JPH11513011A - 光ファイバ製造のヘリウム再循環 - Google Patents

光ファイバ製造のヘリウム再循環

Info

Publication number
JPH11513011A
JPH11513011A JP10503085A JP50308598A JPH11513011A JP H11513011 A JPH11513011 A JP H11513011A JP 10503085 A JP10503085 A JP 10503085A JP 50308598 A JP50308598 A JP 50308598A JP H11513011 A JPH11513011 A JP H11513011A
Authority
JP
Japan
Prior art keywords
helium
consolidation
purified
supplying
recirculated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10503085A
Other languages
English (en)
Japanese (ja)
Inventor
エイ クルズィンスキ，ポール
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Corning Inc
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Publication of JPH11513011A publication Critical patent/JPH11513011A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/02—Manufacture of glass fibres or filaments by drawing or extruding, e.g. direct drawing of molten glass from nozzles; Cooling fins therefor
    • C03B37/025—Manufacture of glass fibres or filaments by drawing or extruding, e.g. direct drawing of molten glass from nozzles; Cooling fins therefor from reheated softened tubes, rods, fibres or filaments, e.g. drawing fibres from preforms
    • C03B37/029—Furnaces therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B23/00—Noble gases; Compounds thereof
    • C01B23/001—Purification or separation processes of noble gases
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/0144—Means for after-treatment or catching of worked reactant gases
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01446—Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01446—Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering
    • C03B37/0146—Furnaces therefor, e.g. muffle tubes, furnace linings
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/02—Manufacture of glass fibres or filaments by drawing or extruding, e.g. direct drawing of molten glass from nozzles; Cooling fins therefor
    • C03B37/025—Manufacture of glass fibres or filaments by drawing or extruding, e.g. direct drawing of molten glass from nozzles; Cooling fins therefor from reheated softened tubes, rods, fibres or filaments, e.g. drawing fibres from preforms
    • C03B37/027—Fibres composed of different sorts of glass, e.g. glass optical fibres
    • C03B37/02718—Thermal treatment of the fibre during the drawing process, e.g. cooling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0029—Obtaining noble gases
    • C01B2210/0031—Helium
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2205/00—Fibre drawing or extruding details
    • C03B2205/57—Recovering, recycling or purifying the coolant, e.g. helium
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0323—Valves
    • F17C2205/0326—Valves electrically actuated
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/01—Pure fluids
    • F17C2221/011—Oxygen
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/01—Pure fluids
    • F17C2221/014—Nitrogen
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/01—Pure fluids
    • F17C2221/016—Noble gases (Ar, Kr, Xe)
    • F17C2221/017—Helium
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/03—Mixtures
    • F17C2221/037—Containing pollutant, e.g. H2S, Cl
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/05—Ultrapure fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0107—Single phase
    • F17C2223/0123—Single phase gaseous, e.g. CNG, GNC
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/01—Propulsion of the fluid
    • F17C2227/0128—Propulsion of the fluid with pumps or compressors
    • F17C2227/0157—Compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/04—Methods for emptying or filling
    • F17C2227/044—Methods for emptying or filling by purging
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/04—Indicating or measuring of parameters as input values
    • F17C2250/0404—Parameters indicated or measured
    • F17C2250/043—Pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2265/00—Effects achieved by gas storage or gas handling
    • F17C2265/01—Purifying the fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/05—Applications for industrial use
    • F17C2270/0518—Semiconductors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00—Technologies relating to chemical industry
    • Y02P20/10—Process efficiency

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Separation By Low-Temperature Treatments (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
JP10503085A 1996-06-24 1997-06-09 光ファイバ製造のヘリウム再循環 Pending JPH11513011A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US2079696P 1996-06-24 1996-06-24
US60/020,796 1996-06-24
PCT/US1997/009968 WO1997049960A1 (en) 1996-06-24 1997-06-09 Helium recycling for optical fiber manufacturing

Publications (1)

Publication Number Publication Date
JPH11513011A true JPH11513011A (ja) 1999-11-09

Family

ID=21800625

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10503085A Pending JPH11513011A (ja) 1996-06-24 1997-06-09 光ファイバ製造のヘリウム再循環

Country Status (12)

Country Link
US (3) US5890376C1 (https=)
EP (1) EP0879389B1 (https=)
JP (1) JPH11513011A (https=)
KR (1) KR19990044095A (https=)
CN (1) CN1196789A (https=)
AT (1) ATE241119T1 (https=)
AU (1) AU714363B2 (https=)
BR (1) BR9702330A (https=)
CA (1) CA2221691A1 (https=)
DE (1) DE69722180D1 (https=)
DK (1) DK0879389T3 (https=)
WO (1) WO1997049960A1 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004149404A (ja) * 2002-08-28 2004-05-27 Boc Group Inc:The 光学繊維用クーラントガスの回収および再循環のための装置および方法
JP2004359520A (ja) * 2003-06-06 2004-12-24 Toshiba Ceramics Co Ltd 合成シリカガラスの製造方法及びその製造装置

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JP2001163632A (ja) * 1999-12-13 2001-06-19 Sumitomo Electric Ind Ltd 光ファイバ製造方法および光ファイバ製造装置
AU7185900A (en) * 2000-01-14 2001-07-19 Boc Group, Inc., The Helium recovery process
US6345451B1 (en) * 2000-03-23 2002-02-12 Air Products And Chemicals, Inc. Method and apparatus for hot continuous fiber cooling with cooling gas recirculation
FR2808793B1 (fr) * 2000-05-15 2002-09-27 Air Liquide Fabrication de fibre optique refroidie a l'helium avec recyclage sans purification de l'helium
FR2815399B1 (fr) * 2000-10-18 2003-01-03 Air Liquide Procede et installation de purification et recyclage de l'helium, et leur application a la fabrication de fibres optiques
US20020134530A1 (en) * 2001-03-20 2002-09-26 American Air Liquide, Inc. Heat transfer fluids and methods of making and using same
US20020129622A1 (en) * 2001-03-15 2002-09-19 American Air Liquide, Inc. Heat transfer fluids and methods of making and using same
US6668582B2 (en) 2001-04-20 2003-12-30 American Air Liquide Apparatus and methods for low pressure cryogenic cooling
US6651358B2 (en) 2001-04-30 2003-11-25 American Air Liquide, Inc. Heat transfer fluids and methods of making and using same comprising hydrogen, helium and combinations thereof
US6574972B2 (en) 2001-04-30 2003-06-10 L'air Liquide - Societe' Anonyme A' Directoire Et Conseil De Surveillance Pour L'etude Et L'exploitation Des Procedes Georges Claude Low temperature heat transfer methods
US6789400B2 (en) * 2001-11-30 2004-09-14 The Boc Group, Inc. Cap assembly and optical fiber cooling process
FR2833188B1 (fr) * 2001-12-06 2004-05-21 Air Liquide Installation et procede de production de produits en utilisant un fluide
US20040139766A1 (en) * 2003-01-17 2004-07-22 Weeks Gene K. Systems and methods for recycling gas used in treating optical fiber
US20040194513A1 (en) * 2003-04-04 2004-10-07 Giacobbe Frederick W Fiber coolant system including improved gas seals
US7261763B2 (en) * 2003-07-17 2007-08-28 The Boc Group, Inc. Method for the recovery and recycle of helium and chlorine
US20050011230A1 (en) * 2003-07-17 2005-01-20 Shirley Arthur I. Method for blending and recirculating deuterium-containing gas
US7984838B2 (en) * 2006-05-04 2011-07-26 Medtronic Ps Medical, Inc. Recycled helium gas surgical instrument
US20090324816A1 (en) * 2008-06-27 2009-12-31 Paul Andrew Chludzinski Low Permeability Gas Recycling in Consolidation
NL2002422C2 (en) * 2009-01-16 2010-07-19 Draka Comteq Bv Method and system to manufacture an optical fibre preform.
JP5323530B2 (ja) * 2009-02-23 2013-10-23 古河電気工業株式会社 光ファイバの製造方法
US8444749B2 (en) 2009-06-10 2013-05-21 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Method and system for membrane-based gas recovery
CN103363294B (zh) * 2013-07-08 2016-02-03 安徽万瑞冷电科技有限公司 一种用于空调行业的废氦气回收系统
US9649590B2 (en) * 2014-01-13 2017-05-16 Versum Materials Us, Llc System and method for gas recovery and reuse
US10308544B2 (en) 2015-10-13 2019-06-04 Corning Incorporated Gas reclamation system for optical fiber production
CN106744749A (zh) * 2016-11-30 2017-05-31 富通集团（嘉善）通信技术有限公司 用于光纤拉丝系统的氦气在线回收利用方法及装置
CN109896738B (zh) * 2017-02-28 2021-08-06 天津富通集团有限公司 光纤预制棒的生产工艺
US11136256B2 (en) * 2017-07-25 2021-10-05 Made In Space, Inc. System and method for manufacturing optical fiber
CN108328919A (zh) * 2018-04-19 2018-07-27 合肥硕朗自动化科技有限公司 一种光纤拉丝冷却管氦气回收装置
CN109930201A (zh) * 2019-03-08 2019-06-25 银川隆基硅材料有限公司 一种气体回用控制方法及气体回用控制设备
CN110498401B (zh) * 2019-09-02 2024-05-17 北京中科富海低温科技有限公司 氦气回收净化装置
CN112225448B (zh) * 2020-10-22 2022-12-06 江苏亨通光导新材料有限公司 一种用于光纤预制棒烧结的氦氯混合气循环系统
CN112604465A (zh) * 2020-11-03 2021-04-06 国网湖北省电力有限公司检修公司 用于六氟化硫气体放电降解处理的气体循环装置及方法
EP4080146A1 (en) * 2021-04-21 2022-10-26 Linde GmbH Method of operating a fabrication plant and fabrication plant
EP4265322A1 (en) * 2022-04-22 2023-10-25 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Helium recovery process

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FR2510539A1 (fr) * 1981-07-28 1983-02-04 Expertises Sa Cie Maritime Procede et installation d'epuration de l'helium contenu dans un melange de gaz
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JP2004149404A (ja) * 2002-08-28 2004-05-27 Boc Group Inc:The 光学繊維用クーラントガスの回収および再循環のための装置および方法
KR100981502B1 (ko) * 2002-08-28 2010-09-10 더 비오씨 그룹 인코포레이티드 광섬유 냉각제 기체를 회수 및 재순환시키기 위한 장치 및 방법
JP2004359520A (ja) * 2003-06-06 2004-12-24 Toshiba Ceramics Co Ltd 合成シリカガラスの製造方法及びその製造装置

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AU3383597A (en) 1998-01-14
US5890376C1 (en) 2001-05-15
US6092391A (en) 2000-07-25
EP0879389A4 (https=) 1998-12-02
WO1997049960A1 (en) 1997-12-31
ATE241119T1 (de) 2003-06-15
DK0879389T3 (da) 2003-09-15
CN1196789A (zh) 1998-10-21
US5890376A (en) 1999-04-06
US6253575B1 (en) 2001-07-03
EP0879389A1 (en) 1998-11-25
KR19990044095A (ko) 1999-06-25
BR9702330A (pt) 1999-07-20
AU714363B2 (en) 1999-12-23
DE69722180D1 (de) 2003-06-26
EP0879389B1 (en) 2003-05-21

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