ATE287531T1 - Dampfdrucksensor und verfahren - Google Patents

Dampfdrucksensor und verfahren

Info

Publication number
ATE287531T1
ATE287531T1 AT96917116T AT96917116T ATE287531T1 AT E287531 T1 ATE287531 T1 AT E287531T1 AT 96917116 T AT96917116 T AT 96917116T AT 96917116 T AT96917116 T AT 96917116T AT E287531 T1 ATE287531 T1 AT E287531T1
Authority
AT
Austria
Prior art keywords
vapor
coating
hole
pressure sensor
vapor adsorbing
Prior art date
Application number
AT96917116T
Other languages
German (de)
English (en)
Inventor
Ralph L Fenner
Robert C Quinn
Original Assignee
Ralph L Fenner
Robert C Quinn
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ralph L Fenner, Robert C Quinn filed Critical Ralph L Fenner
Application granted granted Critical
Publication of ATE287531T1 publication Critical patent/ATE287531T1/de

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N19/00Investigating materials by mechanical methods
    • G01N19/10Measuring moisture content, e.g. by measuring change in length of hygroscopic filament; Hygrometers

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Measuring Fluid Pressure (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Pressure Sensors (AREA)
AT96917116T 1995-06-07 1996-06-03 Dampfdrucksensor und verfahren ATE287531T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/474,241 US5563341A (en) 1995-06-07 1995-06-07 Vapor pressure sensor and method
PCT/US1996/008716 WO1996041147A1 (en) 1995-06-07 1996-06-03 Vapor pressure sensor and method

Publications (1)

Publication Number Publication Date
ATE287531T1 true ATE287531T1 (de) 2005-02-15

Family

ID=23882741

Family Applications (1)

Application Number Title Priority Date Filing Date
AT96917116T ATE287531T1 (de) 1995-06-07 1996-06-03 Dampfdrucksensor und verfahren

Country Status (7)

Country Link
US (1) US5563341A (enExample)
EP (1) EP0832424B1 (enExample)
JP (1) JPH11506835A (enExample)
AT (1) ATE287531T1 (enExample)
AU (1) AU5978996A (enExample)
DE (1) DE69634201T2 (enExample)
WO (1) WO1996041147A1 (enExample)

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US6338369B1 (en) 1998-11-09 2002-01-15 Marconi Commerce Systems Inc. Hydrocarbon vapor sensing
DE19853732C1 (de) * 1998-11-23 2000-07-06 Univ Dresden Tech Sensor zur Messung der Konzentration eines oder mehrerer Gase bzw. der Luftfeuchte
WO2000039570A2 (en) * 1998-12-28 2000-07-06 Raytheon Company Sensor for detecting small concentrations of a target matter
JP2003507723A (ja) * 1999-08-19 2003-02-25 ザ・リージェンツ・オブ・ザ・ユニバーシティー・オブ・カリフォルニア カンチレバーアレイブロックのパレットにより微小力を可視的に識別する装置及び方法
US6901786B2 (en) * 1999-11-30 2005-06-07 Veeder-Root Company Fueling system vapor recovery and containment leak detection system and method
US6622757B2 (en) 1999-11-30 2003-09-23 Veeder-Root Company Fueling system vapor recovery and containment performance monitor and method of operation thereof
US6881585B1 (en) * 2000-03-06 2005-04-19 General Electric Company Method and apparatus for rapid screening of volatiles
GB2369436A (en) * 2000-07-28 2002-05-29 Marconi Applied Techn Ltd Chemical sensing micro-mechanical cantilever
US6357493B1 (en) 2000-10-23 2002-03-19 Marconi Commerce Systems Inc. Vapor recovery system for a fuel dispenser
US6347649B1 (en) 2000-11-16 2002-02-19 Marconi Commerce Systems Inc. Pressure sensor for a vapor recovery system
KR100393188B1 (ko) * 2000-12-29 2003-07-31 삼성전자주식회사 다초점 렌즈를 이용한 위상공액 홀로그래픽 정보 저장장치 및 정보 저장 방법
DE10129987C2 (de) * 2001-06-12 2003-06-12 Univ Dresden Tech Sensor zur Messung der Anwesenheit und Konzentration von Komponenten in einer Flüssigkeit
DE10129985C2 (de) * 2001-06-12 2003-06-12 Univ Dresden Tech Sensor zur Messung der Anwesenheit und der Konzentration von Komponenten in einer Flüssigkeit
DE10129986C2 (de) * 2001-06-12 2003-06-12 Univ Dresden Tech Sensor zur Messung der Anwesenheit und der Konzentration von Komponenten in einer Flüssigkeit
US6908561B1 (en) * 2001-11-06 2005-06-21 Lockhead Martin Corporation Polymide-to-substrate adhesion promotion in HDI
US6866819B1 (en) 2001-11-13 2005-03-15 Raytheon Company Sensor for detecting small concentrations of a target matter
US6671631B2 (en) 2002-01-04 2003-12-30 General Electric Company Systems and methods for analyzing viscoelastic properties of combinatorial libraries of materials
US20030154149A1 (en) * 2002-02-13 2003-08-14 Dilip Gajendragadkar System and method of creating and executing a restricted stock sale plan
JP2006512589A (ja) * 2002-12-27 2006-04-13 カンション アクティーゼルスカブ 縦および横の両方向のピエゾ抵抗係数を用いたカンチレバーセンサ
WO2005003406A2 (en) * 2003-06-27 2005-01-13 Sundew Technologies, Llc Apparatus and method for chemical source vapor pressure control
DE10352257B4 (de) * 2003-11-08 2006-02-23 Danfoss A/S Taupunktfühler
US7551058B1 (en) 2003-12-10 2009-06-23 Advanced Design Consulting Usa, Inc. Sensor for monitoring environmental parameters in concrete
US7373819B2 (en) * 2005-09-30 2008-05-20 Honeywell International Inc. Stress sensitive humidity sensor based on a MEMS structure
EP1949770B1 (en) * 2005-11-09 2018-12-12 Koninklijke Philips N.V. Method of manufacturing a package carrier for enclosing at least one microelectronic element and method of manufacturing a diagnostic device
TWI279536B (en) * 2006-02-24 2007-04-21 Ind Tech Res Inst Cantilever resistive humidity detection structure and method for manufacturing the same
US7909069B2 (en) 2006-05-04 2011-03-22 Veeder-Root Company System and method for automatically adjusting an ORVR compatible stage II vapor recovery system to maintain a desired air-to-liquid (A/L) ratio
DE102006026668B4 (de) * 2006-06-08 2008-07-10 Technische Universität Dresden Sensor und Verfahren zur Messung der Konzentration von Komponenten in einer Flüssigkeit
TWI319479B (en) * 2006-10-18 2010-01-11 Ind Tech Res Inst A resistive-type humidity sensing structure with micro-bridge format and a method therefor
EP2222948B1 (en) * 2007-11-19 2014-06-11 Robert Bosch GmbH Fuel liquid and vapor pressure sensor
US8514060B2 (en) 2008-05-21 2013-08-20 Mitomo Corporation Wireless identification tag
JP5008201B2 (ja) * 2008-05-21 2012-08-22 三智商事株式会社 無線icタグ
PL2291322T3 (pl) 2008-05-28 2012-07-31 Franklin Fueling Systems Inc Sposób oraz urządzenie do monitorowania ograniczenia w systemie odzyskiwania oparów paliwa na etapie ii
US8402817B2 (en) * 2008-05-28 2013-03-26 Franklin Fueling Systems, Inc. Method and apparatus for monitoring for leaks in a stage II fuel vapor recovery system
KR101094870B1 (ko) * 2008-12-17 2011-12-15 한국전자통신연구원 습도 센서 및 이의 제조 방법
EP2433109B1 (en) 2009-05-18 2019-12-18 Franklin Fueling Systems, Inc. Method and apparatus for detecting a leak in a fuel delivery system
US9103705B2 (en) 2012-02-27 2015-08-11 Freescale Semiconductor, Inc. Combined environmental parameter sensor
GB2516247A (en) * 2013-07-16 2015-01-21 Nokia Corp An apparatus and associated methods
US10866203B2 (en) * 2016-03-31 2020-12-15 Kyocera Corporation Stress sensor
JP6691414B2 (ja) * 2016-03-31 2020-04-28 京セラ株式会社 応力センサ
JP6826732B2 (ja) * 2018-03-20 2021-02-10 国立大学法人東北大学 光音響計測装置

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US3077774A (en) * 1957-02-18 1963-02-19 Energy Kontrols Inc Humidity indicating device
US3301057A (en) * 1964-05-12 1967-01-31 Johnson Service Co Humidity sensing element
JPS54158289A (en) * 1978-06-05 1979-12-13 Hitachi Ltd Humidity detector
JPS60247148A (ja) * 1984-05-23 1985-12-06 Matsushita Electric Ind Co Ltd 湿度センサ
JPS60247147A (ja) * 1984-05-23 1985-12-06 Matsushita Electric Ind Co Ltd 湿度センサ
JPS63100352A (ja) * 1986-10-16 1988-05-02 Sanyo Electric Co Ltd 湿度センサ
JPH06100529B2 (ja) * 1986-11-10 1994-12-12 三洋電機株式会社 湿度検出装置
EP0376721B1 (en) * 1988-12-29 1998-07-15 Sharp Kabushiki Kaisha Moisture-sensitive device
US4969359A (en) * 1989-04-06 1990-11-13 Ford Motor Company Silicon accelerometer responsive to three orthogonal force components and method for fabricating
JPH03226649A (ja) * 1990-01-31 1991-10-07 Sanyo Electric Co Ltd 感湿素子
AU6770394A (en) * 1993-05-25 1994-12-20 Rosemount Inc. Organic chemical sensor

Also Published As

Publication number Publication date
EP0832424B1 (en) 2005-01-19
DE69634201T2 (de) 2006-01-05
DE69634201D1 (de) 2005-02-24
EP0832424A1 (en) 1998-04-01
AU5978996A (en) 1996-12-30
WO1996041147A1 (en) 1996-12-19
JPH11506835A (ja) 1999-06-15
US5563341A (en) 1996-10-08
EP0832424A4 (en) 1999-09-15

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