JPH11257968A - Oscillating arm, oscillator, and oscillatory type gyroscope - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable the wide control of a Q value of vibration in an oscillating arm to any value, by providing a film-shaped Q-value regulating part for an oscillating body, and enabling the regulation of the Q-value of a predetermined frequency in the oscillating body. SOLUTION: In an oscillatory type gyroscope, an oscillating piece 12 of its each bending oscillating arm is, for example, provided with film shaped Q-value regulating parts 5A-5D, etc. Each Q-value regulating part is formed by providing a metal plating film 13 such as gold through the use of an electrolytic plating method, etc. on substrate layers 14 and 15, which are a bold film, a chromium film, etc., by a sputtering method, etc. By letting the overall thickness of each Q-value regulating part be preferably various values of 0.5 μm or more, it is possible to change the Q value of bending oscillation in the oscillating piece 12 largely and to perform control. Each Q-value regulating part can be structured so that Q-value regulating parts may be continuously provided for the driving or detecting electrode of the oscillating piece 12. In addition, a part of an electrode part can be increased in thickness sufficiently so as to regulate the Q values to be a Q-value regulating part in constitution.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibrator used for an angular velocity sensor used for detecting a rotational angular velocity in a rotary system, a vibratory gyroscope, and a vibrating arm usable for these.

[0002]

2. Description of the Related Art Conventionally, as an angular velocity sensor for detecting a rotational angular velocity in a rotating system, a vibrating gyroscope using a piezoelectric body has been used for confirming the position of an aircraft, a ship, a space satellite, or the like. Was. Recently, it has been used as a consumer field for car navigation, detection of camera shake of a VTR or a still camera, and the like.

[0003] Such a piezoelectric vibratory gyroscope utilizes the fact that when an angular velocity is applied to a vibrating object, a Coriolis force is generated in a direction perpendicular to the vibration. And the principle is analyzed with a mechanical model (for example,
"Acoustic Wave Technology Handbook", Ohmsha, 491
497). Various types of piezoelectric vibrating gyroscopes have been proposed so far. For example, Sperry tuning fork type gyroscope, Watson tuning fork type gyroscope, equilateral triangular prism type resonating gyroscope,
A cylindrical sound piece gyroscope and the like are known.

Recently, a vibrator of a vibrator is formed of a piezoelectric single crystal such as quartz, a drive electrode and a detection electrode are provided on the surface of the piezoelectric single crystal, and vibration is excited by the drive electrode.
Detection of vibration of a vibrating body through a detection electrode is performed (Japanese Patent Application No. 7-228845).

On the other hand, as a variable indicating the energy loss in the vibration state of the vibrating gyroscope, so-called Q
The value is known. In order to improve the sensitivity of the vibratory gyroscope, it is desired that the Q value of the vibrator is large. However, in order to increase the response band of the vibratory gyroscope, it is desired to reduce the Q value of the detected vibration. This is because the vibratory gyroscope uses a self-excited oscillation circuit to optimize the frequency of the vibration detected by the vibrator by the self-oscillation of the vibrator.
At this time, if the Q value of the detected vibration is large, the frequency range in which the frequency of the detected vibration is optimal becomes very narrow, and the response band becomes narrow. Furthermore, in order to improve matching between the vibrator and the drive circuit and stabilize the operation of the vibratory gyroscope, it is desirable to reduce the Q value of the drive vibration.

[0006]

However, the types of piezoelectric single crystals that are actually available are limited, and the Q value of each vibration is determined by the material of the vibrator. In particular, when designing an actual device, there are various restrictions such as the use of the vibrating gyroscope, the direction of the crystal axis of the piezoelectric single crystal, the thickness of the vibrator, the sensitivity and temperature characteristics of the piezoelectric single crystal, and so on. Since the types, dimensions, and designs of usable piezoelectric single crystals are limited, the Q value of each vibration cannot be controlled to a desired value.

In particular, it is common to form the entire vibrator from the same piezoelectric single crystal plate. However, when the drive vibration system of the vibrator and the detection vibration system are provided independently, the Q value of the drive vibration in the drive vibration system and the Q value of the vibration in the detection vibration system constitute the vibrator respectively. Since it is almost determined by the material of the piezoelectric single crystal and the thickness of the vibrator,
It is virtually difficult to control both independently.

It is an object of the present invention to provide a vibration arm and a vibrator having a vibrating body made of a piezoelectric material so that the Q value of vibration in the vibrating arm can be controlled widely.

[0009]

According to the present invention, there is provided a vibrating arm for exciting a predetermined vibration, wherein the vibrating body is made of a piezoelectric material, and a Q value of the predetermined vibration in the vibrating body is adjusted. And a film-shaped Q-value adjusting section provided on the vibrating body.

Further, the present invention relates to a vibrator having the above-mentioned vibrating arm, and to a vibratory gyroscope having this vibrator. It is related.

The inventor of the present invention provides a vibrating body made of a piezoelectric material with a film-like Q-value adjusting section, so that the vibration Q
We arrived at adjusting the value, succeeded in the demonstration, and completed the present invention. Hereinafter, the present invention will be described more specifically.

A vibrator made of a piezoelectric material constituting a vibrating arm is provided with a Q value adjusting section, and by changing the position, size, material and thickness of the Q value adjusting section, the Q of the vibration of the vibrating arm is improved. The value can be increased or decreased by a desired amount. This is because the Q-value adjusting unit provided on the vibrating body is distorted in accordance with the deformation of the vibrating body accompanying the vibration of the vibrating arm,
It is considered that the Q value adjusting unit is plastically deformed and the bending energy due to the vibration is converted into energy such as heat, so that the Q value of the vibration is reduced. At this time, the degree of change in the Q value can be controlled by selecting the position, thickness, size (planar dimension), and material of the Q value adjusting unit.

As a result of further study, the present inventor has found that the thickness of the Q value adjusting section is one of the most important factors. That is, the thickness of the Q-value adjusting section is 0.5 μm when the planar dimensions and the material of the Q-value adjusting section are fixed.
As described above, it has been found that the Q value changes rapidly.

In the case where the vibrator of the vibration type gyroscope is provided with a drive vibration system and a detection vibration system separately, one of the vibration arm in the drive vibration system and the vibration arm in the detection vibration system is provided. The present invention can be applied to the apparatus and a Q value adjusting unit can be provided. Or, a vibration arm in a driving vibration system,
Apply the present invention to both the vibration arm in the detection vibration system,
By providing the Q value adjusting units, the Q value of the drive vibration and the Q value of the detected vibration can be controlled separately.

The upper limit of the thickness of the Q value adjusting section is not particularly limited, but is preferably 10 μm or less in order to prevent the occurrence of film peeling.

In a preferred aspect of the present invention, the vibrating arm includes a film-shaped electrode portion for driving or detecting a predetermined vibration, separately from the Q value adjusting portion. It is provided so as not to contact the value adjustment unit.
In this case, the Q value adjusting unit is not normally electrically connected to the film-shaped electrode unit, but the Q value adjusting unit and the electrode unit can be electrically connected by wire bonding. .

In another preferred aspect of the present invention, the vibrating arm includes a film-shaped electrode portion for driving or detecting a predetermined vibration, separately from the Q value adjusting portion. The value adjustment unit is provided continuously. In this case, since the potential of the Q value adjustment unit becomes equal to the potential of the electrode unit, the Q value adjustment unit may partially function as an electrode.

In another aspect of the present invention, the Q value adjusting section functions as an electrode for driving or detecting a predetermined vibration on the vibrating arm. In this case, particularly preferably, the electrode includes a Q value adjusting section and a thin film portion thinner than the Q value adjusting section. This thin film portion does not have the ability to adjust the Q value of the vibration of the vibrating arm, and generates the necessary electric field in the vibrating arm together with other counter electrodes,
Alternatively, it plays a role of extracting a potential due to an electric field generated in the vibrating arm. The Q value adjusting section functions as the above-mentioned electrode and plays a role of controlling the Q value of the vibrating arm provided with this electrode within a desired range. The overall thickness of the electrode can be made sufficiently large to serve as a Q value adjusting section.

In the present invention, it is particularly preferable that the vibrating body is a vibrating piece having an elongated shape, and the vibrating piece bends and vibrates. This is because, when the vibrating body expands and contracts, each part of the Q-value adjusting unit largely expands and contracts with the expansion and contraction vibration of the vibrating body. On the other hand, when the vibrating bar bends and vibrates, a relatively large strain is applied to a part of the vibrating bar, that is, a region where the electrode portion or the thin film portion is provided (usually a base portion of the vibrating bar). Or occur. However, if the Q-value adjusting unit is provided at a position distant from the region where the largest distortion occurs, the deformation of the Q-value adjusting unit itself due to the bending vibration is small, and therefore, the Q-value adjusting unit may separate from the resonator element. It is not.

Note that the vibrating body is an elongated vibrating reed,
This means that the length of the vibrating body is at least three times the width of the vibrating body.

As the material of the film-shaped Q value adjusting section, a metal film and a metal oxide film are particularly preferable. The present inventor examined an organic material film and a mixture of an organic material and a metal powder as a material of the Q value adjusting unit, but in any case, a drift due to a temporal change occurred after manufacturing a vibration type gyroscope. In the case of the metal film and the metal oxide film, there is an advantage in that the drift due to such a change with time does not occur.

The metal film constituting the Q value adjusting section includes a gold film, a multilayer film of gold and chromium, a multilayer film of gold and titanium, a silver film, a multilayer film of silver and chromium, and a multilayer film of silver and titanium. A multilayer film, a lead film, and a platinum film are preferred. As the metal oxide, TiO2
Is preferred. In particular, by using a gold film, since the specific gravity of gold is large, the control performance with respect to vibration is enhanced, and the characteristics of the Q value adjustment unit are unlikely to change over time. However, since the adhesion between the gold film and the oxide single crystal, for example, quartz, is low, between the gold film and the vibrating arm, especially the crystal arm,
It is preferable to interpose an underlayer, for example, at least a chromium layer or a titanium layer.

As a method of manufacturing the Q value adjusting section, a known method such as a vacuum evaporation method, a sputtering method, an electrolytic plating method, and an electroless plating method can be adopted.

Further, after forming the Q value adjusting portion on the vibrating body, a part of the material can be removed from the Q value adjusting portion by irradiating the Q value adjusting portion with a laser beam or by reverse sputtering. . In this case, while measuring the Q value of the vibration of the vibrating arm to be processed,
By removing a part of the material constituting the value adjusting section, the Q value of the vibration can be controlled to a desired value.

In a particularly preferred embodiment of the present invention, the vibrator has a drive vibration system and a detection vibration system, and when the drive vibration is excited in the drive vibration system, the vibrator is not rotating. The detection vibration system does not substantially vibrate. Thus, during rotation, a Coriolis force acts in the drive vibration system in response to the drive vibration, and as a result, the detected vibration is excited in the vibrator. Among the detected vibrations, only the detected vibration appearing in the detection vibration system can be detected.

At this time, that the detection vibration system does not substantially vibrate includes, for example, a case where the amplitude of the vibration of the detection vibration system when exciting the drive vibration is 1/1000 or less of the maximum amplitude of the drive vibration. .

In a particularly preferred embodiment of the present invention, the vibrator extends parallel to a predetermined plane. This includes the case where the vibrator is formed within a range of 1 mm or less in thickness. At this time, preferably, the driving vibration and the detection vibration of the vibrator are respectively generated in parallel to the predetermined plane.

When the driving vibration and the detection vibration of the vibrator are generated in parallel to a predetermined plane, the entire vibrator can be formed of the same piezoelectric single crystal.
In this case, a vibrator can be manufactured by first preparing a thin plate of a piezoelectric single crystal, and processing the thin plate by etching and grinding. Each part of the vibrator can be formed by another member, but it is particularly preferable to form the vibrator integrally.

When a vibrator is formed from a flat plate-shaped material, for example, a flat plate material of a piezoelectric single crystal such as quartz crystal by an etching process, a protrusion of a specific shape, for example, an elongated protrusion is provided on each vibrating arm of the vibrator. May be generated. Such protrusions cause the symmetry of the vibrator strictly designed at the time of design to be reduced. However, the protrusion may be present, and it is preferable that the height of the protrusion is small. However, if the height of the protrusion is equal to or less than 1/5 of the width of the component piece of the vibrator, it can be generally used without any problem. The same applies to a case where an asymmetric portion other than the protrusion due to another manufacturing cause exists in the vibrator.

When a projection or the like is present on the vibrator as described above, a part of the projection is deleted by laser processing or the like, or a part other than the projection of the vibrator is deleted by laser processing or the like. Thereby, it is possible to adjust the center of gravity of the driving vibration system after the etching so that the center of gravity of the driving vibration system is located in a region near the center of gravity of the vibrator during driving.

The piezoelectric material constituting the vibrator includes LiNbO ₃ single crystal, LiTaO ₃ single crystal, lithium niobate-lithium lithium tantalate solid solution single crystal, lithium borate single crystal, and langasite single crystal. In addition to a piezoelectric single crystal, a piezoelectric ceramic such as PZT can be used.

Among the piezoelectric single crystals, LiNbO ₃ single crystal, LiTaO ₃ single crystal and lithium niobate-lithium tantalate solid solution single crystal have particularly large electromechanical coupling coefficients. Also, comparing the LiNbO ₃ single crystal with the LiTaO ₃ single crystal, the LiTaO ₃ single crystal is
_It has a larger electromechanical coupling coefficient and better temperature stability than the _three single crystals.

When a piezoelectric single crystal is used, detection sensitivity can be improved and detection noise can be reduced. In addition, when a piezoelectric single crystal is used, a vibrator that is particularly insensitive to temperature changes can be manufactured.
It is suitable for use in vehicles that require temperature stability. This will be further described.

As an angular velocity sensor using a tuning-fork type vibrator, there is, for example, a piezoelectric vibratory gyroscope described in Japanese Patent Application Laid-Open No. 8-128833. However, in such a vibrator, the vibrator vibrates in two directions. Therefore, when the vibrator is formed of a piezoelectric single crystal, it is necessary to match the characteristics of the piezoelectric single crystal in two directions. However, in practice, piezoelectric single crystals have anisotropy.

Generally, in a piezoelectric vibratory gyroscope,
In order to improve the measurement sensitivity, it is required to maintain a constant vibration frequency difference between the natural resonance frequency of the driving vibration mode and the natural resonance frequency of the detection vibration mode.
However, the piezoelectric single crystal has anisotropy, and when the crystal plane changes, the degree of temperature change of the vibration frequency changes. For example, when cutting along a certain crystal plane, there is almost no change in temperature of the vibration frequency, but when cutting along another crystal plane, the vibration frequency responds sensitively to temperature change. Therefore, when the vibrator vibrates in two directions, at least one of the two vibrating surfaces becomes a crystal surface having a large temperature change in vibration frequency.

On the other hand, when the whole vibrator is made to vibrate in a predetermined plane and the vibrator is formed of a piezoelectric single crystal, only the crystal plane having the best temperature characteristic of the single crystal is vibrated. Available in

FIG. 1 is a plan view schematically showing a vibrator 1 according to one embodiment of the present invention. The vibrator 1 has a base 6
And two drive vibration systems 2A and 2B and two detection vibration systems 21A and 21B.

The base 6 is a four-fold symmetrical square centered on the center of gravity GO of the vibrator. Peripheral portion 6a of base 6
From each side radially toward the four directions,
A, 2B and the detection vibration systems 21A, 21B protrude, and the vibration systems are separated from each other. Drive vibration system 2A
And 2B are two-fold symmetric about the center of gravity GO of the transducer, and the detection vibration systems 21A and 21B are two-fold symmetric about the center of gravity GO.

Each of the driving vibration systems 2A and 2B includes supporting portions 11A and 11B protruding from the peripheral edge 6a of the base 6, and supporting portions 1A and 11B.
There are provided bending vibration arms 3A, 3B, 3C, 3D extending from the tip 11b side of 1A, 11B in the direction orthogonal to the support. Each of the detection vibration systems 21A and 21B has 1
It consists of elongated detection vibration arms 9A and 9B.
11a is a connection portion of the support portion to the base 6.

Each bending vibration arm 3A, 3B, 3C, 3
D, 9A, and 9B are provided with drive or detection electrode units and a Q value adjustment unit, respectively. These forms are shown enlarged in FIGS. 2A and 2B.

Each bending vibration arm is provided with an elongated rectangular bar-shaped vibrating piece 12. A film-like electrode portion 4A (10A) is provided on the surface 12a of the resonator element 12, and a film-like Q value adjusting portion 5A according to the present invention is provided on the tip side of the electrode portion.
5B, 5C, and 5D (or 5E and 5F) are provided. On the back surface 12b and the side surfaces 12c and 12d of the resonator element 12, the film-like electrode portions 4B, 4C, 4D (10B,
C, 10D) are provided. The thickness of the film-shaped electrode portion is usually 0.1 to 0.5 μm.

In this embodiment, each electrode section is made of a multilayer film of aluminum, gold and chromium, and a multilayer film of gold and titanium. Each Q value adjusting unit includes two underlayers 15 and 14 and a metal plating film 13 provided thereon.
The material of the underlayer is preferably a multilayer film of gold and chromium, or a multilayer film of gold and titanium, and the material of the metal plating film is particularly preferably gold for the above-mentioned reason.

In this embodiment, since the Q value adjusting section is located away from the electrode section, it has almost no function as an electrode.

The method of driving and detecting the bending vibration piece is described in Japanese Patent Application No. Hei 7-228845. That is, by applying an AC voltage between the drive electrode units 4A and 4B and the drive electrode units 4C and 4D, each bending vibration arm 3
A, 3B, 3C, and 3D can be vibrated as indicated by arrow A, respectively. At this time, the driving vibration systems 2A and 2A
The center of gravity GD of the entire vibration of B is set in a region near the center of gravity GO of the vibrator. Here, the neighborhood area is G
It means within 1 mm from O. When a rotational component such as Ω is given to the vibrator in this state, each bending vibrating piece for detection vibration vibrates as shown by arrow B.

FIG. 3A is a plan view showing another example of a driving bending vibration arm 3E (detection bending vibration arm 9C), and FIG. 3B is a front view thereof. Each drive electrode unit 4A, 4B, 4C, 4D or each detection electrode unit 10A,
Each form of 0B, 10C, and 10D is the same as that shown in FIG. In the present embodiment, the film-shaped Q value adjusting section 5G on the tip side of the vibrating arm includes the electrode 4A (or 1
0A) are continuously provided and electrically connected to each other, thereby forming an integral film 16. The Q value adjusting section 5G has the same laminated structure as the Q value adjusting section shown in FIG. The Q value adjusting section 5G basically adjusts each Q value of the driving vibration or the detected vibration of the bending vibration piece 3E (or 9C), and the Q value adjusting section 5G is connected to the electrode section 4A (10A) of the Q value adjusting section. The closer area will eventually act as an electrode.

In each of the embodiments shown in FIGS. 2A, 2B, 3A, and 3B, the Q value adjusting section is provided separately from the electrode section. By making a part of the thickness large enough to adjust the Q value of the bending vibration piece, it is possible to form a film-shaped Q value adjusting portion and make the remaining portion of the electrode portion a thin film portion. In this case, both the thin film portion and the Q value adjusting section function as counter electrodes.

FIGS. 4 (a)-(c) and 5 (a)-
(C) is a front view for explaining a process suitable for manufacturing each vibrating element shown in FIG. 2 or 3. FIG.
As shown in (a), the surface 12 of the resonator element material 12A
Underlayers 14 and 15 are provided on a and 12b, respectively. Next, as shown in FIG.
The metal plating layer 13 is provided at a predetermined position on the underlayer 14 of FIG. Next, as shown in FIG. 4C, a resist film 20 having an outer contour pattern of the vibrator is formed on the front side and the back side of the material 12A, respectively. Next, extra underlayers 14 and 15 not covered with the resist film 20 are formed.
Are removed by etching to obtain the configuration shown in FIG. 21 is an exposed surface of the material 12A.

Next, the material 12A is etched to remove the area not covered by the resist film 20, and then the resist film 20 is removed, and the vibrating reed 12 shown in FIG.
Get. The exposed portions of the underlayers 14 and 15 are removed, and FIG.
As shown in (c), the Q value adjusting units 5A to 5G are formed. Next, electrode portions 4A-4D and 10A-10D are formed. The bending vibration arm shown in FIG. 2 or FIG. 3 is obtained according to the positional relationship between each electrode unit and the Q value adjusting unit.

Hereinafter, more specific experimental results will be described. The bending vibration piece 3A shown in FIG. 2 was manufactured based on the method described with reference to FIGS. However,
In FIG. 4A, the thickness of the material 12A is 0.3 mm.
The underlayer 15 was a chromium film having a thickness of 200 angstroms provided by a sputtering method, and the underlayer 14 was a gold film having a thickness of 5000 angstroms provided by a sputtering method. Next, a resist film having a thickness of 5 μm was coated, the resist film was patterned by photolithography, and a gold plating film 13 was formed by electrolytic plating (FIG. 4B).

Next, a resist film 20 was coated on the front and back surfaces of the Z plate 12A, and an outer shape pattern of the vibrator was formed by photolithography (FIG. 4).
(C)). The Z plate was immersed in an aqueous solution of iodine and potassium iodide to remove the excess gold film 14. The Z plate was further immersed in an aqueous solution of ceric ammonium nitrate and perchloric acid, and the extra chromium film 15 was removed by etching (FIG. 5A). 80 ° C.
For 20 hours, and the Z plate was etched (FIG. 5B). Next, the gold film 14 and the chromium film 15 were removed (FIG. 5C). Using a metal mask, an aluminum film having a thickness of 2000 angstroms was formed as the electrode portion 4A.

The bending vibration arm 3A was fixed to the support member using an epoxy resin adhesive, and the drive electrode was connected to the control circuit by wire bonding.

In the above description, the width of the bending vibration piece 12 is 1 m
m, the length is 6 mm, the width of the drive electrode section is 1 mm, the length of the drive electrode section is 6 mm, the width of the Q value adjustment section is 1 mm, and the length of the Q value adjustment section is 1 mm. The distance between the electrode section and the Q value adjusting section was 0.5 mm. The overall thickness of the Q value adjusting section 5A was changed as shown in Table 1, and the Q value of the bending vibration of the bending vibration piece 3A at that time was measured.

[0053]

[Table 1]

As can be seen from this result, the thickness is set to 0.
By providing a film-shaped Q value adjustment unit of 5 μm or more,
The Q value of the bending vibration in the bending vibration piece is greatly changed,
You can now control it. On the other hand, the conventional electrode section does not have such an influence as to change the Q value of the bending vibration, and cannot be used as a means for adjusting the Q value.

[0055]

As described above, according to the present invention, in a vibrating arm and a vibrator having a vibrating body made of a piezoelectric material, the Q value of vibration in the vibrating arm can be controlled widely.

[Brief description of the drawings]

FIG. 1 is a plan view schematically showing a vibrator 1 according to an embodiment of the present invention.

2A is a plan view showing each of the bending vibration arms 3A, 3B, 3C, and 3D for driving the vibrator 1 or the bending vibration arms 9A and 9B for detection, and FIG. , FIG. 2
It is a front view of the bending vibration arm of (a).

FIG. 3A is a plan view showing each bending vibration arm 3E for driving or a bending vibration arm 9C for detection according to another embodiment of the present invention, and FIG. 3B is a plan view showing FIG. It is a front view of the bending vibration arm of (a).

FIGS. 4A to 4C show respective steps of a suitable process for producing each bending vibration piece.

FIGS. 5A to 5C show respective steps of a preferred process for producing each bending vibration piece.

[Explanation of symbols]

1 vibrator 2A, 2B drive vibration system 3A,
3B, 3C, 3D, 3E Bending vibration arm for driving
4A, 4B, 4C, 4D Drive electrode unit 5A, 5
B, 5C, 5D, 5E, 5F Film-shaped Q-value adjusting section (separated from electrode section) 5G Film-shaped Q-value adjusting section (continuous with electrode section) 6 Base 9
A, 9B Flexural vibration arm for detection 10A, 10
B, 10C, 10D detection electrode unit 12 vibrating reed
12A Material of vibrating piece 21A, 21B Detecting vibration system GD Center of overall driving vibration GO Center of gravity of vibrator 1

 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Takao Soma 2-56, Suda-cho, Mizuho-ku, Nagoya-shi, Aichi Japan Insulator Co., Ltd.

Claims (11)

[Claims] 1. A vibrating arm for exciting a predetermined vibration, comprising: a vibrating body made of a piezoelectric material; and a vibrating body provided on the vibrating body to adjust a Q value of the predetermined vibration in the vibrating body. A vibrating arm, comprising: 2. The vibrating arm according to claim 1, wherein the thickness of the Q value adjusting section is 0.5 μm or more. 3. The vibrating arm includes a film-shaped electrode unit for driving or detecting the predetermined vibration, separately from the Q-value adjusting unit. The vibrating arm according to claim 1 or 2, wherein the vibrating arm is provided so as not to contact. 4. The vibrating arm includes a film-shaped electrode unit for driving or detecting the predetermined vibration, separately from the Q-value adjusting unit, wherein the electrode unit, the Q-value adjusting unit, 3. The vibrating arm according to claim 1, wherein the arm is provided continuously. 5. The vibrating arm according to claim 1, wherein the Q value adjusting section functions as an electrode for driving or detecting the predetermined vibration. 6. The vibrating arm according to claim 5, wherein said electrode includes said Q value adjusting section and a thin film portion thinner than said Q value adjusting section. 7. The vibrating arm according to claim 1, wherein said Q value adjusting section includes a gold film. 8. The vibrating element according to claim 1, wherein the vibrating body is a vibrating piece having an elongated shape, and the predetermined vibration is a vibration that bends the vibrating piece. A vibrating arm according to one claim. 9. A vibrator comprising the vibrating arm according to any one of claims 1 to 8. 10. A vibratory gyroscope comprising the vibrator according to claim 9. 11. The vibrator includes a drive vibration system and a detection vibration system, and the drive vibration system and the detection vibration system each include at least one vibration arm. Vibrating the vibrating arm, and the vibrating arm of the detection vibration system does not substantially vibrate when the vibrator is not rotating,
The vibratory gyroscope according to claim 10.