KR100648244B1 - Control method of pellicle attachment apparatus - Google Patents

Abstract

A method for controlling pellicle attachment apparatus is provided to uniformly adhere pellicle to photo-mask in correct position thereof by indicating control items and values through touch-panel to a user and feed-backing output value of a servo-motor to control the servo-motor. The control method comprises the steps of: (1) loading photo-mask in a mask holder depending on operation of a worker; (2) loading pellicle in a pellicle door depending on the operation; (3) adjusting position of the mask holder by actuating a stepping motor by the worker; (4) determining whether run-start instruction is inputted by the worker; (5) forward driving the pellicle door arm and a back door arm in the mask holder direction by controlling a servo-motor if the instruction is inputted; (6) controlling the servo-motor based on position and velocity data setup by the worker by feeding back output of the servo-motor; (7) adhering pellicle with pressurized pressure through touch-panel when the servo-motor is controlled according to the position and velocity data; and (8) backward driving the pellicle door arm and the back door arm after adhesion of the pellicle.

Description

CONTROL METHOD OF PELLICLE ATTACHMENT APPARATUS}

1 is a block diagram for conceptually explaining a ferrule bonding apparatus according to the present invention;

2 is an operation flowchart for explaining an embodiment of a control method of a pellicle bonding apparatus according to the present invention;

3 is an operation flowchart for explaining another embodiment of a control method of a pellicle bonding apparatus according to the present invention;

4 to 9 are views illustrating a control screen provided to a touch panel for controlling the pellicle bonding apparatus applied to FIG. 1.

*** Explanation of symbols on main parts of drawing ***

10: touch panel 20: controller

30: Servo motor 40: Pericle door arm

50: back door arm 60: X-axis stepping motor

70, 80: Y-axis stepping motor

90: mask holder

100: vision device

The present invention relates to a control method of a pellicle bonding apparatus.

More specifically, the operator can know the control items and control values through the touch panel, and the ferrule bonding device is operated by simple operation, and the servo motor is controlled by feeding back the output value of the servo motor to the photo mask. It relates to a method of controlling a pellicle bonding apparatus for uniformly attaching the cleats.

Photolithography technology is used to manufacture a semiconductor device or a liquid crystal display device, and the process of exposing and transferring the pattern on a photomask or a reticle to a board | substrate using a projection type exposure apparatus is included.

However, as described above, when the integration and miniaturization of the device proceed, defects due to exposure of the foreign matter (dust) adhered on the photomask or the reticle onto the substrate in the exposure process are likely to occur.

As a result, an optically stable transparent polymer thin film (ferric) is attached at a predetermined height from the photomask surface or the reticle surface so that no foreign matter adheres to the photomask surface or the reticle surface on which the pattern is formed.

As described above, when the manual method is applied to the photomask surface or the reticle surface, it is not easy to accurately attach and there is a problem that the uniform force cannot be transmitted.

That is, there is a problem in that the shaking occurs during the attachment process, the uniform adhesion is impossible, the ferrule is not attached vertically.

Therefore, there has been a need for an automatic ferrule bonding device that can be mounted on a photo mask surface or a reticle surface with a certain spacing.

The present invention is devised in response to the requirements of the pellicle device is operated in an automatic manner as described above, the object of the present invention to enable the operator to know the control items and control values through the touch panel, the ferry by simple operation It is to provide a control method of a pellicle gluing device to operate the claw adhesion device, and to control the servo motor by feeding back the output value of the servomotor so that the pellicle is uniformly attached to the photo mask.

In addition, another object of the present invention to provide a control method of a pellicle bonding apparatus to be attached to the correct position when the pellicle is attached to the photo mask using a vision device.

One embodiment of the present invention proposed to solve the above technical problem, in a method of controlling a pellicle bonding apparatus, (1) the process of loading a photo mask in the mask holder in response to the operator's operation; (2) loading the pellicle into the pellicle door in response to the operator's operation; (3) adjusting the position of the mask holder by operating a stepping motor by an operator; (4) determining whether a run start command is input by an operator; (5) controlling the servo motor to advance the ferry door arm and the back door arm toward the mask holder when the run start command is input; (6) receiving the output value of the servo motor and controlling the servo motor according to position and speed data set by an administrator; (7) controlling the servomotor according to the set position and speed data and then attaching the ferrule with the set pressurized pressure through the touch panel; And (8) rotating the servomotor in reverse after attaching the vehicle to drive the rear door arm and the rear door arm backward.

Hereinafter, with reference to the accompanying drawings will be described in detail with respect to the pellicle bonding apparatus.

As shown in FIG. 1, the ferricle bonding device includes a touch panel 10 for allowing an operator to input a command or data by touching an upper portion of the screen, and overall control of the ferry bonding device to an internal memory. It stores a parameter value preset by the operating program and the administrator to control, and controls the entire system so that the ferrule bonding device is driven in accordance with the operating program in response to the operator's command input through the touch panel 10 A controller 20 and a servo motor 30 for driving the forward or reverse drive of the ferry door arm 40 and the back door arm 50 in response to the control of the controller 20, and the control of the controller 20. In response to the X-axis stepping motor 60 and the controller 20 to cause the mask holder 90 to be driven forward or backward or left or right in response. Response is composed of a plurality of Y-axis stepper motor 70, 80 for the mask holder 90 is to be moved up and down.

The operation program stored in the internal memory of the controller 20 loads a photo mask in the mask holder in response to the operator's operation, loads the ferrule in the ferry door in response to the operator's operation, and steps the motor (stepping motor) 60), 70, 80 are operated so that the position of the mask holder 90 is aligned at the correct position, and if the run start command is input by judging whether the run start command is input by the operator, the servo motor 30 ) To allow the ferry door arm 40 and the backdoor arm 50 to be driven forward in the direction of the mask holder 90. The servo motor 30 is controlled by the servo motor 30 based on the position and speed data set by the manager by receiving the output value of the servo motor 30, and the position and speed data of the servo motor 30 is set. When controlled according to the attachment to the fertilizer at the set pressure pressure through the touch panel (10). Then, after the ferrule is attached, the servomotor 30 is rotated in reverse so that the ferry door arm 40 and the back door arm 50 are driven backward.

When the run start command is input by the operator, the operation program receives a pattern alignment key photographing signal input from the vision device 100 and presets the current position of the pattern alignment key printed on the photomask. By comparing the positions of the pattern alignment key by moving the photo mask so that the current position of the pattern alignment key is included in the error range of the preset position and then the pattern alignment key photographing signal input from the vision device 100 If the current position of the pattern alignment key is not included in the error range of the preset position after receiving the input, repeat the process of realigning the photo mask so that the pattern alignment key is included in the error range of the preset position. do.

Thus, the control method of the pellicle bonding apparatus according to the present invention having the configuration as described above is as follows.

First, the controller 20 provided in the pellicle bonding apparatus loads the photo mask on the mask holder in response to the operator's operation as shown in FIG. 2 (S100).

Then, in response to the operator's operation, the vehicle is loaded with a vehicle (S110), the stepping motor is operated by the operator to adjust the position of the mask holder (S120), and it is determined whether the run start command is input by the operator. (S130).

As a result of the determination, when the run start command is input, the controller 20 controls the servo motor 30 to drive the ferry door arm 40 and the back door arm 50 in the direction of the mask holder 90 (S140). .

Then, the controller 20 receives the output value of the servo motor 30 and checks whether the servo motor 30 is controlled according to the position and speed data set by the manager to control the servo motor 30 ( S150).

When the servo motor 30 is controlled according to the set position and speed data, the controller 20 attaches the ferrule to the set pressurized pressure through the touch panel 10 (S160), and then attaches the ferrule to the servo motor. Reverse rotation of the 30 to allow the ferry door arm 40 and the back door arm 50 to be driven backward to return to the original position (S170).

On the other hand, Figure 3 is another embodiment of Figure 2 by adding a vision device 100 in the above embodiment, the detailed description of the same process will be omitted and added vision device ( Only the processes S145 and S147 added by step 100 will be described. The controller 20 receives the pattern alignment key photographing signal printed on the photomask output from the vision device 100 and receives the photomask. The alignment process (S145) is performed.

After performing the photo mask alignment process (S145) and again receiving the pattern alignment key photographing signal through the vision device 100, it is determined whether the alignment is performed (S147). do. That is, the controller 20 may allow the photo mask mounted on the mask holder 90 to be aligned at the correct position.

The process of S145 and S147 will be described in more detail. When the run start command is input by the operator, the controller 20 receives the pattern alignment key photographing signal input from the vision device 100 and is printed on the photomask. Compares the current position of the pattern alignment key with the preset position.

The controller 20 moves and aligns the photo mask so that the current position of the pattern alignment key is included in an error range of a preset position. Then, the pattern alignment key photographing signal inputted from the vision device 100 is input again to determine whether the current position of the pattern alignment key is included in the error range of the preset position.

As a result of the determination, when the pattern alignment key is out of the error range, the controller 20 repeatedly performs the process of realigning the photo mask so that the pattern alignment key is included in the error range of a preset position.

If the current position of the re-entered pattern alignment key is included in an error range of a preset position, the controller 20 switches to the process of attaching the ferrule to the photo mask.

Meanwhile, the controller 20 displays the control screen on the touch panel 10 as shown in FIG. 3 to FIG. 8 to enable the operator to grasp the working status, as well as to the desired mode and the desired value. It can also be adjusted to drive the bonding device.

The control screen will be described in detail with reference to FIGS. 3 to 8 as follows.

First, when the “MAIN” area is touched on the initial screen of FIG. 3, the main screen shown in FIG. 4 is displayed. The main screen, as can be seen in the accompanying drawings Figure 4, the processing number notification window, mask size notification window, subscription time notification window, pressure speed notification window, return speed notification window, pressure pressure notification window and start button (START), stop button (STOP) , Pause button (PAUSE), the number of processing notification window indicates the total number of masks that have been carried out the pericle mounting operation, the mask size notification window indicates the mask size information, the pressurization time notification window masks the pellicle adhesive member The pressurization speed indicates the speed at which the pellicle door arm and the backdoor arm move when the pellicle adhesive is attached to the mask, and the return speed alarm window shows the pellicle door Shows the speed at which the arm and backdoor arm move back to their original position. When mounting the mounting member to the mask indicates the pressure pellicle door arm and the back door arm to apply.

When the "SET-UP" area is touched in the initial screen of FIG. 3, a setup screen as shown in FIG. 5 is displayed. The setup screen allows the setting of parameters described below, as can be seen in FIG. 5.

That is, when the operator selects the desired parameter, the keypad is activated as shown in FIG. 6 and the parameter value can be set using the activated keypad.

The operator can set the pressurization time described in the main screen of FIG. 4, when the moving speed of the pellicle door arm 40 and the back door arm 50 is in the high speed mode, that is, the pellicle door arm 40 and the back door arm. When 50 is moved to the position near the mask, it is possible to set the pressurization speed which is the speed at which the ferry door arm 40 and the back door arm 50 move. In this case, when the moving speeds of the ferry door arm 40 and the back door arm 50 are in the low speed mode, the controller 20 controls the speed of the servo motor 30 to control the ferry door arm 40 and the back door arm 50. Control the speed of movement.

And, the operator can set the pressing speed, the return speed, the pressing pressure using the keypad of FIG.

In addition, in the low speed mode, when the pressurizing pressure is higher than the set pressure when the servo motor 30 is mounted on the mask, the pressure is automatically switched to the process of pressurizing the ferrule adhesive member.

When the "JOG" area is touched in the initial screen of FIG. 3, a jog screen as shown in FIG. 7 is displayed. As shown in FIG. 7, the jog screen enables the operator to drive the ferrule door arm and the back door arm in a desired direction using a button. When the operator mounts the position information (Position) and the ferrule adhesive member to the mask through the jog screen of FIG. 7, the operator can know the position of the ferry door arm 40 and the back door arm 50. Torque information can be inputted to know the pressure applied to the. At this time, the position of the servo motor 30 is controlled by the controller 20.

The jog screen includes an " Origin " button for moving the ferry door arm 40 and the back door arm 50 to the home position, and the left and right movement of the ferry door arm 40 and the back door arm 50. And a " low / high speed " button that can switch the moving speed of the ferry door arm 40 and the back door arm 50 to a low speed mode or a high speed mode.

In addition, as shown in FIG. 8, the jog screen is " ALIGN " which can move the X-axis stepping motor 60 and the two Y-axis stepping motors 70 and 80 mounted on the mask holder to the origin. Enter the button and the "Jog" button and the number that can move the X-axis stepping motor 60 and the two Y-axis stepping motors 70 and 80 mounted on the mask holder in a desired direction in units of um at a low speed. "Numeral Pad" which can move the X-axis stepping motor 60 and two Y-axis stepping motors 70 and 80 mounted in the mask holder by the input distance in a desired direction in units of um at a low speed. It is.

In addition, although not illustrated in the drawing, the touch panel 10 further provides a log screen for outputting log data generated and stored in the process of bonding the ferrule according to the operator's operation.

The present invention is not limited to the above embodiments, and various modifications and changes can be made by those skilled in the art, which are included in the spirit and scope of the present invention included in the appended claims.

The present invention having the configuration and operation and the preferred embodiment as described above allows the operator to know the control items and the control values through the touch panel, to operate the ferrule bonding device with a simple operation, and to feed back the output value of the servomotor. By controlling the servo motor, there is an effect of uniformly attaching the ferrule to the photo mask.

In addition, the present invention has an effect that can be attached to the correct position when the ferricle is attached to the photo mask using a vision device.

Claims (8)

In the control method of the pellicle bonding apparatus, (1) loading the photo mask into the mask holder in response to the operator's manipulation; (2) loading the pellicle into the pellicle door in response to the operator's operation; (3) adjusting the position of the mask holder by operating a stepping motor by an operator; (4) determining whether a run start command is input by an operator; (5) controlling the servo motor to advance the ferry door arm and the back door arm toward the mask holder when the run start command is input; (6) receiving the output value of the servo motor and controlling the servo motor according to position and speed data set by an administrator; (7) if the servomotor is controlled according to the set position and speed data, attaching the ferrule with the set pressure pressure through the touch panel; And (8) Process of reversing the servo motor by rotating the servomotor after the ferrule is attached Control method of the pellicle device, characterized in that provided with. The method of claim 1, When the run start command is input by the operator in the step (5), the current position of the pattern alignment key is preset by comparing the preset position by receiving the pattern alignment key photographing signal input from the vision device. After the photo mask is moved and aligned to be included in the error range of the position, the pattern alignment key photographing signal output from the vision device is input again, and the photo mask is determined to be included in the error range. And repeatedly performing a pattern alignment key to be included in an error range of a predetermined position by repeatedly performing the same. The method of claim 2, wherein the (7) process, The method may further include a process of allowing a pressurization time, a pressurization speed, or a return speed value to be input through the touch panel, and controlling the servo motor according to the input value to drive the ferrule door arm and the backdoor arm. Method of controlling the pellicle bonding device. The method of claim 3, wherein the (7) process, Position information of the movement of the ferry door arm and the back door arm in response to the operator's operation, torque information to indicate the pressure to inform the servo motor when the ferrule adhesive member is mounted on the mask, and alarm information to indicate the alarm information of the servo motor. The control method of the pellicle bonding apparatus further comprising the step of expressing the code information on the touch panel. The method of claim 4, wherein (7) According to the operator's operation further includes the step of expressing the moving button to move the left and right movement button and the back door arm and the return button on the upper part of the touch panel to the top of the touch panel Control method of the bonding device. The method of claim 5, wherein the (7) process, According to the operator's operation is set to a low speed or high speed mode, the mode change button for moving the ferry door arm and the back door arm at low or high speed further comprises the step of displaying on the upper part of the touch panel Control method. The method of claim 6, wherein the (7) process, According to an operator's operation, the mask holder position change button for moving the X-axis stepping motor and the Y-axis stepping motor mounted on the mask holder in a desired direction in a unit of μm is further included on the upper part of the touch panel. Control method of the pellicle bonding device. The method of claim 7, wherein the step (7), Allowing the operator to input the moving distance of the stepping motor using the keypad, and further comprising the step of allowing the X-axis stepping motor and the Y-axis stepping motor to be moved in a unit of μm by the moving distance input by the operator. Method of controlling the pellicle bonding device.

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