JPH11200045A - 蒸着装置のクリーニング方法 - Google Patents
蒸着装置のクリーニング方法Info
- Publication number
- JPH11200045A JPH11200045A JP1790698A JP1790698A JPH11200045A JP H11200045 A JPH11200045 A JP H11200045A JP 1790698 A JP1790698 A JP 1790698A JP 1790698 A JP1790698 A JP 1790698A JP H11200045 A JPH11200045 A JP H11200045A
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- vapor deposition
- vacuum
- guide rolls
- roll
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 46
- 238000000034 method Methods 0.000 title claims description 11
- 238000007740 vapor deposition Methods 0.000 title abstract description 21
- 238000001771 vacuum deposition Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 abstract description 7
- 229910052751 metal Inorganic materials 0.000 description 10
- 239000002184 metal Substances 0.000 description 10
- 238000000151 deposition Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000008021 deposition Effects 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 230000005291 magnetic effect Effects 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 230000005294 ferromagnetic effect Effects 0.000 description 4
- 239000000835 fiber Substances 0.000 description 4
- 239000002759 woven fabric Substances 0.000 description 4
- 239000000428 dust Substances 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 238000001816 cooling Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 239000004745 nonwoven fabric Substances 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1790698A JPH11200045A (ja) | 1998-01-13 | 1998-01-13 | 蒸着装置のクリーニング方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1790698A JPH11200045A (ja) | 1998-01-13 | 1998-01-13 | 蒸着装置のクリーニング方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11200045A true JPH11200045A (ja) | 1999-07-27 |
| JPH11200045A5 JPH11200045A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 2005-08-18 |
Family
ID=11956797
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1790698A Pending JPH11200045A (ja) | 1998-01-13 | 1998-01-13 | 蒸着装置のクリーニング方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11200045A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008065909A1 (fr) * | 2006-11-28 | 2008-06-05 | Ulvac, Inc. | Procédé et appareil de formation de film sous vide par enroulement |
| JP2010168618A (ja) * | 2009-01-22 | 2010-08-05 | Sumitomo Metal Mining Co Ltd | ロール・ツー・ロール真空成膜装置による成膜方法及びそのロール清掃方法 |
-
1998
- 1998-01-13 JP JP1790698A patent/JPH11200045A/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008065909A1 (fr) * | 2006-11-28 | 2008-06-05 | Ulvac, Inc. | Procédé et appareil de formation de film sous vide par enroulement |
| KR101044362B1 (ko) * | 2006-11-28 | 2011-06-29 | 가부시키가이샤 알박 | 권취식 진공성막방법 및 권취식 진공성막장치 |
| JP5061119B2 (ja) * | 2006-11-28 | 2012-10-31 | 株式会社アルバック | 巻取式真空成膜装置の運転方法および巻取式真空成膜装置 |
| JP2010168618A (ja) * | 2009-01-22 | 2010-08-05 | Sumitomo Metal Mining Co Ltd | ロール・ツー・ロール真空成膜装置による成膜方法及びそのロール清掃方法 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20041217 Effective date: 20041217 Free format text: JAPANESE INTERMEDIATE CODE: A821 |
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| A621 | Written request for application examination |
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| A521 | Written amendment |
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| RD04 | Notification of resignation of power of attorney |
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| A977 | Report on retrieval |
Effective date: 20070724 Free format text: JAPANESE INTERMEDIATE CODE: A971007 |
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| A131 | Notification of reasons for refusal |
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