JPH11257968A - 振動アーム、振動子および振動型ジャイロスコープ - Google Patents
振動アーム、振動子および振動型ジャイロスコープInfo
- Publication number
- JPH11257968A JPH11257968A JP10059348A JP5934898A JPH11257968A JP H11257968 A JPH11257968 A JP H11257968A JP 10059348 A JP10059348 A JP 10059348A JP 5934898 A JP5934898 A JP 5934898A JP H11257968 A JPH11257968 A JP H11257968A
- Authority
- JP
- Japan
- Prior art keywords
- vibration
- value
- vibrating
- film
- vibrator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003534 oscillatory effect Effects 0.000 title abstract 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 18
- 229910052737 gold Inorganic materials 0.000 claims abstract description 18
- 239000010931 gold Substances 0.000 claims abstract description 18
- 239000010408 film Substances 0.000 claims description 42
- 238000001514 detection method Methods 0.000 claims description 35
- 239000000463 material Substances 0.000 claims description 26
- 239000010409 thin film Substances 0.000 claims description 6
- 238000005452 bending Methods 0.000 abstract description 32
- 230000008859 change Effects 0.000 abstract description 10
- 238000000034 method Methods 0.000 abstract description 10
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 abstract description 9
- 229910052804 chromium Inorganic materials 0.000 abstract description 9
- 239000011651 chromium Substances 0.000 abstract description 9
- 229910052751 metal Inorganic materials 0.000 abstract description 9
- 239000002184 metal Substances 0.000 abstract description 9
- 238000007747 plating Methods 0.000 abstract description 5
- 238000004544 sputter deposition Methods 0.000 abstract description 5
- 238000009713 electroplating Methods 0.000 abstract description 3
- 230000010355 oscillation Effects 0.000 abstract description 2
- 230000001105 regulatory effect Effects 0.000 abstract 7
- 239000000758 substrate Substances 0.000 abstract 1
- 239000013078 crystal Substances 0.000 description 42
- 230000005484 gravity Effects 0.000 description 10
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 5
- 238000005530 etching Methods 0.000 description 5
- 229910052719 titanium Inorganic materials 0.000 description 5
- 239000010936 titanium Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 3
- 235000014676 Phragmites communis Nutrition 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 229910052744 lithium Inorganic materials 0.000 description 3
- 229910044991 metal oxide Inorganic materials 0.000 description 3
- 150000004706 metal oxides Chemical class 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- XMPZTFVPEKAKFH-UHFFFAOYSA-P ceric ammonium nitrate Chemical compound [NH4+].[NH4+].[Ce+4].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O XMPZTFVPEKAKFH-UHFFFAOYSA-P 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- VLTRZXGMWDSKGL-UHFFFAOYSA-N perchloric acid Chemical compound OCl(=O)(=O)=O VLTRZXGMWDSKGL-UHFFFAOYSA-N 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000006104 solid solution Substances 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- DKNPRRRKHAEUMW-UHFFFAOYSA-N Iodine aqueous Chemical compound [K+].I[I-]I DKNPRRRKHAEUMW-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- -1 for example Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- RIUWBIIVUYSTCN-UHFFFAOYSA-N trilithium borate Chemical compound [Li+].[Li+].[Li+].[O-]B([O-])[O-] RIUWBIIVUYSTCN-UHFFFAOYSA-N 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Gyroscopes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10059348A JPH11257968A (ja) | 1998-03-11 | 1998-03-11 | 振動アーム、振動子および振動型ジャイロスコープ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10059348A JPH11257968A (ja) | 1998-03-11 | 1998-03-11 | 振動アーム、振動子および振動型ジャイロスコープ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11257968A true JPH11257968A (ja) | 1999-09-24 |
| JPH11257968A5 JPH11257968A5 (enrdf_load_stackoverflow) | 2004-11-04 |
Family
ID=13110707
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10059348A Pending JPH11257968A (ja) | 1998-03-11 | 1998-03-11 | 振動アーム、振動子および振動型ジャイロスコープ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11257968A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009085715A (ja) * | 2007-09-28 | 2009-04-23 | Tdk Corp | 振動ジャイロセンサ |
| JP2011522573A (ja) * | 2008-05-08 | 2011-08-04 | ソナベーション， インコーポレイテッド | マルチモード機械的共振器のための方法およびシステム |
| JP2021069076A (ja) * | 2019-10-28 | 2021-04-30 | 国立大学法人東北大学 | 振動子におけるｑ値のトリミング方法 |
-
1998
- 1998-03-11 JP JP10059348A patent/JPH11257968A/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009085715A (ja) * | 2007-09-28 | 2009-04-23 | Tdk Corp | 振動ジャイロセンサ |
| JP2011522573A (ja) * | 2008-05-08 | 2011-08-04 | ソナベーション， インコーポレイテッド | マルチモード機械的共振器のための方法およびシステム |
| JP2021069076A (ja) * | 2019-10-28 | 2021-04-30 | 国立大学法人東北大学 | 振動子におけるｑ値のトリミング方法 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4305623B2 (ja) | 振動子および振動型ジャイロスコープ | |
| EP0427177B1 (en) | Vibrator | |
| JP3694160B2 (ja) | 振動型ジャイロスコープおよびその調整方法 | |
| JP3942762B2 (ja) | 振動子、振動型ジャイロスコープ、直線加速度計および回転角速度の測定方法 | |
| JP4364385B2 (ja) | 振動型ジャイロスコープおよびその製造方法 | |
| JP4107768B2 (ja) | 振動子および振動型ジャイロスコープ | |
| JPH11248465A (ja) | 振動子、振動型ジャイロスコープおよび回転角速度の測定方法 | |
| JP4356881B2 (ja) | 振動型ジャイロスコープ | |
| JP4305625B2 (ja) | 振動子および物理量測定用信号発生素子 | |
| JPH11257968A (ja) | 振動アーム、振動子および振動型ジャイロスコープ | |
| JP4281345B2 (ja) | 振動型ジャイロスコープ | |
| JP4035264B2 (ja) | 振動型ジャイロスコープ | |
| JP3720563B2 (ja) | 振動子、振動型ジャイロスコープおよび回転角速度の測定方法 | |
| JP4361174B2 (ja) | 振動型ジャイロスコープ | |
| JP4364390B2 (ja) | 振動型ジャイロスコープ | |
| JPH10160477A (ja) | 振動子、振動子の調整方法およびこの振動子を使用した振動型ジャイロスコープ | |
| JPH10160478A (ja) | 振動子、振動子の調整方法およびこの振動子を使用した振動型ジャイロスコープ | |
| JP3958455B2 (ja) | 振動子、振動型ジャイロスコープおよび直線加速度計 | |
| JPH10221087A (ja) | 振動子、振動型ジャイロスコープ、その製造方法、振動子を励振する方法および振動子の振動を検出する方法 | |
| JP3701785B2 (ja) | 振動子、振動型ジャイロスコープ、直線加速度計および回転角速度の測定方法 | |
| JPH10170270A (ja) | 振動子およびこの振動子を使用した振動型ジャイロスコープ | |
| JP4067044B2 (ja) | 振動子および振動型ジャイロスコープ | |
| JP4297251B2 (ja) | 回転角速度測定装置 | |
| JPH10318756A (ja) | 振動ジャイロ | |
| JPH10153432A (ja) | 振動型ジャイロスコープ |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20040109 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20050628 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20050830 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20060110 |