JPH11316112A5 - - Google Patents

Info

Publication number
JPH11316112A5
JPH11316112A5 JP1998353940A JP35394098A JPH11316112A5 JP H11316112 A5 JPH11316112 A5 JP H11316112A5 JP 1998353940 A JP1998353940 A JP 1998353940A JP 35394098 A JP35394098 A JP 35394098A JP H11316112 A5 JPH11316112 A5 JP H11316112A5
Authority
JP
Japan
Prior art keywords
light
integrated circuit
optical axis
light source
oblique
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1998353940A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11316112A (ja
Filing date
Publication date
Priority claimed from SG1997004179A external-priority patent/SG67446A1/en
Priority claimed from US09/012,294 external-priority patent/US6055055A/en
Application filed filed Critical
Publication of JPH11316112A publication Critical patent/JPH11316112A/ja
Publication of JPH11316112A5 publication Critical patent/JPH11316112A5/ja
Pending legal-status Critical Current

Links

JP10353940A 1997-12-01 1998-11-27 集積回路の交差光軸検査システム Pending JPH11316112A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
SG9704179.2 1997-12-01
SG1997004179A SG67446A1 (en) 1997-12-01 1997-12-01 Cross optical axis inspection system for integrated circuits
US09/012,294 US6055055A (en) 1997-12-01 1998-01-23 Cross optical axis inspection system for integrated circuits

Publications (2)

Publication Number Publication Date
JPH11316112A JPH11316112A (ja) 1999-11-16
JPH11316112A5 true JPH11316112A5 (OSRAM) 2006-03-23

Family

ID=26665163

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10353940A Pending JPH11316112A (ja) 1997-12-01 1998-11-27 集積回路の交差光軸検査システム

Country Status (3)

Country Link
US (1) US6055055A (OSRAM)
EP (1) EP0919804A1 (OSRAM)
JP (1) JPH11316112A (OSRAM)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6915006B2 (en) * 1998-01-16 2005-07-05 Elwin M. Beaty Method and apparatus for three dimensional inspection of electronic components
US6072898A (en) * 1998-01-16 2000-06-06 Beaty; Elwin M. Method and apparatus for three dimensional inspection of electronic components
SG84530A1 (en) * 1998-05-21 2001-11-20 Agilent Technologies Inc Cross optical axis inspection system for integrated circuits
US6538750B1 (en) * 1998-05-22 2003-03-25 Cyberoptics Corporation Rotary sensor system with a single detector
US6243164B1 (en) * 1998-07-13 2001-06-05 Electro Scientific Industries Method and system for determining lead coplanarity
US6678058B2 (en) 2000-10-25 2004-01-13 Electro Scientific Industries, Inc. Integrated alignment and calibration of optical system
US6532063B1 (en) 2000-11-10 2003-03-11 Semiconductor Technologies & Instruments 3-D lead inspection
EP1220596A1 (en) * 2000-12-29 2002-07-03 Icos Vision Systems N.V. A method and an apparatus for measuring positions of contact elements of an electronic component
AU2002237751A1 (en) * 2001-01-02 2002-07-16 Robotic Vision Systems, Inc. Lcc device inspection module
US20020135757A1 (en) * 2001-01-02 2002-09-26 Robotic Vision Systems, Inc. LCC device inspection module
US6856694B2 (en) * 2001-07-10 2005-02-15 Eaton Corporation Decision enhancement system for a vehicle safety restraint application
US7181083B2 (en) * 2003-06-09 2007-02-20 Eaton Corporation System and method for configuring an imaging tool
JP4234402B2 (ja) * 2002-11-21 2009-03-04 富士機械製造株式会社 電子回路部品像取得装置
ES2266869T3 (es) * 2002-11-23 2007-03-01 National Rejectors, Inc. Gmbh Procedimiento para la captura fotografica de un objeto cilindrico, especialmente en forma de disco.
US6944527B2 (en) * 2003-11-07 2005-09-13 Eaton Corporation Decision enhancement system for a vehicle safety restraint application
US7532749B2 (en) * 2003-11-18 2009-05-12 Panasonic Corporation Light processing apparatus
US7701564B2 (en) * 2005-05-18 2010-04-20 Hitachi Global Storage Technologies Netherlands B.V. System and method for angular measurement
JP4728433B2 (ja) * 2008-01-25 2011-07-20 パナソニック株式会社 検査装置及び検査方法
US8294760B2 (en) * 2009-04-21 2012-10-23 Samsung Techwin Co., Ltd. Electronic part recognition apparatus and chip mounter having the same
US8461532B2 (en) * 2009-11-05 2013-06-11 The Aerospace Corporation Refraction assisted illumination for imaging
US8450688B2 (en) 2009-11-05 2013-05-28 The Aerospace Corporation Refraction assisted illumination for imaging
US8138476B2 (en) 2009-11-05 2012-03-20 The Aerospace Corporation Refraction assisted illumination for imaging
JP5534919B2 (ja) * 2010-04-22 2014-07-02 富士機械製造株式会社 電子部品の撮像判定方法及び部品実装機
US9402036B2 (en) * 2011-10-17 2016-07-26 Rudolph Technologies, Inc. Scanning operation with concurrent focus and inspection
US9007454B2 (en) 2012-10-31 2015-04-14 The Aerospace Corporation Optimized illumination for imaging
CN107889522B (zh) 2015-08-26 2020-08-28 Abb瑞士股份有限公司 对象多视角检测设备及其方法
JP7199241B2 (ja) * 2019-02-07 2023-01-05 株式会社東芝 半導体検査システム及び半導体検査装置
US11941797B2 (en) 2021-03-03 2024-03-26 Battelle Memorial Institute Systems and methods for inspection of IC devices

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60247106A (ja) * 1984-05-22 1985-12-06 Fujitsu Ltd 形状検査装置
US4696047A (en) * 1985-02-28 1987-09-22 Texas Instruments Incorporated Apparatus for automatically inspecting electrical connecting pins
JPH0359446A (ja) * 1989-07-28 1991-03-14 Nec Corp 集積回路パッケージピン検査装置
JPH03203399A (ja) * 1989-12-29 1991-09-05 Matsushita Electric Ind Co Ltd 部品装着装置
JPH03210410A (ja) * 1990-01-12 1991-09-13 Fujitsu Ltd ピングリッドアレイ検査装置
US5185811A (en) * 1990-12-27 1993-02-09 International Business Machines Corporation Automated visual inspection of electronic component leads prior to placement
US5173796A (en) * 1991-05-20 1992-12-22 Palm Steven G Three dimensional scanning system
US5563703A (en) * 1994-06-20 1996-10-08 Motorola, Inc. Lead coplanarity inspection apparatus and method thereof

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