JP5198988B2 - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
- Publication number
- JP5198988B2 JP5198988B2 JP2008235959A JP2008235959A JP5198988B2 JP 5198988 B2 JP5198988 B2 JP 5198988B2 JP 2008235959 A JP2008235959 A JP 2008235959A JP 2008235959 A JP2008235959 A JP 2008235959A JP 5198988 B2 JP5198988 B2 JP 5198988B2
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- Prior art keywords
- pressure
- reaction tube
- vent
- control unit
- gas supply
- Prior art date
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Description
2 縦型低圧CVD装置
3 圧力測定制御部
4 反応管
4a キャップ
5 ヒータ室
5a ヒータ
6 搬送室
7 ウエハボード
8 半導体ウエハ
9 カセット
10 搬送ロボット
11 ベントガス供給配管
12 排気管
13 ベントガス供給量制御部
14 ベントガス供給バルブ
15 主排気バルブ
16 真空ポンプ
17 ベント配管
18 ベントバルブ
19 ベントガス排気量制御部
20 ベント配管
21 ベントガス供給バルブ
22 ベントガス供給量制御部
23〜25 圧力センサ
26 ベントガス供給量制御部
27 排気量制御部
28 圧力測定部
29 制御部
Claims (1)
- 低圧CVD法によって成膜を行った後、反応管、前記反応管の大気ベントを行う大気ベントバルブよりも下流側のベント配管内、および半導体ウエハを前記反応管に搬送出する搬送室内にベントガスをそれぞれ導入する工程と、
前記ベントガスの導入により、前記反応管、前記下流側のベント配管内、および前記搬送室内の圧力が前記反応管が設置されるクリーンルーム内の実大気圧と同じ程度となると、前記大気ベントバルブを開いて前記反応管の大気ベントを行い、前記反応管内の前記半導体ウエハを搬出する工程とを有することを特徴とする半導体装置の製造方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008235959A JP5198988B2 (ja) | 2008-09-16 | 2008-09-16 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008235959A JP5198988B2 (ja) | 2008-09-16 | 2008-09-16 | 半導体装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010073706A JP2010073706A (ja) | 2010-04-02 |
JP5198988B2 true JP5198988B2 (ja) | 2013-05-15 |
Family
ID=42205257
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2008235959A Expired - Fee Related JP5198988B2 (ja) | 2008-09-16 | 2008-09-16 | 半導体装置の製造方法 |
Country Status (1)
Country | Link |
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JP (1) | JP5198988B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018186235A (ja) * | 2017-04-27 | 2018-11-22 | 東京エレクトロン株式会社 | 基板処理装置、インジェクタ内のパーティクル除去方法及び基板処理方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2683579B2 (ja) * | 1988-08-04 | 1997-12-03 | 東京エレクトロン株式会社 | 処理装置 |
JP2000306838A (ja) * | 1999-04-20 | 2000-11-02 | Matsushita Electronics Industry Corp | 半導体基板の処理装置及び処理方法 |
CN100456435C (zh) * | 2004-11-01 | 2009-01-28 | 株式会社日立国际电气 | 衬底处理装置以及半导体设备的制造方法 |
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2008
- 2008-09-16 JP JP2008235959A patent/JP5198988B2/ja not_active Expired - Fee Related
Also Published As
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JP2010073706A (ja) | 2010-04-02 |
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