JPH11191396A5 - - Google Patents

Info

Publication number
JPH11191396A5
JPH11191396A5 JP1997360940A JP36094097A JPH11191396A5 JP H11191396 A5 JPH11191396 A5 JP H11191396A5 JP 1997360940 A JP1997360940 A JP 1997360940A JP 36094097 A JP36094097 A JP 36094097A JP H11191396 A5 JPH11191396 A5 JP H11191396A5
Authority
JP
Japan
Prior art keywords
electrode
discharge vessel
discharge
frequency
excimer lamp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1997360940A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11191396A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP36094097A priority Critical patent/JPH11191396A/ja
Priority claimed from JP36094097A external-priority patent/JPH11191396A/ja
Priority to CA 2244645 priority patent/CA2244645A1/en
Priority to US09/132,215 priority patent/US6194821B1/en
Priority to DE1998136619 priority patent/DE19836619A1/de
Publication of JPH11191396A publication Critical patent/JPH11191396A/ja
Priority to US09/695,043 priority patent/US6888041B1/en
Priority to US11/075,263 priority patent/US20050156497A1/en
Publication of JPH11191396A5 publication Critical patent/JPH11191396A5/ja
Pending legal-status Critical Current

Links

JP36094097A 1997-02-12 1997-12-26 エキシマランプおよびエキシマ発光装置 Pending JPH11191396A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP36094097A JPH11191396A (ja) 1997-12-26 1997-12-26 エキシマランプおよびエキシマ発光装置
CA 2244645 CA2244645A1 (en) 1997-12-26 1998-08-10 Decomposition apparatus of organic compound, decomposition method thereof, excimer uv lamp and excimer emission apparatus
US09/132,215 US6194821B1 (en) 1997-02-12 1998-08-11 Decomposition apparatus of organic compound, decomposition method thereof, excimer UV lamp and excimer emission apparatus
DE1998136619 DE19836619A1 (de) 1997-12-26 1998-08-12 Vorrichtung und Verfahren zur Zersetzung einer organischen Verbindung, Excimer-UV-Lampe und Excimer-Emissions-Vorrichtung
US09/695,043 US6888041B1 (en) 1997-02-12 2000-10-25 Decomposition apparatus of organic compound, decomposition method thereof, excimer UV lamp and excimer emission apparatus
US11/075,263 US20050156497A1 (en) 1997-02-12 2005-03-09 Decomposition apparatus of organic compound, decomposition method thereof, excimer UV lamp and excimer emission apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP36094097A JPH11191396A (ja) 1997-12-26 1997-12-26 エキシマランプおよびエキシマ発光装置

Publications (2)

Publication Number Publication Date
JPH11191396A JPH11191396A (ja) 1999-07-13
JPH11191396A5 true JPH11191396A5 (enrdf_load_html_response) 2005-07-28

Family

ID=18471546

Family Applications (1)

Application Number Title Priority Date Filing Date
JP36094097A Pending JPH11191396A (ja) 1997-02-12 1997-12-26 エキシマランプおよびエキシマ発光装置

Country Status (1)

Country Link
JP (1) JPH11191396A (enrdf_load_html_response)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000133209A (ja) * 1998-10-27 2000-05-12 Iwasaki Electric Co Ltd 無電極電界放電エキシマランプ装置
JP2001185089A (ja) * 1999-12-28 2001-07-06 Quark Systems Co Ltd エキシマ照射装置
JP7627173B2 (ja) * 2021-05-28 2025-02-05 株式会社オーク製作所 放電ランプ、紫外線照射装置、オゾン発生装置および放電ランプの製造方法
CN113990735A (zh) * 2021-11-20 2022-01-28 广东星普节能光电有限公司 一种准分子灯及加工方法

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