JPH11109628A5 - - Google Patents

Info

Publication number
JPH11109628A5
JPH11109628A5 JP1997267024A JP26702497A JPH11109628A5 JP H11109628 A5 JPH11109628 A5 JP H11109628A5 JP 1997267024 A JP1997267024 A JP 1997267024A JP 26702497 A JP26702497 A JP 26702497A JP H11109628 A5 JPH11109628 A5 JP H11109628A5
Authority
JP
Japan
Prior art keywords
group
represent
acid
photosensitive composition
same
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997267024A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11109628A (ja
JP3865890B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP26702497A priority Critical patent/JP3865890B2/ja
Priority claimed from JP26702497A external-priority patent/JP3865890B2/ja
Publication of JPH11109628A publication Critical patent/JPH11109628A/ja
Publication of JPH11109628A5 publication Critical patent/JPH11109628A5/ja
Application granted granted Critical
Publication of JP3865890B2 publication Critical patent/JP3865890B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP26702497A 1997-09-30 1997-09-30 ポジ型感光性組成物 Expired - Fee Related JP3865890B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26702497A JP3865890B2 (ja) 1997-09-30 1997-09-30 ポジ型感光性組成物

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26702497A JP3865890B2 (ja) 1997-09-30 1997-09-30 ポジ型感光性組成物

Publications (3)

Publication Number Publication Date
JPH11109628A JPH11109628A (ja) 1999-04-23
JPH11109628A5 true JPH11109628A5 (enExample) 2004-10-14
JP3865890B2 JP3865890B2 (ja) 2007-01-10

Family

ID=17439004

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26702497A Expired - Fee Related JP3865890B2 (ja) 1997-09-30 1997-09-30 ポジ型感光性組成物

Country Status (1)

Country Link
JP (1) JP3865890B2 (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100583092B1 (ko) * 2000-06-15 2006-05-24 주식회사 하이닉스반도체 레지스트 플로우 공정용 포토레지스트 조성물의 첨가제
EP1991910A4 (en) * 2006-02-16 2010-12-01 Cornell Res Foundation Inc ADAMANTAN-BASED MOLECULAR GLASS PHOTORESISTS FOR SUB-200 NM LITHOGRAPHY
KR20130138732A (ko) * 2010-09-08 2013-12-19 가부시키가이샤 구라레 아크릴산에스테르 유도체, 고분자 화합물 및 포토 레지스트 조성물
JP5986825B2 (ja) * 2012-06-29 2016-09-06 株式会社ダイセル 高分子化合物、フォトレジスト用樹脂組成物、及び半導体の製造方法
JP5986826B2 (ja) * 2012-06-29 2016-09-06 株式会社ダイセル 高分子化合物、フォトレジスト用樹脂組成物、及び半導体の製造方法
US9261785B2 (en) 2012-06-29 2016-02-16 Daicel Corporation Polymer compound, resin composition for photoresists, and method for producing semiconductor
JP6140496B2 (ja) * 2013-03-25 2017-05-31 東京応化工業株式会社 レジスト組成物、レジストパターン形成方法
BR112017009657A2 (pt) 2014-11-06 2018-01-23 Enanta Pharmaceuticals, Inc análogos de ácidos biliares como agonistas de fxr/tgr5 e métodos de uso dos mesmos
JP6222057B2 (ja) * 2014-11-25 2017-11-01 信越化学工業株式会社 化学増幅レジスト材料及びパターン形成方法
WO2016086115A1 (en) 2014-11-26 2016-06-02 Enanta Pharmaceuticals, Inc. Tetrazole derivatives of bile acids as fxr/tgr5 agonists and methods of use thereof
CA2968404A1 (en) 2014-11-26 2016-06-02 Enanta Pharmaceuticals, Inc. Bile acid analogs as fxr/tgr5 agonists and methods of use thereof
US10208081B2 (en) 2014-11-26 2019-02-19 Enanta Pharmaceuticals, Inc. Bile acid derivatives as FXR/TGR5 agonists and methods of use thereof
RU2017130466A (ru) 2015-02-11 2019-03-12 Энанта Фармасьютикалс, Инк. Аналоги желчной кислоты в качестве агонистов fxr/tgr5 и способы их применения
SI3277286T1 (sl) * 2015-03-31 2021-09-30 Enanta Pharmaceuticals, Inc. Derivati žolčne kisline kot antagonisti FXR/TGR5 in metode za njihovo uporabo
WO2017147137A1 (en) 2016-02-23 2017-08-31 Enanta Pharmaceuticals, Inc. Benzoic acid derivatives of bile acid as fxr/tgr5 agonists and methods of use thereof
US10584145B2 (en) 2016-11-29 2020-03-10 Enanta Pharmaceuticals, Inc. Process for preparation of sulfonylurea bile acid derivatives
ES2971092T3 (es) 2017-04-07 2024-06-03 Enanta Pharm Inc Procedimiento para la preparación de derivados de ácidos biliares de carbamato de sulfonilo

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