JPH11298132A - Method for forming and mounting solder bump, and solder junction structure - Google Patents

Method for forming and mounting solder bump, and solder junction structure

Info

Publication number
JPH11298132A
JPH11298132A JP9431498A JP9431498A JPH11298132A JP H11298132 A JPH11298132 A JP H11298132A JP 9431498 A JP9431498 A JP 9431498A JP 9431498 A JP9431498 A JP 9431498A JP H11298132 A JPH11298132 A JP H11298132A
Authority
JP
Japan
Prior art keywords
solder
hole
circuit electrode
solder bump
bump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9431498A
Other languages
Japanese (ja)
Other versions
JP3367416B2 (en
Inventor
Tadahiko Sakai
忠彦 境
Ken Maeda
憲 前田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP09431498A priority Critical patent/JP3367416B2/en
Publication of JPH11298132A publication Critical patent/JPH11298132A/en
Application granted granted Critical
Publication of JP3367416B2 publication Critical patent/JP3367416B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To provide a method for forming a solder bump together with a method for mounting a solder bump of high junction reliability. SOLUTION: A solder ball 15 is solder-jointed to a circuit electrode 12 through a through hole 13 provided at an insulating substrate 11, so that a solder bump is formed on the surface opposite to the circuit electrode 12 of the insulating substrate 11, related to a method for forming a solder bump. Here, the solder ball 15 is mounted on the through hole 13 provided as a diameter smaller than the solder ball 15, and the solder ball 15 is pressurized against the substrate 11 so that the upper end surface of the through hole 13 is crushed for beveling. Then the insulating substrate 11 is heated to melt the solder ball 15, for solder joint to the circuit electrode 12. Thus, a notch in the solder joint part is eliminated for preventing concentration of stress, thus reliability at the solder junction after mounting is improved.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、電子部品や基板の
回路電極上に半田バンプを形成する半田バンプの形成方
法および半田バンプを電子部品や基板に実装する半田バ
ンプの実装方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of forming a solder bump on a circuit electrode of an electronic component or a substrate and a method of mounting a solder bump on an electronic component or a substrate. .

【0002】[0002]

【従来の技術】電子部品の実装方法として半田バンプを
用いる方法が知られている。この方法は電子部品の回路
電極上に予め半田の突出電極である半田バンプを形成
し、この半田バンプを基板などの回路電極に半田接合す
るものである。半田バンプを形成する方法として、従来
より半田ボールを電子部品などの回路電極上に搭載する
方法が知られている。
2. Description of the Related Art As a method for mounting electronic components, a method using solder bumps is known. In this method, a solder bump, which is a protruding electrode of solder, is previously formed on a circuit electrode of an electronic component, and the solder bump is soldered to a circuit electrode such as a substrate. As a method of forming a solder bump, a method of mounting a solder ball on a circuit electrode such as an electronic component has been conventionally known.

【0003】ところでCSP(Chip Size P
ackage)などでは、回路電極が形成される面と半
田バンプが形成される面が基板の同一面でない場合があ
る。すなわちパッケージを構成するテープ状の基板の片
側の面に回路電極が形成され、この回路電極が形成され
た面の反対側に半田ボールが搭載される。そしてこの半
田ボールを溶融させ、回路電極位置に設けられた基板の
貫通孔を介して溶融半田を回路電極に導通させて半田バ
ンプが形成される。
[0003] By the way, CSP (Chip Size P)
In some cases, the surface on which the circuit electrodes are formed and the surface on which the solder bumps are formed are not the same surface of the substrate. That is, circuit electrodes are formed on one surface of a tape-shaped substrate constituting a package, and solder balls are mounted on the opposite side of the surface on which the circuit electrodes are formed. Then, the solder ball is melted, and the molten solder is conducted to the circuit electrode through a through hole of the substrate provided at the position of the circuit electrode to form a solder bump.

【0004】以下、このような場合の従来の半田バンプ
形成方法について図面を参照して説明する。図3
(a),(b),(c)は従来のテープ状基板の部分断
面図である。図3(a)において、テープ状の絶縁基板
1の下面には回路電極2が形成されている。絶縁基板1
の回路電極2の位置には貫通孔3が設けられている。貫
通孔3は図において下側から上に向かって打ち抜き加工
により設けられたものであり、上端面のエッジには打ち
抜き加工によるバリBが発生している。
A conventional solder bump forming method in such a case will be described below with reference to the drawings. FIG.
(A), (b), (c) is a partial sectional view of a conventional tape-shaped substrate. In FIG. 3A, a circuit electrode 2 is formed on a lower surface of a tape-shaped insulating substrate 1. Insulating substrate 1
A through hole 3 is provided at the position of the circuit electrode 2. The through-hole 3 is provided by punching from the lower side to the upper side in the figure, and burrs B are generated at the edge of the upper end face by the punching.

【0005】この貫通孔3内にはフラックス4が塗布さ
れ、この後図3(b)に示すように、回路電極2上に半
田バンプを形成するため、貫通孔3内には半田ボール5
が搭載される。この後絶縁基板1をリフローに送って加
熱することにより半田ボール5が溶融し、溶融半田5’
は貫通孔3内を満たし、回路電極2に半田接合される。
[0005] A flux 4 is applied in the through hole 3, and then, as shown in FIG. 3 (b), a solder bump is formed in the through hole 3 to form a solder bump on the circuit electrode 2.
Is mounted. Thereafter, the insulating substrate 1 is sent to reflow and heated, so that the solder balls 5 are melted and the molten solder 5 ′ is melted.
Fills the through hole 3 and is soldered to the circuit electrode 2.

【0006】[0006]

【発明が解決しようとする課題】このとき溶融半田5’
は絶縁基板1の上面まで張り出して貫通孔3の上端面を
覆うが、ここで貫通孔3の上端面のエッジにはバリBが
存在しているため、溶融半田5’が固化した後にはこの
バリBの部分に鋭利な切欠き部Nが形成される。切欠き
部Nが存在するとこの部分の応力集中を招き、半田バン
プの繰り返し強度を低下させる。そして実装後のヒート
サイクルによる半田接合部の破断の要因となり、半田接
合部の信頼性を著しく低下させる。
At this time, the molten solder 5 '
Protrudes to the upper surface of the insulating substrate 1 and covers the upper end surface of the through-hole 3. Here, since the burrs B are present at the edge of the upper end surface of the through-hole 3, the molten solder 5 'is solidified after the solidification. A sharp notch N is formed in the portion of the burr B. The presence of the notch N causes concentration of stress in this portion, and reduces the repetitive strength of the solder bump. Then, it becomes a cause of breakage of the solder joint due to a heat cycle after mounting, and significantly reduces the reliability of the solder joint.

【0007】しかしながら前述の従来の半田バンプ形成
方法では、前記切欠き部Nの発生を有効に防止すること
が困難であることから上記重大欠陥を防止できず、接合
信頼性の高い半田バンプを形成することが困難であると
いう問題があった。また上記の問題は、球状の半田バン
プを基板の回路電極に実装する場合、すなわち回路電極
を覆ったレジストに貫通孔を設け、この貫通孔内を介し
て半田バンプを回路電極に実装する場合にも共通するも
のであった。
However, in the above-described conventional method for forming a solder bump, it is difficult to effectively prevent the occurrence of the notch portion N, so that the above serious defect cannot be prevented, and a solder bump having high bonding reliability can be formed. There was a problem that it was difficult to do. In addition, the above problem occurs when a spherical solder bump is mounted on a circuit electrode of a substrate, that is, when a through hole is provided in a resist covering the circuit electrode, and the solder bump is mounted on the circuit electrode through the through hole. Was also common.

【0008】そこで本発明は、接合信頼性の高い半田バ
ンプの形成方法および半田バンプの実装方法ならびに接
合信頼性の高い半田接合構造を提供することを目的とす
る。
Accordingly, an object of the present invention is to provide a method for forming a solder bump having high bonding reliability, a method for mounting a solder bump, and a solder bonding structure having high bonding reliability.

【0009】[0009]

【課題を解決するための手段】請求項1記載の半田バン
プの形成方法は、絶縁基板に設けられた貫通孔を介して
半田ボールを回路電極に半田接合して前記絶縁基板の回
路電極の反対面に半田バンプを形成する半田バンプの形
成方法であって、前記半田ボールより小さい径で設けら
れた前記貫通孔に半田ボールを押圧することにより前記
貫通孔の上端エッジを押しつぶす工程と、前記絶縁基板
を加熱して前記半田ボールを溶融させて前記回路電極に
半田接合する工程とを含む。
According to a first aspect of the present invention, there is provided a method of forming a solder bump, comprising: soldering a solder ball to a circuit electrode via a through hole provided in an insulating substrate; A method of forming a solder bump on a surface, wherein a step of crushing an upper end edge of the through hole by pressing the solder ball into the through hole provided with a smaller diameter than the solder ball; Heating the substrate to melt the solder balls and solder-join the circuit electrodes.

【0010】請求項2記載の半田バンプの実装方法は、
電子部品に形成された半田バンプを基板の回路電極を覆
う絶縁膜に設けられた貫通孔を介して前記回路電極に半
田接合して、前記半田バンプを基板に実装する半田バン
プの実装方法であって、前記半田バンプより小さい径で
設けられた前記貫通孔に半田バンプを押圧することによ
り前記半田バンプで前記貫通孔の上端エッジを押しつぶ
す工程と、前記基板を加熱して前記半田バンプを溶融さ
せて前記回路電極に半田接合する工程とを含む。
According to a second aspect of the present invention, there is provided a method for mounting a solder bump.
A solder bump mounting method of soldering a solder bump formed on an electronic component to the circuit electrode via a through hole provided in an insulating film covering a circuit electrode of the board, and mounting the solder bump on the board. Pressing the solder bumps into the through holes provided with a smaller diameter than the solder bumps to crush the upper edges of the through holes with the solder bumps, and heating the substrate to melt the solder bumps. And soldering to the circuit electrode.

【0011】請求項3記載の半田接合構造は、球状の半
田部を回路電極を覆う絶縁膜に設けられた貫通孔を介し
て前記回路電極に半田接合することにより形成される半
田接合構造であって、前記半田接合構造の形成工程が、
前記半田部より小さい径で設けられた前記貫通孔に前記
半田部を押圧することにより半田部で貫通孔の上端エッ
ジを押しつぶす工程と、前記半田部を溶融させて前記回
路電極に半田接合する工程とを含むようにした。
According to a third aspect of the present invention, there is provided a solder joint structure formed by joining a spherical solder portion to the circuit electrode through a through hole provided in an insulating film covering the circuit electrode. Therefore, the step of forming the solder joint structure,
Pressing the solder portion into the through hole provided with a smaller diameter than the solder portion to crush the upper end edge of the through hole with the solder portion; and melting the solder portion and soldering to the circuit electrode. And included.

【0012】各請求項記載の発明によれば、半田ボール
や半田バンプを半田接合するために絶縁基板や絶縁膜に
設けられた貫通孔に、半田ボールや半田バンプを押圧し
て貫通孔の上端エッジを押しつぶすことにより、半田接
合部内の切欠き部を無くし応力集中の発生を防止して、
実装後の半田接合部の信頼性を向上させることができ
る。
According to the present invention, the upper end of the through-hole is pressed by pressing the solder ball or the solder bump into the through-hole provided in the insulating substrate or the insulating film for solder-joining the solder ball or the solder bump. By crushing the edge, the notch in the solder joint is eliminated, preventing the occurrence of stress concentration,
The reliability of the solder joint after mounting can be improved.

【0013】[0013]

【発明の実施の形態】(実施の形態1)図1(a),
(b),(c),(d),(e)は本発明の実施の形態
1の半田バンプの形成方法の工程説明図であり、半田バ
ンプの形成方法を工程順に示すものである。図1(a)
において、絶縁膜としての絶縁基板11には貫通孔13
が形成されている。貫通孔13は絶縁基板11の下面に
形成された回路電極12の位置に対応して設けられ、絶
縁基板11の回路電極12の反対面に半田部としての半
田バンプを形成するためのものである。ここで貫通孔1
3の径は、バンプ形成のために搭載される半田ボールの
径よりも小さく設定されている。また、貫通孔13は打
ち抜き加工されたものであるため、上端面にはバリBが
生じている。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS (Embodiment 1) FIG.
(B), (c), (d), and (e) are process explanatory views of the method of forming a solder bump according to the first embodiment of the present invention, and show the method of forming a solder bump in the order of processes. FIG. 1 (a)
In the above, the insulating substrate 11 as an insulating film has
Are formed. The through holes 13 are provided corresponding to the positions of the circuit electrodes 12 formed on the lower surface of the insulating substrate 11, and are for forming solder bumps as solder portions on the surface of the insulating substrate 11 opposite to the circuit electrodes 12. . Here the through hole 1
The diameter of 3 is set smaller than the diameter of a solder ball mounted for bump formation. Since the through-hole 13 has been punched, burrs B are formed on the upper end surface.

【0014】次に図1(b)に示すように、貫通孔13
内にクリーム半田14が供給される。クリーム半田14
は溶剤成分を含むフラックス中に半田粒子を混合したも
のである。次に図1(c)に示すように、クリーム半田
14が供給された貫通孔14上に、ボール搭載手段によ
って半田ボール15が搭載される。図1(b)、(c)
には、ボール搭載手段の例として吸着ツール16を示し
ている。前述のように半田ボール15の径は貫通孔13
の径より大きく、半田ボール15は貫通孔13の内部に
入り込んで電極12には接触せず、貫通孔13の上端面
に接触した状態で載置される。そして搭載動作後、ボー
ル搭載手段によって、所定荷重にて半田ボール15を絶
縁基板11に対して所定時間押圧する。これにより、図
1(d)に示すように、貫通孔13の上端面は半田ボー
ル15の押圧力によって押しつぶされ、貫通孔13の打
ち抜き加工時に発生した上端面のバリBは消滅する。
Next, as shown in FIG.
The cream solder 14 is supplied therein. Cream solder 14
Is obtained by mixing solder particles in a flux containing a solvent component. Next, as shown in FIG. 1C, the solder balls 15 are mounted on the through holes 14 to which the cream solder 14 is supplied by the ball mounting means. FIG. 1 (b), (c)
Shows a suction tool 16 as an example of the ball mounting means. As described above, the diameter of the solder ball 15 is
Is larger than the diameter, the solder ball 15 enters the through hole 13 and does not contact the electrode 12, but is placed in a state of contacting the upper end surface of the through hole 13. After the mounting operation, the solder balls 15 are pressed against the insulating substrate 11 with a predetermined load by the ball mounting means for a predetermined time. Thereby, as shown in FIG. 1D, the upper end surface of the through hole 13 is crushed by the pressing force of the solder ball 15, and the burr B on the upper end surface generated at the time of punching the through hole 13 disappears.

【0015】この後、絶縁基板11はリフロー工程に送
られ加熱される。これにより、図1(e)に示すように
半田ボール15およびクリーム半田14が溶融し、溶融
半田14’、15’は貫通孔13内を満たし、一部は絶
縁基板11上に張り出す。このとき、貫通孔13の上端
面は前述の押圧によってつぶされているので、溶融半田
15’が固化した後に貫通孔13の上端面に鋭利な切欠
きが形成されず、したがって応力集中の発生を招くこと
のない信頼性の高い半田バンプを形成することができ
る。なお、本実施の形態では搭載工程の後、押圧する工
程を行っているが、搭載と同時に吸着ツール16で半田
ボール15を絶縁基板11へ押圧してもよい。
Thereafter, the insulating substrate 11 is sent to a reflow step and heated. As a result, as shown in FIG. 1E, the solder balls 15 and the cream solder 14 are melted, and the molten solders 14 ′ and 15 ′ fill the inside of the through-hole 13, and a part of them protrudes onto the insulating substrate 11. At this time, since the upper end surface of the through hole 13 is crushed by the above-described pressing, a sharp notch is not formed in the upper end surface of the through hole 13 after the molten solder 15 ′ is solidified. It is possible to form a highly reliable solder bump without inviting. Although the pressing step is performed after the mounting step in the present embodiment, the solder ball 15 may be pressed against the insulating substrate 11 by the suction tool 16 at the same time as the mounting.

【0016】(実施の形態2)図2(a),(b),
(c),(d),(e)は本発明の実施の形態2の半田
バンプの実装方法の工程説明図であり、半田バンプの実
装方法を工程順に示すものである。図2(a)におい
て、基板21の表面には回路電極22が形成されてい
る。基板21および回路電極22を覆って、エポキシや
アクリルなどの樹脂材料より成る絶縁膜としてのソルダ
ーレジスト23が形成されている。ソルダーレジスト2
3の回路電極22に対応した位置には、貫通孔24が設
けられている。ここで貫通孔24の径は、実装される半
田バンプの径よりも小さいものとなっており、貫通孔2
4の上端面は鋭利なエッジ部となっている。
(Embodiment 2) FIGS. 2 (a), (b),
(C), (d), and (e) are process explanatory diagrams of the solder bump mounting method according to the second embodiment of the present invention, and show the solder bump mounting method in the order of processes. In FIG. 2A, a circuit electrode 22 is formed on the surface of a substrate 21. A solder resist 23 as an insulating film made of a resin material such as epoxy or acrylic is formed so as to cover the substrate 21 and the circuit electrodes 22. Solder resist 2
A through hole 24 is provided at a position corresponding to the third circuit electrode 22. Here, the diameter of the through hole 24 is smaller than the diameter of the solder bump to be mounted.
The upper end face of 4 has a sharp edge portion.

【0017】次に、図2(b)に示すように、貫通孔2
4内にはクリーム半田25が供給され、次いで図2
(c)に示すように、基板21上に搭載手段により半田
部としての球状の半田バンプ26が形成された電子部品
27を搭載する。図2(b)には、搭載手段の例として
ノズル28を示している。前述のように半田バンプ26
の径は貫通孔24の径より大きく、したがって半田バン
プ26は貫通孔24の内部に入り込まず、貫通孔24の
上端面に接触する状態で載置されている。そして搭載動
作後、搭載手段によって所定荷重にて電子部品27を基
板21に対して所定時間押圧する。これにより、図2
(d)に示すように、貫通孔24の上端面は半田バンプ
26の押圧力によって押しつぶされ、貫通孔24の上端
面の鋭利なエッジ部は消滅する。
Next, as shown in FIG.
4, cream solder 25 is supplied.
As shown in (c), an electronic component 27 on which a spherical solder bump 26 as a solder portion is formed is mounted on a substrate 21 by mounting means. FIG. 2B shows a nozzle 28 as an example of the mounting means. As described above, the solder bump 26
Is larger than the diameter of the through-hole 24, and therefore the solder bump 26 does not enter the inside of the through-hole 24 and is placed in a state of contacting the upper end surface of the through-hole 24. After the mounting operation, the mounting means presses the electronic component 27 against the substrate 21 with a predetermined load for a predetermined time. As a result, FIG.
As shown in (d), the upper end surface of the through hole 24 is crushed by the pressing force of the solder bump 26, and the sharp edge of the upper end surface of the through hole 24 disappears.

【0018】この後基板21はリフロー工程に送られ、
加熱される。この結果、図2(e)に示すように、クリ
ーム半田25および半田バンプ26が溶融して、溶融半
田25’、26’は貫通孔24内を満たし、一部は基板
21上に張り出す。このとき、貫通孔24の上端面は前
述の押圧によって面取りがなされているので、溶融半田
が固化した後に貫通孔24の上端面に鋭利な切欠きが形
成されず、したがって半田バンプ26の実装後に応力集
中の発生を招くことのない信頼性の高い半田接合部を形
成することができる。なお、本実施の形態では、搭載工
程の後、押圧する工程を行っているが、搭載と同時に電
子部品27を貫通孔24に押しつけるようにしてもよ
い。
Thereafter, the substrate 21 is sent to a reflow process,
Heated. As a result, the cream solder 25 and the solder bump 26 melt as shown in FIG. At this time, since the upper end surface of the through hole 24 is chamfered by the above-described pressing, a sharp notch is not formed in the upper end surface of the through hole 24 after the molten solder is solidified. A highly reliable solder joint that does not cause stress concentration can be formed. In the present embodiment, the pressing step is performed after the mounting step. However, the electronic component 27 may be pressed against the through hole 24 simultaneously with the mounting.

【0019】[0019]

【発明の効果】本発明によれば、半田ボールや半田バン
プを半田接合するために絶縁膜に設けられた貫通孔に、
半田ボールや半田バンプを押圧して貫通孔の上端エッジ
を押しつぶした後に半田接合するようにしたので、上端
面のバリやエッジによる半田接合部内の切欠き部を無く
すことができ、従って半田接合部での応力集中の発生を
防止して、実装後の半田接合部の信頼性を向上させるこ
とができる。
According to the present invention, a through hole provided in an insulating film for solder-joining a solder ball or a solder bump is formed.
Solder balls and solder bumps are pressed to crush the top edge of the through-hole and then solder-bonded, so burrs on the top surface and notches in the solder-bonded portion due to edges can be eliminated, and therefore the solder-bonded portion This prevents the occurrence of stress concentration in the solder joint, thereby improving the reliability of the solder joint after mounting.

【図面の簡単な説明】[Brief description of the drawings]

【図1】(a)本発明の実施の形態1の半田バンプの形
成方法の工程説明図 (b)本発明の実施の形態1の半田バンプの形成方法の
工程説明図 (c)本発明の実施の形態1の半田バンプの形成方法の
工程説明図 (d)本発明の実施の形態1の半田バンプの形成方法の
工程説明図 (e)本発明の実施の形態1の半田バンプの形成方法の
工程説明図
FIG. 1A is a process explanatory view of a solder bump forming method according to a first embodiment of the present invention. FIG. 1B is a process explanatory view of a solder bump forming method according to a first embodiment of the present invention. Process description diagram of the solder bump forming method of the first embodiment (d) Process description diagram of the solder bump forming method of the first embodiment of the present invention (e) Method of forming the solder bump of the first embodiment of the present invention Process description diagram

【図2】(a)本発明の実施の形態2の半田バンプの実
装方法の工程説明図 (b)本発明の実施の形態2の半田バンプの実装方法の
工程説明図 (c)本発明の実施の形態2の半田バンプの実装方法の
工程説明図 (d)本発明の実施の形態2の半田バンプの実装方法の
工程説明図 (e)本発明の実施の形態2の半田バンプの実装方法の
工程説明図
FIG. 2A is a process explanatory view of a solder bump mounting method according to a second embodiment of the present invention. FIG. 2B is a process explanatory view of a solder bump mounting method according to a second embodiment of the present invention. Process description diagram of solder bump mounting method according to Embodiment 2 (d) Process description diagram of solder bump mounting method according to Embodiment 2 of the present invention (e) Method of mounting solder bump according to Embodiment 2 of the present invention Process description diagram

【図3】(a)従来のテープ状基板の部分断面図 (b)従来のテープ状基板の部分断面図 (c)従来のテープ状基板の部分断面図3A is a partial cross-sectional view of a conventional tape-shaped substrate. FIG. 3B is a partial cross-sectional view of a conventional tape-shaped substrate.

【符号の説明】[Explanation of symbols]

1、11 絶縁基板 2、12、22 回路電極 3、13、24 貫通孔 4、14、25 クリーム半田 5、15 半田ボール 21 基板 23 ソルダーレジスト 26 半田バンプ 27 電子部品 DESCRIPTION OF SYMBOLS 1, 11 Insulating board 2, 12, 22 Circuit electrode 3, 13, 24 Through-hole 4, 14, 25 Cream solder 5, 15 Solder ball 21 Substrate 23 Solder resist 26 Solder bump 27 Electronic component

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】絶縁基板に設けられた貫通孔を介して半田
ボールを回路電極に半田接合して前記絶縁基板の回路電
極の反対面に半田バンプを形成する半田バンプの形成方
法であって、前記半田ボールより小さい径で設けられた
前記貫通孔に半田ボールを押圧することにより前記貫通
孔の上端エッジを押しつぶす工程と、前記絶縁基板を加
熱して前記半田ボールを溶融させて前記回路電極に半田
接合する工程とを含むことを特徴とする半田バンプの形
成方法。
1. A method of forming a solder bump, comprising: soldering a solder ball to a circuit electrode via a through hole provided in an insulating substrate to form a solder bump on a surface of the insulating substrate opposite to the circuit electrode; Pressing the solder ball into the through-hole provided with a smaller diameter than the solder ball to crush the upper edge of the through-hole; and heating the insulating substrate to melt the solder ball and to form the circuit electrode. And a solder bonding step.
【請求項2】電子部品に形成された半田バンプを基板の
回路電極を覆う絶縁膜に設けられた貫通孔を介して前記
回路電極に半田接合して、前記半田バンプを基板に実装
する半田バンプの実装方法であって、前記半田バンプよ
り小さい径で設けられた前記貫通孔に半田バンプを押圧
することにより前記半田バンプで前記貫通孔の上端エッ
ジを押しつぶす工程と、前記基板を加熱して前記半田バ
ンプを溶融させて前記回路電極に半田接合する工程とを
含むことを特徴とする半田バンプの実装方法。
2. A solder bump, wherein a solder bump formed on an electronic component is solder-bonded to the circuit electrode via a through-hole provided in an insulating film covering the circuit electrode on the board, and the solder bump is mounted on the board. The mounting method, wherein pressing the solder bumps into the through holes provided with a smaller diameter than the solder bumps to crush the upper edge of the through holes with the solder bumps, and heating the substrate to heat the substrate. Melting the solder bumps and joining them to the circuit electrodes by soldering.
【請求項3】球状の半田部を回路電極を覆う絶縁膜に設
けられた貫通孔を介して前記回路電極に半田接合するこ
とにより形成される半田接合構造であって、前記半田接
合構造の形成工程が、前記半田部より小さい径で設けら
れた前記貫通孔に前記半田部を押圧することにより半田
部で貫通孔の上端エッジを押しつぶす工程と、前記半田
部を溶融させて前記回路電極に半田接合する工程とを含
むことを特徴とする半田接合構造。
3. A solder joint structure formed by soldering a spherical solder portion to the circuit electrode via a through hole provided in an insulating film covering the circuit electrode, wherein the solder joint structure is formed. Pressing the solder portion into the through hole provided with a smaller diameter than the solder portion to crush the upper end edge of the through hole with the solder portion; and melting the solder portion and soldering the circuit electrode. And a joining step.
JP09431498A 1998-04-07 1998-04-07 Solder bump forming method, solder bump mounting method, and solder joint structure Expired - Fee Related JP3367416B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP09431498A JP3367416B2 (en) 1998-04-07 1998-04-07 Solder bump forming method, solder bump mounting method, and solder joint structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP09431498A JP3367416B2 (en) 1998-04-07 1998-04-07 Solder bump forming method, solder bump mounting method, and solder joint structure

Publications (2)

Publication Number Publication Date
JPH11298132A true JPH11298132A (en) 1999-10-29
JP3367416B2 JP3367416B2 (en) 2003-01-14

Family

ID=14106823

Family Applications (1)

Application Number Title Priority Date Filing Date
JP09431498A Expired - Fee Related JP3367416B2 (en) 1998-04-07 1998-04-07 Solder bump forming method, solder bump mounting method, and solder joint structure

Country Status (1)

Country Link
JP (1) JP3367416B2 (en)

Also Published As

Publication number Publication date
JP3367416B2 (en) 2003-01-14

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