JPH1164623A - カラーフィルタの製造方法 - Google Patents
カラーフィルタの製造方法Info
- Publication number
- JPH1164623A JPH1164623A JP22833897A JP22833897A JPH1164623A JP H1164623 A JPH1164623 A JP H1164623A JP 22833897 A JP22833897 A JP 22833897A JP 22833897 A JP22833897 A JP 22833897A JP H1164623 A JPH1164623 A JP H1164623A
- Authority
- JP
- Japan
- Prior art keywords
- resist layer
- opening
- layer
- semiconductor substrate
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 12
- 239000000758 substrate Substances 0.000 claims abstract description 40
- 239000000049 pigment Substances 0.000 claims abstract description 29
- 238000000034 method Methods 0.000 claims abstract description 19
- 238000002834 transmittance Methods 0.000 claims abstract description 7
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 abstract description 30
- 238000003384 imaging method Methods 0.000 description 10
- 239000002904 solvent Substances 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 5
- 239000003086 colorant Substances 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 3
- 239000011368 organic material Substances 0.000 description 3
- 230000000295 complement effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Landscapes
- Optical Filters (AREA)
- Solid State Image Pick-Up Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22833897A JPH1164623A (ja) | 1997-08-25 | 1997-08-25 | カラーフィルタの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22833897A JPH1164623A (ja) | 1997-08-25 | 1997-08-25 | カラーフィルタの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH1164623A true JPH1164623A (ja) | 1999-03-05 |
| JPH1164623A5 JPH1164623A5 (enExample) | 2004-12-02 |
Family
ID=16874902
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22833897A Pending JPH1164623A (ja) | 1997-08-25 | 1997-08-25 | カラーフィルタの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH1164623A (enExample) |
-
1997
- 1997-08-25 JP JP22833897A patent/JPH1164623A/ja active Pending
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20051117 |
|
| RD01 | Notification of change of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7421 Effective date: 20051227 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20070904 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20071105 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20080304 |