JPS4884991A - - Google Patents

Info

Publication number
JPS4884991A
JPS4884991A JP48013321A JP1332173A JPS4884991A JP S4884991 A JPS4884991 A JP S4884991A JP 48013321 A JP48013321 A JP 48013321A JP 1332173 A JP1332173 A JP 1332173A JP S4884991 A JPS4884991 A JP S4884991A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48013321A
Other languages
Japanese (ja)
Other versions
JPS5113919B2 (it
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4884991A publication Critical patent/JPS4884991A/ja
Publication of JPS5113919B2 publication Critical patent/JPS5113919B2/ja
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
JP48013321A 1972-02-01 1973-02-01 Expired JPS5113919B2 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19722204581 DE2204581B2 (de) 1972-02-01 1972-02-01 Steuereinrichtung fuer den bearbeitungsdruck einer laepp- oder honmaschine

Publications (2)

Publication Number Publication Date
JPS4884991A true JPS4884991A (it) 1973-11-10
JPS5113919B2 JPS5113919B2 (it) 1976-05-04

Family

ID=5834643

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48013321A Expired JPS5113919B2 (it) 1972-02-01 1973-02-01

Country Status (7)

Country Link
US (1) US3848365A (it)
JP (1) JPS5113919B2 (it)
DD (1) DD103843A5 (it)
DE (1) DE2204581B2 (it)
FR (1) FR2170689A5 (it)
GB (1) GB1386041A (it)
IT (1) IT974177B (it)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56146665A (en) * 1980-04-14 1981-11-14 Supiide Fuamu Kk Lapping process and its device
JPS56146666A (en) * 1980-04-14 1981-11-14 Supiide Fuamu Kk Lapping device
JPS62120972A (ja) * 1986-11-06 1987-06-02 Supiide Fuamu Kk 加圧装置
US5969521A (en) * 1996-07-18 1999-10-19 Speedfam Co., Ltd. Automatic measuring apparatus having a switching means to generate an output signal only when a sensor is positioned at a predetermined space

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2442081C3 (de) * 1974-09-03 1979-11-15 Jmj-Werkzeugmaschinen Gmbh Fuer Feinbearbeitung, 4020 Mettmann Läppmaschine
JPS54105710U (it) * 1977-12-29 1979-07-25
US4209949A (en) * 1978-01-04 1980-07-01 Staats & Staats, Inc. Method and apparatus for high precision lapping machines
US4194322A (en) * 1978-06-05 1980-03-25 Ford Motor Company Constant force sheet glass cutting drill assembly
JPS5645365A (en) * 1979-09-14 1981-04-25 Ichikawa Seisakusho:Kk Double-face lapping machine
DE2950881C2 (de) * 1979-12-18 1983-06-01 Fa. Peter Wolters, 2370 Rendsburg Steuereinrichtung für den Bearbeitungsdruck an Läpp-, Hon- und Schleißmaschinen
DE3520713A1 (de) * 1985-06-10 1986-12-11 Fa. Peter Wolters, 2370 Rendsburg Steuervorrichtung fuer den bearbeitungsdruck an laepp-, hon- und poliermaschinen
DE3600364A1 (de) * 1986-01-09 1987-07-16 Rexroth Mannesmann Gmbh Verfahren und vorrichtung zum ausgleich des auf einen hydraulischen antrieb wirkenden veraenderlichen gewichtes einer masse, insbesondere fuer den senkrecht stehenden antriebszylinder einer laeppmaschine
US4837979A (en) * 1987-03-17 1989-06-13 Sintobrator, Ltd. Polishing device
DE3818159A1 (de) * 1988-05-28 1989-11-30 Wolters Peter Fa Verfahren und vorrichtung zur steuerung des betriebs von hon- oder schleifmaschinen
US4974370A (en) * 1988-12-07 1990-12-04 General Signal Corp. Lapping and polishing machine
DE69116901T2 (de) * 1990-02-27 1996-07-18 Toshiba Kawasaki Kk Robotersteuerung
US5072881A (en) * 1990-06-04 1991-12-17 Systems Specialties Method of cleaning automated paint spraying equipment
US5573446A (en) * 1995-02-16 1996-11-12 Eastman Kodak Company Abrasive air spray shaping of optical surfaces
US5653622A (en) * 1995-07-25 1997-08-05 Vlsi Technology, Inc. Chemical mechanical polishing system and method for optimization and control of film removal uniformity
CZ102596A3 (en) * 1996-04-09 1997-10-15 Vladimir Ing Hrazdil Apparatus for grinding and/or polishing metallographic patterns
DE69811420T2 (de) * 1997-03-31 2003-07-17 Nippei Toyama Corp., Tokio/Tokyo Schleifmaschine und Verfahren
US5957763A (en) * 1997-09-19 1999-09-28 Speedfam Corporation Polishing apparatus with support columns supporting multiple platform members
JPH11207610A (ja) * 1998-01-26 1999-08-03 Speedfam Co Ltd 研磨量制御システム及びその方法
WO1999056910A1 (en) * 1998-05-01 1999-11-11 Speedfam Corporation Polishing apparatus
JP2002154049A (ja) * 2000-11-15 2002-05-28 Fujikoshi Mach Corp 研磨方法
JP4273056B2 (ja) * 2004-08-12 2009-06-03 不二越機械工業株式会社 研磨装置
KR100702015B1 (ko) * 2005-08-04 2007-03-30 삼성전자주식회사 웨이퍼 연마장치 및 이를 이용한 웨이퍼 연마방법
KR20110056976A (ko) * 2009-11-23 2011-05-31 삼성전자주식회사 휠 팁의 높이를 조절할 수 있는 웨이퍼 연마 장치
US10335919B2 (en) * 2015-03-13 2019-07-02 Struers ApS Specimen mover and a method of placing specimens in a specimen mover
CN107116370B (zh) * 2016-10-25 2019-02-22 浦江县杰浩进出口有限公司 一种稳定的板材加工装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB901875A (en) * 1958-12-22 1962-07-25 Hans Friedrich Bovensiepen An improved lapping machine
US3173230A (en) * 1962-12-03 1965-03-16 Wolters Peter Lapping machine
US3691697A (en) * 1970-09-21 1972-09-19 Hamco Mach & Elect Co Pressure control for lapping device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56146665A (en) * 1980-04-14 1981-11-14 Supiide Fuamu Kk Lapping process and its device
JPS56146666A (en) * 1980-04-14 1981-11-14 Supiide Fuamu Kk Lapping device
JPS639943B2 (it) * 1980-04-14 1988-03-03 Supiido Fuamu Kk
JPS62120972A (ja) * 1986-11-06 1987-06-02 Supiide Fuamu Kk 加圧装置
US5969521A (en) * 1996-07-18 1999-10-19 Speedfam Co., Ltd. Automatic measuring apparatus having a switching means to generate an output signal only when a sensor is positioned at a predetermined space

Also Published As

Publication number Publication date
GB1386041A (en) 1975-03-05
FR2170689A5 (it) 1973-09-14
US3848365A (en) 1974-11-19
JPS5113919B2 (it) 1976-05-04
DE2204581A1 (de) 1973-08-16
DD103843A5 (it) 1974-02-12
IT974177B (it) 1974-06-20
DE2204581B2 (de) 1977-12-08

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