JPH11200023A5 - - Google Patents

Info

Publication number
JPH11200023A5
JPH11200023A5 JP1998017909A JP1790998A JPH11200023A5 JP H11200023 A5 JPH11200023 A5 JP H11200023A5 JP 1998017909 A JP1998017909 A JP 1998017909A JP 1790998 A JP1790998 A JP 1790998A JP H11200023 A5 JPH11200023 A5 JP H11200023A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1998017909A
Other languages
Japanese (ja)
Other versions
JPH11200023A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP1790998A priority Critical patent/JPH11200023A/ja
Priority claimed from JP1790998A external-priority patent/JPH11200023A/ja
Publication of JPH11200023A publication Critical patent/JPH11200023A/ja
Publication of JPH11200023A5 publication Critical patent/JPH11200023A5/ja
Pending legal-status Critical Current

Links

JP1790998A 1998-01-13 1998-01-13 真空蒸着装置 Pending JPH11200023A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1790998A JPH11200023A (ja) 1998-01-13 1998-01-13 真空蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1790998A JPH11200023A (ja) 1998-01-13 1998-01-13 真空蒸着装置

Publications (2)

Publication Number Publication Date
JPH11200023A JPH11200023A (ja) 1999-07-27
JPH11200023A5 true JPH11200023A5 (enExample) 2005-08-18

Family

ID=11956887

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1790998A Pending JPH11200023A (ja) 1998-01-13 1998-01-13 真空蒸着装置

Country Status (1)

Country Link
JP (1) JPH11200023A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102122612A (zh) * 2010-12-16 2011-07-13 潘重光 一种采用荫罩技术生产线制造器件的方法及系统

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