JPH11281364A - 圧電振動ジャイロ - Google Patents
圧電振動ジャイロInfo
- Publication number
- JPH11281364A JPH11281364A JP10079869A JP7986998A JPH11281364A JP H11281364 A JPH11281364 A JP H11281364A JP 10079869 A JP10079869 A JP 10079869A JP 7986998 A JP7986998 A JP 7986998A JP H11281364 A JPH11281364 A JP H11281364A
- Authority
- JP
- Japan
- Prior art keywords
- arm
- detection
- piezoelectric
- drive
- driving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000001514 detection method Methods 0.000 claims abstract description 49
- 230000008878 coupling Effects 0.000 abstract description 5
- 238000010168 coupling process Methods 0.000 abstract description 5
- 238000005859 coupling reaction Methods 0.000 abstract description 5
- 238000010586 diagram Methods 0.000 description 8
- 230000035945 sensitivity Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Gyroscopes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10079869A JPH11281364A (ja) | 1998-03-26 | 1998-03-26 | 圧電振動ジャイロ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10079869A JPH11281364A (ja) | 1998-03-26 | 1998-03-26 | 圧電振動ジャイロ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11281364A true JPH11281364A (ja) | 1999-10-15 |
| JPH11281364A5 JPH11281364A5 (enExample) | 2005-09-15 |
Family
ID=13702229
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10079869A Withdrawn JPH11281364A (ja) | 1998-03-26 | 1998-03-26 | 圧電振動ジャイロ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11281364A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008249491A (ja) * | 2007-03-30 | 2008-10-16 | Tdk Corp | 角速度センサ素子および角速度センサ装置 |
| CN102118142A (zh) * | 2010-01-05 | 2011-07-06 | 精工爱普生株式会社 | 振动元件、振子以及电子设备 |
-
1998
- 1998-03-26 JP JP10079869A patent/JPH11281364A/ja not_active Withdrawn
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008249491A (ja) * | 2007-03-30 | 2008-10-16 | Tdk Corp | 角速度センサ素子および角速度センサ装置 |
| CN102118142A (zh) * | 2010-01-05 | 2011-07-06 | 精工爱普生株式会社 | 振动元件、振子以及电子设备 |
| JP2011158464A (ja) * | 2010-01-05 | 2011-08-18 | Seiko Epson Corp | 振動素子、振動子、および電子機器 |
| US8640540B2 (en) | 2010-01-05 | 2014-02-04 | Seiko Epson Corporation | Vibrating element, vibrator, and electronic apparatus |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20050325 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20050325 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20060531 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20060606 |
|
| A761 | Written withdrawal of application |
Free format text: JAPANESE INTERMEDIATE CODE: A761 Effective date: 20060802 |