JPH11200023A - 真空蒸着装置 - Google Patents

真空蒸着装置

Info

Publication number
JPH11200023A
JPH11200023A JP1790998A JP1790998A JPH11200023A JP H11200023 A JPH11200023 A JP H11200023A JP 1790998 A JP1790998 A JP 1790998A JP 1790998 A JP1790998 A JP 1790998A JP H11200023 A JPH11200023 A JP H11200023A
Authority
JP
Japan
Prior art keywords
shutter
vacuum
evaporation
opening
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1790998A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11200023A5 (enExample
Inventor
充 ▲高▼井
Mitsuru Takai
Kunihiro Ueda
国博 上田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Priority to JP1790998A priority Critical patent/JPH11200023A/ja
Publication of JPH11200023A publication Critical patent/JPH11200023A/ja
Publication of JPH11200023A5 publication Critical patent/JPH11200023A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
JP1790998A 1998-01-13 1998-01-13 真空蒸着装置 Pending JPH11200023A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1790998A JPH11200023A (ja) 1998-01-13 1998-01-13 真空蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1790998A JPH11200023A (ja) 1998-01-13 1998-01-13 真空蒸着装置

Publications (2)

Publication Number Publication Date
JPH11200023A true JPH11200023A (ja) 1999-07-27
JPH11200023A5 JPH11200023A5 (enExample) 2005-08-18

Family

ID=11956887

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1790998A Pending JPH11200023A (ja) 1998-01-13 1998-01-13 真空蒸着装置

Country Status (1)

Country Link
JP (1) JPH11200023A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012079295A1 (zh) * 2010-12-16 2012-06-21 Pan Chongguang 一种采用荫罩技术生产线制造器件的方法及系统

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012079295A1 (zh) * 2010-12-16 2012-06-21 Pan Chongguang 一种采用荫罩技术生产线制造器件的方法及系统

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