JPH1133904A - System and method for polishing - Google Patents

Abstract

PROBLEM TO BE SOLVED: To mass-produce discs polished at a high accuracy by assembling a ring like polishing member rotary polishing device as a unit of a system. SOLUTION: Ringlike polishing member rotary polishing devices 3-1, 3-2 perform the R-working to both surfaces of a disc D1 so as to improve the degree of flatness. When working of the disc D1 by a polishing device 1 and supply of a following disc D2 by a disc supplying device 2 are concluded, the disc D1 is positioned at a washing position of a washing device 4. After washing of the disc D1, working of the disc D2 and supply of a disc D3 are concluded, the disc D1 is positioned to a polishing position of a polishing device 6. Ringlike polishing member rotary polishing devices 6-1, 6-2 are moved to the disc D1 side so as to perform the C-working to both surfaces of the magnetic disc D1. Namely, since the C-working is performed to the disc D1 having a high degree of flatness, polishing at a high accuracy is obtained.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to a polishing system and a polishing method for polishing a disk by a series of devices arranged in a circle.

[0002]

2. Description of the Related Art In recent years, with the increase in capacity and density of magnetic disks, it has been desired to form streaks having a small intersection angle on the surface of the magnetic disk by a texture process. Conventionally, as this type of technology, as shown in FIG. 28, there is a technology in which a magnetic disk D is rotated and a tape 100 in which a fixed abrasive surface is brought into contact with the surface of the magnetic disk D is swung in the tape width direction. . Specifically, the rotational speed of the magnetic disk D and the swinging speed of the tape 100 are adjusted to grind a streak having a desired small intersection angle on the surface of the magnetic disk D.

[0003]

However, in the above-mentioned conventional technique, since the magnetic disk D is polished with the tape 100 using the fixed abrasive, burrs and return are generated on the surface of the magnetic disk D, and the processing accuracy is reduced. Was very low. Therefore, by polishing the surface of the magnetic disk D while rotating and revolving the ring-shaped polishing pad, a polishing apparatus (ring) capable of forming a desired line mark without generating burrs and return on the surface of the magnetic disk D Polishing member rotary polishing device) has been devised. This ring-shaped polishing member rotary polishing apparatus uses a polishing pad having a center hole larger than the width portion of the magnetic disk D so that the width portion of the magnetic disk D is included in the center hole. , So that the polishing pad can revolve around the center of the magnetic disk D while rotating the polishing pad, and it has been proved that the polishing pad has extremely excellent polishing characteristics. However, a system for mass-producing the magnetic disk D by incorporating the ring-shaped polishing member rotary polishing device has not been devised yet, and construction of this system has been desired.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problem, and a polishing system capable of mass-producing a highly polished disk by incorporating a ring-shaped polishing member rotary polishing apparatus as a unit of the system. And a method thereof.

[0005]

In order to solve the above-mentioned problems, a polishing system according to the present invention comprises a transport unit capable of transporting a chuck to a predetermined position, a supply unit for holding an unpolished disk on the chuck, and a chuck. Polishing system, comprising: a first polishing section for polishing a disk held by a first polishing section; a cleaning section for cleaning a polished disk from the first polishing section; and a discharge section for removing the polished disk from a chuck. Wherein the transfer unit has an endless rail and a chuck suspended on the endless rail,
While sequentially stopping at the disk supply position of the supply section, the disk polishing position of the first polishing section, the disk cleaning position of the cleaning section, and the disk discharge position of the discharge section, the disk is rotated along the endless rail. The first polishing unit includes a rotatable revolving unit, one or more revolving units having a ring-shaped polishing member at a tip end capable of contacting the disk so as to include the width of the disk in the center hole, a revolving unit, and A ring-shaped polishing member rotary polishing apparatus including a driving unit for rotating the rotation unit is provided. With this configuration, when the chuck is stopped at the disk supply position, the unpolished disk is held by the chuck by the supply unit, and is transported along the endless rail to the disk polishing position. Then, the ring-shaped polishing member rotating type polishing apparatus brings the ring-shaped polishing member at the tip surface of the rotation portion into contact with the disk so that the center hole thereof includes the width portion of the disk, and the driving portion drives the rotation portion and the revolving portion. Is driven to revolve. As a result, the surface of the disk is polished by the ring-shaped polishing member, and streaks having a desired crossing angle are formed on the surface. When the disk is polished, it is transported to the cleaning section, where it is cleaned, and abrasive powder and the like attached to the disk are removed. Then, the disc is conveyed to the discharge section, taken out of the chuck, an empty chuck is conveyed to the first supply section, and the same operation is repeated.
Further, in the above-mentioned polishing system, after the cleaning unit, a second disk having the same structure as the first polishing unit and performing substantially the same processing as the first polishing unit on the disk cleaned by the cleaning unit.
Is provided. With this configuration, when the disc cleaned by the cleaning unit is transported to the second polishing unit, the ring-shaped polishing member rotary polishing apparatus moves the ring-shaped polishing member at the tip end surface of the rotation unit to the center hole of the disk. Contact the disk to include the
The revolving unit and the revolving unit are driven to revolve. This allows
While the disk surface is polished with a ring-shaped polishing member,
Streaks having a desired crossing angle are formed on the surface. When the disc is polished, it is transported to the discharge section, the disc is removed from the chuck, and the empty chuck is returned to the first supply section. Further, in the above-mentioned polishing system, the chuck holds the outer peripheral surface of the disk, and the polishing section has two opposed ring-shaped polishing member rotating type polishing apparatuses. The polishing apparatus is configured to simultaneously polish both surfaces of the disk held by the chuck. With this configuration, both sides of the disk are simultaneously polished, and streaks having a desired crossing angle are formed on both sides. Further, in the polishing system,
The ring-shaped polishing member was a ring-shaped polishing pad.

Further, the polishing method of the present invention includes a step of supplying an unpolished disk to a chuck suspended on an endless rail, and including a width portion of the disk held by the chuck in the center hole. Then, a ring-shaped polishing member is brought into contact with the disk-shaped polishing member, and the ring-shaped polishing member revolves around the center of the disk while rotating, thereby polishing the disk surface.
Polishing step, a cleaning step of cleaning the polished disk, a discharge step of taking out the polished disk from the chuck, and, while sequentially stopping the chuck at the supply step position, the first polishing step position, and the cleaning step position, And a transporting step of circulating along the endless rail. Also,
In the above polishing method, after the cleaning step, the ring-shaped polishing member is brought into contact with the disk so that the width portion of the already-cleaned disk is included in the center hole, and the ring-shaped polishing member is rotated around the center of the disk. And a second polishing step for polishing the disk surface by revolving the disk. Further, in the above-mentioned polishing method, the chuck holds the outer peripheral surface of the disk, and in the polishing step, a ring-shaped polishing member is brought into contact with both surfaces of the disk held by the chuck, and the two surfaces are simultaneously polished. And Further, in the polishing method, the ring-shaped polishing member is a ring-shaped polishing pad.

[0007]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a block diagram showing a polishing system according to one embodiment of the present invention. As shown in FIG. 1, the polishing system includes a disk transport device 1 (transport portion), a disk supply device 2 (supply portion), a polishing device 3 (first polishing portion), a cleaning device 4 (cleaning portion), and a polishing device. A disk provided with a device 6 (second polishing unit) and a disk discharge device 7 (discharge unit), and the disk supply device 2 to the disk discharge device 7 are sequentially arranged circumferentially below the disk transfer device 1. It is a circulating system.

[0008] The disk transfer device 1 is composed of a ring-shaped rail 10 suspended above and a chuck 5 moving along the rail 10. FIG. 2 is a cross-sectional view showing the disk transport device 1, and FIG. 3 is a perspective view showing a movable body. As shown in FIG. 2, the rail 10 has a rectangular cross section, and a movable body 11 that is moved by the rotation of the rollers 12 is fitted inside the rail 10. Movable body 11
As shown in FIGS. 2 and 3, is a rectangular thick plate body, and has holes 11a penetrating on both sides at its front and rear portions, respectively. The rollers 12, 12 are fixed to both ends of each shaft 13 inserted into such a hole 11a. Hole 1
The shaft 13 inserted in the shaft 1a is supported by bearings 11b attached to both inner ends of the hole 11a. With such a structure, the movable body 11 is
2 can be moved in the rail 10 by the rotation of the rail 2, and on the lower surface thereof, a connecting shaft 11c hanging down through a guide hole 10a cut out along the lower surface of the rail 10 is attached. I have.

FIG. 4 is a sectional view showing the structure of the chuck 5. As shown in FIG. 4, the chuck 5 includes a cylindrical holder 50, a flexible collet 51 fixed in the holder 50, and a cylindrical sleeve 52 inserted between the holder 50 and the collet 51. And The holder 50 is
The upper end of the outer peripheral surface is connected to the connection shaft 11c of the movable body 11. The collet 51 has a plurality of blades 53 that are thinner than the thickness of the magnetic disk D inside the opening, and has a ring spring 54 that urges the blade 53 in the opening direction inside the collet 51. The sleeve 52 is
It is press-fitted outside the collet 51 and urged in the press-fit direction by a spring 52b. That is, the collet 51 is normally pressed by the inner tapered surface of the sleeve 52,
The blade 53 is in a closed state.

The chuck 5 having such a structure is provided with the movable body 1.
1 and move along the rails 10. Specifically, as shown in FIG. 1 and FIG. 2, an endless chain 14 is arranged below the rail 10, and circulates along the rail 10. The connecting shaft 11c is connected to a part of the chain 14 via a bracket 11d. Thus, by rotating the chain 14, the rollers 12, 12 are pulled by the chain 14 and rotate, and the chuck 5 moves along the rail 10. Such movement control of the chuck 5 is performed by a controller (not shown). That is, in FIG. 1, the chuck 5 is set at the disk supply position of the disk supply device 2, the disk polishing position of the polishing device 3, the disk cleaning position of the cleaning device 4, the disk polishing position of the polishing device 6, and the disk discharge position of the disk discharge device 7. While stopping once, the motor is rotated along the rail 10. In this embodiment, five movable bodies 11 (FIGS. 2 and 3) with the chuck 5 suspended are provided at predetermined intervals as shown in FIG. The movable bodies 11 are simultaneously stopped at the disk supply position, the disk polishing position of the polishing device 3, the disk cleaning position, the disk polishing position of the polishing device 6, and the disk discharge position. By the way, since the five chucks 5 are pulled and moved by the chain 14, there is a possibility that the inertia of the five chucks 5 deviates from the disk supply position, the disk polishing position, the disk cleaning position, the disk polishing position, and the disk discharge position. Therefore, a lock mechanism for stopping each chuck 5 while securely positioning it at each position such as a disk supply position is provided near each device. Specifically, as shown in FIGS. 2 and 3, the lock mechanism has a pair of cylinders 9, 9 disposed on both sides of the rail 10, and the lock mechanism is provided at the tip of a piston rod 90 of each cylinder 9. The pin mounting plate 91 is fixed. Pins 92, 92 of the same shape are provided in parallel on the front surface of the pin mounting plate 91. The distance between the center axes of these pins 92, 92 is set equal to the distance between the center axes of the rollers 12, 12, and the outer diameter of each pin 92 is the same as the diameter of the center hole 12a provided at the center of the roller 12. Is set. The tip 92a of each pin 92 is formed in a tapered shape. Thereby, the movable body 11
Stops at each device position, the cylinders 9 on both sides of the rail 10 operate, the piston rod 90 extends, and the pins 9
2 attempts to enter the center hole 12a of each roller 12. At this time, the movable body 11 may be slightly shifted from a predetermined stop position due to inertia, and the center of the center hole 12a and the center of the pin 92 may not match. However, since the tip portion 92a of the pin 92 is formed in a tapered shape as described above, even if the center of the center hole 12a and the pin 92 are slightly shifted, the tapered surface of the tip portion 92a and the inner surface of the center hole 12a. The movable body 11 moves as the distal end portion 92a enters the center hole 12a by contact with the
a. As a result, the movable body 11, that is, the chuck 5 is locked in a state where it is positioned at a predetermined position by the lock mechanism. The locked state can be released by contracting the piston rod 90. Pins 92 are provided on both sides of the rail 10.
A long hole 10b that allows insertion into the center hole 12a is formed.

The disk supply device 2 is a device for holding the unpolished magnetic disk D on the chuck 5, and is composed of a robot and an operation mechanism. FIG. 5 is a side view showing the disk supply device 2. In FIG.
Reference numeral 0 denotes a robot, and reference numeral 21 denotes an operation mechanism. The robot 20 includes a drive unit 20 attached to an upper fixed unit.
a and an arm 20 driven by the driving unit 20a
b, 20c, and a chuck 20d attached to the tip of the arm 20c. Thus, by holding the unpolished magnetic disk D stored in the cassette 200 from the center hole side with the chuck 20d, the magnetic disk D can be carried to the operation mechanism 21 side.

The operation of storing and taking out the magnetic disk D carried by the robot 20 into and from the chuck 5 is performed by an operation mechanism 21.
Done by The operation mechanism 21 includes a chuck 22 that moves in the left-right direction in FIG. 5, a holder 23 that also moves in the left-right direction, and a center positioning body 29 that faces the holder 23 and that can move in the left-right direction. ing. FIG.
FIG. 2 is a cross-sectional view illustrating a main part of an operation mechanism 21. As shown in FIG. 6, the chuck 22 has a structure in which the tip of the lever 52a of the sleeve 52 can be pinched and released.
3 can move left and right. Holder 23
Has a structure in which the movable claw 24 and the fixed claw 25 hold the magnetic disk D from the outer peripheral surface side. FIG. 7 shows the movable claw 2
4 is a schematic front view showing an arrangement state of 4 and fixed claws 25. FIG. As shown in FIG. 7, the movable claw 24
Three movable claws 24 are provided at intervals of 20 degrees, and these three movable claws 24 are integrally moved in the radial direction by the driving of the driving unit 24a (see FIG. 6), and the outer periphery of the magnetic disk D is moved around these movable claws 24.
It is designed to be sandwiched between. Also, three fixed claws 25 are provided on the distal end surface of the holding member 23 at intervals of 120 degrees between the movable claws 24. However, these fixed claws 25 do not move, and the magnetic disk is received by the receiving portion 25a. The outer peripheral surface of D is received. FIG. 8 is a cross-sectional view illustrating the relationship between the movable claw 24 and the fixed claw 25 and the blade 53. As shown in FIG. 8, there are six blades 53 of the chuck 5, and the positions of the gaps between the blades 53 correspond to the positions where the movable claws 24 and the fixed claws 25 are provided. Therefore, in FIG. 6, when the holding body 23 is moved to the chuck 5, the movable claws 24,
The fixed claw 25 enters the gap between the blades 53. On the other hand, the center positioning body 29 has a structure in which a tip is formed in a tapered shape and a projection 29b having the same diameter as the center hole R of the magnetic disk D is provided at the center thereof.

The operation mechanism 21 having the above-described structure functions as follows. 9 is a cross-sectional view showing a state in which the magnetic disk D is held by the operating mechanism 21, FIG. 10 is a cross-sectional view showing a state in which the blade 53 is corrected, and FIG. FIG. At the same time that the chuck lever 20d of the robot 20 holding the magnetic disk D inserts the magnetic disk D into the chuck 5, the operating mechanism 21 operates. That is, as shown in FIG. 9, the chuck 53 moves to the chuck 5 side, and after holding the lever 52 a of the sleeve 52, returns to pull out the sleeve 52, and the blade 53 is opened by the urging force of the ring spring 54. In this state, the robot 20 arranges the magnetic disk D between the six blades 53. Then, the holding member 23 moves to the magnetic disk D side, and as shown in FIG. 8, the opened movable claw 24 and the fixed claw 25 enter the gap between the blades 53, and the outer peripheral surface of the magnetic disk D is fixed to the fixed claw. 25 receiving parts 2
5a. At the same time, the driving unit 24a
, The movable claw 24 is closed, and the outer peripheral surface of the magnetic disk D is held by the movable claw 24. In such a state, the robot 20 separates from the operation mechanism 21, and the robot 20 shifts to the operation of taking out the next magnetic disk D from the cassette 200 as shown in FIG. In parallel with this, as shown in FIG. 10, the center positioning body 29 approaches the magnetic disk D side, and the protrusion 29b is inserted into the center hole R. As a result, the center of the magnetic disk D is positioned. When the convex portion 29b is completely inserted into the center hole R, the peripheral surface of the center positioning member 29 comes into contact with the peripheral edge of the magnetic disk D, and both side surfaces of the blade 53 hold the holding member 23 and the center positioning member 29. The blade 53 is pinched by the peripheral surface, and the bending of the blade 53 is corrected. In this state, the chuck 22 releases the pinching state of the lever 52a, the sleeve 52 is pressed between the holder 50 and the collet 51 by the urging force of the spring 52b, the blade 53 closes, and the outer peripheral surface of the magnetic disk D is released. Is sandwiched by the six blades 53. Then, FIG.
As shown in (2), the chuck 22, the holding body 23, and the center positioning body 29 return to the original state.

In FIG. 1, a polishing device 3 is a device for simultaneously polishing both surfaces of a magnetic disk D supplied to a chuck 5 by a disk supply device 2 and positioned at a polishing position. FIG. 12 is a side view specifically showing the disk supply device 2. As shown in FIG.
Is composed of two ring-shaped polishing member rotary polishing apparatuses 3-1 and 3-2 opposed to each other. Note that the symbol L
Is a polishing center line, which coincides with the center of the magnetic disk D. FIG. 13 shows a ring-shaped polishing member rotary polishing apparatus 3
It is sectional drawing which shows -1. As shown in FIG. 13, the ring-shaped polishing member rotary polishing device 3-1 includes a revolving drum 31.
(Revolving section), a rotating drum 32 (rotating section), a rotating motor 38 and a rotating motor 39 (drive section).

The drum 31 is mounted inside the housing 30 via a bearing 30a, and rotates around a polishing center line L. A tooth portion 31a is formed on the outer peripheral surface. The drum 32
On its surface, a ring-shaped polishing pad 33 (ring-shaped polishing member) is provided. A shaft 34 of the drum 32 is supported by a bearing 30b, and a gear 35 is fixed to an end of the shaft 34. Three drums 32 having such a structure are provided on the drum 31. FIG.
FIG. 15 is an explanatory view showing a relationship between the inner diameter of the polishing pad 33 and the width of the magnetic disk D. As shown in FIG. 14, the three drums 32
The three polishing pads 33 attached to the leading end surface of the drum 32 are also positioned at 120 ° rotational symmetry with respect to the polishing center line L at the symmetrical positions of 120 ° rotation. The inner diameter W of such a polishing pad 33 is:
As shown in FIG. 15, the width is set to be equal to or larger than the width M of the magnetic disk D. In FIG. 13, the motor 38 is
A motor for rotating the drum 32 by itself, and a gear 36
At the tip of the rotating shaft 38a. This gear 36 is located at the center of the gear 35 of the three drums 32,
It meshes with three gears 35. On the other hand, the motor 39
Is a motor for rotating the drum 31. The motor 37 has a gear 37 at the tip of the rotating shaft 39a, and the gear 37 meshes with the teeth 31a of the drum 31. This allows
When the motors 38 and 39 are driven, the three polishing pads 33 revolve around the polishing center line L while rotating. The ring-shaped polishing member rotary polishing device 2-2 shown in FIG. 12 has the same structure as the ring-shaped polishing member rotary polishing device 3-1. The centers of the three polishing pads 33 coincide with the polishing center line L. In this state, it faces the ring-shaped polishing member rotary polishing device 3-1.

The ring-shaped polishing member rotating type polishing apparatuses 3-1 and 3-2 having such a structure are provided with rails 40-1 and 40-2.
It moves right and left along. Specifically, when the chuck 5 holding the magnetic disk D is located between the ring-shaped polishing member rotary polishing devices 3-1 and 3-2, and the center of the magnetic disk D is positioned at the polishing center line L, Then, the ring-shaped polishing member rotary polishing apparatuses 3-1 and 3-2 move to the chuck 5 side, and the polishing pad 33 (FIGS.
5) is brought into contact with both sides of the magnetic disk D. Thereafter, the polishing pad 33 revolves around the polishing center line L while rotating, thereby forming streaks having a desired intersection angle on both surfaces of the magnetic disk D.

FIG. 16 is a plan view showing the state of formation of streak marks. As shown in FIG. 16, when the polishing pad 33 revolves around the polishing center line L while rotating, one contact point P is directed from the outer peripheral side of the magnetic disk D to the center hole R, and reaches the center hole R. A spiral streak as shown is formed again toward the outer periphery of the magnetic disk D. As a result, the point P
Are intersected at the intersection angle θ. FIG. 17 is a plan view showing the mode of the intersection angle of the streak. The magnitude of the intersection angle θ of the streaks formed on the magnetic disk D can be changed by adjusting the rotation speed and the revolution speed of the polishing pad 33. That is, by setting the rotation speed higher than the revolution speed, the intersection angle θ can be increased as shown in FIG. 17A (hereinafter, such processing is referred to as “R-processing”). ). Conversely, by making the rotation speed smaller than the revolution speed, the intersection angle θ can be made smaller as shown in FIG. 17B (hereinafter, such processing is referred to as “C-processing”). . This polishing device 3
In the polishing in the above, R-processing shown in FIG. 17A was performed to increase the flatness of the magnetic disk D.

In FIG. 12, the ring-shaped polishing member rotary polishing devices 3-1 and 3-2 move the rails 40-1 and 40-2 in a direction away from the magnetic disk D held by the chuck 5 after the R-processing. -2 to move along. Then, the chuck 5 holding the polished magnetic disk D is moved to the cleaning device 4 shown in FIG.

The cleaning device 4 is a known device for cleaning the magnetic disk D carried by the chuck 5. FIG.
Is a side view of the cleaning device 4, and FIG. 19 is a sectional view showing a cleaning operation. As shown in FIG. 18, the cleaning device 4
The magnetic disk D has a pair of cleaning devices 4-1 and 4-2 for cleaning the left surface and the right surface, respectively. Each of these cleaning devices 4-1 and 4-2 includes a sponge brush 41-.
1, 41-2 and nozzles 42-1 and 42-2. When the chuck 5 is transported to the cleaning device 4 and the magnetic disk D is positioned at the disk cleaning position, the cleaning device 4
-1 and 4-2 move toward the magnetic disk D along the rails 43-1 and 43-2, and the sponge brushes 41-1 and 41-2 contact both surfaces of the magnetic disk D as shown in FIG. At the same time, the tips of the nozzles 42-1 and 42-2 approach the upper part of the magnetic disk D. In this state, the sponge brushes 41-1 and 41-2 rotate in directions opposite to each other, and pure water or the like is sprayed onto the magnetic disk D from the nozzles 42-1 and 42-2, so that both surfaces of the magnetic disk D are cleaned. Is done. After the cleaning, the cleaning devices 4-1 and 4-2 are mounted on the magnetic disk D.
, And the chuck 5 is conveyed to the polishing apparatus 6.

The polishing device 6 has the same structure as the polishing device 3,
The ring-shaped polishing member rotary polishing apparatus 3 shown in FIG.
Although a ring-shaped polishing member rotary polishing apparatus 6-1 and 6-2 having the same structure as that of the magnetic disk D is provided, the C-processing is performed on the magnetic disk D which has been cleaned. Polishing device 3
And different. That is, the revolving speed of the polishing pad 33 in the ring-shaped polishing member rotating type polishing apparatuses 6-1 and 6-2 is made larger than the rotation speed, and the intersection angle θ is small as shown in FIG. Streaks are formed to accomplish the texturing process. Then, the magnetic disk D polished by the polishing device 6 is carried to the disk discharge device 7 by the chuck 5.

The disc ejection device 7 is also used for the disc supply device 2.
Has a robot 20 and an operating mechanism 21, but differs from the disk supply device 2 in that the magnetic disk D conveyed from the polishing device 6 is removed from the chuck 5. . That is, as shown in FIG. 10, the blade 53 is corrected and the center of the magnetic disk D is positioned by the holding body 23 and the center positioning body 29 of the operating mechanism 21, and in this state, as shown in FIG. Then, after the outer peripheral surface of the magnetic disk D is sandwiched between the movable claw 24 and the fixed claw 25, the sleeve 52 is pulled out by the chuck 22, and the blade 53 is opened. And movable claw 2
4. After holding the magnetic disk D held by the fixed claw 25 by the chuck 20d of the robot 20, the movable claw 24 is opened and the magnetic disk D is transferred from the chuck 5 to the robot 20. Then, the magnetic disk D is stored in the cassette 201 by the robot 20.

Next, the operation of the polishing system according to this embodiment will be described. This operation also specifically achieves each step of the polishing method of the present invention.
FIGS. 0 to 24 are schematic plan views showing the respective steps. First, as shown in FIG. 20, in the disk supply device 2, a first magnetic disk D (hereinafter referred to as a "magnetic disk D
1) is taken out of the cassette 200 by the robot 20, and when the magnetic disk D1 is supplied to the chuck 5-1 by the cooperation of the robot 20 and the operation mechanism 21, the chain 14 (see FIGS. 1 and 2). Rotate, and the chucks 5-1 to 5-5 integrally rotate clockwise (supply process, transport process). Then, as shown in FIG. 21, when the chuck 5-1 is transported to the polishing apparatus 3 and the magnetic disk D1 is positioned on the polishing center line L by the lock mechanism, the ring-shaped polishing member rotary polishing apparatus 3 -1,
3-2 is moved to the magnetic disk D1 side, and each polishing pad 3 is moved.
3 contacts both surfaces of the magnetic disk D1 in the state shown in FIG. In such a state, the polishing pads 33 of the ring-shaped polishing member rotary polishing devices 3-1 and 3-2 are rotated and revolved, and both surfaces of the magnetic disk D1 are R-processed, thereby increasing the flatness of both surfaces of the magnetic disk D1. (First polishing step). At this time, as shown in FIG.
Is positioned at the disk supply position of the disk supply device 2, the second magnetic disk D (hereinafter, referred to as "magnetic disk D2") is supplied to the chuck 5-2.

When the R-work of the magnetic disk D1 in the polishing device 3 and the supply of the magnetic disk D2 in the disk supply device 2 are completed, the chucks 5-1 to 5-
The lock of the magnetic disk D1 is released, and the chucks 5-1 to 5-5 rotate integrally, and the magnetic disk D1 is positioned at the disk cleaning position of the cleaning device 4 by the lock mechanism as shown in FIG. Then, as shown in FIG. 18, the cleaning devices 4-1 and 4-2 move to the magnetic disk D1 side, and FIG.
As shown in (2), both surfaces of the magnetic disk D1 are cleaned by the rotating sponge brushes 41-1 and 41-2 (cleaning step). At this time, since the chucks 5-2 and 5-3 are positioned in the polishing device 3 and the disk supply device 2, respectively, the R-
Processing is performed, and in the disk supply device 2,
The supply of the magnetic disk D3 to the chuck 5-3 is performed.

The cleaning of the magnetic disk D1 in the cleaning device 4 and the R of the magnetic disk D2 in the polishing device 3 are performed.
-Magnetic disk D3 in processing and disk supply device 2
Is completed, the locks of the chucks 5-1 to 5-5 are released, and the chucks 5-1 to 5-5 rotate integrally, and as shown in FIG. It is positioned at the polishing position. Then, the ring-shaped polishing member rotary polishing devices 6-1 and 6-2 are moved to the magnetic disk D1.
Side, the ring-shaped polishing member rotary polishing device 3-1
As in the case of 3-2, both surfaces of the magnetic disk D1 are C-processed (second polishing step). That is, in the polishing device 6, since the C-work is further performed on the magnetic disk D1 having a high flatness, high-precision polishing is achieved. At this time, since the chucks 5-2 to 5-4 are positioned in the cleaning device 4, the polishing device 3, and the disk supply device 2, respectively, the cleaning devices 4, the polishing devices 3,
In the disk supply device 2, the magnetic disks D2, D
3, cleaning of D4, R-processing, and supply to the chuck 5-4 are performed.

When the above steps are completed, the locks of the chucks 5-1 to 5-5 are released, and the chucks 5-1 to 5-5 are released.
24, the magnetic disk D1 is positioned at the disk discharge position of the disk discharge device 7, as shown in FIG. Then, the magnetic disk D1 is taken out of the chuck 5-1 by the cooperation of the robot 20 of the disk ejection device 7 and the operating mechanism 21, and the cassette 20 is removed.
1 (discharge process). At this time, the chuck 5
Since −2 to 5-5 are positioned in the polishing device 6 to the disk supply device 2, C-processing, cleaning, R-processing, and supply of the magnetic disks D2 to D5 to the chuck 5-5 are performed.

When the above steps are completed, the locks of the chucks 5-1 to 5-5 are released, and the chucks 5-1 to 5-5 are released.
5-5 rotates integrally, and the empty chuck 5-1 is returned to the disk supply device 2. Thereafter, the same processing as that of the magnetic disk D1 is performed on the magnetic disk D supplied to the chuck 5-1. By sequentially polishing the first magnetic disk D1, the second D2,..., The n-th magnetic disk Dn in this manner, a large number of magnetic disks D can be mass-produced.

The present invention is not limited to the above embodiment, and various modifications and changes can be made within the scope of the invention. For example, in the above embodiment,
Although three polishing pads 33 are provided in the polishing devices 3 and 6,
The number of polishing pads 33 is not limited to these, and may be one or more. Although the polishing pad 33 was used as the ring-shaped polishing member, a grindstone was used in place of the polishing pad 33, and these ring-shaped polishing member rotary polishing apparatuses 3-1, 3-2, 6-1 and 6 were used. -2 can also be a grinder. In the above embodiment, FIG.
As shown in FIG. 5, a dress brush B having brushes planted on both sides may be held by the chuck 5 to dress the polishing pads 33 of the polishing apparatuses 3 and 6. That is, as shown in FIG. 26, the polishing pads 33 of the two ring-shaped polishing member rotary polishing machines 3-1 and 3-2 (6-1 and 6-2) are brought into contact with both surfaces of the dress brush B. By rotating the polishing pad 33, the surface of the polishing pad 33 is dressed. In addition, not the polishing pad 33 but a ring-shaped polishing member rotary polishing apparatus 3 using a ring-shaped grindstone.
In the case of -1, 3-2 (6-1, 6-2), a ring-shaped grindstone is dressed using a diamond electrodeposition dresser having diamond particles fixed on both sides instead of the dress brush B. In addition, a shower device is provided between the disk supply device 2, the polishing device 3, the cleaning device 4, the polishing device 6, and the disk discharge device 7, and the pure device or the like is ejected to both sides of the magnetic disk D being conveyed, and D can also be prevented from drying. In the above-described embodiment, the polishing system including the disk supply device 2, the polishing device 3, the cleaning device 4, the polishing device 6, and the disk discharge device 7 along the disk transport device 1 has been described. This does not exclude a polishing system in which only the disk supply device 2, the polishing device 3, and the cleaning device 4 are arranged along the disk transfer device 1 to simplify the equipment. Conversely, a polishing system in which a cleaning device having the same structure as the cleaning device 4 is additionally provided between the polishing device 6 and the disk ejection device 7 is not excluded. In the above embodiment, the example in which the magnetic disk D is applied has been described. However, the present invention is not limited to this, and the present invention includes all disks. Further, in the above-described embodiment, the outer peripheral surface of the magnetic disk D is sandwiched between the movable claw 24 and the fixed claw 25 of the operation mechanism 21. However, as shown in FIG. The magnetic disk D may be delivered to the robot 20 by providing the attracting device 28 and attracting the magnetic disk D with the attracting device 28.

[0028]

As described above in detail, according to the present invention, the ring-shaped polishing member is brought into contact with the disk so that the center hole thereof includes the width portion of the disk, and the ring-shaped polishing member is rotated while rotating. Orbit around the center,
Since the surface of the disk is polished, the use of a ring-shaped polishing pad as the ring-shaped polishing member makes it possible to obtain a high-precision disk without burrs or return and having streaks having a desired intersection angle. In addition, the transport, polishing, and removal of the disk can be automatically performed on the line, so that a highly polished disk can be mass-produced. Further, by employing a configuration in which the polished disk is washed and then polished again, a disk with higher precision can be mass-produced. In other words, the first time polishing is performed to increase the crossing angle of the streak, to obtain the flatness of the disk,
By controlling the rotation speed and the revolving speed of the ring-shaped polishing pad in each polishing step so as to form a streak having a small intersection angle in the second polishing, it is possible to mass-produce disks with higher precision. . Further, by adopting a configuration in which both surfaces of the disk are simultaneously polished, mass productivity can be further improved.

[Brief description of the drawings]

FIG. 1 is a block diagram showing a polishing system according to an embodiment of the present invention.

FIG. 2 is a cross-sectional view showing a disk transport device.

FIG. 3 is a perspective view showing a movable body.

FIG. 4 is a sectional view showing a structure of a chuck.

FIG. 5 is a side view showing the disk supply device.

FIG. 6 is a sectional view showing a main part of the operation mechanism.

FIG. 7 is a schematic front view showing an arrangement state of a movable claw and a fixed claw.

FIG. 8 is a sectional view showing a relationship between a movable claw, a fixed claw, and a blade.

FIG. 9 is a cross-sectional view showing a state in which a magnetic disk is held by an operation mechanism.

FIG. 10 is a sectional view showing a straightened state of the blade.

FIG. 11 is a cross-sectional view showing a state where a magnetic disk is held by a chuck.

FIG. 12 is a side view specifically showing a polishing apparatus.

FIG. 13 is a cross-sectional view showing a ring-shaped polishing member rotary polishing apparatus.

FIG. 14 is a front view showing an arrangement state of a drum.

FIG. 15 is an explanatory diagram showing the relationship between the inner diameter of the polishing pad and the width of the magnetic disk.

FIG. 16 is a plan view showing a formation state of a streak.

FIG. 17 is a plan view showing a mode of an intersection angle of a streak.

FIG. 18 is a side view of the cleaning device.

FIG. 19 is a sectional view showing a cleaning operation of the cleaning device.

FIG. 20 is a schematic plan view showing a step of supplying a first magnetic disk.

FIG. 21 is a schematic plan view showing a first polishing step and a supply step of the first and second magnetic disks.

FIG. 22 is a schematic plan view showing a cleaning step, a first polishing step, and a supply step of the first to third magnetic disks.

FIG. 23 is a schematic plan view showing a second polishing step, a cleaning step, a first polishing step, and a supply step of the first to fourth magnetic disks.

FIG. 24 is a schematic plan view showing a discharge step, a second polishing step, a cleaning step, a first polishing step, and a supply step of the first to fifth magnetic disks.

FIG. 25 is a sectional view showing a modification.

26 is a measurement diagram showing a dressing operation of a polishing pad by a dress brush applied to a modification of FIG. 25;

FIG. 27 is a sectional view showing another modification.

FIG. 28 is a plan view showing a conventional polishing apparatus.

[Explanation of symbols]

1. Disk transport device 2. Disk supply device
3, 6: polishing device, 4: cleaning device, 3-1, 3-2,
6-1, 6-2 ... Ring type polishing member rotary polishing device,
Reference numeral 5: chuck, 7: disk ejection device, 10: rail, D: magnetic disk.

Claims (8)

[Claims] A transport section capable of transporting the chuck to a predetermined position; a supply section for holding the unpolished disc on the chuck; a first polishing section for polishing the disc held on the chuck; 1. A polishing system comprising: a cleaning unit for cleaning a polished disk from a polishing unit; and a discharge unit for removing the polished disk from the chuck, wherein the transport unit includes an endless rail and the endless rail. A chuck suspended from a rail, and sequentially moving the chuck to a disk supply position of the supply unit, a disk polishing position of the first polishing unit, a disk cleaning position of the cleaning unit, and a disk discharge position of the discharge unit. While stopping, the circuit is rotated along the endless rail. The first polishing section is designed to include a rotatable revolving section and a width section of the disk in a center hole. And one or more rotation portion having a distal end portion capable of ring-like polishing member contacts the disk,
A polishing system, comprising: a ring-shaped polishing member rotary polishing apparatus comprising: a driving unit configured to rotationally drive the revolving unit and the rotation unit. 2. The polishing system according to claim 1, wherein, after the cleaning unit, a first disk having the same structure as the first polishing unit and having been cleaned by the cleaning unit. A polishing system, comprising a second polishing unit that performs substantially the same processing as the polishing unit. 3. The polishing system according to claim 1, wherein the chuck sandwiches an outer peripheral surface of the disk, and wherein the polishing unit includes two opposed ring-shaped polishing members. A polishing system comprising: a polishing apparatus; and a polishing apparatus for polishing both surfaces of a disc held by the chuck simultaneously by using the two ring-shaped polishing member rotary polishing apparatuses. 4. The polishing system according to claim 1, wherein the ring-shaped polishing member is a ring-shaped polishing pad. 5. A supply step of holding an unpolished disc on a chuck suspended on an endless rail, and a ring-shaped polishing member so as to include a width portion of the disc held by the chuck in a center hole. The ring-shaped polishing member is rotated around the center of the disk while rotating, the first polishing step of polishing the disk surface, the cleaning step of cleaning the polished disk, A discharging step of taking out from the chuck, and a transporting step of rotating the chuck along the endless rail while stopping the chuck at the supply step position, the first polishing step position, and the cleaning step position sequentially. A polishing method characterized by the above-mentioned. 6. The polishing method according to claim 5, wherein, after the cleaning step, a ring-shaped polishing member is brought into contact with the disk so that the width portion of the cleaned disk is included in the center hole. A second polishing step of polishing the disk surface by revolving the disk-shaped polishing member around the center of the disk while rotating. 7. The polishing method according to claim 5, wherein the chuck holds the outer peripheral surface of the disk, and the polishing step includes forming the ring-shaped on both surfaces of the disk held by the chuck. A polishing method comprising: bringing a polishing member into contact with the polishing member to polish both surfaces simultaneously. 8. The polishing method according to claim 5, wherein the ring-shaped polishing member is a ring-shaped polishing pad.