de brasage de pieces en materiau composite thermostructural siliciure
US8097547B2 (en) 2004-11-29 2012-01-17 Saint-Gobain Centre De Recherches Et D'etudes Europeen Sintered refactory material based on silicon carbide with a silicon nitride binder
FR2889087B1 (fr) * 2005-07-28 2008-09-12 Saint Gobain Ct Recherches Support de cuisson pour ceramiques et procede d'obtention
US20080220256A1 (en) * 2007-03-09 2008-09-11 Ues, Inc. Methods of coating carbon/carbon composite structures
FR2935636B1 (fr) 2008-09-05 2011-06-24 Commissariat Energie Atomique Materiau a architecture multicouche, dedie a une mise en contact avec du silicium liquide
JP5735501B2 (ja) * 2009-07-07 2015-06-17 モーガン・アドヴァンスト・マテリアルズ・アンド・テクノロジー・インコーポレイテッドＭｏｒｇａｎ Ａｄｖａｎｃｅｄ Ｍａｔｅｒｉａｌｓ Ａｎｄ Ｔｅｃｈｎｏｌｏｇｙ Ｉｎｃ． 硬質非酸化物又は酸化物セラミック／硬質非酸化物又は酸化物セラミック複合体ハイブリッドシール部品
US20110073039A1 (en) * 2009-09-28 2011-03-31 Ron Colvin Semiconductor deposition system and method
CN101775590B (zh) * 2010-01-08 2011-08-10 刘锡潜 一种具有保护涂层的石墨基座及其制备方法
US20130108863A1 (en) * 2010-04-21 2013-05-02 Entegris, Inc. Coated Graphite Article And Reactive Ion Etch Manufacturing And Refurbishment Of Graphite Article
US10138551B2 (en) 2010-07-29 2018-11-27 GES Associates LLC Substrate processing apparatuses and systems
CN104528734A (zh) * 2014-12-25 2015-04-22 大连理工大学 一种降低电子束熔炼多晶硅能耗的装置与方法
US20160230570A1 (en) 2015-02-11 2016-08-11 Rolls-Royce High Temperature Composites Inc. Modified atmosphere melt infiltration
FR3042993A1 (fr) 2015-11-04 2017-05-05 Commissariat Energie Atomique Matrice et piston d'appareil de sps, appareil de sps les comprenant, et procede de frittage, densification ou assemblage sous une atmosphere oxydante utilisant cet appareil
EP3514129A1 (en) 2018-01-18 2019-07-24 Heraeus GMSI LLC Process for manufacturing a silicon carbide coated body
EP3514259A1 (en) 2018-01-18 2019-07-24 Heraeus GMSI LLC Process for manufacturing a silicon carbide coated body
EP3626865A1 (en) 2018-09-20 2020-03-25 Heraeus GMSI LLC Susceptor and method for manufacturing the same
EP3647459A1 (en) * 2018-10-31 2020-05-06 Petroceramics S.p.A. Method and an assembly by chemical vapor infiltration of porous components
IT201800009953A1 (it) 2018-10-31 2020-05-01 Petroceramics Spa Metodo ed un assieme di infiltrazione e la deposizione rapida da fase vapore di componenti porosi
WO2021034214A1 (ru) * 2019-08-19 2021-02-25 Генадий Викторович СВЯТЕЦ Изделие с покрытием из карбида кремния и способ изготовления изделия с покрытием из карбида кремния
WO2021034215A1 (ru) * 2019-08-19 2021-02-25 СВЯТЕЦ, Генадий Викторович Изделие из графита с модифицированным приповерхностным слоем и способ модификации поверхности изделия, имеющего основу из графита
CN111172555B (zh) * 2020-01-22 2022-11-08 核工业第八研究所 一种制氟用碳阳极板
CN111463113B (zh) * 2020-05-25 2023-04-11 哈尔滨晶创科技有限公司 一种用于半绝缘SiC离子掺杂退火过程的保护碳化硅表面的处理方法
CN113005429A (zh) * 2021-02-26 2021-06-22 中山德华芯片技术有限公司 一种嵌套式石墨盘

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2734800A (en) * 1956-02-14 Brooks
FR985350A (fr) * 1949-04-30 1951-07-17 Lorraine Carbone Procédé de traitement de pièces en carbone pour usages électriques et produits nouveaux en résultant
US2677627A (en) * 1951-10-26 1954-05-04 Norton Co Process of coating carbonaceous material with silicon carbide
US2828231A (en) * 1954-03-31 1958-03-25 Gen Electric Method and apparatus for ultrasonic cleansing
US3019128A (en) * 1957-09-17 1962-01-30 Union Carbide Corp Coated carbonaceous articles
US2992127A (en) * 1958-12-23 1961-07-11 Texas Instruments Inc Novel graphite articles and method of making
US3095316A (en) * 1959-09-30 1963-06-25 Union Carbide Corp Process for coating carbonaceous articles with silicon dioxide
US3140193A (en) * 1960-04-06 1964-07-07 James S Kane Process for producing oxidation resistant refractory coating on dense graphite
US3164489A (en) * 1961-12-26 1965-01-05 Lear Siegler Inc Silicon impregnated graphite part and process for producing same
US3393085A (en) * 1962-07-06 1968-07-16 Union Carbide Corp Thermally stable carbon articles
US3329527A (en) * 1963-09-13 1967-07-04 Monsanto Co Graphite heating elements and method of conditioning the heating surfaces thereof
US3493423A (en) * 1964-05-01 1970-02-03 Union Carbide Corp Coating carbon substrates with refractory metal carbides
US3385723A (en) * 1964-06-26 1968-05-28 Martin Marietta Corp Carbon article coated with beta silicon carbide
US3406044A (en) * 1965-01-04 1968-10-15 Monsanto Co Resistance heating elements and method of conditioning the heating surfaces thereof
NL133271C (ja) * 1966-01-05
US3459504A (en) * 1966-10-21 1969-08-05 Texas Instruments Inc Formation of carbide compounds by vapor deposition on graphite bodies

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58148039U (ja) * 1982-03-31 1983-10-05 日立化成工業株式会社 ＳｉＣ−黒鉛複合材治具
JPS6135530Y2 (ja) * 1982-03-31 1986-10-16
JPS62145726A (ja) * 1985-12-20 1987-06-29 Hitachi Chem Co Ltd エピタキシヤル成長用サセプタ−
JPH0650731B2 (ja) * 1985-12-20 1994-06-29 日立化成工業株式会社 エピタキシヤル成長用サセプタ−
JPH0583517B2 (ja) * 1988-03-29 1993-11-26 Toyo Tanso Co
JPH01249679A (ja) * 1988-03-29 1989-10-04 Toyo Tanso Kk 黒鉛一炭化珪素複合体並びにその製造法
JPH02164783A (ja) * 1988-12-15 1990-06-25 Hitachi Chem Co Ltd ＳｉＣ黒鉛複合材の製造法
JPH0590184A (ja) * 1991-09-27 1993-04-09 Mitsui Eng & Shipbuild Co Ltd 半導体拡散炉用ウエハボートの製造方法
JP2000109989A (ja) * 1998-10-05 2000-04-18 Tokai Carbon Co Ltd プラズマ処理装置の内壁保護部材
KR20200104370A (ko) * 2017-12-27 2020-09-03 어플라이드 머티어리얼스, 인코포레이티드 탄화규소 코팅된 몸체를 제조하기 위한 프로세스
JP2021508659A (ja) * 2017-12-27 2021-03-11 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 炭化ケイ素コーティング体を製造するためのプロセス
JP2021508660A (ja) * 2017-12-27 2021-03-11 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 炭化ケイ素コーティング体を製造するためのプロセス
JP2021508662A (ja) * 2017-12-27 2021-03-11 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 炭化ケイ素コーティング体を製造するためのプロセス
JP2021508661A (ja) * 2017-12-27 2021-03-11 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 炭化ケイ素コーティング体を製造するためのプロセス
KR20230004940A (ko) * 2017-12-27 2023-01-06 어플라이드 머티어리얼스, 인코포레이티드 탄화규소 코팅된 몸체를 제조하기 위한 프로세스

Also Published As

Publication number Publication date
US3925577A (en) 1975-12-09
IT997220B (it) 1975-12-30
BE807699A (fr) 1974-05-24
GB1452773A (en) 1976-10-13
CA1013213A (en) 1977-07-05
FR2207883A1 (ja) 1974-06-21
DE2357814A1 (de) 1974-05-30
FR2207883B1 (ja) 1978-01-06
SE394421B (sv) 1977-06-27

Similar Documents

Publication Publication Date Title
FR2207883B1 (ja)
JPS49132725A (ja)
AU452399B2 (ja)
JPS4920322A (ja)
JPS495097A (ja)
FR2194713B2 (ja)
AU477830B2 (ja)
JPS4923022U (ja)
JPS492318U (ja)
SE379025B (ja)
CH607148A5 (ja)
BG18046A1 (ja)
BG18083A1 (ja)
BG18127A1 (ja)
BG18208A1 (ja)
BG18252A1 (ja)
BG18476A1 (ja)
BG18536A1 (ja)
CH559536A5 (ja)
CH559862A5 (ja)
CH559989A5 (ja)
CH563930A5 (ja)
BG17911A1 (ja)
CH563026A5 (ja)
BG17219A1 (ja)