JPH11200023A - 真空蒸着装置 - Google Patents
真空蒸着装置Info
- Publication number
- JPH11200023A JPH11200023A JP1790998A JP1790998A JPH11200023A JP H11200023 A JPH11200023 A JP H11200023A JP 1790998 A JP1790998 A JP 1790998A JP 1790998 A JP1790998 A JP 1790998A JP H11200023 A JPH11200023 A JP H11200023A
- Authority
- JP
- Japan
- Prior art keywords
- shutter
- opening
- vapor deposition
- driving
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001771 vacuum deposition Methods 0.000 title claims description 5
- 238000001704 evaporation Methods 0.000 claims abstract description 8
- 238000000151 deposition Methods 0.000 claims description 8
- 230000008020 evaporation Effects 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 6
- 238000007738 vacuum evaporation Methods 0.000 claims description 6
- 238000010894 electron beam technology Methods 0.000 claims description 4
- 238000007740 vapor deposition Methods 0.000 abstract description 18
- 238000004519 manufacturing process Methods 0.000 abstract description 8
- 230000015572 biosynthetic process Effects 0.000 abstract description 4
- 230000037303 wrinkles Effects 0.000 abstract description 4
- 238000005520 cutting process Methods 0.000 abstract description 3
- 238000009416 shuttering Methods 0.000 abstract 3
- 230000005856 abnormality Effects 0.000 abstract 1
- 239000010408 film Substances 0.000 description 11
- 229910052751 metal Inorganic materials 0.000 description 11
- 239000002184 metal Substances 0.000 description 11
- 230000008021 deposition Effects 0.000 description 6
- 230000005291 magnetic effect Effects 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 239000007789 gas Substances 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000005294 ferromagnetic effect Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000001816 cooling Methods 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1790998A JPH11200023A (ja) | 1998-01-13 | 1998-01-13 | 真空蒸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1790998A JPH11200023A (ja) | 1998-01-13 | 1998-01-13 | 真空蒸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11200023A true JPH11200023A (ja) | 1999-07-27 |
| JPH11200023A5 JPH11200023A5 (enExample) | 2005-08-18 |
Family
ID=11956887
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1790998A Pending JPH11200023A (ja) | 1998-01-13 | 1998-01-13 | 真空蒸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11200023A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012079295A1 (zh) * | 2010-12-16 | 2012-06-21 | Pan Chongguang | 一种采用荫罩技术生产线制造器件的方法及系统 |
-
1998
- 1998-01-13 JP JP1790998A patent/JPH11200023A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012079295A1 (zh) * | 2010-12-16 | 2012-06-21 | Pan Chongguang | 一种采用荫罩技术生产线制造器件的方法及系统 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0337369B1 (en) | Continuous vacuum vapor deposition apparatus | |
| JP4234338B2 (ja) | フィルムの蒸着方法 | |
| US20070026141A1 (en) | Apparatus and method for producing magnetic recording medium | |
| JPH0318254B2 (enExample) | ||
| JPH11200023A (ja) | 真空蒸着装置 | |
| JPH11200011A (ja) | 真空蒸着装置 | |
| JPH11193460A (ja) | 真空容器内の巻き取り装置 | |
| JP3781154B2 (ja) | 真空蒸着装置 | |
| JP3529393B2 (ja) | 真空蒸着装置 | |
| JP2000290389A (ja) | 成膜装置 | |
| JPH11200045A (ja) | 蒸着装置のクリーニング方法 | |
| JPH10105965A (ja) | 磁気記録媒体の製造方法および装置 | |
| JPH10154325A (ja) | 磁気記録媒体の製造装置 | |
| JPS6326459B2 (enExample) | ||
| JP4906149B2 (ja) | 磁気記録媒体の製造方法および製造装置 | |
| JP2002020857A (ja) | 真空成膜装置及び成膜用坩堝。 | |
| JP4048643B2 (ja) | 磁気記録媒体の製造方法 | |
| JPS6326460B2 (enExample) | ||
| JPH0633226A (ja) | 真空蒸着における原料金属供給方法 | |
| JPH11236668A (ja) | 薄膜形成装置及び真空蒸着装置 | |
| JP3106456B2 (ja) | 対向ターゲット式スパッタ方法及び対向ターゲット式スパッタ装置 | |
| JPH05339706A (ja) | 真空蒸着めっき設備 | |
| JPH11353650A (ja) | 磁気記録媒体の製造装置及びそれを使用した磁気記録媒体の製造方法 | |
| JPH03291376A (ja) | 真空蒸着方法および装置 | |
| JPH11200020A (ja) | 真空蒸着装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20041217 Effective date: 20041217 Free format text: JAPANESE INTERMEDIATE CODE: A821 |
|
| A621 | Written request for application examination |
Effective date: 20041217 Free format text: JAPANESE INTERMEDIATE CODE: A621 |
|
| RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20041217 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20050204 |
|
| RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20050225 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20070724 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20070726 |
|
| A02 | Decision of refusal |
Effective date: 20071115 Free format text: JAPANESE INTERMEDIATE CODE: A02 |