JPS49111585A - - Google Patents

Info

Publication number
JPS49111585A
JPS49111585A JP2118173A JP2118173A JPS49111585A JP S49111585 A JPS49111585 A JP S49111585A JP 2118173 A JP2118173 A JP 2118173A JP 2118173 A JP2118173 A JP 2118173A JP S49111585 A JPS49111585 A JP S49111585A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2118173A
Other languages
Japanese (ja)
Other versions
JPS5235596B2 (es
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2118173A priority Critical patent/JPS5235596B2/ja
Publication of JPS49111585A publication Critical patent/JPS49111585A/ja
Publication of JPS5235596B2 publication Critical patent/JPS5235596B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Manufacturing Of Printed Circuit Boards (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Drying Of Semiconductors (AREA)
  • Formation Of Insulating Films (AREA)
JP2118173A 1973-02-23 1973-02-23 Expired JPS5235596B2 (es)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2118173A JPS5235596B2 (es) 1973-02-23 1973-02-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2118173A JPS5235596B2 (es) 1973-02-23 1973-02-23

Publications (2)

Publication Number Publication Date
JPS49111585A true JPS49111585A (es) 1974-10-24
JPS5235596B2 JPS5235596B2 (es) 1977-09-09

Family

ID=12047752

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2118173A Expired JPS5235596B2 (es) 1973-02-23 1973-02-23

Country Status (1)

Country Link
JP (1) JPS5235596B2 (es)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5244562A (en) * 1975-10-07 1977-04-07 Fujitsu Ltd Epitaxial growth method
JPS5272172A (en) * 1975-12-12 1977-06-16 Mitsubishi Electric Corp Formation of insulator film on semiconductor crystal
JPS5438770A (en) * 1977-09-01 1979-03-23 Mitsubishi Electric Corp Etching device
JPS5565428A (en) * 1978-11-10 1980-05-16 Tdk Corp Direct formation of thin film pattern
JPS56142630A (en) * 1980-04-09 1981-11-07 Fujitsu Ltd Manufacture of semiconductor device
JPS57500492A (es) * 1980-05-12 1982-03-18
JPS5892216A (ja) * 1981-11-27 1983-06-01 Mitsubishi Electric Corp 半導体装置の製造方法
JPS58132925A (ja) * 1982-02-02 1983-08-08 Agency Of Ind Science & Technol パタ−ン投影によるデバイス製作法
JPS59140369A (ja) * 1983-12-27 1984-08-11 Agency Of Ind Science & Technol 薄膜製造方法とその装置
JPS61119042A (ja) * 1984-11-15 1986-06-06 Toshiba Corp 半導体基板中の不純物を分析する為の試料を作成する装置
JPS61224387A (ja) * 1985-03-28 1986-10-06 Rikagaku Kenkyusho 半導体装置

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5943815B2 (ja) * 1975-10-07 1984-10-24 富士通株式会社 エピタキシヤル成長法
JPS5244562A (en) * 1975-10-07 1977-04-07 Fujitsu Ltd Epitaxial growth method
JPS5272172A (en) * 1975-12-12 1977-06-16 Mitsubishi Electric Corp Formation of insulator film on semiconductor crystal
JPS5438770A (en) * 1977-09-01 1979-03-23 Mitsubishi Electric Corp Etching device
JPS5565428A (en) * 1978-11-10 1980-05-16 Tdk Corp Direct formation of thin film pattern
JPS56142630A (en) * 1980-04-09 1981-11-07 Fujitsu Ltd Manufacture of semiconductor device
JPS57500492A (es) * 1980-05-12 1982-03-18
JPS5892216A (ja) * 1981-11-27 1983-06-01 Mitsubishi Electric Corp 半導体装置の製造方法
JPS58132925A (ja) * 1982-02-02 1983-08-08 Agency Of Ind Science & Technol パタ−ン投影によるデバイス製作法
JPS59140369A (ja) * 1983-12-27 1984-08-11 Agency Of Ind Science & Technol 薄膜製造方法とその装置
JPS61119042A (ja) * 1984-11-15 1986-06-06 Toshiba Corp 半導体基板中の不純物を分析する為の試料を作成する装置
JPH0544830B2 (es) * 1984-11-15 1993-07-07 Tokyo Shibaura Electric Co
JPS61224387A (ja) * 1985-03-28 1986-10-06 Rikagaku Kenkyusho 半導体装置

Also Published As

Publication number Publication date
JPS5235596B2 (es) 1977-09-09

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