JPH1169684A - Printed coil for actuator - Google Patents

Printed coil for actuator

Info

Publication number
JPH1169684A
JPH1169684A JP9219412A JP21941297A JPH1169684A JP H1169684 A JPH1169684 A JP H1169684A JP 9219412 A JP9219412 A JP 9219412A JP 21941297 A JP21941297 A JP 21941297A JP H1169684 A JPH1169684 A JP H1169684A
Authority
JP
Japan
Prior art keywords
insulating
layers
conductor
insulating material
coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9219412A
Other languages
Japanese (ja)
Inventor
Kazunori Yamauchi
一記 山内
Takashi Takahashi
敬 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asahi Chemical Industry Co Ltd
Original Assignee
Asahi Chemical Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Chemical Industry Co Ltd filed Critical Asahi Chemical Industry Co Ltd
Priority to JP9219412A priority Critical patent/JPH1169684A/en
Publication of JPH1169684A publication Critical patent/JPH1169684A/en
Pending legal-status Critical Current

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  • Windings For Motors And Generators (AREA)
  • Manufacture Of Motors, Generators (AREA)

Abstract

PROBLEM TO BE SOLVED: To maintain thin insulating layers, stable insulating properties and the maintenance of a conductor pattern by composing a printed coil of the insulating layers burying sections among the conductors of a plurality of conductor wiring patterns, film layers ensuring the mechanical strength of sections among the insulating layers and adhesive layers directly bonding films and the conductors. SOLUTION: A plurality of conductor wiring pattern 1 layers are composed of insulating layers (first insulating layers: varnish) 2 being directy joined with the conductors of the conductor wiring pattern 1 layers and burying sections among the conductors, film 4 layers for ensuring insulation among the layers and mechanical strength and adhesive layers (second insulating layers) 3 directly bonding the films 4 with the conductors. The first insulating materials (varnish) bury sections among at least the conductor wiring patterns 1 in the half or more of conductor thickness at that time, and an epoxy resin, a polyester resin, an acrylic resin, etc., are used generally as the second insulating materials (the adhesive layers). The thickness of a filmy insulating base material is set in 20 μm or less, a modulus in tension in 250 kg/mm<2> or more and dielectric breakdown strength in 200 kV/mm<2> or more.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明はアクチュエータ用プ
リントコイルに関し、特に絶縁層の改良によりアクチュ
エータの推力やトルクの大幅な向上を図るものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a printed coil for an actuator, and more particularly to a method of improving a thrust and a torque of an actuator by improving an insulating layer.

【0002】[0002]

【従来の技術】アクチュエータ、特にモータにおいて薄
型化に伴い、コイル部も巻き線からフォトリソグラフィ
の技術を用いたプリントコイルが多く用いられている。
例えば、図4に示すようにアクチュエータはプリントコ
イルの薄いと言う特徴を生かし、コイル6を挟んで配置
される磁石5とヨーク7のギャップを非常に狭くするこ
とができる。また図5に示すように、平面的に配置され
たコイルは渦巻状コイル8であるため、渦巻の中央部は
スルーホール9により裏面に接続され、再び渦巻を描き
ながら渦巻の外側に引き出される。またコイル間を接続
する引き回し線も他のパターンと干渉しないようにする
ためスルーホールが用いられる。
2. Description of the Related Art As actuators, particularly motors, have become thinner, printed coils using photolithography technology have been widely used from coil windings.
For example, as shown in FIG. 4, the actuator makes use of the feature that the print coil is thin, and the gap between the magnet 5 and the yoke 7 arranged with the coil 6 interposed therebetween can be made very narrow. Further, as shown in FIG. 5, since the coil arranged in a plane is a spiral coil 8, the central part of the spiral is connected to the back surface by a through hole 9, and is drawn out of the spiral while drawing the spiral again. In addition, through-holes are used to prevent the leading lines connecting the coils from interfering with other patterns.

【0003】一方、従来の巻き線を用いたアクチュエー
タと比べると、磁石とヨークのギャップを狭くすること
と、強力な磁石を用いることにより、コイルの位置にお
ける磁場を非常に強くすることが可能である。特にギャ
ップを数十μm縮められても特性は大幅に向上するた
め、プリントコイルをいかに薄く作れるかが重要であ
る。
On the other hand, compared with an actuator using a conventional winding, the magnetic field at the position of the coil can be extremely increased by reducing the gap between the magnet and the yoke and using a strong magnet. is there. In particular, even if the gap is reduced by several tens of μm, the characteristics are greatly improved. Therefore, it is important how the print coil can be made thin.

【0004】[0004]

【発明が解決しようとする課題】そこで絶縁層を薄くす
るため、実公平4−29526号公報においては導体配
線パターンを保持する接着材を熱で流動させ、層間の絶
縁をフィルムで確保し、且つ導体とフィルム間の接着材
を無くすことで導体配線の層間厚みをフィルム厚みにま
で縮めている。図3はその断面を示す模式図である。
In order to reduce the thickness of the insulating layer, Japanese Unexamined Utility Model Publication No. 29526/1992 discloses that an adhesive for holding a conductor wiring pattern is caused to flow by heat, insulation between layers is secured by a film, and By eliminating the adhesive between the conductor and the film, the interlayer thickness of the conductor wiring is reduced to the film thickness. FIG. 3 is a schematic view showing the cross section.

【0005】しかしながら、導体は、フィルムと接着材
が押し流されて無くなっているため、導体の保持は導体
の面方向に充填された樹脂が導体を側面だけで保持して
おり、外部への接続端子などは導体面積の割に接着保持
している面積の割合が非常に小さく強度不足となってし
まう。また絶縁基材はフィルムと導体側面のわずかな接
着材からなり、コイル自体として極めて弱くなりモータ
のロータを回す反力を受けて変形や振動を起こす。
[0005] However, since the film and the adhesive are lost due to the flow of the film and the adhesive, the resin is held only in the side surface by the resin filled in the surface direction of the conductor. In such a case, the ratio of the area held and adhered to the conductor area is very small, resulting in insufficient strength. Further, the insulating base material is made of a slight adhesive material between the film and the side surface of the conductor, and becomes extremely weak as the coil itself, and undergoes a reaction force for rotating the rotor of the motor, causing deformation and vibration.

【0006】一方、目的は異なるが特公平2ー3187
5号公報では導体層間の信頼性確保のため、導体の積層
面と線間を第1絶縁材で埋めておき、特に別の絶縁材な
しに第2絶縁材で他の基板に接着する技術が開示されて
いる。図2はその断面を示す模式図である。ここでは他
の基板に接着するときに巻き込む異物や汚染物質を防止
するため、予め第1絶縁材で覆っておく方法を取ってい
る。
[0006] On the other hand, although the purpose is different, Japanese Patent Publication No. 2-3187
In Japanese Patent Application Laid-Open No. 5 (1993) -1993, in order to ensure reliability between conductor layers, a technique is used in which the conductor lamination surface and the space between the conductors are filled with a first insulating material, and in particular, bonded to another substrate with a second insulating material without another insulating material. It has been disclosed. FIG. 2 is a schematic diagram showing the cross section. Here, in order to prevent foreign substances and contaminants from being involved in bonding to another substrate, a method of covering the substrate with a first insulating material in advance is adopted.

【0007】この方法によれば厚みの制限が緩い印刷回
路基板では問題無いが、積層間の絶縁信頼性は向上する
ものの第1絶縁材+第2絶縁材とからなる積層間が非常
に厚くなる。この方法をアクチュエータ用コイルに応用
する場合、次の点が問題になる。アクチュエータ用プリ
ントコイルの最も重要な特性である導体の断面占積率を
維持しつつ厚みを薄くするには、絶縁材で薄くするしか
原理的に方法がない。
According to this method, there is no problem in the case of a printed circuit board whose thickness is loosely limited. However, although the insulation reliability between the laminations is improved, the lamination between the first insulating material and the second insulating material becomes extremely thick. . When this method is applied to an actuator coil, the following problems arise. In order to reduce the thickness while maintaining the cross-sectional space factor of the conductor, which is the most important characteristic of the printed coil for an actuator, there is in principle a method only by reducing the thickness with an insulating material.

【0008】そのため第1絶縁材を導体の頂上部分で薄
くしようとすると導体間を埋めることが困難になる。従
って、第2絶縁基材を薄くする方が容易である。しか
し、一度硬化した第1絶縁材の上に第2絶縁材を接着硬
化させる場合、何らかの表面処理をしないと充分な接着
強度が得られない。また第2絶縁材が薄い分、第1絶縁
材のわずかな凹凸で接着の安定性が確保できないし、下
地の凹凸の影響を受けて材料自体が持つ絶縁特性には到
底達しない。
Therefore, if the first insulating material is made thinner at the top of the conductor, it becomes difficult to fill the space between the conductors. Therefore, it is easier to make the second insulating base thin. However, when the second insulating material is bonded and cured on the first cured insulating material, a sufficient bonding strength cannot be obtained unless some surface treatment is performed. Further, since the second insulating material is thin, the stability of the adhesive cannot be secured due to the slight unevenness of the first insulating material, and the insulating property of the material itself is hardly reached due to the influence of the unevenness of the base.

【0009】以上から絶縁基材を2層の第1絶縁材、第
2絶縁材で構成することから絶縁層の薄化と接着の安定
性上多くの困難が発生する。そこで本発明は、絶縁層の
厚みを薄く、かつ導体と絶縁層の接着力を確保し、プリ
ントコイルとしての強度を維持する構造とその製造方法
を提供するものである。
As described above, since the insulating base material is composed of the two layers of the first insulating material and the second insulating material, there are many difficulties in thinning the insulating layer and stabilizing the adhesion. Accordingly, the present invention provides a structure in which the thickness of the insulating layer is small, the adhesive strength between the conductor and the insulating layer is secured, and the strength as a printed coil is maintained, and a method of manufacturing the same.

【0010】[0010]

【課題を解決するための手段】本発明のアクチュエータ
用プリントコイルは、導体配線パターンを1層以上有
し、導体配線パターン間に存在する第1絶縁材と、導体
配線パターン及び第1絶縁材が絶縁基材に面した部分を
直接接合する第2絶縁材と、該導体配線パターンに対応
する絶縁基材が1層以上で構成されたアクチュエータ用
プリントコイルであって、第1絶縁材は少なくとも該導
体配線パターンの導体間を導体厚みの1/2以上埋めて
おり、第2絶縁材は厚みが1〜20μmであることを特
徴とするものである。
A printed coil for an actuator according to the present invention has at least one conductive wiring pattern, and a first insulating material existing between the conductive wiring patterns, and the conductive wiring pattern and the first insulating material. A second insulating material for directly joining a portion facing the insulating base material, and a printed coil for an actuator in which the insulating base material corresponding to the conductor wiring pattern is composed of one or more layers, wherein the first insulating material is at least The gap between the conductors of the conductor wiring pattern is filled with 以上 or more of the conductor thickness, and the second insulating material has a thickness of 1 to 20 μm.

【0011】ここで第1絶縁材が導体厚みの1/2未満
では、線間の絶縁信頼性を確保しにくくなることと、接
着時の第2絶縁材のボイドが急激に増加する問題があ
る。当然、導体厚みと同じ厚み、即ち、線間を全て埋め
ることがより好ましい。また直接接合する第2絶縁材の
厚みが1μm未満になると、原因は良くわからないが、
その接合力が極端に低下し接合層がないのに等しい強度
しか得られない。第2絶縁材の厚みが20μmを越える
と、多層に積層した構造ではそれぞれの層で累積され、
プリントコイル全体として急激に厚くなり、モータ等を
構成する上で磁石とヨークの間隔を大きくせざるを得な
くなる。その結果、コイルの位置における磁場が弱く、
モータ出力が低下してしまう。好ましくは1〜10μm
である。
If the thickness of the first insulating material is less than 1/2 of the thickness of the conductor, there is a problem that it is difficult to secure insulation reliability between wires, and that voids of the second insulating material at the time of bonding increase sharply. . Naturally, it is more preferable to fill the same thickness as the conductor thickness, that is, to fill all the spaces between the lines. If the thickness of the second insulating material directly joined is less than 1 μm, the cause is not well understood,
The bonding strength is extremely reduced and only the same strength can be obtained without the bonding layer. When the thickness of the second insulating material exceeds 20 μm, the thickness is accumulated in each layer in the multilayer structure,
The print coil as a whole becomes sharply thicker, and the distance between the magnet and the yoke must be increased in forming a motor or the like. As a result, the magnetic field at the coil position is weak,
The motor output will drop. Preferably 1 to 10 μm
It is.

【0012】この第2絶縁材は接着層となり、使用され
る樹脂は絶縁性・銅/樹脂への接着性等が確保できれば
何でも良いが一般的にエポキシ樹脂、ポリエステル樹
脂、アクリル樹脂などが使用される。また接着層の形成
方法も特に限られないがローラーコート、ディップコー
ト、スクリーン印刷などが用いられる。多層積層する場
合には、10μm厚いと、2層ならば20μm厚くなる
が、4層コイルでは60μm、6層コイルでは当然10
0μm厚くなり、大幅な磁場低下を招く。従って、本発
明は2層以上のコイルで特にその効果を発揮するもので
ある。
The second insulating material serves as an adhesive layer, and the resin used may be any resin as long as the insulating property and the adhesiveness to copper / resin can be ensured. In general, epoxy resin, polyester resin, acrylic resin and the like are used. You. The method for forming the adhesive layer is not particularly limited, but roller coating, dip coating, screen printing and the like are used. In the case of multi-layer lamination, if the thickness is 10 μm, the thickness will be 20 μm if it is two layers.
It becomes 0 μm thick and causes a significant decrease in the magnetic field. Therefore, the present invention exerts its effect particularly with a coil having two or more layers.

【0013】また、絶縁基材はフィルム状であって、そ
の厚みが20μm以下であることが好ましい。さらに引
っ張り弾性率が250kg/mm2以上であり、絶縁破
壊電圧が200Kv/mm以上であることが好ましい。
引っ張り弾性率が250Kg/mm2未満になると、プ
リントコイル全体厚みが薄いため、曲げに対して弱くな
る。これはコイルの不要な振動の原因となり、セット全
体の雑音を大きくする。絶縁破壊電圧も導体層間の樹脂
部分の厚みが薄くなると、コイルとしての層間絶縁の維
持が困難であり、接着層のように導体パターン上に後か
ら形成されるものにおいては絶縁層としての絶縁特性の
均一性の維持は難しく、フィルム層での絶縁特性確保が
重要である。そこで使用するフィルムの絶縁破壊電圧で
200Kv/mm以上であることが必要である。更に本
発明では、絶縁基材が芳香族ポリアミドを含むことが好
ましい。
[0013] The insulating base material is in the form of a film, and preferably has a thickness of 20 µm or less. Furthermore, it is preferable that the tensile modulus is 250 kg / mm 2 or more and the dielectric breakdown voltage is 200 Kv / mm or more.
If the tensile modulus is less than 250 kg / mm 2 , the printed coil is too thin to bend, and thus becomes weak against bending. This causes unnecessary vibration of the coil and increases the noise of the entire set. As for the dielectric breakdown voltage, if the thickness of the resin portion between the conductor layers is reduced, it is difficult to maintain the interlayer insulation as a coil, and the insulation characteristics as an insulation layer in a later-formed conductor pattern such as an adhesive layer. It is difficult to maintain the uniformity of the film, and it is important to secure the insulating properties in the film layer. Therefore, the dielectric breakdown voltage of the film used must be 200 Kv / mm or more. Further, in the present invention, it is preferable that the insulating base material contains an aromatic polyamide.

【0014】本発明は、第2絶縁材と直接接合する導体
配線パターンの接合面が物理的な研磨処理がなされてい
ることを特徴とするものである。ここで、物理的な研磨
処理とは、機械的方法による研磨であれば良く、一般の
バフ研磨やサンドペーパーによるベルトサンダーや砥石
による研磨などが好ましく用いられる。本発明のプリン
トコイルの製造方法は、導体配線パターンが形成された
基板に対し、絶縁材を塗布する工程と、その絶縁材を塗
布した面を研磨し、導体の表面の絶縁材を一部除去する
工程と、導体配線パターンが形成された基板を絶縁性フ
ィルムに接着材で接着する工程とを含むことを特徴とす
るものである。
The present invention is characterized in that the joint surface of the conductor wiring pattern directly joined to the second insulating material has been subjected to a physical polishing treatment. Here, the physical polishing treatment may be any polishing as long as it is performed by a mechanical method, and general buff polishing, polishing using a belt sander or a grindstone using sandpaper, or the like is preferably used. The method of manufacturing a printed coil according to the present invention includes a step of applying an insulating material to the substrate on which the conductor wiring pattern is formed, and polishing the surface on which the insulating material is applied to partially remove the insulating material on the surface of the conductor. And bonding the substrate on which the conductive wiring pattern is formed to an insulating film with an adhesive.

【0015】特に初めに絶縁基材を塗布後、研磨するこ
とで全体厚みを薄くする効果は当然、基板内の厚みむら
が研磨により平坦化される効果、更に特筆すべき効果は
下地の銅層が直接後で使う接着材と接合することや初め
に形成された絶縁層の表面が研磨で粗面化されることで
接合部が強固になり、後で行う金型による切断のストレ
スにも耐えうる構造となった。
In particular, the effect of reducing the overall thickness by applying an insulating base material first and then polishing it, of course, the effect that the thickness unevenness in the substrate is flattened by polishing, and the more remarkable effect is the underlying copper layer Can be bonded directly to an adhesive to be used later, or the surface of the insulating layer formed first can be roughened by polishing, which strengthens the joint and withstands the stress of cutting performed by the mold later. Structure.

【0016】以上のように、本発明は複数の導体配線パ
ターン層をその導体と直接接合し導体間を埋める絶縁層
(第1絶縁層)と、層間の絶縁と機械強度を確保するた
めのフィルム層と、フィルムと導体を直接接着する接着
層(第2絶縁層)とから構成することで初めて、薄い絶
縁層と安定な絶縁性及び導体パターンの保持性を確保す
ることができたのである。
As described above, the present invention provides an insulating layer (first insulating layer) for directly joining a plurality of conductor wiring pattern layers to the conductors and filling between the conductors, and a film for securing insulation between layers and mechanical strength. For the first time, it was possible to secure a thin insulating layer, a stable insulating property, and a holding property of a conductive pattern by only including the layer and an adhesive layer (second insulating layer) for directly bonding the film and the conductor.

【0017】[0017]

【発明の実施の形態】以下、本発明を実施例および比較
例を挙げて説明するが、実施例のみに限定されるもので
はない。ここではアクチュエータ用コイルとしてブラシ
レスモータ用コイルの例を挙げて説明する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described with reference to examples and comparative examples, but is not limited to the examples. Here, an example of a brushless motor coil will be described as an actuator coil.

【0018】[0018]

【実施例1】導電性基板であるアルミ箔上にレジストパ
ターンを導体になるところ以外に形成し、次に必要銅量
析出するよう電解銅メッキを行う。これにより導体パタ
ーン部は導体厚みが35μm、導体間隔はコイル部で2
0μmとなった。そこで第1絶縁材である絶縁ワニス
(日立化成製 WI−640)を先の導体間隔(幅20
μm、深さ35μm)を埋めるようディップコートで塗
布した。その後、ワニスを130度で60分硬化した。
次に基板の導体パターンがある側を角田ブラシ製WX#
320バフで研磨し、メッキ導体の最も高いところのワ
ニスが無くなるまで研磨した。
Embodiment 1 A resist pattern is formed on an aluminum foil, which is a conductive substrate, except where it becomes a conductor, and then electrolytic copper plating is performed so as to deposit a necessary amount of copper. Thereby, the conductor pattern portion has a conductor thickness of 35 μm, and the conductor interval is 2 mm in the coil portion.
It was 0 μm. Therefore, an insulating varnish (WI-640 manufactured by Hitachi Chemical Co., Ltd.), which is the first insulating material, is applied to the conductor gap (width 20).
.mu.m, depth 35 .mu.m). Thereafter, the varnish was cured at 130 degrees for 60 minutes.
Next, the side of the board where the conductor pattern is located is WX # made by Kakuda Brush.
Polishing was performed with a 320 buff until the varnish at the highest point of the plated conductor was removed.

【0019】その後、上記研磨面にセメダイン社製エポ
キシ接着材EP−170を7gスクリーン印刷で塗布し
た。塗布後120度で7分加熱した後、その間に絶縁基
材である旭化成工業(株)製芳香族ポリアミドフィルム
(商標名 アラミカ)4.5μmを挟んでプレスした。
使用したアラミカは引っ張り弾性率が1500kg/m
2であり絶縁破壊電圧が230KV/mmである。
Thereafter, 7 g of an epoxy adhesive EP-170 manufactured by Cemedine Co. was applied to the polished surface by screen printing. After heating at 120 ° C. for 7 minutes after the application, 4.5 μm of an aromatic polyamide film (trade name: Aramica) manufactured by Asahi Kasei Kogyo Co., Ltd., which is an insulating base material, was pressed.
Aramica used has a tensile modulus of 1500 kg / m
m 2 and the dielectric breakdown voltage is 230 KV / mm.

【0020】プレスは初めの昇温速度2度/分、圧力1
0kg/cm2でプレスした。到達温度135度で60
分プレス後、基板温度が60度に低下してから圧力を抜
いた。次いでアルミ基板を塩酸8%で、30分かけてエ
ッチング除去した。得られた基板を金型でブラシレスモ
ータ用コイル形状に打ち抜いた。その結果、得られたコ
イル500個中、打ち抜き後、接着層が剥がれたりした
ものは0個であった。また20個をランダムにサンプリ
ングし断面を切断し、フィルムを挟んだ導体の間隔を測
定したところ平均14.5μmであった。図1に示すよ
うに、4.5μmのフィルム4の両側に各約5μmの接
着層3が存在していた。
The press is operated at an initial heating rate of 2 degrees / minute and a pressure of 1
Pressing was performed at 0 kg / cm 2 . 60 at 135 ° C
After the minute pressing, the pressure was released after the substrate temperature was lowered to 60 degrees. Next, the aluminum substrate was removed by etching with hydrochloric acid 8% for 30 minutes. The obtained substrate was punched into a coil shape for a brushless motor using a mold. As a result, out of the 500 obtained coils, the number of the adhesive layers peeled off after punching was 0. Further, 20 pieces were randomly sampled, the cross section was cut, and the distance between the conductors sandwiching the film was measured. The result was 14.5 μm on average. As shown in FIG. 1, about 5 μm of the adhesive layer 3 was present on both sides of the 4.5 μm film 4.

【0021】また更に20個をサンプリングし20mm
離れたところを2ヶ所支点として中央に100g懸けて
曲げたところ中央部の変位を測定した結果、平均1.2
mmであった。更に上記基板を金型で打ち抜くまでを同
じ工程で作製し、得られた基板2枚を積層し4層基板を
作製した。その工程は、アルミ基板をエッチング後、表
面をもう一度、角田ブラシ製WX#320バフで研磨
し、その研磨面にセメダイン社製エポキシ接着材EP−
170を7gスクリーン印刷で塗布した。塗布後120
度で7分加熱した後、その間に旭化成工業(株)製芳香
族ポリアミドフィルム(商標名 アラミカ)4.5μm
を挟んで上記エッチングされた基板2枚をプレスした。
その結果、導体層が4層の基板が得られた。得られた基
板は同様に金型で打ち抜いたが、やはり得られたコイル
500個中、打ち抜き後、接着層が剥がれたりしたもの
は0個であった。また100個の厚みを測定したとこ
ろ、平均184μmであった。
Further, 20 samples are sampled and 20 mm
As a result of measuring the displacement at the center when the center was bent by 100 g at the center with the distant points as two supporting points, the average was 1.2.
mm. Further, the above-described substrate was manufactured in the same process until punching out with a mold, and two obtained substrates were laminated to obtain a four-layer substrate. In this step, after etching the aluminum substrate, the surface is polished once again with a WX # 320 buff manufactured by Kakuda Brush, and the polished surface is coated with an epoxy adhesive EP- manufactured by Cemedine.
170 was applied by 7 g screen printing. 120 after application
After heating at a temperature of 7 minutes, 4.5 μm of an aromatic polyamide film (trade name: Aramica) manufactured by Asahi Kasei Corporation
Then, the two etched substrates were pressed.
As a result, a substrate having four conductor layers was obtained. The obtained substrate was similarly punched with a mold, but among the 500 obtained coils, none of the coils had the adhesive layer peeled off after punching. When the thickness of 100 pieces was measured, it was 184 μm on average.

【0022】このコイルを磁束密度Br=11000Ga
ussの磁石を持つモータに実装するとコイルの厚みから
ヨークの距離0.5mmに設定でき、トルク定数48.
1gcm/Aの性能が得られた。
The coil has a magnetic flux density Br = 11000 Ga.
When mounted on a motor having a uss magnet, the yoke distance can be set to 0.5 mm from the coil thickness, and the torque constant is 48.
Performance of 1 gcm / A was obtained.

【0023】[0023]

【実施例2】厚みが12μmのアラミカを用いた以外は
実施例1と全く同一で基板を作成した。得られた基板を
金型でブラシレスモータ用コイル形状に打ち抜いた。そ
の結果得られたコイル500個中打ち抜き後、接着層が
剥がれたりしたものは0個であった。また20個をラン
ダムにサンプリングし断面を切断し、フィルムを挟んだ
導体の間隔を測定したところ平均22.2μmであっ
た。図1に示すように、12μmのフィルム4の両側に
各約5.1μmの接着層3が存在していた。
Example 2 A substrate was prepared in exactly the same manner as in Example 1 except that aramica having a thickness of 12 μm was used. The obtained substrate was punched into a coil shape for a brushless motor using a mold. After punching out of 500 of the resulting coils, no adhesive layer was peeled off. Moreover, 20 pieces were randomly sampled, the cross section was cut, and the distance between the conductors sandwiching the film was measured. The result was 22.2 μm on average. As shown in FIG. 1, each 5.1 μm adhesive layer 3 was present on both sides of the 12 μm film 4.

【0024】また更に20個をサンプリングし20mm
離れたところを2ヶ所支点として中央に100g懸けて
曲げたところ中央部の変位を測定した結果、平均1.0
mmであった。
Further, 20 samples were sampled and 20 mm
As a result of measuring the displacement of the central part when the center was bent 100 g at the center with the distant points as two fulcrums, the average was 1.0.
mm.

【0025】[0025]

【実施例3】絶縁基材のフィルムとして東レデュポン
(株)製ポリイミドフィルム(商標カプトン)12μm
を用いた以外は実施例1と全く同一で基板を作成した。
使用したカプトンは引っ張り弾性率が300kg/mm
2であり絶縁破壊電圧が280KV/mmである。
Example 3 12 μm polyimide film (trade name: Kapton) manufactured by Toray Dupont Co., Ltd.
A substrate was prepared in exactly the same manner as in Example 1 except that the substrate was used.
Kapton used has a tensile modulus of elasticity of 300 kg / mm
2 , and the dielectric breakdown voltage is 280 KV / mm.

【0026】得られた基板を金型でブラシレスモータ用
コイル形状に打ち抜いた。その結果、得られたコイル5
00個中打ち抜き後、接着層が剥がれたりしたものは0
個であった。また20個をランダムにサンプリングし、
断面を切断し、フィルムを挟んだ導体の間隔を測定した
ところ平均22.5μmであった。図1に示すように、
12μmのフィルム4の両側に各約5.25μmの接着
層3が存在していた。
The obtained substrate was punched out by a mold into a coil shape for a brushless motor. As a result, the obtained coil 5
After punching out of 00 pieces, the adhesive layer was peeled off.
Was individual. In addition, 20 samples are randomly sampled,
The cross section was cut, and the distance between the conductors sandwiching the film was measured. The result was 22.5 μm on average. As shown in FIG.
The adhesive layer 3 of about 5.25 μm was present on both sides of the 12 μm film 4.

【0027】また更に20個をサンプリングし20mm
離れたところを2ヶ所支点として中央に100g懸けて
曲げたところ中央部の変位を測定した結果、平均1.2
mmであった。
Further, 20 samples were sampled and 20 mm
As a result of measuring the displacement at the center when the center was bent by 100 g at the center with the distant points as two supporting points, the average was 1.2.
mm.

【0028】[0028]

【実施例4】絶縁基材のフィルムとして東レデュポン
(株)製ポリイミドフィルム(商標名カプトン)25μ
mを用いた以外は実施例1と全く同一で基板を作成し
た。使用したカプトンは引っ張り弾性率が300kg/
mm2であり絶縁破壊電圧が280KV/mmである。
Example 4 A polyimide film (trade name: Kapton) manufactured by Toray Dupont Co., Ltd.
A substrate was prepared in exactly the same manner as in Example 1 except that m was used. The Kapton used has a tensile modulus of elasticity of 300 kg /
mm 2 and the dielectric breakdown voltage is 280 KV / mm.

【0029】得られた基板を金型でブラシレスモータ用
コイル形状に打ち抜いた。その結果得られたコイル50
0個中打ち抜き後、接着層が剥がれたりしたものは0個
であった。また20個をランダムにサンプリングし断面
を切断し、フィルムを挟んだ導体の間隔を測定したとこ
ろ平均36.1μmであった。図1に示すように、25
μmのフィルム4の両側に各約5.55μmの接着層3
が存在していた。
The obtained substrate was punched into a coil shape for a brushless motor using a mold. The resulting coil 50
After punching out of 0 pieces, there were 0 pieces where the adhesive layer was peeled off. In addition, 20 samples were randomly sampled, the cross section was cut, and the distance between the conductors sandwiching the film was measured. The result was 36.1 μm on average. As shown in FIG.
about 5.55 μm of adhesive layer 3 on both sides of a μm film 4
Existed.

【0030】また更に20個をサンプリングし20mm
離れたところを2ヶ所支点として中央に100g懸けて
曲げたところ中央部の変位を測定した結果、平均1.1
mmであった。
Further, 20 samples were sampled and 20 mm
As a result of measuring the displacement at the center when the center was bent at 100 g at the center with the distant points as two fulcrums, the average was 1.1.
mm.

【0031】[0031]

【比較例1】導電性基板であるアルミ箔上にレジストパ
ターンを導体になるところ以外に形成し、次に必要銅量
析出するよう電解銅メッキを行う。これにより導体パタ
ーン部は導体厚みが35μm、導体間隔はコイル部で2
0μmとなった。次に絶縁ワニス(日立化成製WI−6
40)を先の導体間隔(幅20μm、深さ35μm)を
埋めるようディップコートで塗布した。その後ワニスを
130度で60分硬化した。
COMPARATIVE EXAMPLE 1 A resist pattern is formed on an aluminum foil as a conductive substrate except where it becomes a conductor, and then electrolytic copper plating is performed so as to deposit a required amount of copper. As a result, the conductor pattern portion has a conductor thickness of 35 μm, and the conductor interval is 2
It was 0 μm. Next, insulating varnish (WI-6 manufactured by Hitachi Chemical)
40) was applied by dip coating so as to fill the preceding conductor interval (width 20 μm, depth 35 μm). Thereafter, the varnish was cured at 130 degrees for 60 minutes.

【0032】その後上記ワニス面にセメダイン社製エポ
キシ接着材EP−170を3.5gスクリーン印刷で塗
布した。塗布後120度で7分加熱した後、その間に東
レデュポン(株)製ポリイミドフィルム(商標 カプト
ン)25μmを挟んでプレスした。使用したカプトンは
引っ張り弾性率が300kg/mm2であり絶縁破壊電
圧が280KV/mmである。
Thereafter, 3.5 g of an epoxy adhesive EP-170 manufactured by Cemedine Co. was applied to the varnish surface by screen printing. After heating at 120 ° C. for 7 minutes after the application, a polyimide film (trade name: Kapton, manufactured by Toray DuPont Co., Ltd.) of 25 μm was pressed therebetween during the pressing. The Kapton used has a tensile modulus of 300 kg / mm 2 and a dielectric breakdown voltage of 280 KV / mm.

【0033】プレスは初めの昇温速度2度/分、圧力1
0kg/cm2でプレスした。到達温度135度で60
分プレス後、基板温度が60度になるまで加圧を続け
た。このアルミ基板を塩酸8%で30分かけてエッチン
グ除去した。得られた基板を金型でブラシレスモータ用
コイル形状に打ち抜いた。その結果得られたコイル50
0個中打ち抜き後、接着層が剥がれたりしたものは27
0個であった。また20個をランダムにサンプリングし
断面を切断し、フィルムを挟んだ導体の間隔を測定した
ところ平均49.7μmであった。図2に示すように、
25μmのフィルム4の両側に接着層3が2.35μm
とその上にワニス2が10μmが存在していた。
The press was initially heated at a rate of 2 ° C./min.
Pressing was performed at 0 kg / cm 2 . 60 at 135 ° C
After the minute press, pressurization was continued until the substrate temperature reached 60 degrees. The aluminum substrate was removed by etching with 8% hydrochloric acid for 30 minutes. The obtained substrate was punched into a coil shape for a brushless motor using a mold. The resulting coil 50
After punching out of 0 pieces, 27
There were zero. Moreover, 20 pieces were randomly sampled, the cross section was cut, and the distance between the conductors sandwiching the film was measured. The result was 49.7 μm on average. As shown in FIG.
Adhesive layer 3 on both sides of 25 μm film 4 is 2.35 μm
And 10 μm of varnish 2 was present thereon.

【0034】また更に20個をサンプリングし20mm
離れたところを2ヶ所支点として中央に100g懸けて
曲げたところ中央部の変位を測定した結果平均3.5m
mであった。更に上記基板を金型で打ち抜くまでを同じ
工程で作製し、得られた基板2枚を積層し4層基板を作
製した。
Further, 20 samples were sampled and 20 mm
As a result of measuring the displacement of the central part when it was bent at 100 g at the center with two fulcrums as the fulcrum, the average was 3.5 m.
m. Further, the above-described substrate was manufactured in the same process until punching out with a mold, and two obtained substrates were laminated to obtain a four-layer substrate.

【0035】工程はアルミ基板をエッチング後、表面に
セメダイン社製エポキシ接着材EP−170を3.5g
スクリーン印刷で塗布した。塗布後120度で7分加熱
した後、その間に旭化成工業(株)製芳香族ポリアミド
フィルム(商標名 アラミカ)4.5μmを挟んで上記
エッチングされた基板2枚をプレスした。その結果、導
体層が4層の基板が得られた。得られた基板は同様に金
型で打ち抜いたが得られたコイル500個中、打ち抜き
後、接着層が剥がれたりしたものは372個であった。
また100個の厚みを測定したところ、平均289μm
であり、実施例1と比べ厚みが105μm厚く、約1.
6倍となった。これは実施例1と比べ、このコイルを実
装するモータの磁石(磁束密度Br=11000Gaus
s)とヨークの距離0.5mmを約0.1mm広げる必
要があり、磁場の強度が22%低下したためトルク定数
も22%低下して37.5gcm/Aとなった。
In the process, after etching the aluminum substrate, 3.5 g of epoxy adhesive EP-170 manufactured by Cemedine Co., Ltd. was applied to the surface.
Coated by screen printing. After heating at 120 ° C. for 7 minutes after the application, two etched substrates were pressed with 4.5 μm of an aromatic polyamide film (trade name: Aramica) manufactured by Asahi Kasei Corporation. As a result, a substrate having four conductor layers was obtained. The obtained substrate was similarly punched with a die, but among the 500 obtained coils, 372 had the adhesive layer peeled off after punching.
When the thickness of 100 pieces was measured, the average was 289 μm.
In comparison with Example 1, the thickness was 105 μm thick, and about 1.
6 times. This is different from the first embodiment in that the magnet (magnetic flux density Br = 11000 Gauss) of the motor mounting this coil is used.
It was necessary to increase the distance between the s) and the yoke by 0.5 mm by about 0.1 mm, and the magnetic field intensity decreased by 22%, so that the torque constant also decreased by 22% to 37.5 gcm / A.

【0036】[0036]

【比較例2】導電性基板、例えばアルミ箔状にレジスト
パターンを導体になるところ以外に形成し、次に必要銅
量析出するよう電解銅メッキを行う。これにより導体パ
ターン部は導体厚みが35μm、導体間隔はコイル部で
20μmとなった。その後、上記研磨面にセメダイン社
製エポキシ接着材EP−170を7gスクリーン印刷で
塗布した。塗布後120度で7分加熱した後、その間に
東レデュポン(株)製ポリイミドフィルム(商標名 カ
プトン)25μmを挟んでプレスした。使用したカプト
ンは引っ張り弾性率が300kg/mm2であり、絶縁
破壊電圧が280KV/mmである。
COMPARATIVE EXAMPLE 2 A resist pattern is formed on a conductive substrate, for example, an aluminum foil, except where it becomes a conductor, and then electrolytic copper plating is performed so as to deposit a required amount of copper. As a result, the conductor pattern portion had a conductor thickness of 35 μm, and the conductor interval was 20 μm in the coil portion. Thereafter, 7 g of an epoxy adhesive EP-170 manufactured by Cemedine Co. was applied to the polished surface by screen printing. After heating at 120 ° C. for 7 minutes after application, a polyimide film (trade name: Kapton) 25 μm manufactured by Toray DuPont was pressed between them. The Kapton used has a tensile modulus of 300 kg / mm 2 and a dielectric breakdown voltage of 280 KV / mm.

【0037】プレスは初めの昇温速度2度/分、圧力1
0kg/cm2でプレスした。到達温度135度で60
分プレス後基板温度が60度になるまで加圧を続けた。
このアルミ基板を塩酸8%で30分かけてエッチング除
去した。得られた基板を金型でブラシレスモータ用コイ
ル形状に打ち抜いた。その結果得られたコイル500個
中、打ち抜き後、接着層が剥がれたりしたものは345
個であった。また20個をランダムにサンプリングし断
面を切断し、フィルムを挟んだ導体の間隔を測定したと
ころ平均25.2μmであった。図3に示すように、2
5μmのフィルム4の両側に各約0.1μmの接着層3
が存在していた。
The press was initially heated at a rate of 2 ° C./min.
Pressing was performed at 0 kg / cm 2 . 60 at 135 ° C
Pressing was continued until the substrate temperature reached 60 ° C. after the minute pressing.
The aluminum substrate was removed by etching with 8% hydrochloric acid for 30 minutes. The obtained substrate was punched into a coil shape for a brushless motor using a mold. Of the 500 coils obtained as a result, 345 in which the adhesive layer was peeled off after punching was used.
Was individual. Moreover, 20 pieces were randomly sampled, the cross section was cut, and the distance between the conductors sandwiching the film was measured. The result was 25.2 μm on average. As shown in FIG.
A 0.1 μm adhesive layer 3 on each side of a 5 μm film 4
Existed.

【0038】また更に20個をサンプリングし20mm
離れたところを2ヶ所支点として中央に100g懸けて
曲げたところ中央部の変位を測定した結果、平均4.2
mmであった。
Further, 20 samples were sampled and 20 mm
As a result of measuring the displacement at the center when the center was bent 100 g at the center with two fulcrums as the fulcrum, the average was 4.2.
mm.

【0039】[0039]

【発明の効果】本発明によれば、複数の導体配線パター
ン層をその導体と直接接合し導体間を埋める絶縁層と、
層間の絶縁と機械強度を確保するためのフィルム層と、
フィルムと導体を直接接着する接着層とから構成するこ
とにより、薄い絶縁層と安定な絶縁性及び導体パターン
の保持性を確保することができる。
According to the present invention, an insulating layer that directly joins a plurality of conductor wiring pattern layers to the conductor and fills the gap between the conductors;
A film layer to ensure insulation between layers and mechanical strength,
By comprising the film and the adhesive layer for directly bonding the conductor, it is possible to secure a thin insulating layer, stable insulating properties, and holding properties of the conductor pattern.

【0040】そのため、コイルをアクチュエータ用に用
いた場合に、推力やトルクの大幅な向上が可能となる。
Therefore, when the coil is used for the actuator, the thrust and the torque can be greatly improved.

【0041】[0041]

【図面の簡単な説明】[Brief description of the drawings]

【0042】[0042]

【図1】本発明のプリントコイルの断面を示す模式図で
ある。
FIG. 1 is a schematic view showing a cross section of a printed coil of the present invention.

【0043】[0043]

【図2】従来技術によるプリントコイルの断面を示す模
式図である。
FIG. 2 is a schematic view showing a cross section of a print coil according to the related art.

【0044】[0044]

【図3】他の従来技術によるプリントコイルの断面を示
す模式図である。
FIG. 3 is a schematic view showing a cross section of a print coil according to another conventional technique.

【0045】[0045]

【図4】プリントコイルを使ったモータの一例を示す図
である。
FIG. 4 is a diagram illustrating an example of a motor using a printed coil.

【0046】[0046]

【図5】プリントコイルの一例を示す平面図である。FIG. 5 is a plan view showing an example of a print coil.

【0047】[0047]

【符号の説明】[Explanation of symbols]

1 導体パターン 2 ワニス 3 接着層 4 フィルム 5 回転子 6 プリントコイル 7 ヨーク板 8 渦巻き状コイル 9 スルーホール DESCRIPTION OF SYMBOLS 1 Conductor pattern 2 Varnish 3 Adhesive layer 4 Film 5 Rotor 6 Print coil 7 Yoke plate 8 Spiral coil 9 Through hole

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】 導体配線パターンを1層以上有し、導体
配線パターン間に存在する第1絶縁材と、導体配線パタ
ーン及び第1絶縁材が絶縁基材に面した部分を直接接合
する第2絶縁材と、該導体配線パターンに対応する絶縁
基材が1層以上で構成されたアクチュエータ用プリント
コイルであって、第1絶縁材は少なくとも該導体配線パ
ターンの導体間を導体厚みの1/2以上埋めており、第
2絶縁材は厚みが1〜20μmであることを特徴とする
アクチュエータ用プリントコイル。
A first insulating material having at least one layer of a conductive wiring pattern, wherein a first insulating material existing between the conductive wiring patterns is directly joined to a portion of the conductive wiring pattern and the first insulating material facing the insulating base material; An actuator print coil, comprising an insulating material and an insulating base material corresponding to the conductor wiring pattern in one or more layers, wherein the first insulating material forms at least half of the conductor thickness between conductors of the conductor wiring pattern. The printed coil for an actuator, wherein the second insulating material has a thickness of 1 to 20 μm.
【請求項2】 絶縁基材がフィルム状であって、その厚
みが20μm以下であることを特徴とする請求項1記載
のアクチュエータ用プリントコイル。
2. The printed coil for an actuator according to claim 1, wherein the insulating base is in the form of a film and has a thickness of 20 μm or less.
【請求項3】 絶縁基材がフィルム状であって、引っ張
り弾性率が250kg/mm2以上であり、絶縁破壊電
圧が200KV/mm以上であることを特徴とする請求
項2記載のアクチュエータ用プリントコイル。
3. The actuator print according to claim 2, wherein the insulating base material is in the form of a film, the tensile elastic modulus is 250 kg / mm 2 or more, and the dielectric breakdown voltage is 200 KV / mm or more. coil.
【請求項4】 絶縁基材が芳香族ポリアミドを含むこと
を特徴とする請求項3記載のアクチュエータ用プリント
コイル。
4. The printed coil for an actuator according to claim 3, wherein the insulating base material contains an aromatic polyamide.
【請求項5】 第2絶縁材と直接接合する導体配線パタ
ーンの接合面が物理的な研磨処理がなされていることを
特徴とする請求項1〜4のいずれかに記載のアクチュエ
ータ用プリントコイル。
5. The printed coil for an actuator according to claim 1, wherein a joining surface of the conductor wiring pattern directly joined to the second insulating material is subjected to a physical polishing treatment.
【請求項6】 導体配線パターンが形成された基板に対
し、絶縁材を塗布する工程と、その絶縁材を塗布した面
を研磨し、導体の表面の絶縁材を一部除去する工程と、
導体配線パターンが形成された基板を絶縁性フィルムに
接着材で接着する工程とを含むことを特徴とするプリン
トコイルの製造方法。
6. A step of applying an insulating material to the substrate on which the conductor wiring pattern is formed, a step of polishing the surface on which the insulating material is applied, and partially removing the insulating material on the surface of the conductor.
Bonding the substrate on which the conductor wiring pattern is formed to an insulating film with an adhesive.
JP9219412A 1997-08-14 1997-08-14 Printed coil for actuator Pending JPH1169684A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9219412A JPH1169684A (en) 1997-08-14 1997-08-14 Printed coil for actuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9219412A JPH1169684A (en) 1997-08-14 1997-08-14 Printed coil for actuator

Publications (1)

Publication Number Publication Date
JPH1169684A true JPH1169684A (en) 1999-03-09

Family

ID=16735004

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9219412A Pending JPH1169684A (en) 1997-08-14 1997-08-14 Printed coil for actuator

Country Status (1)

Country Link
JP (1) JPH1169684A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1549120A3 (en) * 2003-12-26 2007-11-21 Matsushita Electric Industrial Co., Ltd. Coil electric conductor, laminated coil conductor, production method of the same and electronic component using the same
JP2012089700A (en) * 2010-10-20 2012-05-10 Asahi Kasei Electronics Co Ltd Planar coil, method of manufacturing the same, and composite planar coil for actuator
TWI423564B (en) * 2009-07-09 2014-01-11 Sunonwealth Electr Mach Ind Co A stator of a motor with a coil unit
JP2017135806A (en) * 2016-01-26 2017-08-03 株式会社M.T.C Vibration power generation element

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5694937A (en) * 1979-12-27 1981-07-31 Asahi Chem Ind Co Ltd Fine coil and its manufacture
JPS61247245A (en) * 1985-04-25 1986-11-04 Asahi Chem Ind Co Ltd Double fine pattern circuit
JPS61254039A (en) * 1985-05-02 1986-11-11 Sony Corp Forming method for circuit pattern
JPS627345A (en) * 1985-07-03 1987-01-14 Canon Electronics Inc Manufacture of multilayer seat coil
JPS62291089A (en) * 1986-06-10 1987-12-17 日東電工株式会社 Manufacture of circuit board
JPH01315232A (en) * 1988-06-11 1989-12-20 Asmo Co Ltd Rotor for printed motor
JPH0225003A (en) * 1988-07-14 1990-01-26 Asahi Chem Ind Co Ltd Planar coil
JPH08181019A (en) * 1994-12-27 1996-07-12 Asahi Chem Ind Co Ltd Plane coil
JPH0955577A (en) * 1995-08-11 1997-02-25 Nec Corp Production of printed wiring board

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5694937A (en) * 1979-12-27 1981-07-31 Asahi Chem Ind Co Ltd Fine coil and its manufacture
JPS61247245A (en) * 1985-04-25 1986-11-04 Asahi Chem Ind Co Ltd Double fine pattern circuit
JPS61254039A (en) * 1985-05-02 1986-11-11 Sony Corp Forming method for circuit pattern
JPS627345A (en) * 1985-07-03 1987-01-14 Canon Electronics Inc Manufacture of multilayer seat coil
JPS62291089A (en) * 1986-06-10 1987-12-17 日東電工株式会社 Manufacture of circuit board
JPH01315232A (en) * 1988-06-11 1989-12-20 Asmo Co Ltd Rotor for printed motor
JPH0225003A (en) * 1988-07-14 1990-01-26 Asahi Chem Ind Co Ltd Planar coil
JPH08181019A (en) * 1994-12-27 1996-07-12 Asahi Chem Ind Co Ltd Plane coil
JPH0955577A (en) * 1995-08-11 1997-02-25 Nec Corp Production of printed wiring board

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1549120A3 (en) * 2003-12-26 2007-11-21 Matsushita Electric Industrial Co., Ltd. Coil electric conductor, laminated coil conductor, production method of the same and electronic component using the same
US7394341B2 (en) 2003-12-26 2008-07-01 Matsushita Electric Industrial Co., Ltd. Coil electric conductor, laminated coil conductor, production method of the same and electronic component using the same
TWI423564B (en) * 2009-07-09 2014-01-11 Sunonwealth Electr Mach Ind Co A stator of a motor with a coil unit
JP2012089700A (en) * 2010-10-20 2012-05-10 Asahi Kasei Electronics Co Ltd Planar coil, method of manufacturing the same, and composite planar coil for actuator
JP2017135806A (en) * 2016-01-26 2017-08-03 株式会社M.T.C Vibration power generation element

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