JPH11506835A - 蒸気圧力センサ及びその方法 - Google Patents

蒸気圧力センサ及びその方法

Info

Publication number
JPH11506835A
JPH11506835A JP9501221A JP50122197A JPH11506835A JP H11506835 A JPH11506835 A JP H11506835A JP 9501221 A JP9501221 A JP 9501221A JP 50122197 A JP50122197 A JP 50122197A JP H11506835 A JPH11506835 A JP H11506835A
Authority
JP
Japan
Prior art keywords
substrate
vapor
cantilever
coating
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
JP9501221A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11506835A5 (enExample
Inventor
ラルフ エル フェナー
ロバート シー クイン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of JPH11506835A publication Critical patent/JPH11506835A/ja
Publication of JPH11506835A5 publication Critical patent/JPH11506835A5/ja
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N19/00—Investigating materials by mechanical methods
    • G01N19/10—Measuring moisture content, e.g. by measuring change in length of hygroscopic filament; Hygrometers

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Measuring Fluid Pressure (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Pressure Sensors (AREA)
JP9501221A 1995-06-07 1996-06-03 蒸気圧力センサ及びその方法 Ceased JPH11506835A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/474,241 1995-06-07
US08/474,241 US5563341A (en) 1995-06-07 1995-06-07 Vapor pressure sensor and method
PCT/US1996/008716 WO1996041147A1 (en) 1995-06-07 1996-06-03 Vapor pressure sensor and method

Publications (2)

Publication Number Publication Date
JPH11506835A true JPH11506835A (ja) 1999-06-15
JPH11506835A5 JPH11506835A5 (enExample) 2004-07-22

Family

ID=23882741

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9501221A Ceased JPH11506835A (ja) 1995-06-07 1996-06-03 蒸気圧力センサ及びその方法

Country Status (7)

Country Link
US (1) US5563341A (enExample)
EP (1) EP0832424B1 (enExample)
JP (1) JPH11506835A (enExample)
AT (1) ATE287531T1 (enExample)
AU (1) AU5978996A (enExample)
DE (1) DE69634201T2 (enExample)
WO (1) WO1996041147A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006512589A (ja) * 2002-12-27 2006-04-13 カンション アクティーゼルスカブ 縦および横の両方向のピエゾ抵抗係数を用いたカンチレバーセンサ
JP2017181430A (ja) * 2016-03-31 2017-10-05 京セラ株式会社 応力センサ
JP2019164104A (ja) * 2018-03-20 2019-09-26 国立大学法人東北大学 光音響計測装置

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US5804721A (en) * 1997-02-14 1998-09-08 Yankielun; Norbert E. Capacitor for water leak detection in roofing structures
US6016686A (en) * 1998-03-16 2000-01-25 Lockheed Martin Energy Research Corporation Micromechanical potentiometric sensors
US6126311A (en) * 1998-11-02 2000-10-03 Claud S. Gordon Company Dew point sensor using mems
US6338369B1 (en) 1998-11-09 2002-01-15 Marconi Commerce Systems Inc. Hydrocarbon vapor sensing
DE19853732C1 (de) * 1998-11-23 2000-07-06 Univ Dresden Tech Sensor zur Messung der Konzentration eines oder mehrerer Gase bzw. der Luftfeuchte
WO2000039570A2 (en) * 1998-12-28 2000-07-06 Raytheon Company Sensor for detecting small concentrations of a target matter
JP2003507723A (ja) * 1999-08-19 2003-02-25 ザ・リージェンツ・オブ・ザ・ユニバーシティー・オブ・カリフォルニア カンチレバーアレイブロックのパレットにより微小力を可視的に識別する装置及び方法
US6901786B2 (en) * 1999-11-30 2005-06-07 Veeder-Root Company Fueling system vapor recovery and containment leak detection system and method
US6622757B2 (en) 1999-11-30 2003-09-23 Veeder-Root Company Fueling system vapor recovery and containment performance monitor and method of operation thereof
US6881585B1 (en) * 2000-03-06 2005-04-19 General Electric Company Method and apparatus for rapid screening of volatiles
GB2369436A (en) * 2000-07-28 2002-05-29 Marconi Applied Techn Ltd Chemical sensing micro-mechanical cantilever
US6357493B1 (en) 2000-10-23 2002-03-19 Marconi Commerce Systems Inc. Vapor recovery system for a fuel dispenser
US6347649B1 (en) 2000-11-16 2002-02-19 Marconi Commerce Systems Inc. Pressure sensor for a vapor recovery system
KR100393188B1 (ko) * 2000-12-29 2003-07-31 삼성전자주식회사 다초점 렌즈를 이용한 위상공액 홀로그래픽 정보 저장장치 및 정보 저장 방법
DE10129987C2 (de) * 2001-06-12 2003-06-12 Univ Dresden Tech Sensor zur Messung der Anwesenheit und Konzentration von Komponenten in einer Flüssigkeit
DE10129985C2 (de) * 2001-06-12 2003-06-12 Univ Dresden Tech Sensor zur Messung der Anwesenheit und der Konzentration von Komponenten in einer Flüssigkeit
DE10129986C2 (de) * 2001-06-12 2003-06-12 Univ Dresden Tech Sensor zur Messung der Anwesenheit und der Konzentration von Komponenten in einer Flüssigkeit
US6908561B1 (en) * 2001-11-06 2005-06-21 Lockhead Martin Corporation Polymide-to-substrate adhesion promotion in HDI
US6866819B1 (en) 2001-11-13 2005-03-15 Raytheon Company Sensor for detecting small concentrations of a target matter
US6671631B2 (en) 2002-01-04 2003-12-30 General Electric Company Systems and methods for analyzing viscoelastic properties of combinatorial libraries of materials
US20030154149A1 (en) * 2002-02-13 2003-08-14 Dilip Gajendragadkar System and method of creating and executing a restricted stock sale plan
WO2005003406A2 (en) * 2003-06-27 2005-01-13 Sundew Technologies, Llc Apparatus and method for chemical source vapor pressure control
DE10352257B4 (de) * 2003-11-08 2006-02-23 Danfoss A/S Taupunktfühler
US7551058B1 (en) 2003-12-10 2009-06-23 Advanced Design Consulting Usa, Inc. Sensor for monitoring environmental parameters in concrete
US7373819B2 (en) * 2005-09-30 2008-05-20 Honeywell International Inc. Stress sensitive humidity sensor based on a MEMS structure
EP1949770B1 (en) * 2005-11-09 2018-12-12 Koninklijke Philips N.V. Method of manufacturing a package carrier for enclosing at least one microelectronic element and method of manufacturing a diagnostic device
TWI279536B (en) * 2006-02-24 2007-04-21 Ind Tech Res Inst Cantilever resistive humidity detection structure and method for manufacturing the same
US7909069B2 (en) 2006-05-04 2011-03-22 Veeder-Root Company System and method for automatically adjusting an ORVR compatible stage II vapor recovery system to maintain a desired air-to-liquid (A/L) ratio
DE102006026668B4 (de) * 2006-06-08 2008-07-10 Technische Universität Dresden Sensor und Verfahren zur Messung der Konzentration von Komponenten in einer Flüssigkeit
TWI319479B (en) * 2006-10-18 2010-01-11 Ind Tech Res Inst A resistive-type humidity sensing structure with micro-bridge format and a method therefor
EP2222948B1 (en) * 2007-11-19 2014-06-11 Robert Bosch GmbH Fuel liquid and vapor pressure sensor
US8514060B2 (en) 2008-05-21 2013-08-20 Mitomo Corporation Wireless identification tag
JP5008201B2 (ja) * 2008-05-21 2012-08-22 三智商事株式会社 無線ｉｃタグ
PL2291322T3 (pl) 2008-05-28 2012-07-31 Franklin Fueling Systems Inc Sposób oraz urządzenie do monitorowania ograniczenia w systemie odzyskiwania oparów paliwa na etapie ii
US8402817B2 (en) * 2008-05-28 2013-03-26 Franklin Fueling Systems, Inc. Method and apparatus for monitoring for leaks in a stage II fuel vapor recovery system
KR101094870B1 (ko) * 2008-12-17 2011-12-15 한국전자통신연구원 습도 센서 및 이의 제조 방법
EP2433109B1 (en) 2009-05-18 2019-12-18 Franklin Fueling Systems, Inc. Method and apparatus for detecting a leak in a fuel delivery system
US9103705B2 (en) 2012-02-27 2015-08-11 Freescale Semiconductor, Inc. Combined environmental parameter sensor
GB2516247A (en) * 2013-07-16 2015-01-21 Nokia Corp An apparatus and associated methods
US10866203B2 (en) * 2016-03-31 2020-12-15 Kyocera Corporation Stress sensor

Family Cites Families (12)

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Publication number Priority date Publication date Assignee Title
US2461310A (en) * 1947-05-21 1949-02-08 Foxboro Co Apparatus for measuring humidity
US3077774A (en) * 1957-02-18 1963-02-19 Energy Kontrols Inc Humidity indicating device
US3301057A (en) * 1964-05-12 1967-01-31 Johnson Service Co Humidity sensing element
JPS54158289A (en) * 1978-06-05 1979-12-13 Hitachi Ltd Humidity detector
JPS60247148A (ja) * 1984-05-23 1985-12-06 Matsushita Electric Ind Co Ltd 湿度センサ
JPS60247147A (ja) * 1984-05-23 1985-12-06 Matsushita Electric Ind Co Ltd 湿度センサ
JPS63100352A (ja) * 1986-10-16 1988-05-02 Sanyo Electric Co Ltd 湿度センサ
JPH06100529B2 (ja) * 1986-11-10 1994-12-12 三洋電機株式会社 湿度検出装置
EP0376721B1 (en) * 1988-12-29 1998-07-15 Sharp Kabushiki Kaisha Moisture-sensitive device
US4969359A (en) * 1989-04-06 1990-11-13 Ford Motor Company Silicon accelerometer responsive to three orthogonal force components and method for fabricating
JPH03226649A (ja) * 1990-01-31 1991-10-07 Sanyo Electric Co Ltd 感湿素子
AU6770394A (en) * 1993-05-25 1994-12-20 Rosemount Inc. Organic chemical sensor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006512589A (ja) * 2002-12-27 2006-04-13 カンション アクティーゼルスカブ 縦および横の両方向のピエゾ抵抗係数を用いたカンチレバーセンサ
JP2017181430A (ja) * 2016-03-31 2017-10-05 京セラ株式会社 応力センサ
JP2019164104A (ja) * 2018-03-20 2019-09-26 国立大学法人東北大学 光音響計測装置

Also Published As

Publication number Publication date
EP0832424B1 (en) 2005-01-19
DE69634201T2 (de) 2006-01-05
DE69634201D1 (de) 2005-02-24
EP0832424A1 (en) 1998-04-01
ATE287531T1 (de) 2005-02-15
AU5978996A (en) 1996-12-30
WO1996041147A1 (en) 1996-12-19
US5563341A (en) 1996-10-08
EP0832424A4 (en) 1999-09-15

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