JPH11258779A - Device and method for laminating pellicle liner - Google Patents

Abstract

PROBLEM TO BE SOLVED: To laminate a pellicle frame to a pellicle liner with high positional accuracy by providing the laminating device with a driving means for detecting the positions of respective edge parts of the pellicle frame and the pellicle liner and changing the position of one of the frame and the liner in accordance with these detected results. SOLUTION: The positions of respective edge parts of a pellicle frame 2 and a pellicle liner 5 are simultaneously detected by six cameras 11 arranged on the whole periphery of the frame 2 and detected results are fed back to a driving means (XYZθ stages) 14. The position of the frame 2 is adjusted by the means 14 so that the extruded quantity of the liner 5 from the frame 2 is uniform on the whole circumference. Then the frame 2 held by a pellicle hand 13 is moved down to the Z direction by using the means 14 and laminated to the liner 5. A laser displacement gage or the like can be also used as a position detecting means.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pellicle liner bonding apparatus and method used for manufacturing a pellicle for lithography (hereinafter, referred to as a pellicle).

[0002]

2. Description of the Related Art In the manufacture of semiconductor devices such as LSIs and VLSIs or liquid crystal display panels, when a semiconductor wafer or a liquid crystal original plate is irradiated with light to form a pattern,
If dust adheres to the original exposure plate, the dust bends or absorbs the light. As a result, the transferred patterning is deformed, the edges are roughened, and the base is stained black, thereby impairing the dimensions, quality, appearance, and the like, resulting in a decrease in product performance and yield. For this reason, the work of creating a pattern is usually performed in a clean room. However, even in a clean room, it is difficult to always keep the original exposure plate clean,
The adhesion of dust is prevented by attaching a pellicle that allows light for exposure (substantially 500 nm or less) to pass well to the surface of the original exposure plate.

FIGS. 3A and 3B are schematic diagrams showing a general pellicle, wherein FIG. 3A is a schematic plan view, and FIG. 3B is a schematic cross-sectional view taken along the line AA ′ in FIG. As can be seen from FIG. 3, a general pellicle has a pellicle film 1 bonded via an adhesive 3 applied to an upper end surface of a pellicle frame 2, and a mask adhesive 4 on a lower end surface of the pellicle frame 2. Is applied, and a pellicle liner 5 is adhered to the surface thereof to protect the mask adhesive 4. A general pellicle liner has a release agent applied to the surface of a substrate made of PET or the like, and has a thickness of about 0.1 mm and a frame shape.
A pellicle liner tab 6 (generally, 10 × 10 mm) provided at one corner of the pellicle liner 5
This is for facilitating the peeling of the pellicle liner 5.

[0004]

The pellicle must be free of foreign matter for the purpose of use. For this reason, in the pellicle manufacturing process, great care is taken to prevent foreign matter from adhering to the pellicle as the final product. The same applies to the step of attaching the pellicle liner to the pellicle frame. If the pellicle frame or the pellicle liner is strongly handled, or the contact portion is increased, foreign substances will immediately adhere to the product. Therefore, conventionally, in order to attach the pellicle liner to the pellicle frame,
Positioning is performed using a pellicle hand that contacts and grips a hole provided on the side surface or side surface of the frame, and for a pellicle liner, lightly touches a reference piece provided on a stand on which the liner is set to perform positioning. Are bonded at a low speed. However, since this conventional method cannot cope with a dimensional error between the pellicle frame and the pellicle liner, it is not easy to make the positional relationship between the two uniform. Further, if the pellicle frame and the pellicle liner are stuck together with vague positioning so as not to worry about the adhesion of foreign matter, a product having a non-uniform positional relationship between the pellicle frame and the pellicle liner will be produced. For example, FIG. 4 shows a pellicle in a pellicle liner position defect state. As shown in FIG. 4, if the pellicle liner 5 is shifted leftward from an appropriate position with respect to the pellicle frame 2, and the edge of the pellicle liner 5 is located significantly inside the edge of the pellicle frame 2, The mask adhesive 4 is exposed and does not play a role of protection. That is, a portion where the pellicle liner 5 does not protect the mask adhesive 4 is generated. As a result, as shown in FIG. 6B, while the pellicle liner 5 is housed in the pellicle container, the mask adhesive 4 is removed from the container body 32. This may cause a situation in which the adhesive is incorrectly adhered. Also, as shown in FIG.
If the pellicle liner 5 protrudes excessively from the pellicle frame 2, when the pellicle is taken out of the container body 32, the pellicle liner 5 and the locking portion of the container provided for locking the pellicle in the lateral direction are locked. The frictional resistance increases, and the possibility of dust generation increases. Further, since the positional relationship between the container and the pellicle frame becomes non-uniform, it becomes impossible to cope with an apparatus such as an auto mounter which indirectly positions the pellicle frame by positioning the container.

[0005]

As a result of various studies to solve the above problems, the present inventor has detected the positions of the edge of the pellicle frame and the edge of the pellicle liner,
The obtained result is fed back to the driving means, and the position is corrected so as to have a uniform positional relationship over the entire periphery of the pellicle frame. Then, by bonding the two together, the edge from the pellicle frame edge to the pellicle liner edge is bonded. It has been confirmed that the distance can be controlled uniformly around the entire circumference. That is,
The present invention changes the position of at least one of a pellicle frame and a pellicle liner in accordance with a result obtained by the position detecting means for detecting the position of each edge of the pellicle frame and the pellicle liner. A pellicle liner laminating apparatus having a driving unit, and detecting a position of each edge of the pellicle frame and the pellicle liner, and changing at least one of the pellicle frame and the pellicle liner according to an obtained result. A pellicle liner bonding method using the pellicle liner bonding apparatus described above.

The position detecting means only needs to be able to measure the changed position in a non-contact manner so that no dust is generated at the time of detection.
Examples include a camera, a laser displacement meter, and an ultrasonic displacement meter.

[0007]

Next, the present invention will be described in more detail with reference to the drawings. As shown in FIG. 1, the pellicle liner laminating apparatus according to one embodiment of the present invention includes a camera 11, an illumination 12, a pellicle hand 13 that holds the pellicle frame 2, and a driving unit that adjusts the position of the pellicle hand 13 ( XYZθ stage) 14.

When the frame has a rectangular shape, the camera 11 and the illumination 12, which are position detecting means for detecting the positions of the respective edges of the pellicle frame 2 and the pellicle liner 5, have both the pellicle frame around the pellicle frame. It is necessary to provide a total of at least five places, that is, two places or more on one side and one place or more on each other side. Even when the frame has a circular shape, it is necessary to provide three or more equally spaced intervals so as to sandwich the pellicle frame around the pellicle frame. The reason why two or more cameras are required on a given side when the frame has a rectangular shape is to correct the angle between the pellicle frame and the pellicle liner. The resolution of the camera 11 and the illuminance of the illumination 12 are not particularly limited and can be freely selected according to the required bonding accuracy, but a combination having a resolution of 10 μm or more is preferable.

The pellicle hand 13 has a structure in which a parallel arm that opens and closes sandwiches the pellicle, and a contact portion provided on the arm contacts a side surface of the frame or a hole provided on the side surface of the frame, so that the pellicle frame 2 is opened.
Hold. As for the material of the pellicle hand 13, if the pellicle hand 13 is deformed by itself, a trouble such as disconnection from the pellicle frame 2 or the pellicle liner 5 is caused. It is important that it has a proper strength and that no rust or foreign matter is generated. Materials satisfying such conditions include aluminum alloys such as duralumin,
Metals such as stainless steel and iron, resins such as acrylic resin, polycarbonate resin and Teflon resin or silicon nitride,
Ceramics such as alumina can be used. However, the material of the connection portion with the pellicle frame 2 or the pellicle liner 5 is low dust generation such as polyimide resin, acrylic resin, polycarbonate resin, Teflon resin, nylon resin, etc. from the viewpoint of preventing the pellicle frame 2 from being scratched or dusted. It is desirable to use a conductive resin or ceramics such as silicon nitride and alumina.

The driving means (XYZθ stage) 14 is connected to the pellicle hand 13 and is not limited in terms of its driving method and the like as long as at least one of the pellicle frame 2 and the pellicle liner 5 can be adjusted in the XYZθ direction. It can be freely selected according to the required bonding accuracy, but one having a positional accuracy of 10 μm or more is preferable.

The material and shape of the pellicle liner 5 to be attached to the pellicle frame 2 are not particularly limited. However, if the color tone is a transparent or translucent type such as an OHP sheet, the pellicle frame 2 and the pellicle liner 5 can be connected to the camera 11. When viewed simultaneously, the contrast between the edge of the pellicle frame and the edge of the pellicle liner becomes clear, so that it is not necessary to separately measure the position of the pellicle frame 2 and the pellicle liner 5, and the amount of protrusion can be easily detected. .

The pellicle liner 5 is bonded to the pellicle frame 2 using the pellicle liner bonding apparatus according to the present embodiment as follows. The position of each edge of the pellicle frame 2 and the pellicle liner 5 is set to six cameras 11 arranged on the entire periphery of the pellicle frame.
At the same time, and the obtained result is fed back to the driving means (XYZθ stage) 14. Driving means (XYZθ stage) 14 so that the amount of protrusion of pellicle liner 5 from pellicle frame 2 becomes uniform over the entire circumference.
To adjust the position of the pellicle frame 2. afterwards,
The pellicle frame 2 held by the pellicle hand 13 is lowered in the Z direction using the driving means (XYZθ stage) 14 and bonded to the pellicle liner 5.

FIG. 2 shows an example of a pellicle liner bonding apparatus according to another embodiment of the present invention. The apparatus of the present embodiment includes a transmission type laser displacement meter light emitting unit 21 for detecting the position of the pellicle frame 2, a light receiving unit 22, a pellicle hand 23, and a driving unit (XYZθ stage) 24 for adjusting the position of the pellicle hand 23, a pellicle. It is composed of a transmission type laser displacement meter light emitting unit 25 for detecting the position of the liner 5 and a light receiving unit 26. The pellicle frame position detecting laser displacement meter light emitting unit 21 and the light receiving unit 22 for detecting the position of the pellicle frame 2 are configured such that, when the shape of the frame is a quadrangle, the pellicle frame is sandwiched between the two around the pellicle frame. It is necessary to provide at least two places on one side and at least one place on each of the other sides, for a total of at least five places. Even if the frame shape is circular, put the pellicle frame around the pellicle frame between them,
It is necessary to provide three or more at equal intervals. The reason why two or more cameras are required on a given side when the frame shape is a quadrangle is to correct the angle of the pellicle frame. The laser displacement meter light emitting section 21 has a function of emitting a band-shaped laser light, and the light receiving section 22 emits the laser displacement meter light emitting section 21 and is partially blocked by a frame and reaches the light receiving side. It is necessary to have a function of detecting the laser light and measuring the position of the frame from the length of the band of the light that has arrived. Further, the pellicle liner position detecting laser displacement meter light emitting unit 25 and the light receiving unit 26 for detecting the position of the pellicle liner 5 are arranged so that the pellicle liner is sandwiched between the two when the shape of the liner is square. Therefore, it is necessary to provide at least two locations on one side and at least one location on each of the other sides, for a total of at least five locations. Even when the shape of the liner is circular, three or more pellicle liners need to be provided at equal intervals so as to sandwich the pellicle liner around the liner. The reason why two or more cameras are required on one side when the shape of the liner is square is to correct the angle of the pellicle liner. The laser displacement meter light emitting section 21 has a function of emitting a band-shaped laser light, and the light receiving section 22 is emitted from the laser displacement meter light emitting section 21 and partially cut off by the liner to reach the light receiving side. It is necessary to have a function of detecting laser light and measuring the position of the liner from the length of the band of the light that has arrived. When the above-described laser displacement meter is used as a position detecting means for detecting the position of each edge of the pellicle frame 2 and the pellicle liner 5, unlike the camera, the surface state and transmittance of the frame and the liner are not relatively required. It is preferred in that respect. Other components may be the same as those described above.

The bonding of the pellicle liner 5 to the pellicle frame 2 using the pellicle liner bonding apparatus of the present embodiment is performed as follows. The band-like laser light emitted from the pellicle frame position detecting laser displacement meter light emitting unit 21 installed on the upper part of the pellicle frame 2 is partially blocked by the edge of the pellicle frame 2 and installed on the lower part of the pellicle frame 2. The received pellicle frame position detecting laser displacement meter light receiving unit 22 receives the light. Of the band-shaped laser light emitted from the laser displacement meter light emitting unit 21, the portion blocked by the pellicle frame 2 does not reach the laser displacement meter light receiving unit 22 and the portion not blocked by the pellicle frame 2. Reaches the light receiving section 22. That is, the light receiving section 22 recognizes the boundary between the laser light that has reached and the laser light that has not reached as the edge of the pellicle frame. Thus, the position of the edge of the pellicle frame is detected by the laser displacement meter arranged on the entire periphery of the pellicle frame.

On the other hand, similarly to the pellicle frame 2, the pellicle liner 5 is configured such that the edge of the pellicle liner is positioned at six pellicle liner position detecting laser displacement meter light emitting sections 31 arranged all around the pellicle liner 5. ,
Laser displacement sensor light receiving part 32 for pellicle liner position detection
To detect. Then, after recognizing the positions of both the pellicle frame 2 and the pellicle liner 5, the result is fed back to the driving means (XYZθ stage) 24, and the pellicle hand 23 is driven by the driving means (XYZθ stage) 24.
The pellicle frame 2 held by the above is inverted by 180 degrees in the θ direction and moved on the pellicle liner 5, and the pellicle is driven by the driving means (XYZθ stage) 24 so that the amount of protrusion of the pellicle liner 5 from the pellicle frame 2 becomes uniform over the entire circumference. Adjust the position of the frame 2. After that, the pellicle hand 23 is driven by the driving means (XYZθ stage) 24.
Lower the pellicle frame 2 held in
Affix to pellicle liner 5.

[0016]

EXAMPLES Next, examples of the present invention and comparative examples will be shown, but the present invention is not limited to these examples.

Example 1 A pellicle frame and a pellicle liner were bonded using the pellicle liner bonding apparatus shown in FIG. KP-M for camera 11
2 (trade name, manufactured by Hitachi Electronics Co., Ltd.), and a lens KCM-Z2 (trade name, manufactured by Kenko) was attached to the tip. KTS-100RSV (Kenko)
Light, and the light guide FG6S
-4000F (RB) (manufactured by Kenko, trade name), then the condensing lamp K attached to the tip of the light guide
Light was condensed by LL-101 (trade name, manufactured by Kenko), and the pellicle frame 2 and the pellicle liner 5 were irradiated.
Using this device, a size of 149 × 122 × 6.3 (m
m) Pellicle 6N2H (trade name, manufactured by Shin-Etsu Chemical Co., Ltd.)
After attaching a pellicle liner to the sensor, the detection resolution is 1 μm
The amount of protrusion of the pellicle liner at the locations indicated by a to f in FIG. 5 was measured using an automatic dimension measuring device (Shin-Etsu Engineering Co., Ltd.) (n = 10). As a result, as shown in Table 1, in all the pellicles, the variation 3σ of the protruding amount at six points on the entire circumference was within 0.030 mm. The pellicle liner edge did not come inside the pellicle frame edge at all.

[0018]

[Table 1]

Example 2 A pellicle frame and a pellicle liner were bonded using the pellicle liner bonding apparatus shown in FIG. As the laser displacement meter for detecting the position of the pellicle liner, LS-5040 (controller unit LS-5000, manufactured by Keyence Corporation, trade name) was used. Using this device, the size is 149 × 122 × 6.
After attaching a pellicle liner to a 3 (mm) Shin-Etsu pellicle 6N2H (described above), using an automatic dimension measuring device (manufactured by Shin-Etsu Engineering Co., Ltd.) having a detection resolution of 1 μm, FIG.
The pellicle liner protruding amounts at the points indicated by a to f were measured (n = 10). As a result, as shown in Table 2, each of the pellicles had a variation 3σ in the protruding amount at six points on the entire circumference within 0.030 mm. The pellicle liner edge did not come inside the pellicle frame edge at all.

[0020]

[Table 2]

[0021]

According to the present invention, the pellicle frame and the pellicle liner can be bonded with high positional accuracy.

[Brief description of the drawings]

FIG. 1A is a plan view of a pellicle bonding apparatus (camera system) of the present invention, and FIG. 1B is a side view.

FIG. 2A is a plan view of a pellicle bonding apparatus (laser displacement meter system) of the present invention, and FIG. 2B is a side view.

FIG. 3 is a schematic view showing a general pellicle, and FIG.
3 is a schematic plan view, and FIG. 3B is a schematic sectional view taken along line AA ′ in FIG.

FIG. 4 is a schematic diagram of a pellicle (poor pellicle liner position).

FIG. 5 is a diagram showing locations where the amount of protrusion of the pellicle liner is measured.

6A and 6B are diagrams showing a state in which the pellicle is stored in a container, wherein FIG. 6A is a schematic cross-sectional view, FIG.
(C) is an enlarged view of a portion B.

[Explanation of symbols]

Reference Signs List 1 pellicle film 2 pellicle frame 3 adhesive 4 mask adhesive 5 pellicle liner 6 pellicle liner tab 11 camera 12 illumination 13, 23 pellicle hand 14, 24 drive means (XYZθ stage) 21 pellicle frame position detecting laser displacement meter light emitting section 22 Laser displacement meter light receiving part for pellicle frame position detection 25 Laser displacement meter light emitting part for pellicle liner position detection 26 Laser displacement meter light receiving part for pellicle liner position detection 31 Lid 32 Container body 33 Locking part 34 Clip

Claims (4)

[Claims] 1. A position detecting means for detecting the position of each edge of a pellicle frame and a pellicle liner, and at least one of a pellicle frame and a pellicle liner is changed according to a result obtained by the position detecting means. Pellicle liner bonding apparatus having a driving means. 2. The pellicle liner laminating apparatus according to claim 1, wherein the position detecting means is a camera. 3. The pellicle liner bonding apparatus according to claim 1, wherein the position detecting means is a laser displacement meter. 4. The pellicle frame and the pellicle liner according to claim 1, wherein the position of each edge is detected, and at least one of the pellicle frame and the pellicle liner is changed according to the obtained result. A pellicle liner laminating method using the pellicle liner laminating apparatus described in the above.