JPH11283497A - Forming method for ceramic capillary rib and paste and blade thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce the number of processes and eliminate waste of material to form a ceramic capillary rib easily and accurately. SOLUTION: A paste is applied to a board 10 to form paste film 11. A blade 12 or the board 10 is moved in a certain direction in a state in which a comb tooth 12b formed on at least a part of a periphery of the blade 12 is stuck into the paste film 11 to form a ceramic capillary rib 13 on a surface of the board 10. The paste contains 30-95% wt.% of glass powder or mixed powder of glass and ceramic, 0.3-15% wt.% of an organic binder and 3-70% wt.% of a solvent, plasticizer and dispersant. It is desirable that an aspect ratio of the ceramic capillary rib 13 on the board 10 is 2-10. It is desirable that a depth (h) of the comb tooth 12b is 0.03 mm<=(h)<=1.0 mm and a relationship between a pitch P and a clearance w of the comb tooth 12b is w/P<=0.9. The ceramic capillary rib 13 is separated from the surface of the board 10 and formed on an insulating layer.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] The present invention relates to a PDP (plasma d
isplay panel: plasma display panel), PAL
The present invention relates to a method for forming a ceramic capillary rib in a process of manufacturing an FPD (flat panel display) such as a C (plasma addressed liquid crystal display), and a paste and a blade used for the method.

[0002]

2. Description of the Related Art Conventionally, in a first method of forming a rib of this kind, as shown in FIG. Align with the pattern of above and apply many times repeatedly,
After being dried, it is baked to be formed on the substrate 1 at predetermined intervals. The height H of the rib 8 is usually 100 to 300 μm.
m, the width W of the rib is usually about 50 to 100 μm,
The width S of the cell 9 sandwiched between the ribs is usually 100 to 3
It is about 00 μm. A sand blast method is known as a second method for forming the rib. in this way,
As shown in FIG. 10, a ceramic paste containing glass powder is applied to the entire surface of the glass substrate 1 by a thick film method and dried, or by laminating a ceramic green tape containing glass powder to a height of 150 to 200 μm. After the formation of the pattern forming layer 3, the pattern forming layer 3 is covered with a photosensitive film 4.
The upper surface is covered with a mask 5, and exposure and development are performed to form a resist layer 6 having a predetermined pattern. Next, sandblasting is performed from above the resist layer 6 to form a cell 9.
After removing the portion which becomes the above, the resist layer 6 is further removed by using a release agent or the like to obtain a desired rib 8.

[0003]

In the first conventional forming method, the width W of the rib is relatively narrow, about 50 to 100 .mu.m, and the paste tends to drip after printing. Must be reduced to about 10 to 20 μm after firing. As a result, in this method, the height H
To make a 100-300 μm rib,
It is necessary to apply the coating repeatedly as many times as 20 times, and since the height H / W obtained by dividing the height H of the rib after the upper coating by the width W of the rib is as large as about 1.5 to 4, the thickness is large. There is a disadvantage that it is difficult to form ribs with high accuracy even when alignment is sufficiently performed during film printing. Further, the above-mentioned conventional second forming method includes coating a photosensitive film for forming a resist layer, exposing,
A complicated process such as development is required, and most of the pattern forming layer is removed by sandblasting, so that a large amount of material for the pattern forming layer is required. SUMMARY OF THE INVENTION An object of the present invention is to provide a method for forming a ceramic capillary rib which can be formed simply and accurately with a small number of steps without waste of material, and a paste and a blade used therefor. Another object of the present invention is to provide an FP having a ceramic rib obtained by firing the above ceramic capillary rib.
D.

[0004]

The invention according to claim 1 is
As shown in FIG. 1, the paste is applied to the surface of the substrate 10 to form a paste film 11, and the comb 12 b formed at least in part around the blade 12 is pierced into the paste film 11 so that the blade 12 or the substrate 10 Is moved in a certain direction to form the ceramic capillary ribs 13 on the surface of the substrate 10. With the comb teeth 12b piercing the paste film 11, the blade 12 or the substrate 1
By moving 0 in a certain direction, the paste 11 at a location corresponding to the comb teeth 12b of the blade 12 of the film 11 formed on the surface of the substrate 10 moves or is swept away by the gap between the comb teeth 12b, and the comb teeth 12b Only the film 11 located in the gap remains on the substrate 10 and the ceramic capillary rib 13 is formed on the surface of the substrate 10.

According to a second aspect of the present invention, as shown in FIG.
The ceramic capillary layer 22 and the ceramic capillary layer 22 are formed on the surface of the substrate 10 by moving the blade 12 or the substrate 10 in a certain direction with the comb teeth 12b formed at least partially around the blade 12 piercing the paste film 11. This is a method of forming a ceramic capillary rib 23 on the capillary layer 22. By moving the blade 12 with the tip of the comb tooth 12b piercing the paste film 11 so as to float from the surface of the substrate 10 to a predetermined height, or by moving the substrate 10 in a certain direction,
The paste from the surface 0 to a predetermined height remains on the substrate surface to form the ceramic capillary layer 22. The paste above the ceramic capillary layer 22 and corresponding to the comb teeth 12b of the blade 12
b is swept or swept into the gap
Only the paste located in the gap b is left on the ceramic capillary layer 22 and the ceramic capillary rib 23 is formed on the ceramic capillary layer 22.

The invention according to claim 3 is used in the method for forming a ceramic capillary rib according to claim 1 or 2, wherein the glass powder or the glass-ceramic mixed powder 30 to 30 is used.
This paste contains 95% by weight, 0.3 to 15% by weight of an organic binder, 3 to 70% by weight of a solvent, a plasticizer and a dispersant. By mixing the paste in this way, the viscosity becomes 1
A paste of 000 to 500,000 cps can be obtained, and the ceramic capillary rib formed on the substrate 10 is suppressed from dripping to form the ceramic capillary rib with high accuracy. The paste has a viscosity of 5,000 to 50.
10,000 cps is preferred, and 10,000 to 300,
000 cps is more preferred.

According to a fourth aspect of the present invention, as shown in FIGS. 3 and 4, there is provided a blade having a comb tooth 12b formed at an edge 12a used in the method for forming a ceramic capillary rib according to the first or second aspect. is there. The blade 12 is made of metal, ceramic, plastic, or the like that does not react with the paste or be dissolved in the paste. When the ribs 23 with ceramic capillary layer shown in FIG. 7 are formed, the edges (not shown) at both ends of the blade 12 are separated from the other edges by a predetermined length in order to float the edge 12a to a predetermined height. Preferably, it is longer.

According to a fifth aspect of the present invention, there is provided the blade according to the fourth aspect, wherein the thickness t is 0.01 mm or more and 3.0 mm or less, as shown in FIGS.
When the pitch of b is P, the gap between the comb teeth 12b is w, and the depth of the gap is h, 0.03 mm ≦ h ≦ 1.0 m
m and w / P ≦ 0.9. The ceramic capillary rib 13 formed by the blade 12 that satisfies the expression according to claim 5 is tightened by subsequent drying and firing to obtain a dense ceramic rib having a desired gap between the ribs.

The invention according to claim 6 is the invention according to claim 4 or 5, wherein the shape of the gap between the comb teeth 12b is rectangular, trapezoidal or inverted trapezoidal as shown in FIGS. It is a blade. If the shape of the gap between the comb teeth 12b is trapezoidal, the ceramic capillary rib 13 having a wide opening is formed.
If the shape of the gap between the comb teeth 12b is inverted trapezoidal, the opening can be narrowed and the tip width of the ceramic capillary rib 13 can be widened. As a result,
The ceramic capillary rib 13 having a shape suitable for the purpose can be formed.

According to a seventh aspect of the present invention, as shown in FIG. 2, in a ceramic rib 14 formed on a substrate 10, the height of the rib 14 is H, and the height of the ceramic rib 14 is (1/2) H. width W _C of the ribs, when the height (3/4) rib width W _M and the height of the place of H (9/10) the width of the rib at the H W _T, H, W _C, respectively (the maximum value or the minimum value - average value) of W _M and W _T / variation represented by the average value is not more than 5%, the aspect ratio expressed by H / W _C is 2-10 It is a ceramic rib characterized by the following. By having an aspect ratio of 2 to 10,
An extremely accurate ceramic rib can be obtained.

According to an eighth aspect of the present invention, as shown in FIG. 8, an insulating layer 24 is formed on a substrate 10;
4, the height of the rib 25 is H, the width of the rib at the height (1/2) H is W _C , and the width of the rib at the height (3/4) H is H. the width of rib W _M and height (9/10) when the width of the rib at the H and W _T, H, W _C, respectively (the maximum value or the minimum value of W _M and W _T - average ) / Variation represented by the average value is 5
% Or less and the aspect ratio represented by H / W _C is 2
A ceramic rib characterized by being 10 to 10.
According to a ninth aspect of the present invention, there is provided a ceramic capillary rib formed by the method of the first aspect or a ceramic rib formed by firing the ceramic capillary layer and the ceramic capillary rib formed by the method of the second aspect.
Alternatively, it is an FPD having a ceramic rib 25 formed on the insulating layer 24. In this specification, the term "ceramic capillary" refers to most of the organic binder and solvent after applying a paste containing the glass powder or glass-ceramic mixed powder of the present invention, an organic binder, a solvent, a plasticizer and a dispersant. And a state in which a plasticizer and a dispersant remain.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described in detail with reference to the drawings. The method for forming a ceramic capillary rib according to the present invention uses a substrate 1 as shown in FIG.
Paste film 1 formed by applying paste on the surface of
1, a comb tooth 12b formed on the blade 12 is pierced, and the blade 12 or the substrate 10 is moved in a certain direction while the edge 12a of the blade 12 is in contact with the surface of the substrate 10 so that a ceramic capillary rib is formed on the surface of the substrate 10. 13 is formed. The paste is a paste containing glass powder or glass-ceramic mixed powder, an organic binder, a solvent, a plasticizer, and a dispersant. The glass powder contains SiO ₂ , ZnO, PbO, or the like as a main component, and has a softening point of 300 ° C. or higher. It needs to be 600 ° C.

The glass / ceramic mixed powder is Si
A glass powder containing O ₂ , ZnO, PbO or the like as a main component;
And a ceramic powder such as alumina, cordierite, mullite, or forsterite which serves as a filler. The ceramic powder makes the thermal expansion coefficient of the rib 13 formed equal to the thermal expansion coefficient of the glass substrate 10. Mixed for. The content of the ceramic powder is preferably 60% by volume or less. When the content of the ceramic powder exceeds 60% by volume, the ribs become porous, which is not preferable. In addition, it is preferable that the particle diameters of the glass powder and the ceramic powder are each 0.1 to 30 μm. When the particle diameter of the glass powder and the ceramic powder is less than 0.1 μm, the glass powder and the ceramic powder are apt to agglomerate and the handling thereof becomes complicated. On the other hand, if the thickness exceeds 30 μm, a desired rib 13 cannot be formed when the blade 12 described later moves.

The paste is composed of 30 to 95% by weight of glass powder or glass / ceramic mixed powder, 0.3 to 15% by weight of organic binder, and 3 to 70% of solvent, plasticizer and dispersant.
It is preferable to mix them by weight%. More preferably, 70 to 90% by weight of a glass powder or a glass / ceramic mixed powder, 1 to 3.5% by weight of an organic binder, and 7 to 20% by weight of a solvent, a plasticizer, and a dispersant are added. The organic binder is a polymer (resin) which is easily thermally decomposed and has a high viscosity when dissolved in a solvent, and examples thereof include ethyl cellulose, acryl, and polyvinyl butyral. The solvent needs to be an organic solvent having relatively low volatility at room temperature, and examples thereof include terpineol, butyl carbitol, acetate, and ether. Examples of the plasticizer include glycerin and dibutyl phthalate, and examples of the dispersant include benzene and sulfonic acid. By forming the paste in this manner, a paste having a predetermined viscosity can be obtained, and the ceramic ribs 13 formed on the substrate 10 can be formed by suppressing the dripping of the ceramic capillary ribs 13 and firing the ceramic ribs accurately. Can be.

The paste is applied to the surface of the substrate 10 by an existing means such as a screen printing method, a dip method or a doctor blade method. A plurality of comb teeth 12b are formed at equal intervals and in the same direction on a blade 12 that comes into contact with the surface of the substrate 10 on which the paste film 11 is formed. The blade 12 is made of a metal, ceramic, plastic, or the like that does not react with the paste or is dissolved in the paste. In particular, from the viewpoint of dimensional accuracy and durability, ceramic or an alloy based on Fe, Ni, or Co is preferable. The gap between each comb tooth 12b is formed in accordance with the cross-sectional shape of the ceramic capillary rib 13 formed by the blade 12. As shown in FIGS. 3 and 4, the blade 12 in the present embodiment is formed of stainless steel having a thickness t of 0.1 mm, the pitch P of the comb teeth 12 b is 100 to 200 μm, and The gap has a depth h of 300 μm.

Here, the blade 12 has a thickness t of 0.0
When the pitch of the comb teeth 12b is P, the gap between the comb teeth 12b is w, and the depth of the gap is h, 0.03 mm ≦ h ≦ 1.0 mm and 1 mm or more and 3.0 mm or less. It is preferable that w / P ≦ 0.9. The ceramic capillary rib 13 formed by the blade 12 that satisfies this formula is tightened by subsequent drying and firing, so that a dense ceramic rib having a desired rib gap can be obtained. The shape of the gap between the comb teeth 12b is not limited to the case where the gap is formed in a square shape as shown in FIG.
May be formed in a trapezoidal shape as shown in FIG. 5 or an inverted trapezoidal shape as shown in FIG. If the shape of the gap between the comb teeth 12b is trapezoidal, it is possible to form the ceramic capillary rib 13 suitable for use with a wide opening.
If the shape of the gap between the comb teeth 12b is inverted trapezoidal, the top of the rib is flattened over a wide area.
3 can be formed.

Returning to FIG. 1, the formation of the ceramic capillary rib 13 by the blade 12 configured as described above is performed by contacting the substrate 10 with the edge 12a of the blade 12 in contact with the surface of the substrate 10 on which the paste film 11 is formed. This is performed by fixing and moving the blade 12 in a certain direction as shown by a solid arrow in FIG. 1, or by fixing the blade 12 and moving the substrate 10 in a certain direction as shown by a dashed arrow in FIG. . By this movement, the portion of the blade 12 of the paste applied to the surface of the substrate 10 corresponding to the comb teeth 12b is moved or swept into the gap between the comb teeth 12b, and only the paste located in the gap between the comb teeth 12b is left on the substrate 10. And the ceramic capillary ribs 13 are formed on the surface of the substrate 10. If the depth of the groove of the comb tooth is larger than the thickness of the paste film 11, the paste swept out when moving the blade 12 or the glass substrate 10 enters the groove and has a height greater than the thickness of the paste film 11. The ceramic capillary rib 13 can be formed.

The thus formed ceramic capillary rib 13 is then dried to form a ceramic green rib (not shown), heated for binder removal, and subsequently fired to obtain the ceramic green rib shown in FIG. It becomes the rib 14. As shown in the enlarged circle of FIG. 2, the ceramic ribs 14 formed on the substrate 10
Is the height of H, and the rib 14 at the height (1/2) H
The width W _C, when the height (3/4) width W _M and the height of the ribs 14 where the H (9/10) the width of the rib 14 where the H W _T, H, W _C, each of W _M and W _T - variation represented by (maximum average value) / average value 5%
And the aspect ratio represented by H / W _C is 2 to
It is preferably 10. When the aspect ratio is 2 to 10, an extremely fine ceramic rib 14 can be obtained.

Next, a second embodiment of the present invention will be described in detail with reference to the drawings. As shown in FIG. 7, a method of forming a ceramic capillary rib according to the present invention includes a method of forming a comb tooth 12b formed on at least a part of a periphery of a blade 12 on a paste film 11 formed by applying a paste on the surface of a substrate 10. By piercing the paste film 11 and moving the blade 12 or the substrate 10 in a predetermined direction while the edge 12a of the blade 12 floats at a predetermined height from the surface of the substrate 10, the ceramic capillary layer 22 and the ceramic capillary layer In this method, a ceramic capillary rib 23 is formed on the substrate 22. Since the paste and the application of the paste are the same as those in the above-described embodiment, the description thereof will not be repeated.

That is, as shown in FIG. 7, the formation of the ceramic capillary rib 23 by the blade 12 is performed by forming the edge 12a of the blade 12 on the substrate 1 on which the paste film 11 is formed.
In a state where the substrate 10 is floated at a predetermined height from the surface, the blade 12 is fixed and the blade 12 is moved in a fixed direction as shown by a solid arrow, or the blade 10 is fixed and the substrate 10 is fixed as shown by a broken arrow. This is done by moving in the direction. By this movement, the paste from the surface of the substrate 10 to a predetermined height remains on the surface of the substrate to form a ceramic capillary layer 22, and a portion of the paste above the ceramic capillary layer 22 corresponding to the comb teeth 12b of the blade 12 is combed. The paste moves or is swept into the gap between the teeth 12b, and only the paste located in the gap between the comb teeth 12b remains on the ceramic capillary layer 22, and the ceramic capillary rib 2 is placed on the ceramic capillary layer 22.
3 is formed.

The thus formed ceramic capillary layer 22 and ceramic capillary rib 23 are then dried into ceramic green layers and ceramic green ribs (not shown), and further heated to remove the binder, and subsequently heated. The substrate 1 shown in FIG.
And the ceramic rib 25 formed on the insulating layer 24. As shown in the enlarged circle of FIG. 8, the ceramic rib 25 formed on the insulating layer 24 has a height H (1/2)
Width W _C of the ribs 25 where the H, the height (3/4) width W _M and the height of the ribs 25 where the H and (9/10) width of the rib 25 where the H W _T H, W _C , W _M
And the variation expressed by (maximum value−average value) / average value of W _T is preferably 5% or less, and the aspect ratio represented by H / W _C is preferably 2 to 10. When the aspect ratio is 2 to 10, an extremely fine ceramic rib 25 can be obtained.

[0022]

Next, examples of the present invention will be described in detail together with comparative examples. <Example 1> having an average particle diameter of 3μm PbO-SiO ₂ -B ₂ O
70% by weight of the ₃ series glass powder and 30% by weight of an alumina powder having an average particle size of 5 μm as a filler were prepared and thoroughly mixed. This mixed powder, ethyl cellulose as an organic binder, and a solvent were blended at a weight ratio of 55/5/40 and kneaded sufficiently to obtain a paste. The solvent is a mixture of terpineol as a solvent, glycerin as a plasticizer, and sulfonic acid as a dispersant. As shown in FIG. 1, the paste obtained in this manner was screen-printed on a soda-lime glass substrate 10 having a diagonal dimension of 40 inches and a thickness of 3 mm by a screen printing method.
The paste was applied at 0 μm to form a paste film 11.

On the other hand, the pitch P of the comb teeth 12b is 100 μm.
m, the gap w between the comb teeth 12b was 40 μm, and the depth h was 300 μm. A blade 12 made of stainless steel having a thickness of 0.1 mm was prepared (FIG. 4). The comb teeth 12b of the blade 12 are pierced into the paste film 11, and the edge 12a is formed on the substrate 10 on which the paste film is formed.
The substrate 10 is fixed while being in contact with the surface, and the blade 12 is moved in a certain direction as shown by the solid arrow in FIG.
3 was formed.

Example 2 ZnO-B having an average particle size of 2 μm
₂ O ₃ glass powder, polyvinyl butyral as an organic binder, and a solvent composed of ether (solvent), dibutyl phthalate (plasticizer) and benzene (dispersant) in a weight ratio of 60/10/30. Then, the mixture was sufficiently kneaded to obtain a paste. The paste thus obtained was applied on the same glass substrate 10 as in Example 1 by a screen printing method at a thickness of 100 μm to form a paste film. On the other hand, the pitch P of the comb teeth 12b is 200 μm, the gap w between the comb teeth 12b is 70 μm, and the depth h is 3 μm.
A blade 12 made of stainless steel having a thickness of 0.1 mm and being 00 μm was prepared (FIG. 4). The substrate 12 is fixed with the comb teeth 12b of the blade 12 pierced into the paste film 11 and the edge 12a thereof is in contact with the surface of the substrate 10 on which the paste film is formed. As shown by the solid arrow in FIG. The ceramic capillary rib 13 was formed on the surface of the substrate 10 by moving the substrate 12 in a certain direction.

Example 3 PbO having an average particle size of 2.5 μm
And 50% by weight of -ZnO-SiO ₂ based glass powder, alumina powder having an average particle diameter of 3μm as the filler 50% by weight
Prepared and mixed well. This mixed powder, polymethacrylate as an organic binder, and ether as a solvent were blended at a weight ratio of 30/15/55, and sufficiently kneaded to obtain a paste. The paste thus obtained was applied on the same glass substrate 10 as in Example 1 by a screen printing method to a thickness of 200 μm to form a paste film. On the other hand, the pitch P of the comb teeth 12b is 100 μm, the gap w between the comb teeth 12b is 30 μm, and the depth h
A blade 12 made of stainless steel having a thickness of 0.1 mm and a thickness of 300 μm was prepared (FIG. 4). The substrate 10 is fixed with the comb teeth 12b of the blade 12 piercing the paste film 11 and the edge 12a of the blade 12 being in contact with the surface of the substrate 10 on which the paste film 11 is formed.
The ceramic capillary rib 13 was formed on the surface of the substrate 10 by moving the blade 12 in a certain direction, as shown by the solid arrow in FIG.

Example 4 PbO-S having an average particle size of 3 μm
80% by weight of iO ₂ -B ₂ O ₃ -based glass powder and 20% by weight of alumina powder having an average particle diameter of 1 μm as a filler were prepared and sufficiently mixed. The mixed powder, the acrylic resin as the organic binder, and the solvent were mixed in a weight ratio of 90/3 /.
7 and kneaded well to obtain a paste. The solvent used was only ether, which was a solvent. As shown in FIG. 7, a paste having a thickness of 300 mm was formed on a soda lime glass substrate 10 having a diagonal dimension of 40 inches and a thickness of 2 mm by a roll coater method.
The paste film 11 was formed by applying a thickness of μm. On the other hand, the pitch P of the comb teeth 12b is 200 μm, and
A blade 1 made of 0.05 mm thick Ni having a gap w of 150 μm and a depth h of 200 μm
2 was prepared (FIG. 4). Comb teeth 12 of this blade 12
b is pierced into the paste film 11, and the substrate 10 is fixed in a state where the edge 12a is floated by 20 μm from the surface of the substrate 10 on which the paste film is formed, as shown by a solid arrow in FIG.
By moving the blade 12 in a certain direction, the substrate 10
A ceramic capillary layer 22 was formed on the surface, and a ceramic capillary rib 23 was formed on the ceramic capillary layer 22.

<Example 5> The same paste as in Example 3 was obtained and applied on the same glass substrate 10 as in Example 1 with a thickness of 200 μm by a screen printing method to form a paste film. On the other hand, the pitch P of the comb teeth 12b is 200 μm, the tip gap w of the comb teeth 12b is 150 μm, the base gap w _h is 100 μm, and the depth h is 200 μm.
A blade 12 made of stainless steel having a thickness of 0.1 mm and having a trapezoidal shape of the gap b was prepared (FIG. 5). The comb teeth 12b of the blade 12 are
The substrate 10 is fixed in a state where the edge 12a of the substrate 10 is stabbed and the edge 12a is in contact with the surface of the substrate 10 on which the paste film 11 is formed, and the blade 12 is moved in a certain direction as shown by a solid arrow in FIG. A ceramic capillary rib 13 was formed on the surface of the substrate 10.

<Example 6> The same paste as in Example 3 was obtained and applied on the same glass substrate 10 as in Example 1 with a thickness of 200 μm by a screen printing method to form a paste film. On the other hand, the pitch P of the comb teeth 12b is 200 μm, the tip gap w of the comb teeth 12b is 100 μm, the base gap w _h is 150 μm, and the depth h is 200 μm.
A blade 12 made of stainless steel having a thickness of 0.1 mm and having an inverted trapezoidal shape was prepared (FIG. 6). The comb teeth 12b of the blade 12 are
The substrate 10 is fixed in a state where the edge 12a of the substrate 10 is stabbed and the edge 12a is in contact with the surface of the substrate 10 on which the paste film 11 is formed, and the blade 12 is moved in a certain direction as shown by a solid arrow in FIG. A ceramic capillary rib 13 was formed on the surface of the substrate 10.

<Comparative Example 1> As shown in FIG. 9, a rib-forming paste 2 containing glass powder, an organic binder and a solvent and having a viscosity of 50,000 ps was screen-printed on a soda-lime glass substrate 1 by a screen printing method. The steps of aligning and printing with the pattern described above and drying at 150 ° C. for 10 minutes are as follows:
Coating was repeated twice. This overcoating was set so that the height H of the ceramic green rib 2 was 200 μm. As the rib forming paste, SiO ₂ , Zn
It contains glass powder containing O and PbO as main components and Al ₂ O ₃ powder. Ethyl cellulose was used as the organic binder, and α-terpineol was used as the solvent. Thus, the ceramic green ribs 2 were formed at predetermined intervals (the width S of the cell 9). Next, the structure in which the ceramic green ribs 2 were formed on the substrate 1 was heat-treated at 550 ° C. for 1 hour in the air, thereby forming the ceramic ribs 8 having a height H of about 170 μm on the substrate 1.

<Comparative Test and Evaluation> The ceramic capillary ribs 13 formed on the substrate 10 of Examples 1 to 6 were dried into ceramic green ribs (not shown), and further heated to remove the binder. The ceramic ribs 14 were fired. The height H and the width of 100 arbitrary ceramic ribs 14 obtained by firing and 100 arbitrary ceramic ribs 8 obtained in Comparative Example 1 were measured as follows. . The ceramic capillary rib 13 in Example 1 was dried at 150 ° C. for 30 minutes to remove the solvent to form a ceramic green rib, heated for binder removal, and then fired at 560 ° C. for 1 hour to obtain a ceramic rib. Was.

The ceramic capillary rib 13 in Example 2 was dried at 150 ° C. for 30 minutes to remove the solvent to form a ceramic green rib, heated to remove the binder, and then fired at 580 ° C. for 1 hour to form the ceramic rib. Obtained. Further, the ceramic capillary rib 13 in Example 3 was dried at 150 ° C. for 30 minutes to remove the solvent to form a ceramic green rib, heated for binder removal, and then fired at 550 ° C. for 1 hour to obtain a ceramic rib. Was. Furthermore, the ceramic capillary ribs 13 in Examples 4 to 6 were dried at room temperature for 10 minutes, and further heated for binder removal.
It was baked at 0 ° C. for 10 minutes to obtain a ceramic rib and a ceramic insulating layer.

As shown in FIG. 2, the measurement of the width of any 100 ceramic ribs on the substrates of Examples 1 to 6 and Comparative Example 1 was performed by measuring the height (H) 1/2) rib width W _C of at the H, the height (3 /
4) The width W _M of the rib at H and the height (9/10) H
The measurement was carried out by measuring the width W _T of the rib at the point (1). After calculating the average of these measurements,
H, W _C, respectively (the maximum value or the minimum value - average value) of W _M and W _T were calculated variation represented by / average value. Table 1 shows the results of Examples 1 to 3 in comparison with the results of Comparative Example 1, and Table 2 shows the results of Examples 4 to 6 in comparison with the results of Comparative Example 1.

[0033]

[Table 1]

[0034]

[Table 2]

As is clear from Tables 1 and 2, the results of Examples 1 to 6 show that the method of the present invention effectively forms ceramic capillary ribs on a substrate. Further, it was found that the ceramic capillary rib could be dried, heated for binder removal, and subsequently fired to obtain the ceramic rib. It was clarified that ceramic ribs could be easily obtained. Further, since the aspect ratio of the ceramic rib obtained by drying, heating and firing this ceramic capillary rib is 2 to 10, it has been found that a highly accurate ceramic rib can be obtained by the present invention.

[0036]

As described above, according to the present invention, the comb teeth formed on the blade are stabbed into the paste film, and the blade or the substrate is moved in a certain direction while the edge of the blade is in contact with the surface of the formed substrate. By moving the paste, the paste at the position corresponding to the comb teeth of the blade moves or is swept away in the gap between the comb teeth, and only the paste located in the gap between the comb teeth remains on the substrate, and Ceramic capillary ribs can be formed. As a result, according to the method of the present invention, ceramic capillary ribs can be formed simply and accurately with a small number of steps without waste of material. The ceramic ribs thus formed are then dried, heated and fired, whereby the ceramic ribs can be formed on the substrate.
For this reason, the conventional thick film printing method in which the rib portions are overcoated with thick film printing, or the cell portions are removed by sandblasting through complicated processes such as exposure and development for forming a resist layer. It is extremely simple compared to the conventional method. As a result, efficient mass production of ceramic ribs serving as insulating protective layers formed on partition walls and bus electrodes of luminous cells in the manufacturing process of plasma display panels, liquid crystal display devices, fluorescent display devices, hybrid integrated circuits, etc. Can be planned.

Further, 30 to 95% by weight of glass powder or glass / ceramic mixed powder and 0.3 to 1 of organic binder are used.
By using a paste containing 5% by weight, a solvent, a plasticizer and a dispersant, 3 to 70% by weight, dripping of the ceramic capillary rib formed on the substrate is suppressed, and the ceramic capillary rib is accurately formed and dried. The ceramic ribs obtained by heating and firing can be formed with higher precision than before. In addition, the thickness is 0.01 mm or more and 3.0 mm
In the following, when the pitch of the comb teeth is P, the gap between the comb teeth is w, and the depth of the gap is h, 0.03 mm ≦
If the ceramic capillary rib is formed by a blade satisfying a relationship of h ≦ 1.0 mm and w / P ≦ 0.9, the ceramic capillary rib is tightened by subsequent drying and firing, and a desired gap between the ribs is obtained. And a dense ceramic rib having the following.

Further, in the ceramic rib formed by the method of the present invention, the width of the rib at the height (1/2) H is W _C , and the width of the rib at the height (3/4) H is W. when _M and height (9/10) width of the rib where the H and W _T, H, W _C, respectively (the maximum value or the minimum value - average value) of W _M and W _T / average value The variation represented is 5% or less, and a highly accurate ceramic rib can be obtained.

If the blade or the substrate is moved in a certain direction while the comb teeth formed on the blade are stabbed into the paste film and the edge of the blade is floated at a predetermined height from the surface of the substrate on which the paste film has been formed, the substrate is removed. The paste from the surface to a predetermined height remains on the substrate surface to form a ceramic capillary layer, and a ceramic capillary rib can be formed on the ceramic capillary layer. The ceramic capillary layer and the ceramic capillary rib thus formed are then dried, heated and fired, whereby the ceramic rib can be formed on the substrate via the insulating layer. For this reason, according to the present invention, even a ceramic rib with an insulating layer can be obtained very easily, and efficient mass production of the ceramic rib with an insulating layer can be achieved.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a state of forming a ceramic capillary rib in the present invention.

FIG. 2 is a cross-sectional view showing a ceramic rib obtained by drying, heating, and firing the ceramic capillary rib in the cross section along the line AA in FIG. 1;

FIG. 3 is a front view of the blade.

FIG. 4 is a sectional view taken along line BB of FIG. 3;

FIG. 5 is a front view corresponding to FIG. 3 of another blade;

FIG. 6 is a front view corresponding to FIG. 3 of still another blade.

FIG. 7 is a perspective view corresponding to FIG. 1 showing a state of forming a rib with a ceramic capillary layer in the present invention.

8 is a cross-sectional view corresponding to FIG. 2 showing a ceramic rib with an insulating layer obtained by drying, heating, and firing the rib with a ceramic capillary layer in a cross section taken along line BB of FIG. 7;

FIG. 9 is a sectional view showing the formation of a conventional ceramic rib in the order of steps.

FIG. 10 is a sectional view showing the formation of another conventional ceramic rib in the order of steps.

[Explanation of symbols]

 Reference Signs List 10 glass substrate 11 paste film 12 blade 12a edge 12b comb tooth 13, 23 ceramic capillary rib 14, 25 ceramic rib 22 ceramic capillary layer 25 insulating layer

Claims (9)

[Claims] 1. A paste formed on a surface of a substrate (10) by applying a paste to form a paste film (11), and a comb tooth formed on at least a part of a periphery of a blade (12).
By moving the blade (12) or the substrate (10) in a certain direction while piercing the paste film (11) with the ceramic film (11), the ceramic capillary rib (1) is formed on the surface of the substrate (10).
3) How to form. 2. A paste formed on at least a part of the periphery of the blade (12) by applying a paste to the surface of the substrate (10) to form a paste film (11).
By moving the blade (12) or the substrate (10) in a certain direction while piercing the paste film (11) with the (12b), the ceramic capillary layer (22) on the surface of the substrate (10)
And forming a ceramic capillary rib (23) on the ceramic capillary layer (22). 3. The method for forming a ceramic capillary rib according to claim 1 or 2, wherein 30 to 95% by weight of a glass powder or a glass / ceramic mixed powder, 0.3 to 15% by weight of an organic binder, and a solvent are used. And plasticizer and dispersant 3
Paste containing ~ 70% by weight. 4. A blade having a comb tooth (12b) formed on an edge (12a) used in the method for forming a ceramic capillary rib according to claim 1 or 2. 5. The thickness (t) is 0.01 mm or more and 3.0 mm.
In the following, the pitch of the comb teeth (12b) is P, and the comb teeth
When the gap of (12b) is w and the depth of the gap is h,
0.03 mm ≦ h ≦ 1.0 mm and w / P ≦ 0.
5. The blade according to claim 4, wherein said blade has a relationship of 9. 6. The blade according to claim 4, wherein the shape of the gap between the comb teeth (12b) is rectangular, trapezoidal or inverted trapezoidal. 7. A ceramic rib formed on a substrate (10)
In (14), the height of the rib (14) is H, the width of the rib at the height (1/2) H is W _C , and the width of the rib at the height (3/4) H is when W _M and height (9/10) width of the rib where the H and W _T, the H, W _C, respectively (the maximum value or the minimum value - average value) of W _M and W _T / average And the aspect ratio represented by H / W _C is 2 to 10
A ceramic rib, characterized in that: 8. An insulating layer (24) is formed on a substrate (10), and in the ceramic rib (25) formed on the insulating layer (24), the height of the rib (25) is H, height (1/2) W the width of the rib at the H _C, height (3/4) rib width W _M and the height of the place of H (9/10) rib width at the H when the a W _T, the H, W _C, W each (maximum or minimum - average value) _M and W _T / variation represented by the average value is not more than 5%, H / W Aspect ratio represented by _C is 2 to 10
A ceramic rib, characterized in that: 9. A ceramic rib formed by firing the ceramic capillary rib (13) formed by the method according to claim 1 or the ceramic capillary layer (22) formed by the method according to claim 2. (14) or FP having a ceramic rib (25) formed on an insulating layer (24)
D.