US3848365A - Lapping or honing machine - Google Patents

Lapping or honing machine Download PDF

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Publication number
US3848365A
US3848365A US00324048A US32404873A US3848365A US 3848365 A US3848365 A US 3848365A US 00324048 A US00324048 A US 00324048A US 32404873 A US32404873 A US 32404873A US 3848365 A US3848365 A US 3848365A
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United States
Prior art keywords
pressure
workpiece
hone
lap
lapping
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Expired - Lifetime
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US00324048A
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English (en)
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H Bovensiepen
W Caspers
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping

Definitions

  • Means for adjusting the pressure employing a particular valve in a hydraulic system which hydraulic system gradually effects an increase in pressure of the lap or hone upon the workpiece, maintains the pressure at an elevated value for a pre-determined period of time and thereafter gradually decreases the pressure thereon to a pre-determined lower level.
  • suitable other means for accomplishing the stepless increase of the pressure of the lap or hone on the workpiece are also disclosed.
  • the invention relates to a lapping or honing machine with a pressure unit acting on the lap or hone and with a control unit by which the power input to the pressure unit is adjustable.
  • the pressure unit consists of a cylinder piston unit to which hydraulic fluid can be delivered at both ends.
  • the cylinder piston unit is connected to a hydraulic fluid source through a valve for adjusting the specific contact pressure of the lap or hone to the workpiece surface.
  • the valve permits only a step-wise adjustment of the pressure.
  • This step-wise pressure adjustment has proven to be disadvantageous, because in the machining of workpieces on lapping or honing machines there is the problem that, at the beginning of the operation, only a portion of the surface is engaged by the lap or hone, because the thickness of the workpieces varies.
  • the pressure unit of the lapping or honing machine be operated in two stages, first at a low pressure and then at the maximum pressure corresponding to the optimum specific working pressure.
  • this invention contemplates an improvement in a lapping or honing machine equipped with a pressure unit on the lap or hone and a control unit by which the power input to the pressure unit is adjustable which improvement comprises means to steplessly increase the pressure of the lap or hone on the workpiece from a pre-determined value toward a maximum value.
  • means are provided to hold the pressure with the pressure unit which electric motor is adaptable to gradually increase the pressure of the lap or hone by increasing the pressure in the pressure unit.
  • an especially desirable embodiment of the present invention is one wherein the aforementioned pressure unit comprises a tubular member containing a driven shaft rotatably attached to the lap or hone which bears on the workpiece. It is this lap or hone which has its pressure increased or decreased pursuant to the invention.
  • the tubular member is housed within a cylinder and the tubular member has an exterior ring member extending or protruding from the surface thereof to the cylinder. This defines at least one ring shaped zone to contain hydraulic fluid. As will be seen from the description below, preferably this ring shaped extension is positioned from the tubular member such as to define at least two generally ring shaped chambers.
  • the zones or chambers are provided with a hydraulic fluid inlet in fluid communication therewith and with a source of hydraulic fluid, e.g., a hydraulic fluid reservoir.
  • a valve Disposed between the ring shaped zones or chambers and the hydraulic fluid reservoir is a valve which has a hydraulic fluid entrance and a hydraulic egress in fluid communication with one another through a channel.
  • the channel contains a regulatable bore movable therein in response to an electrical system.
  • the electrical system comprises a pre-determined program whereby the bore, initially; increasingly covers the hydraulic fluid egress and permits fluid flow through the inlet only so as to increase the pressure in the ring shaped zone and thus to move the tubular member and, in turn, the driven member attached to the lap or hone with increasing pressure on the workpiece.
  • the bore moves until such time as it completely covers the hydraulic fluid egress. Such is recorded in the electric motor due to the presence of an arm or extension of the bore which triggers a limit switch. Thereafter, the pressure is maintained at its maximum value for a predetermined period of time.
  • the bore is caused by the electric motor to retreat in the channel whereby to increasingly allow the escape of more hydraulic fluid through the egress until all of the hydraulic fluid has escaped and the pressure is reduced to a pre-determined desirably low value.
  • the bore can comprise a plurality of mechanical members such as a drivable spindle connected to the electric motor which can bear upon a spring such as a coil spring which, in turn, will bear upon the tip of the bore which covers and uncovers the hydraulic fluid egress.
  • This embodiment comprises a driven means such as a spindle fixed to an arm which bears against a pairof springs on either side thereof, each of which springs bears against a housing member containing the drive for said hone or lap.
  • One spring will bear against a protrusion of the housing member relatively close to the hone itself, i.e., downstream of the arm.
  • the other spring will be positioned against a protrusion of the housing member remote from the arm whereby movement in that direction relieves the lap or hone from the workpiece.
  • the pressure is adjusted due to the movement of the spindle means which moves the arm to compress the spring to urge the housing toward or away from the workpiece. Initially, of course, the housing is urged toward the workpiece. Thereafter, the motor will reverse itself, the spindle will turn in opposite direction, the arm will move upward bearing against the remote spring in turn bearing against a protrusion of the housing member whereby to move the same away from the workpiece.
  • the invention is addressed to the problem of a lapping or honing machine by which workpieces having dimensional variations in their thickness can be worked more quickly and with better accuracy of shape in comparison with the lapping and honing machine of the prior art.
  • control unit for the stepless adjustment of the power input to the pressure unit is controlled by a given program in which the power increases from an initial value, e.g., zero, to a maximum value, then is held at this maximum value for a predetermined length of time, and finally diminishes to an end value, e.g., zero.
  • the control unit is set up for the stepless control of the power from the initial value to the maximum value in such a manner that the power increases according to an S curve.
  • This embodiment of the invention is based on the idea that the tolerance variations of the workpieces being machined follow the Gauss distribution curve. If the workpieces are to be lapped or honed at optimum specific working pressure during the entire operation, the power increase in relation to time, i.e., power increase rate, must be greatest in the area in which the greatest frequency of the dimension of greatest deviation from the desired dimension of the workpieces lies. Since only a small number of workpieces have a great tolerance deviation, the power increase in relation to time may take place slowly at the beginning of tht total working time and in the transition to the main working time.
  • the pressure unit is a cylinder piston unit which can be operated by hydraulic fluid and the control unit is a pressure valve connected to the hydraulic fluid feed line.
  • the pressure valve can easily be controlled according to a further embodiment of the invention when it has a spring-loaded valve body, a drive acting on the spring in accordance with the predetermined program to establish the spring bias which determines the pressure of the hydraulic fluid.
  • Suitable drives. are for example, cams'or program-controlled electric motors. To be able in a simple manner toadjust the initial pressure and end pressure on the one side and the maximum pressure on the other, limit switches can be associated with the drive.
  • an especially suitable pressure unit is one which has a programcontrolled electric motor spindle drive in which the part that moves along the spindle acts through a spring on the lap or hone.
  • the controlling of the power in this pressure unit is performed through an electrical control system.
  • FIG. 1 is a side elevation partially broken away of a lapping or honing machine with a hydraulically operated pressure unit.
  • FIG. 2 is a partially diagrammatic longitudinal cross section of a valve for the adjustment of the pressure of the hydraulic pressure unit of the lapping or-honing machine of FIG. 1.
  • FIG. 3 is a lapping or honing machine with an electric motor spindle drive for the pressure unit, in a side view partially broken away.
  • FIG. 4 is a block circuit diagram of an electrical control system.
  • FIG. 5 is a diagram of time versus power in the operation of a lapping or honing machine of the prior art.
  • FIG. 6 is a diagram of time versus power in the operation of the lapping or honing machine of the invention.
  • FIG. 7 is another program of time versus power in the operation of the lapping orhoning machine of the invention.
  • the lapping or honing machines represented in FIGS. 1 and 3 are of the same construction except for the pressure unit. They consist of a column 1, a lower, driven lap or hone 2, and an upper, driven lap or hone 3. Between the .two laps or hones 2, 3, are located the workpieces 4 which are to be lapped or honed. The upper lap or hone 3 is held by a tubular member 5 to whose bottom end it is rotatably mounted. The drive spindle 6 passes through the tubular member 5.
  • the tubular member 5 is constructed in the form of a cylinder piston system that can be fed with hydraulic fluid from both ends, which represents the pressure unit.
  • An exterior piston ring 7 of this cylinder piston system divides the cylinder easing into a lower and upper cylinder chamber 8, 9 respectively.
  • the lower and upper cylinder chambers are supplied with hydraulic fluid from a hydraulic fluid source 10.
  • the pressure in one cylinder chamber, the lower cylinder chamber 8 in this embodiment can be varied according to the predetermined program through valve II, which serves as a control unit for the stepless adjustment of the power input to the pressure unit.
  • the feeding of hydraulic fluid to both varied from a zero initial value to a maximum value and vice versa according to any desired curve.
  • the variation can also be broughtabout through pressure control in the upper cylinder chamber.
  • FIG. 2 An embodiment of a valve 11 is represented in FIG. 2.
  • a valve body 13 In a valve casing 12 a valve body 13 is engaged by a spring 14 which in turn'bears against a movable member 15 of a spindle l7 driven by a direct-current motor 16.
  • Two limit switches 18, 19, are associated with the movable member 15. The limit switches cooperate with a projection of the movable member 15.
  • the limit switch 18 for settingthe maximum pressure and the limit switch 19 for setting the initial pressure and end pressure may be varied as to their position in relation to projection 20 by means of spindles 21 and 22.
  • the valve 11 has its input 23 connected to the upper cylinder chamber 9, while its output 24 leads back to the reservoir of the hydraulic fluid source 10.
  • Valve 11 op- .erates as a throttle valve.
  • the desired pressure in cylinder chamber 9 is adjusted through the bias of spring 14.
  • the spring bias is adjusted by moving the movable member 15 by means of the spindle 17 of motor 16. Motor 16 is turned on and off
  • a cam bearing the given program on its periphery can also engage the spring 14 in the mostsimple embodiment.
  • Operation of the pressure increase steplessly by used of the valve body 13 can also be effected electromagnetically.
  • An electrical control system suitable therefor is represented in FIG. 4.
  • a potentiometer for example, serves to predeterrnine the steepness of the flank of the curve representing the increase of the power in relation to time from zero to maximum power.
  • This predetermined time value is processed in the time circuit.
  • the upper and lower pressure limits can be preset.
  • the actual curve can be predetermined.
  • anapparatus feeding a solenoid is controlled, which automatically compensates voltage fluctuations.
  • the solenoid acts directly on the valve body 13.
  • the pressure unit of FIG. 3, which is especially suited for lapping or honing machines of smaller types has a spindle drive as its pressure unit.
  • a spindle drive As its pressure unit.
  • the ring 32 is engaged by an arm 28 of a nut 30 movable on a threaded spindle 29.
  • the spindle 29 is rotatably mounted in column 1 of the lapping or honing machine.
  • the spindle 29 is driven by an electric motor 31 which is controlled in accordance with the given program.
  • FIGS. 6 and 7 the working diagrams of the lapping or honing machine of the invention are compared with the working diagram of a known lapping or hoining machine.
  • the increasing of the pressure, or of the power of the pressure unit is performed in known lapping machine in a step-wise manner.
  • the operation begins with a power K,,. This power is too great at the beginning of the operation, so that the optimum specific working pressure is exceeded and the danger exists that some of the workpieces may erode the lap.
  • power K At the end of the lapping operation at power K however, the power is too low to achieve an optimum working pressure.
  • the overall working time is shortened in the lapping or honing machine of the invention on the basis of the continuous increasing of the power to the maximum value for the optimum specific working pressure.
  • the invention results in a better accuracy of shape in the workpieces.
  • a lapping or honing machine equipped with a pressure unit on a driven lap or hone to apply lapping or honing pressure to a workpiece and a control unit by which power input to the pressure unit is adjustable, the improvement which comprises means to steplessly increase the pressure of said driven lap or hone on the workpiece from a predetermined value toward a maximum value.
  • An improvement according to claim 1 including means to hold the pressure constant at an elevated pressure for a predetermined period of time.
  • An improvement according to claim 2 including means to automatically diminish the pressure on the driven lap or hone on the workpiece to a predetermined lower value-after the pressure has been held constant at an elevated pressure for a predetermined pe riod of time.
  • control unit is set up for the stepless adjustment of the power from the initial value to a maximum predetermined value in such a manner that the power increases according to an S curve.
  • said means to steplessly increase the pressure of said driven lap or hone against the workpiece comprises an electric motor and an hydraulic system, said hydraulic system connected mechanically to said electric motor and being responsive to said electric motor, said hydraulic system connected to said pressure unit.
  • said pressure unit comprises a tubular member containing a driven shaft rotatably attached to said lap or hone, a cylinder, said tubular member housed within said cylinder, said tubular member having an exterior ring member extending from the surface of said tubular member to said cylinder, an hydraulic fluid inlet in free communication with the so-formed ring shaped region over said exterior ring, a reservoir containing hydraulic fluid, saidhydraulic fluid inlet connected to said reservoir of hydraulic fluid by way of a valve, said valve comprising an hydraulic fluid entrance and an hydraulicegress, a channel, said hydraulic fluid entrance and hydraulic egress in fluid communication with one another through said channel, said channel containing a regulatable bore movable in said channel, an electrical system for regulating said bore in said channel.
  • -said electrical system comprises an electrical motor workpiece when a predetermined period of time has elapsed thereafter, as determined by said extension being in contact with a limit switch, said bore is caused to increasingly open said egress permitting return of said'hydraulic fluid to said reservoir thereby effecting a constant decrease in pressure.
  • said exterior ring defines two ring-shaped zones in said cylinder both of which are connected to an hydraulic fluid inlet and each hydraulic fluid inlet is in fluid communication with said hydraulic entrance of said valve.
  • said driven means comprises a spindle affixed to an arm which bears against a pair of springs on either side thereof
  • said apparatus further comprises a housing member on which said pair of springs bear a driven shaft housed in said housing member, said driven shaft connected to said hone or lap whereby movement of saidspindle moves said arm to compress a spring to urge said housing toward or away from the workpiece.
  • said means to steplessly increase the pressure comprises a contoured cam whose periphery controls the gradual increase in pressure, the time at which the lap or hone is at a maximum predetermined pressure and whose periphery controls. decrease in the pressure to a predetermined lower value, said cam connected to a driving means and bearing on said pressure unit.
  • a process for lapping or honing at least one workpiece which comprises moving the workpiece along a circular path between a lapping or honing disk such that it is concentrical to said lapping or honing disk, pressing the lapping or honing disk against the workpiece during the lapping or honing process with a force which is increased to such extent from an initial starting value to a maximum value while considering the increasing working area of the workpieces during the lapping or honing process, the specific work pressure applied against the workpiece being maintained constant and thereafter, after the force is maintained constant for a predetermined period of time at the maximum work pressure, diminishing the work pressure to a final value.
  • a lapping or honing machine additionally comprising including means for moving a workpiece in a concentrical circular path to said UNITED STATES PATENT OFFICE CERTIFICATE OF CORRECTION Patent N0. 548 365 Dated November 19, 1974 n Hans-Friedrich Bovensiepen et a1 It is certified that error appears 1n the always-identified patent and that said Letters Patent are hereby corrected as shown below:

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
US00324048A 1972-02-01 1973-01-16 Lapping or honing machine Expired - Lifetime US3848365A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19722204581 DE2204581B2 (de) 1972-02-01 1972-02-01 Steuereinrichtung fuer den bearbeitungsdruck einer laepp- oder honmaschine

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US3848365A true US3848365A (en) 1974-11-19

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US00324048A Expired - Lifetime US3848365A (en) 1972-02-01 1973-01-16 Lapping or honing machine

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US (1) US3848365A (it)
JP (1) JPS5113919B2 (it)
DD (1) DD103843A5 (it)
DE (1) DE2204581B2 (it)
FR (1) FR2170689A5 (it)
GB (1) GB1386041A (it)
IT (1) IT974177B (it)

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4007560A (en) * 1974-09-03 1977-02-15 Jmj Werkzeugmaschinen Gmbh Fuer Feinbearbeitung Two wheel lapping machine
US4194322A (en) * 1978-06-05 1980-03-25 Ford Motor Company Constant force sheet glass cutting drill assembly
US4209949A (en) * 1978-01-04 1980-07-01 Staats & Staats, Inc. Method and apparatus for high precision lapping machines
US4742651A (en) * 1985-06-10 1988-05-10 Peter Wolters Control device for the processing pressure on lapping, honing and polishing machines
US4974370A (en) * 1988-12-07 1990-12-04 General Signal Corp. Lapping and polishing machine
US5072881A (en) * 1990-06-04 1991-12-17 Systems Specialties Method of cleaning automated paint spraying equipment
EP0484318A2 (en) * 1987-03-17 1992-05-06 Sintobrator, Ltd. Polishing method
US5509847A (en) * 1990-01-09 1996-04-23 Kabushiki Kaisha Toshiba Control robot
US5573446A (en) * 1995-02-16 1996-11-12 Eastman Kodak Company Abrasive air spray shaping of optical surfaces
US5653622A (en) * 1995-07-25 1997-08-05 Vlsi Technology, Inc. Chemical mechanical polishing system and method for optimization and control of film removal uniformity
US5957763A (en) * 1997-09-19 1999-09-28 Speedfam Corporation Polishing apparatus with support columns supporting multiple platform members
WO1999056910A1 (en) * 1998-05-01 1999-11-11 Speedfam Corporation Polishing apparatus
US6036585A (en) * 1997-03-31 2000-03-14 Nippei Toyama Corporation Grinder and grinding method
US6062949A (en) * 1998-01-26 2000-05-16 Speedfam Co., Ltd. Polishing amount control system and method for same
GB2371005B (en) * 2000-11-15 2004-02-18 Fujikoshi Machinery Corp Method of abrading both faces of work piece
US20060035571A1 (en) * 2004-08-12 2006-02-16 Fujikoshi Machinery Corp. Polishing apparatus
US20070032177A1 (en) * 2005-08-04 2007-02-08 Samsung Electronics Co., Ltd. Wafer processing apparatus and wafer processing method using the same
US20110124273A1 (en) * 2009-11-23 2011-05-26 Samsung Electronics Co., Ltd. Wafer polishing apparatus for adjusting height of wheel tip
US10335919B2 (en) * 2015-03-13 2019-07-02 Struers ApS Specimen mover and a method of placing specimens in a specimen mover

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54105710U (it) * 1977-12-29 1979-07-25
JPS5645365A (en) * 1979-09-14 1981-04-25 Ichikawa Seisakusho:Kk Double-face lapping machine
DE2950881C2 (de) * 1979-12-18 1983-06-01 Fa. Peter Wolters, 2370 Rendsburg Steuereinrichtung für den Bearbeitungsdruck an Läpp-, Hon- und Schleißmaschinen
JPS56146666A (en) * 1980-04-14 1981-11-14 Supiide Fuamu Kk Lapping device
JPS56146665A (en) * 1980-04-14 1981-11-14 Supiide Fuamu Kk Lapping process and its device
DE3600364A1 (de) * 1986-01-09 1987-07-16 Rexroth Mannesmann Gmbh Verfahren und vorrichtung zum ausgleich des auf einen hydraulischen antrieb wirkenden veraenderlichen gewichtes einer masse, insbesondere fuer den senkrecht stehenden antriebszylinder einer laeppmaschine
JPS62120972A (ja) * 1986-11-06 1987-06-02 Supiide Fuamu Kk 加圧装置
DE3818159A1 (de) * 1988-05-28 1989-11-30 Wolters Peter Fa Verfahren und vorrichtung zur steuerung des betriebs von hon- oder schleifmaschinen
CZ102596A3 (en) * 1996-04-09 1997-10-15 Vladimir Ing Hrazdil Apparatus for grinding and/or polishing metallographic patterns
JPH1034529A (ja) * 1996-07-18 1998-02-10 Speedfam Co Ltd 自動定寸装置
CN107116370B (zh) * 2016-10-25 2019-02-22 浦江县杰浩进出口有限公司 一种稳定的板材加工装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3035377A (en) * 1958-12-22 1962-05-22 Bovensiepen Hans-Friedrich Lapping machine
US3173230A (en) * 1962-12-03 1965-03-16 Wolters Peter Lapping machine
US3691697A (en) * 1970-09-21 1972-09-19 Hamco Mach & Elect Co Pressure control for lapping device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3035377A (en) * 1958-12-22 1962-05-22 Bovensiepen Hans-Friedrich Lapping machine
US3173230A (en) * 1962-12-03 1965-03-16 Wolters Peter Lapping machine
US3691697A (en) * 1970-09-21 1972-09-19 Hamco Mach & Elect Co Pressure control for lapping device

Cited By (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4007560A (en) * 1974-09-03 1977-02-15 Jmj Werkzeugmaschinen Gmbh Fuer Feinbearbeitung Two wheel lapping machine
US4209949A (en) * 1978-01-04 1980-07-01 Staats & Staats, Inc. Method and apparatus for high precision lapping machines
US4194322A (en) * 1978-06-05 1980-03-25 Ford Motor Company Constant force sheet glass cutting drill assembly
US4742651A (en) * 1985-06-10 1988-05-10 Peter Wolters Control device for the processing pressure on lapping, honing and polishing machines
EP0484318A2 (en) * 1987-03-17 1992-05-06 Sintobrator, Ltd. Polishing method
EP0484318A3 (en) * 1987-03-17 1994-07-20 Sintobrator Ltd Polishing method
US4974370A (en) * 1988-12-07 1990-12-04 General Signal Corp. Lapping and polishing machine
US5509847A (en) * 1990-01-09 1996-04-23 Kabushiki Kaisha Toshiba Control robot
US5072881A (en) * 1990-06-04 1991-12-17 Systems Specialties Method of cleaning automated paint spraying equipment
US5573446A (en) * 1995-02-16 1996-11-12 Eastman Kodak Company Abrasive air spray shaping of optical surfaces
US5653622A (en) * 1995-07-25 1997-08-05 Vlsi Technology, Inc. Chemical mechanical polishing system and method for optimization and control of film removal uniformity
US6220931B1 (en) * 1997-03-31 2001-04-24 Nippei Toyama Corporation Feeding a grinding wheel in grinding method
US6036585A (en) * 1997-03-31 2000-03-14 Nippei Toyama Corporation Grinder and grinding method
US5957763A (en) * 1997-09-19 1999-09-28 Speedfam Corporation Polishing apparatus with support columns supporting multiple platform members
US6001005A (en) * 1997-09-19 1999-12-14 Speedfam Corporation Polishing apparatus
US6062949A (en) * 1998-01-26 2000-05-16 Speedfam Co., Ltd. Polishing amount control system and method for same
WO1999056910A1 (en) * 1998-05-01 1999-11-11 Speedfam Corporation Polishing apparatus
GB2371005B (en) * 2000-11-15 2004-02-18 Fujikoshi Machinery Corp Method of abrading both faces of work piece
US20060035571A1 (en) * 2004-08-12 2006-02-16 Fujikoshi Machinery Corp. Polishing apparatus
US7115026B2 (en) * 2004-08-12 2006-10-03 Fujikoshi Machinery Corp. Polishing apparatus
CN100534718C (zh) * 2004-08-12 2009-09-02 不二越机械工业株式会社 抛光设备
US20070032177A1 (en) * 2005-08-04 2007-02-08 Samsung Electronics Co., Ltd. Wafer processing apparatus and wafer processing method using the same
US20110124273A1 (en) * 2009-11-23 2011-05-26 Samsung Electronics Co., Ltd. Wafer polishing apparatus for adjusting height of wheel tip
US10335919B2 (en) * 2015-03-13 2019-07-02 Struers ApS Specimen mover and a method of placing specimens in a specimen mover

Also Published As

Publication number Publication date
GB1386041A (en) 1975-03-05
FR2170689A5 (it) 1973-09-14
JPS5113919B2 (it) 1976-05-04
DE2204581A1 (de) 1973-08-16
DD103843A5 (it) 1974-02-12
IT974177B (it) 1974-06-20
DE2204581B2 (de) 1977-12-08
JPS4884991A (it) 1973-11-10

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