JPH1116841A - 半導体製造装置のガス供給方法 - Google Patents

半導体製造装置のガス供給方法

Info

Publication number
JPH1116841A
JPH1116841A JP9168603A JP16860397A JPH1116841A JP H1116841 A JPH1116841 A JP H1116841A JP 9168603 A JP9168603 A JP 9168603A JP 16860397 A JP16860397 A JP 16860397A JP H1116841 A JPH1116841 A JP H1116841A
Authority
JP
Japan
Prior art keywords
gas
gas supply
clf
valve
reaction chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9168603A
Other languages
English (en)
Japanese (ja)
Other versions
JPH1116841A5 (enExample
Inventor
Toshiya Shimada
敏也 嶋田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
Original Assignee
Kokusai Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Co Ltd filed Critical Kokusai Electric Co Ltd
Priority to JP9168603A priority Critical patent/JPH1116841A/ja
Publication of JPH1116841A publication Critical patent/JPH1116841A/ja
Publication of JPH1116841A5 publication Critical patent/JPH1116841A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP9168603A 1997-06-25 1997-06-25 半導体製造装置のガス供給方法 Pending JPH1116841A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9168603A JPH1116841A (ja) 1997-06-25 1997-06-25 半導体製造装置のガス供給方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9168603A JPH1116841A (ja) 1997-06-25 1997-06-25 半導体製造装置のガス供給方法

Publications (2)

Publication Number Publication Date
JPH1116841A true JPH1116841A (ja) 1999-01-22
JPH1116841A5 JPH1116841A5 (enExample) 2005-02-24

Family

ID=15871129

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9168603A Pending JPH1116841A (ja) 1997-06-25 1997-06-25 半導体製造装置のガス供給方法

Country Status (1)

Country Link
JP (1) JPH1116841A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111916328A (zh) * 2019-05-10 2020-11-10 北京北方华创微电子装备有限公司 流路互锁结构、进气装置及半导体加工设备

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111916328A (zh) * 2019-05-10 2020-11-10 北京北方华创微电子装备有限公司 流路互锁结构、进气装置及半导体加工设备
CN111916328B (zh) * 2019-05-10 2024-02-27 北京北方华创微电子装备有限公司 流路互锁结构、进气装置及半导体加工设备

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