JPH11238855A5 - - Google Patents

Info

Publication number
JPH11238855A5
JPH11238855A5 JP1998037719A JP3771998A JPH11238855A5 JP H11238855 A5 JPH11238855 A5 JP H11238855A5 JP 1998037719 A JP1998037719 A JP 1998037719A JP 3771998 A JP3771998 A JP 3771998A JP H11238855 A5 JPH11238855 A5 JP H11238855A5
Authority
JP
Japan
Prior art keywords
film
forming
interlayer insulating
insulating film
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1998037719A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11238855A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP10037719A priority Critical patent/JPH11238855A/ja
Priority claimed from JP10037719A external-priority patent/JPH11238855A/ja
Publication of JPH11238855A publication Critical patent/JPH11238855A/ja
Publication of JPH11238855A5 publication Critical patent/JPH11238855A5/ja
Pending legal-status Critical Current

Links

JP10037719A 1998-02-19 1998-02-19 半導体装置およびその製造方法 Pending JPH11238855A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10037719A JPH11238855A (ja) 1998-02-19 1998-02-19 半導体装置およびその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10037719A JPH11238855A (ja) 1998-02-19 1998-02-19 半導体装置およびその製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2005096275A Division JP2005203813A (ja) 2005-03-29 2005-03-29 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPH11238855A JPH11238855A (ja) 1999-08-31
JPH11238855A5 true JPH11238855A5 (enExample) 2004-12-02

Family

ID=12505329

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10037719A Pending JPH11238855A (ja) 1998-02-19 1998-02-19 半導体装置およびその製造方法

Country Status (1)

Country Link
JP (1) JPH11238855A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW472384B (en) 1999-06-17 2002-01-11 Fujitsu Ltd Semiconductor device and method of manufacturing the same
JP3907921B2 (ja) 2000-06-19 2007-04-18 富士通株式会社 半導体装置の製造方法
JP2004095866A (ja) 2002-08-30 2004-03-25 Fujitsu Ltd 半導体装置及びその製造方法
JP5141550B2 (ja) 2006-03-08 2013-02-13 富士通セミコンダクター株式会社 半導体装置及びその製造方法

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