JPH11174108A5 - - Google Patents

Info

Publication number
JPH11174108A5
JPH11174108A5 JP1997362295A JP36229597A JPH11174108A5 JP H11174108 A5 JPH11174108 A5 JP H11174108A5 JP 1997362295 A JP1997362295 A JP 1997362295A JP 36229597 A JP36229597 A JP 36229597A JP H11174108 A5 JPH11174108 A5 JP H11174108A5
Authority
JP
Japan
Prior art keywords
substrate
electrode wiring
inspection device
predetermined
probe head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1997362295A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11174108A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP9362295A priority Critical patent/JPH11174108A/ja
Priority claimed from JP9362295A external-priority patent/JPH11174108A/ja
Publication of JPH11174108A publication Critical patent/JPH11174108A/ja
Publication of JPH11174108A5 publication Critical patent/JPH11174108A5/ja
Pending legal-status Critical Current

Links

JP9362295A 1997-12-12 1997-12-12 電極配線の検査装置 Pending JPH11174108A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9362295A JPH11174108A (ja) 1997-12-12 1997-12-12 電極配線の検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9362295A JPH11174108A (ja) 1997-12-12 1997-12-12 電極配線の検査装置

Publications (2)

Publication Number Publication Date
JPH11174108A JPH11174108A (ja) 1999-07-02
JPH11174108A5 true JPH11174108A5 (enrdf_load_html_response) 2005-06-23

Family

ID=18476488

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9362295A Pending JPH11174108A (ja) 1997-12-12 1997-12-12 電極配線の検査装置

Country Status (1)

Country Link
JP (1) JPH11174108A (enrdf_load_html_response)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010111969A (ko) * 2000-06-14 2001-12-20 은탁 자기헤드를 이용한 플라즈마 디스플레이 패널의 전극패턴검사 장치 및 그 방법
KR20020091691A (ko) * 2001-05-31 2002-12-06 주식회사 현대 디스플레이 테크놀로지 액정표시장치 테스트 프레임
KR100447192B1 (ko) * 2002-01-15 2004-09-04 엘지전자 주식회사 피디피 모듈의 이상 표시장치 및 방법
US7786742B2 (en) 2006-05-31 2010-08-31 Applied Materials, Inc. Prober for electronic device testing on large area substrates
TWI339730B (en) * 2006-05-31 2011-04-01 Applied Materials Inc Prober for electronic device testing on large area substrates
KR101023890B1 (ko) * 2006-05-31 2011-03-22 어플라이드 머티어리얼스, 인코포레이티드 Ｔｆｔ-ｌｃｄ 테스팅을 위한 소형 프로버
JP2015057605A (ja) * 2006-05-31 2015-03-26 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 大面積基板上での電子デバイス検査のためのプローバ
JP4808135B2 (ja) * 2006-11-09 2011-11-02 株式会社日本マイクロニクス プローブ位置合わせ方法及び可動式プローブユニット機構並びに検査装置
KR100902246B1 (ko) 2008-01-03 2009-06-11 삼성모바일디스플레이주식회사 유기발광 표시장치의 원장단위 검사 장치

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