JPH11160877A5 - - Google Patents

Info

Publication number
JPH11160877A5
JPH11160877A5 JP1998268267A JP26826798A JPH11160877A5 JP H11160877 A5 JPH11160877 A5 JP H11160877A5 JP 1998268267 A JP1998268267 A JP 1998268267A JP 26826798 A JP26826798 A JP 26826798A JP H11160877 A5 JPH11160877 A5 JP H11160877A5
Authority
JP
Japan
Prior art keywords
group
independently represent
resist composition
positive resist
composition according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998268267A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11160877A (ja
JP3841378B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP26826798A priority Critical patent/JP3841378B2/ja
Priority claimed from JP26826798A external-priority patent/JP3841378B2/ja
Publication of JPH11160877A publication Critical patent/JPH11160877A/ja
Publication of JPH11160877A5 publication Critical patent/JPH11160877A5/ja
Application granted granted Critical
Publication of JP3841378B2 publication Critical patent/JP3841378B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP26826798A 1997-09-25 1998-09-22 ポジ型レジスト組成物 Expired - Fee Related JP3841378B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26826798A JP3841378B2 (ja) 1997-09-25 1998-09-22 ポジ型レジスト組成物

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP26039997 1997-09-25
JP9-260399 1997-09-25
JP26826798A JP3841378B2 (ja) 1997-09-25 1998-09-22 ポジ型レジスト組成物

Publications (3)

Publication Number Publication Date
JPH11160877A JPH11160877A (ja) 1999-06-18
JPH11160877A5 true JPH11160877A5 (enExample) 2005-02-24
JP3841378B2 JP3841378B2 (ja) 2006-11-01

Family

ID=26544594

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26826798A Expired - Fee Related JP3841378B2 (ja) 1997-09-25 1998-09-22 ポジ型レジスト組成物

Country Status (1)

Country Link
JP (1) JP3841378B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100634973B1 (ko) 1999-04-09 2006-10-16 센쥬긴소쿠고교가부시키가이샤 솔더볼 및 솔더볼의 피복방법
JP4529245B2 (ja) * 1999-12-03 2010-08-25 住友化学株式会社 化学増幅型ポジ型レジスト組成物
JP6065749B2 (ja) * 2013-05-29 2017-01-25 住友ベークライト株式会社 感光性樹脂組成物および電子装置

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