JPH10226584A - Ceramic rib and its formation - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily and precisely form ceramic ribs in a few processes without wasting materials. SOLUTION: A thermosetting resin layer 11 is formed on a glass substrate 10 by a thick film printing method while leaving prescribed gaps 12 in-between. The layer 11 is converted into a cured layer 13 by heating and the gaps 12 in between the layer 13 are filled with ceramic paste contg. glass powder. This paste is dried to form ceramic green ribs 17, these ribs 17 are fired and the cured layer 13 is vanished during the firing. The objective ceramics ribs 18 are formed on the substrate 10.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for forming a ceramic rib in a process of manufacturing a plasma display panel, a liquid crystal display, a fluorescent display, a hybrid integrated circuit, and the like. More particularly, the present invention relates to a ceramic rib serving as an insulating protective layer formed on a partition wall or a bus electrode of a light emitting cell, and a method for forming the same.

[0002]

2. Description of the Related Art Conventionally, in a first method of forming a rib of this kind, as shown in FIG. 4, a rib 8 is formed by forming a rib forming paste 2 containing glass powder on a glass substrate 1 by a thick film printing method. Align with the pattern of above and apply many times repeatedly,
After being dried, it is baked to be formed on the substrate 1 at predetermined intervals. The height H of the rib 8 is usually 150 to 200 μm.
m, the width W of the rib is usually about 50 to 100 μm,
The width S of the cell 9 sandwiched between the ribs is usually 100 to 3
It is about 00 μm. A sand blast method is known as a second method for forming the rib. in this way,
As shown in FIG. 5, a ceramic paste containing glass powder is applied to the entire surface of the glass substrate 1 by a thick film method and dried, or by laminating a ceramic green tape containing glass powder to a height of 150 to 200 μm. After the pattern formation layer 3 is formed, the pattern formation layer 3 is covered with a photosensitive film 4, and the film 4 is further covered with a mask 5, and exposed and developed to form a resist pattern having a predetermined pattern. 6 is formed. Next, after sandblasting is performed from above the resist layer 6 to remove the portion to be the cell 9, the portion to be the cell 9 is filled with a ceramic paste and dried to form the ceramic green rib 7. Further, the resist layer 6 is removed by using a release agent or the like to obtain a desired rib 8.

[0003]

In the first conventional forming method described above, the width w of the rib is relatively narrow, about 50 to 100 μm, and the paste is liable to be dripped after printing. Must be reduced to about 10 to 20 μm after firing. As a result, in this method, the height H
To make a 150-200 μm rib,
It is necessary to apply the coating repeatedly as many times as 20 times. Since the height H / W obtained by dividing the height H of the rib after the upper coating by the width W of the rib is as large as about 1.5 to 3, the thickness is large. There is a disadvantage that it is difficult to form ribs with high accuracy even when alignment is sufficiently performed during film printing. Further, the above-mentioned conventional second forming method includes coating a photosensitive film for forming a resist layer, exposing,
A complicated process such as development is required, and most of the pattern forming layer is removed by sandblasting, so that a large amount of material for the pattern forming layer is required. SUMMARY OF THE INVENTION An object of the present invention is to provide a ceramic rib which can be formed simply and accurately with a small number of steps and no waste of material, and a method therefor.

[0004]

The invention according to claim 1 is
As shown in FIG. 1, a thermosetting resin layer 11 is formed on a glass substrate 10 by a thick-film printing method so as to have a predetermined gap 12, and the resin layer 11 is heated to form a cured layer 13, which is then cured. A predetermined gap 12 of the layer 13 is filled with a ceramic paste containing glass powder, and the paste is dried to form a ceramic green rib 17. Then, the ceramic green rib 17 is fired and the hardened layer 13 is eliminated at the same time. This is a method for forming a ceramic rib, which comprises forming a ceramic rib 18 on a substrate 10. In the method for forming a ceramic rib according to the first aspect, the thermosetting resin layer 11 is formed by applying a thermosetting resin in a thick film printing method, so that the dripping of the thick film after printing is small. The thickness of a single coating of the thick film can be increased, and the rib can be formed with a small number of times of printing the thick film.

According to a second aspect of the present invention, as shown in FIG. 2, a softening point or a sintering temperature of 600.degree.
A ceramic resist containing the above oxide is placed in a predetermined gap 1
The ceramic resist layer 31 is formed by repeating the steps of printing and drying by a thick film printing method so as to have the ceramic layer 2, and the predetermined gap 12 of the ceramic resist layer 31 is filled with a ceramic paste containing glass powder. Is dried to form a ceramic green rib 17, and further, the ceramic green rib 17 is fired at 500 to 600 ° C., and then the ceramic resist layer 31 powdered during the firing is removed, thereby forming the ceramic rib 18 on the substrate 10. This is a method for forming a ceramic rib, characterized by being formed. In the method for forming a ceramic rib according to the second aspect, the ceramic resist layer 31 formed by thick-film printing of the ceramic resist has an oxide powder dispersed therein and has relatively high rigidity.
It becomes harder to drop than the thermosetting resin layer. As a result, the ceramic ribs 18 can be formed with higher precision than when the thermosetting resin is used.

The invention according to claim 3 is the invention according to claim 2, wherein the ceramic resist layer further comprises SiO ₂ , A
1 selected from the group consisting of l ₂ O ₃ , TiO ₂ and ZrO
An oxide powder mainly composed of a kind or two or more kinds of oxides,
It contains an organic binder and a solvent. The invention according to claim 4 is the invention according to claim 2 or 3, wherein an oxide powder is further contained in the ceramic resist layer in an amount of 40 to 40%.
It is characterized by containing 80% by weight. In the method of forming a ceramic rib according to the third or fourth aspect, the accuracy of the ceramic rib is improved by including an organic binder and a solvent in addition to the oxide powder of 40 to 80% by weight as a component of the ceramic resist layer. Can contribute.

According to a fifth aspect of the present invention, as shown in FIG. 3, a metal resist containing a metal having a softening point of 600 ° C. or more is printed on a glass substrate 10 by a thick film printing method so as to have a predetermined gap 12. The metal resist layer 51 is formed by repeating the steps of drying and drying, and a predetermined gap 12 of the metal resist layer 51 is filled with a ceramic paste containing glass powder, and the paste is dried to form a ceramic green rib 17. And 5 ceramic green ribs 17
This is a method for forming ceramic ribs, wherein the ceramic ribs 18 are formed on the substrate 10 by baking at 00 to 600 ° C. and then removing the powdered metal resist layer 51 during the baking. In the method of forming a ceramic rib according to the fifth aspect, the metal powder is dispersed in the metal resist layer 51 formed by thick film printing of the metal resist and has relatively high rigidity. It becomes harder to drop than the thermosetting resin layer. As a result, the ceramic ribs 18 can be formed with higher precision than when the thermosetting resin is used.

The invention according to claim 6 is the invention according to claim 5, wherein the metal resist layer further comprises Ag, Au and Cu.
And a metal powder mainly composed of one or more metals selected from the group consisting of: an organic binder; and a solvent. The invention according to claim 7 is the invention according to claim 5 or 6, characterized in that the metal resist layer contains 40 to 80% by weight of metal powder. In the method for forming a ceramic rib according to the sixth or seventh aspect, an organic binder or a solvent is contained as a component of the metal resist layer in addition to 40 to 80% by weight of metal powder.
This can contribute to improving the accuracy of the ceramic rib.

According to an eighth aspect of the present invention, as shown in FIG. 1, a ceramic rib 18 formed on a glass substrate 10 is provided.
It is an improvement of. The characteristic configuration is that the height of the rib 18 is H, and the width of the rib 18 at the height (1/2) H is W
_C, when the height (3/4) width W _M and height H where the rib 18 (9/10) the width of the rib 18 where the H W _T, W for W _{C M} and W Each difference in _T is less than 2% of W _C. In the ceramic ribs according to claim 8, each of the difference in W _M and W _T for W _C is less than 2% of W _C, ceramic ribs 18 having extremely high accuracy.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described in detail with reference to the drawings. As shown in FIG. 1, a paste containing a thermosetting resin having a viscosity of 100 to 5000 ps is aligned on a glass substrate 10 in a predetermined pattern by a thick film printing method such as a screen printing method and printed. The step of drying at ~ 250 ° C for 5-60 minutes is repeated and overcoated. Epoxy resin as thermosetting resin,
It is preferable to use a xylene resin, a phenol resin, a polyimide resin, or the like. The height H of the cured layer 13 after curing of the thermosetting resin described later is 150 to 200 μm in one application thickness.
m. Thereby, the predetermined gap 12
Is formed. The resin layer 11 is heated to 100 to 250 ° C. for 5 to 60 minutes to form a hardened layer 13, and then a predetermined gap 12 of the hardened layer 13 is filled with Si.
Glass powder mainly composed of O ₂ , ZnO, PbO, etc. and A
A ceramic paste of 50 to 400 ps containing a ceramic powder such as l ₂ O ₃ is filled, and the surface of the filler is smoothed with a squeegee (not shown). By drying the ceramic paste at 100 to 250 ° C., the gap 1 in the hardened layer 13 is reduced.
The ceramic green ribs 17 are formed on the substrate 2.

The structure in which the hardened layer 13 and the ceramic green rib 17 are formed on the substrate 10 is placed in the air at 500 to
Heat treatment at 600 ° C. for 10 to 60 minutes (firing of the ceramic green rib 17). As a result, the ceramic green ribs 17 are fired and the hardened layer 13 made of an organic polymer disappears due to heat. By washing the substrate 10 with acetone or the like, a height H of about 150 to 2
A ceramic rib 18 having a thickness of 00 μm and a width W of about 30 to 100 μm is formed. The interval between the ribs 18, that is, the width S of the cell 19 is formed to be about 100 to 300 μm.
The value obtained by dividing the height H of the paste after repeated application by its width W is about 150/100 = about 1.5 at the maximum and about 1 at the minimum.
Since the thickness is as small as 50/300 = about 0.5, the ribs can be formed easily, easily, and accurately, with less paste dripping after thick film printing.

FIG. 2 shows a second embodiment of the present invention.
2, the same reference numerals as those in FIG. 1 indicate the same parts. In this embodiment, a ceramic resist having a viscosity of 100 to 5000 ps including an oxide powder, an organic binder and a solvent is aligned in a predetermined pattern on a glass substrate 10 by a thick film printing method such as a screen printing method. And print 100
The step of drying at ２５０250 ° C. for 5 to 60 minutes is repeated 5 to 10 times to apply the ceramic resist layer 3 repeatedly.
Form one. As the oxide powder, SiO ₂ , Al ₂
It is preferable to use an oxide powder mainly containing one or more oxides selected from the group consisting of O ₃ , TiO ₂ and ZrO, and it is preferable to use ethyl cellulose, acrylic, or the like as the organic binder. It is preferable to use terpineol, butyl carbitol, turpentine oil and the like as the solvent.

When the oxide powder contains glass, a glass having a softening point of 600 ° C. or higher is used. When the oxide powder does not contain glass, an oxide having a sintering temperature of 600 ° C. or higher is used. The average particle size of the oxide powder is 0.1 to 50
μm, and more preferably within a range of 2 to 10 μm. The average particle size of the oxide powder was limited to the above range,
If the average particle size is less than 0.1 μm, it is difficult to make a paste, and if the average particle size exceeds 50 μm, the screen printing accuracy is deteriorated.

The ceramic resist layer contains 40 to 80% by weight, preferably 50 to 70% by weight of an oxide powder. The mixing ratio of the oxide powder, the other organic binder and the solvent is by weight ratio: oxide powder: organic binder: solvent = (40-80) :( 30-5) :( 30-5), and the oxide powder : Organic binder: solvent = (50 to 70):
(20 to 10): (20 to 10) is preferable. When the oxide powder occupies a value of 80% by weight or close to 80% by weight or less, it is blended so that the total value of the organic binder and the solvent is 20% by weight or close to 20% by weight or more. If the amount of the oxide powder is less than 40% by weight, that is, if the total amount of the organic binder and the solvent exceeds 60% by weight, the ribs after firing become porous and brittle. If the amount of the oxide powder exceeds 80% by weight, that is, if the total of the organic binder and the solvent is less than 20% by weight, screen printing cannot be performed due to high viscosity.

Next, after filling the same ceramic paste as in the first embodiment into the gap 12 of the ceramic resist layer 31, the paste is cooled to 100 to 250 ° C. for 5 to 5 minutes.
The ceramic green rib 17 is formed in the gap 12 of the ceramic resist layer 31 by heating and drying for 60 minutes. Further, the structure in which the ceramic resist layer 31 and the ceramic green rib 17 are formed on the substrate 10 is heated to 500 to 600 ° C. for 10 to 60 ° C. similarly to the first embodiment.
After the heat treatment (baking of the ceramic green ribs 17) for a period of one minute, the ceramic resist layer 31 is removed by ultrasonic cleaning. At this time, the organic binder in the ceramic resist layer 31 burns out and disappears when the ceramic green rib 17 is fired, and the oxide powder in the ceramic resist layer 31 does not soften or sinter. Since it is powdered, this ceramic resist layer 3
1 can be quickly removed by ultrasonic cleaning or the like after the baking of the rib 17.

As a result, the same ceramic ribs 18 as in the first embodiment are formed on the substrate 10. Since oxide powder is dispersed in the ceramic resist layer 31 and has relatively high rigidity, the ceramic resist layer 31 is less likely to sag than the thermosetting resin layer after the thick-film printing of the first embodiment. As a result, the ceramic ribs 18 can be formed more accurately than in the first embodiment.

FIG. 3 shows a third embodiment of the present invention.
3, the same reference numerals as those in FIG. 1 indicate the same parts. In this embodiment, a metal paste having a viscosity of 100 to 5000 ps containing a metal powder, an organic binder and a solvent is aligned on a glass substrate 10 in a predetermined pattern by a thick film printing method such as a screen printing method. Print 100-250
The step of drying at 5 [deg.] C. for 5 to 60 minutes is repeated 5 to 10 times, and the metal resist layer 51 is formed by repeatedly applying.
As the metal powder, it is preferable to use a metal powder containing one or more metals selected from the group consisting of Ag, Au, Ni and Cu as main components, and the organic binder and the solvent are used in the second embodiment. The same organic binder and solvent in the form are used.

The softening point of the metal is 600 ° C. or higher.
The average particle size of the metal powder is 0.1 to 50 μm.
It is preferable that it is in the range of 0 to 10 μm. The reason for this limitation is the same as the reason for limitation in the second embodiment. The metal resist layer contains 40 to 80% by weight, preferably 50 to 70% by weight of metal powder. The mixing ratio of the metal powder, the other organic binder and the solvent is by weight ratio: metal powder: organic binder: solvent = (40-80):
(30-5): (30-5), and further, metal powder: organic binder: solvent = (50-70): (20-10): (20
To 10). When the metal powder occupies a value of less than or equal to 80% by weight, the metal powder is blended so that the total value of the organic binder and the solvent is 20% by weight or more than 20% by weight. The reason for this limitation is the same as the reason for limitation in the second embodiment.

Next, a ceramic paste is filled in the gap 12 of the metal resist layer 51 in the same manner as in the second embodiment.
After drying and baking, the metal resist layer 51 is removed by ultrasonic cleaning. At this time, the organic binder in the metal resist layer 51 burns out during the firing of the ceramic green rib 17 and disappears, and the metal powder in the metal resist layer 51 is powdered without being softened. The metal resist layer 51 can be quickly removed by baking the ribs 17 by ultrasonic cleaning or the like. As a result, the second
Ceramic ribs 18 similar to those of the embodiment are formed. Since metal powder is dispersed in the metal resist layer 51 and has relatively high rigidity, the metal resist layer 51 is less likely to sag than the thermosetting resin layer after thick-film printing of the first embodiment. As a result, the ceramic ribs 18 can be formed more accurately than in the first embodiment.

[0020]

Next, examples of the present invention will be described in detail together with comparative examples. The respective ceramic ribs of Examples 1 to 3 and Comparative Example 1 described below were formed based on the respective target values in order to obtain ceramic ribs having the same shape. <Example 1> As shown in FIG. 1, a paste containing a thermosetting resin of an acrylic resin having a viscosity of 1000 ps was aligned on a soda lime glass substrate 10 in a predetermined pattern by a screen printing method. And print 15
The step of drying at 0 ° C. for 10 minutes was repeated seven times to perform recoating. The thickness of one application was set so that the height H of the cured layer 13 after curing of the thermosetting resin described later was 200 μm.
Thereby, the thermosetting resin layer 11 having a predetermined gap 12
Was formed. After the resin layer 11 is heated to 150 ° C. for 10 minutes to form a hardened layer 13, a predetermined gap 12 of the hardened layer 13 contains glass powder mainly composed of SiO ₂ and PbO and Al ₂ O ₃ powder. A 300 ps ceramic paste was filled, and the surface of the filler was smoothed with a squeegee (not shown).

This ceramic paste is heated at 150 ° C. for 10 minutes.
By drying for minutes, the ceramic green ribs 17 were formed in the gaps 12 of the hardened layer 13. The structure having the cured layer 13 and the ceramic green ribs 17 formed on the substrate 10 was heat-treated at 520 ° C. for 30 minutes in the air. As a result, the ceramic green ribs 17 were fired and the cured layer 13 made of an organic polymer disappeared due to heat. By cleaning the substrate 10 with acetone, a ceramic rib 18 having a height H of about 200 μm and a width W of about 100 μm was formed on the substrate 10. The distance between the ribs 18;
That is, the width S of the cell 19 was about 300 μm.

<Embodiment 2> As shown in FIG. 2, a ceramic resist having a viscosity of 2000 ps containing an oxide powder, an organic binder and a solvent is placed on a soda lime glass substrate 10 in a predetermined pattern by a screen printing method. The process of combining, printing, and drying at 150 ° C. for 10 minutes was repeated eight times to recoat. The oxide 40 wt% -SiO ₂ as powder, 30 wt% -Al ₂ O _3, 20 wt% -P
Glass powder (softening point 800 ° C.) having a composition of bO and 10% by weight-CaO and having an average particle size of 5 μm was used, ethyl cellulose was used as an organic binder, and butyl carbitol was used as a solvent. Also oxide powder,
The ratio of the organic binder and the solvent is 65: 20: 1 by weight.
It was 5. Thus, a ceramic resist layer 31 having a predetermined gap 12 was formed. One coating thickness was set so that the height H of the ceramic resist layer 31 was 200 μm.

Next, a predetermined gap 12 of the ceramic resist layer 31 is filled with a 100 ps ceramic paste containing glass powder mainly composed of SiO ₂ , ZnO and PbO and Al ₂ O ₃ powder, and the filler is filled with a squeegee (not shown). Was smoothed. 150 ° C of this ceramic paste
Then, the ceramic green ribs 17 were formed in the gaps 12 of the ceramic resist layer 31 by drying for 10 minutes. Further, the structure in which the ceramic resist layer 31 and the ceramic green rib 17 were formed on the substrate 10 was heat-treated at 580 ° C. for 30 minutes in the air, and then the ceramic resist layer 31 was removed by ultrasonic cleaning. As a result, the height H is about 200 μm and the width W is about 100 μm on the substrate 10.
Was formed.

<Embodiment 3> As shown in FIG. 3, a metal resist having a viscosity of 1500 ps containing a metal powder, an organic binder and a solvent is aligned on a soda lime glass substrate 10 in a predetermined pattern by a screen printing method. The process of printing and drying at 150 ° C. for 10 minutes was repeated eight times to perform recoating. Ag powder having an average particle size of 3 μm was used as the metal powder, ethyl cellulose was used as the organic binder, and butyl carbitol was used as the solvent. The ratio of the metal powder, the organic binder and the solvent was 65:20:15 by weight. Thus, a metal resist layer 51 having a predetermined gap 12 was formed. One application thickness was set so that the height H of the metal resist layer 51 was 200 μm.

Next, a predetermined gap 1 of the metal resist layer 51 is set.
2 was filled with a 130 ps ceramic paste containing glass powder mainly composed of SiO ₂ , ZnO and PbO and Al ₂ O ₃ powder, and the surface of the filler was smoothed with a squeegee (not shown). This ceramic paste is heated at 150 ° C for 10
By drying for 1 minute, the gap 1 of the metal resist layer 51 is removed.
The ceramic green ribs 17 were formed on the substrate 2. Further, after the structure on which the metal resist layer 51 and the ceramic green rib 17 are formed on the substrate 10 is heat-treated at 580 ° C. for 30 minutes in the air, the metal resist layer 5 is subjected to ultrasonic cleaning.
1 was removed. As a result, the height H is about 20 on the substrate 10.
The ceramic rib 18 having a thickness of 0 μm and a width W of about 100 μm was formed.

Comparative Example 1 As shown in FIG. 4, a rib-forming paste 2 containing a glass powder, an organic binder and a solvent and having a viscosity of 2000 ps was formed on a soda-lime glass substrate 1.
Was repeatedly aligned 12 times by a screen printing method and printed at 150 ° C. for 10 minutes. This overcoating was set so that the height H of the ceramic green rib 2 was 200 μm. As the rib forming paste, SiO ₂ , ZnO
And a glass powder containing PbO as a main component and an Al ₂ O ₃ powder. Ethyl cellulose was used as the organic binder, and α-terpineol was used as the solvent.
Thus, the ceramic green ribs 2 were formed at predetermined intervals (the width S of the cell 9). Next, the structure having the ceramic green ribs 2 formed on the substrate 1
By performing a heat treatment at 80 ° C. for 30 minutes, a ceramic rib 8 having a height H of about 200 μm and a width W of about 100 μm was formed on the substrate 1.

<Comparative Test and Evaluation> The widths of ten ceramic ribs on the substrates of Examples 1 to 3 and Comparative Example 1 formed based on the respective target values were measured as follows. Height when the ceramic rib height was H (1/2) the width W _C of the ribs at the H, the height (3/4) the width W _M of the ribs at the H, the height ( 9/10) Rib width W _{T at} H
And were respectively measured. Also after calculating the average value of these measurements, determine the respective differences of W _M and W _T for W _C, it was calculated the ratio W _C of W _M and W _T. Table 1 shows the results.

[0028]

[Table 1]

As is apparent from Table 1, while the respective differences in W _M and W _T for W _C in Examples 1-3 was 2% or less of W _C, for the W _C Comparative Example 1 The difference between W _M and W _C was as small as 2% of W _C , but the difference between W _T and W _C was W _C
Was as large as 4%. That is, the accuracy of the ceramic ribs was higher in Examples 1 to 3 than in Comparative Example 1.

[0030]

As described above, according to the present invention, a thermosetting resin layer formed on a glass substrate is heated to form a hardened layer, and a ceramic containing glass powder is provided in a predetermined gap of the hardened layer. The ceramic green ribs were formed by filling and drying the paste, and the ceramic green ribs were baked and the cured layer was erased at the same time as the ceramic ribs were formed on the substrate. Compared to the conventional thick film printing method, or the conventional method of exposing for forming a resist layer, the conventional method of removing the part to be a cell through a complicated process such as development by sandblasting, the method of the present invention is less Ceramic ribs can be formed simply and accurately with no waste of material in the process. As a result, plasma display panels, liquid crystal display devices,
Efficient mass production of ceramic ribs serving as insulating protection layers formed on partition walls and bus electrodes of light emitting cells in the manufacturing process of fluorescent display devices, hybrid integrated circuits, and the like can be achieved.

When a ceramic resist containing an oxide having a softening point or a sintering temperature of 600 ° C. or more is used in place of the thermosetting resin, the ceramic resist layer formed by thick-film printing of the ceramic resist has an oxide. Since the powder is dispersed and has relatively high rigidity, it is more difficult to drop than the thermosetting resin layer. As a result, the ceramic ribs can be formed with higher precision than when the thermosetting resin is used. Particularly, the ceramic resist layer is made of SiO ₂ , Al ₂ O ₃ ,
One or two selected from the group consisting of TiO ₂ and ZrO
When an oxide powder containing at least one kind of oxide as a main component, an organic binder, and a solvent are included, and the oxide powder is included in the ceramic resist layer in an amount of 40 to 80% by weight, the effect is improved by improving the accuracy of the ceramic rib. is there.

The softening point is 600 instead of the thermosetting resin.
If a metal resist containing a metal of at least ℃ is used, metal powder is dispersed in the metal resist layer formed by thick-film printing of the metal resist and has relatively high rigidity. Who will be harder. As a result, the ceramic ribs can be formed with higher precision than when the thermosetting resin is used. In particular, when the metal resist layer is made of Ag or Au
And a metal powder mainly composed of one or more metals selected from the group consisting of Cu and Cu, an organic binder, and a solvent.
When the weight percentage is included, the effect is improved by improving the accuracy of the ceramic rib.

Furthermore ceramic rib formed by the method of the present invention, the height (1/2) width W _C of the ribs at the H, the height (3/4) the width of the rib at the H W _M and height (9/10) when the width of the rib at the H and W _T, 2% of each of the difference W _M and W _T for W _C is W _C
As described below, an extremely accurate ceramic rib can be obtained.

[Brief description of the drawings]

FIG. 1 is a sectional view showing the formation of ceramic ribs according to a first embodiment and an example 1 of the present invention in the order of steps.

FIG. 2 is a sectional view showing the formation of ceramic ribs according to a second embodiment and an example 2 of the present invention in the order of steps.

FIG. 3 is a sectional view showing the formation of ceramic ribs according to a third embodiment and an example 3 of the present invention in the order of steps.

FIG. 4 is a sectional view showing the formation of a conventional ceramic rib in the order of steps.

FIG. 5 is a sectional view showing the formation of another conventional ceramic rib in the order of steps.

[Explanation of symbols]

 Reference Signs List 10 glass substrate 11 thermosetting resin layer 12 gap 13 cured layer 17 ceramic green rib 18 ceramic rib 31 ceramic resist layer 51 metal resist layer

 ────────────────────────────────────────────────── ─── Continuing from the front page (72) Inventor Akira Nishihara 1-297 Kitabukurocho, Omiya City, Saitama Prefecture Mitsubishi Materials Corporation Research Laboratory

Claims (8)

[Claims] 1. A thermosetting resin layer (11) on a glass substrate (10).
Is formed by a thick film printing method so as to have a predetermined gap (12), the resin layer (11) is heated to form a cured layer (13), and a predetermined gap (12) of the cured layer (13) is formed. Filling a ceramic paste containing glass powder, drying the paste to form a ceramic green rib (17), then firing the ceramic green rib (17) and simultaneously disappearing the hardened layer (13), Ceramic ribs (18) on substrate (10)
Forming a ceramic rib. 2. A ceramic resist containing an oxide having a softening point or a sintering temperature of 600 ° C. or more is printed on a glass substrate (10) by a thick film printing method so as to have a predetermined gap (12), and is dried. By repeating the process, the ceramic resist layer
(31), a predetermined gap (12) of the ceramic resist layer (31) is filled with a ceramic paste containing glass powder, and the paste is dried to form a ceramic green rib (1).
7), and the ceramic green rib (17) is further
Forming a ceramic rib (18) on the substrate (10) by removing the ceramic resist layer (31) powdered during the firing after firing at 00 to 600 ° C. Forming method. 3. The ceramic resist layer is made of SiO ₂ , Al ₂
O _3, an oxide powder as a main component one or more oxides selected from TiO ₂ and the group consisting of ZrO, and an organic binder, forming the ceramic ribs according to claim 2, further comprising a solvent Method. 4. The method according to claim 2, wherein the ceramic resist layer contains 40 to 80% by weight of an oxide powder. 5. A step of printing a metal resist containing a metal having a softening point of 600 ° C. or more on a glass substrate (10) by a thick film printing method so as to have a predetermined gap (12), and drying the metal resist. A metal resist layer (51) is formed, a predetermined gap (12) of the metal resist layer (51) is filled with a ceramic paste containing glass powder, and the paste is dried to form a ceramic green rib (17). Further, after firing the ceramic green rib (17) at 500 to 600 ° C., the metal resist layer (53) powdered at the time of firing is removed, thereby forming the ceramic rib (18) on the substrate (10). A method for forming a ceramic rib. 6. The metal resist layer contains a metal powder mainly containing one or more metals selected from the group consisting of Ag, Au and Cu, an organic binder, and a solvent. Method of forming ceramic ribs. 7. The metal resist layer contains 40 to 8 metal powders.
7. The method for forming a ceramic rib according to claim 5, wherein the content is 0% by weight. 8. A ceramic rib (18) formed on a glass substrate (10), wherein the height of the rib (18) is H, and the height of the rib (18) at a height (１ ／) H is when width W _C, the width of the height (3/4) width W _M and the height of the ribs at the H (18) (9/10) ribs at the H (18) and W _T, 2% of the respective difference in W _M and W _T for the W _C is W _C
A ceramic rib characterized by the following.