JPH1164623A5 - - Google Patents

Info

Publication number
JPH1164623A5
JPH1164623A5 JP1997228338A JP22833897A JPH1164623A5 JP H1164623 A5 JPH1164623 A5 JP H1164623A5 JP 1997228338 A JP1997228338 A JP 1997228338A JP 22833897 A JP22833897 A JP 22833897A JP H1164623 A5 JPH1164623 A5 JP H1164623A5
Authority
JP
Japan
Prior art keywords
resist layer
openings
opening window
light
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1997228338A
Other languages
English (en)
Japanese (ja)
Other versions
JPH1164623A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP22833897A priority Critical patent/JPH1164623A/ja
Priority claimed from JP22833897A external-priority patent/JPH1164623A/ja
Publication of JPH1164623A publication Critical patent/JPH1164623A/ja
Publication of JPH1164623A5 publication Critical patent/JPH1164623A5/ja
Pending legal-status Critical Current

Links

JP22833897A 1997-08-25 1997-08-25 カラーフィルタの製造方法 Pending JPH1164623A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22833897A JPH1164623A (ja) 1997-08-25 1997-08-25 カラーフィルタの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22833897A JPH1164623A (ja) 1997-08-25 1997-08-25 カラーフィルタの製造方法

Publications (2)

Publication Number Publication Date
JPH1164623A JPH1164623A (ja) 1999-03-05
JPH1164623A5 true JPH1164623A5 (enExample) 2004-12-02

Family

ID=16874902

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22833897A Pending JPH1164623A (ja) 1997-08-25 1997-08-25 カラーフィルタの製造方法

Country Status (1)

Country Link
JP (1) JPH1164623A (enExample)

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