JPH11254303A - Lapping machine - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent a carrier from transforming even if using a thin carrier. SOLUTION: This lapping machine 1 comprises a sheet carrier 5 which holds a glass board 4 between a lower lapping disc 3 and an upper lapping disc 2 and connects with a sun gear 8 and an internal gear 7 via a gear, which rotate each other to rotate the sheet carrier 5 so as to revolve, and a gap 9a between the lower lapping disc 3 and the internal gear 7, wherein a part of the sheet carrier 5 overhangs from the lower lapping disc 3. A lower spacer 10 and an upper spacer 11 for preventing the sheet carrier 5 from transforming are screwed respectably to be installed to an inside of the internal gear 7. The upper spacer 11 and the lower spacer 10 may be free to be divided and combined.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a lapping machine for simultaneously polishing both surfaces of a workpiece.

[0002]

2. Description of the Related Art Conventionally, for example, a donut-shaped glass substrate has been used for a hard disk of a computer. To finish-polish both sides of this glass substrate, place the carrier on the lower lap disk, set the glass substrate in the glass substrate holding hole of the carrier, rotate the sun gear and the internal gear at different speeds from each other It is known to revolve a carrier while rotating it.
0-51990).

More specifically, as shown in FIG. 4A, a lapping machine 100 comprises a lower lapping disc 101 and an upper lapping disc 102.
The carrier 105 is arranged between them. This carrier 1
05 is provided with a plurality of glass substrate holding holes, the glass substrate 104 is set in the holes, and the sun gear 108 and the internal gear 107 are rotated to revolve while rotating the carrier 105 to rotate around the sun gear 108. While rotating, the upper lap disk 102 and the lower wrap disk 101 are rotated in different directions while the glass substrate 1
04 are polished simultaneously.

[0004]

However, the carrier 1 extends to the outside of the upper lap disk 102 and the lower wrap disk 101.
When the glass substrate 104 is polished without overhanging the glass substrate 104 and the glass substrate 104, the lower lap disk 10
1. The peripheral portion of the upper lap disk 102 is left without being cut, and only the inside is cut into a groove shape by the lapping agent.

Then, the shapes of the peripheral portions of the upper lap disk 102 and the lower wrap disk 101 become non-flat. Therefore, the shape of the glass substrate 104 is transferred to the shape of the lapping machine, so that the glass substrate 104 cannot be processed flat.
This is because, when the carrier 105 is overhanged and polished, a part of the glass substrate holding hole of the carrier 105 slightly protrudes from the upper wrap disk 102 and the lower wrap disk 101, so that the upper wrap disk 102 and the lower wrap disk 102 are positioned. The periphery of the disk 101 can be kept flat.

Therefore, a wide gap is provided between the outer periphery of the lower wrap disk 101 and the internal gear 107, and the carrier 105 and the glass substrate 104 are provided so as to overhang in this gap. In this case, since the glass substrate 104 constantly rotates around the periphery of the lower wrap disk 101, the periphery of the lower wrap disk 101 and the upper wrap disk 102 is cut in the same manner as the inside, and the inside of the wrap disk is as described above. No unnecessary grooves are formed. However, when the carrier is thick, there is no problem because the carrier does not bend or deform during use, but depending on the size of the carrier, in the case of the thin carrier 105 having a thickness of about 1 mm or less,
The glass substrate 104 and the upper lap disk 10
2, the carrier 105 is bent as shown in FIG. 4B during use due to the wrap resistance acting between the lower wrap disk 101 and the glass substrate 104 jumps out from the holding hole of the carrier 105, The glass substrate 104 may be damaged or broken.

Therefore, the carrier 105 having a thickness of 1 mm or less is used.
Even in this case, polishing is performed while sacrificing the polishing load so as not to deform the carrier 105 and holding down the pressing pressure of the carrier 105 to reduce the frictional resistance so that the carrier 105 does not bend. Therefore, the polishing takes too much time, and the polishing efficiency is reduced.

For this reason, as the size of a large lapping machine increases, the number of glass substrates 104 increases, and the wrap resistance increases, so that the carrier 105 is easily deformed. Career 10
5 is not suitable. Therefore, the present invention has been made in view of such a problem, and an object of the present invention is to provide a lapping machine in which a carrier is not deformed even in the case of a thin carrier.

[0009]

Means for Solving the Problems and Effects of the Invention According to the invention made to achieve the above object, a carrier holding a workpiece is disposed between a lower lap disk and an upper lap disk, A carrier is gear-coupled to a sun gear and an internal gear, and the sun gear and the internal gear are rotated relative to each other to revolve while rotating the carrier. The lower lap disk and the internal gear In a lapping machine having a gap therebetween and a part of a holding hole of a workpiece of the carrier overhanging from the lower wrapping disc and the upper lapping disc, the carrier is deformed inside the internal gear. The lower spacer and the upper spacer for prevention are screwed and attached respectively.

According to the first aspect of the present invention, when the carrier is bent by the lower spacer and the upper spacer, the carrier is corrected from the upper side or the lower side and returned to the original position, so that the carrier is bent upward or downward. There is no deformation. Therefore, since a large polishing load can be given, the polishing efficiency can be improved. Further, since the carrier is not deformed even if the number of glass substrates is increased, it can be applied to a large lapping machine.

In the case of replacing the carrier, the carrier can be replaced simply by loosening the screw and removing the upper spacer upward because the screw is fixed. According to a second aspect of the present invention, in the lapping machine according to the first aspect, the upper spacer and the lower spacer can be divided and combined freely.

According to the second aspect of the invention, the carrier can be easily attached and detached because it can be divided and combined freely.

[0013]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described with reference to the drawings. 1A and 1B show a main part of a lapping machine, wherein FIG. 1A is a cross-sectional view, and FIG. 1B is an enlarged cross-sectional view of an upper / lower spacer mounting portion. FIG. 2 is a plan view showing a state viewed from arrows AA in FIG. FIG. 3 shows a spacer, (a) is a plan view,
(B) is a front view.

As shown in FIGS. 1 (a) and 1 (b), the lapping machine 1 comprises an upper lapping disc 2, a lower lapping disc 3, a carrier 5, an internal gear 7, a sun gear 8, and a lower side. It comprises a spacer 10 and an upper spacer 11. The upper lap disk 2 has an opening in the center of a disk made of cast iron, is provided rotatably horizontally by a rotating device (not shown), and is provided so as to be liftable by a lifting device (not shown).

The lower lap disk 3 is connected to the upper lap disk 2
, And has an opening in the center of a cast iron disk like the upper lap disk, and is provided so as to be horizontally rotatable by a rotating device (not shown). In addition, carrier 5
Are arranged so as to be sandwiched between the upper lap disk 2 and the lower wrap disk 3.

The carrier 5 is made of a glass epoxy material and has a thickness of 1 mm or less (specifically, 0.3 mm to 0.5 mm).
mm), as shown in FIG. 2, having a gear 5a all around,
A holding hole for holding a plurality of glass substrates 4 is provided inside. Further, the internal gear 7 is formed in a ring shape with a certain gap 9a provided with respect to the outer periphery of the lower lap disk 3. Note that a gear 7a for gear coupling with the gear 5a of the carrier 5 is provided on the entire inner periphery.

The sun gear 8 is provided with a constant gap 9b from the inner circumference of the lower lap disk 3. In addition,
A gear 8a for gear coupling with the gear 5a of the carrier 5 is provided on the entire outer periphery. Note that a rotation axis K is provided at the center of the sun gear 8. Also, the lower spacer 10
As shown in FIG. 1 (b) inside the internal gear 7,
As shown in FIG. 3, the ring-shaped member is divided into four equal parts below the carrier 5, and the resin member having a tapered downward as the upper surface advances in the direction of the rotation axis K is formed inside the internal gear 7. Is screwed from the screw 12.

As shown in FIG. 3, the upper spacer 11 is formed by dividing a ring-shaped one into four equal parts as shown in FIG. 3, and a resin tapered upward as the lower surface advances in the rotation axis K direction. Is screwed inside the internal gear 7 with a screw 12.

The downward taper of the lower spacer 10 serves to correct the carrier 5 which is going to bend downward and return it to its original position. The upward taper of the upper spacer 11 serves to correct the carrier 5 that is going to bend upward and return it to the original position.

Next, the operation of the embodiment of the present invention will be described. The lower spacer 10 is attached to the internal gear 7. Next, four pieces of the glass substrate holding holes of the carrier 5 are set on the lower wrap disk 3 by overhanging.

Next, the upper spacer 11 is attached to the internal gear 7. Next, the glass substrate 4 is set on the carrier 5. Next, the upper wrap disk 2 is lowered, and the four carriers 5 are sandwiched between the upper wrap disk and the lower wrap disk 3 in a sandwich shape.

Next, from the lapping agent supply port (not shown),
A wrapping agent comprising a mixture of a stirring oil, a rust-preventive oil and abrasive grains is supplied to the carrier 5. Next, the internal gear 7 is rotated in the direction of arrow b and the sun gear 8 is rotated in the direction of arrow a while applying a large grinding load to the upper lap disk 2, as shown in FIG. Then, the carrier 5 revolves around the sun gear 8 while rotating. At the same time, the upper lap disk 2 and the lower lap disk 3 are rotated in different directions.

By doing so, both surfaces of the glass substrate 4 can be polished simultaneously. In this case, the gap 9a
When the carrier 5 tries to bend between the lower spacers 1
The carrier 5 is corrected from the upper side or the lower side and returned to the original position by the upper and lower spacers 11, so that the carrier 5 does not bend or deform upward or downward. Therefore, since a large polishing load can be given, the polishing efficiency can be improved. Further, since the carrier 5 is not deformed even if the number of the glass substrates 4 is increased, it can be applied to the large lapping machine 1.

When the carrier 5 is replaced, the carrier 5 can be replaced simply by loosening the screw 12 and removing the upper spacer 11 upward because the screw is screwed. Further, since the upper spacer 11 is freely divided and combined, the carrier 5 can be easily attached and detached.

Although the embodiments of the present invention have been described above, various embodiments can be made without departing from the scope of the present invention. For example, in the embodiment of the invention, the lower spacer 10 and the upper spacer 11 are described as being divided into four equal parts in a ring shape.
The ring shape may be maintained as long as 1 is separate. In the embodiment of the invention, the lower spacer 10 is provided with a downward taper or the upper spacer 11 is provided with an upward taper.
The taper need not be provided as long as a small gap for the carrier 5 is provided between 1.

In the embodiments of the present invention, the workpiece is described as a glass substrate 4, but any other workpiece may be used as long as it is plate-shaped.

[Brief description of the drawings]

FIG. 1 shows a main part of a lapping machine according to an embodiment of the invention,
(A) is a sectional view, and (b) is an enlarged sectional view of an upper / lower spacer mounting portion.

FIG. 2A is a plan view showing a state viewed from arrows AA.

FIG. 3 shows a spacer according to an embodiment of the present invention;
Is a plan view, and (b) is a front view.

FIG. 4 is an explanatory view of a conventional lapping machine.

[Explanation of symbols]

1: Lapping machine, 2: Upper lap disc, 3: Lower lap disc,
4 glass substrate, 5 carrier, 7 internal gear, 8 sun gear, 9a gap, 10 lower spacer,
11: Upper spacer, 12: Screw.

Claims (2)

[Claims] 1. A carrier holding a workpiece between a lower lap disk and an upper lap disk, the carrier being gear-coupled to a sun gear and an internal gear, the sun gear and the internal gear The carrier is rotated so as to revolve while rotating, the carrier has a gap between the lower wrap disk and the internal gear, and a part of a holding hole of a workpiece of the carrier is the In the lapping machine which is overhanging outward from the lower lapping disc and the upper lapping disc, a lower spacer and an upper spacer for preventing deformation of the carrier are screwed and mounted inside the internal gear, respectively. A lapping machine characterized in that: 2. The apparatus according to claim 1, wherein the upper spacer and the lower spacer are freely divided and combined.
The described lapping machine.