JPH11153734A5 - - Google Patents

Info

Publication number
JPH11153734A5
JPH11153734A5 JP1998222703A JP22270398A JPH11153734A5 JP H11153734 A5 JPH11153734 A5 JP H11153734A5 JP 1998222703 A JP1998222703 A JP 1998222703A JP 22270398 A JP22270398 A JP 22270398A JP H11153734 A5 JPH11153734 A5 JP H11153734A5
Authority
JP
Japan
Prior art keywords
optical system
inner part
electroforming
optical element
outer frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1998222703A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11153734A (ja
Filing date
Publication date
Priority claimed from DE19735831A external-priority patent/DE19735831A1/de
Application filed filed Critical
Publication of JPH11153734A publication Critical patent/JPH11153734A/ja
Publication of JPH11153734A5 publication Critical patent/JPH11153734A5/ja
Pending legal-status Critical Current

Links

JP10222703A 1997-08-18 1998-08-06 電鋳光学系マウント部 Pending JPH11153734A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19735831A DE19735831A1 (de) 1997-08-18 1997-08-18 Galvanoplastische Optik-Fassung
DE19735831.4 1997-08-18

Publications (2)

Publication Number Publication Date
JPH11153734A JPH11153734A (ja) 1999-06-08
JPH11153734A5 true JPH11153734A5 (enExample) 2005-11-04

Family

ID=7839358

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10222703A Pending JPH11153734A (ja) 1997-08-18 1998-08-06 電鋳光学系マウント部

Country Status (6)

Country Link
US (2) US6166868A (enExample)
EP (1) EP0898189B1 (enExample)
JP (1) JPH11153734A (enExample)
KR (1) KR100557912B1 (enExample)
DE (2) DE19735831A1 (enExample)
TW (1) TW392084B (enExample)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19735831A1 (de) * 1997-08-18 1999-02-25 Zeiss Carl Fa Galvanoplastische Optik-Fassung
US20030210856A1 (en) * 2002-05-10 2003-11-13 Cormack Robert H. Telecentric 1xN optical fiber switches
US6768599B2 (en) * 1998-12-25 2004-07-27 Olympus Corporation Lens barrel
US6262853B1 (en) * 1998-12-25 2001-07-17 Olympus Optical Co., Ltd. Lens barrel having deformable member
DE19930643C2 (de) * 1999-07-02 2002-01-24 Zeiss Carl Baugruppe aus einem optischen Element und einer Fassung
DE10030495A1 (de) 2000-06-21 2002-01-03 Zeiss Carl Verfahren zum Verbinden einer Vielzahl von optischen Elementen mit einem Grundkörper
DE10136387A1 (de) 2001-07-26 2003-02-13 Zeiss Carl Objektiv, insbesondere Objektiv für die Halbleiter-Lithographie
TW577108B (en) * 2001-11-07 2004-02-21 Nikon Corp Optical device and the manufacturing method thereof, optical system, and manufacturing method of exposure device and micro-device
DE10158216A1 (de) * 2001-11-28 2003-06-18 Carlos Alberto Valenzuela Spiegel, optisches Abbildungssystem und deren Verwendung
DE10219514A1 (de) 2002-04-30 2003-11-13 Zeiss Carl Smt Ag Beleuchtungssystem, insbesondere für die EUV-Lithographie
WO2005006081A1 (en) * 2003-07-09 2005-01-20 Carl-Zeiss Smt Ag Facet mirrors and a method for producing mirror facets
DE10352820A1 (de) * 2003-11-12 2005-06-23 Carl Zeiss Smt Ag Flanschbaugruppe eines optischen Systems
US7265917B2 (en) 2003-12-23 2007-09-04 Carl Zeiss Smt Ag Replacement apparatus for an optical element
EP1643281A1 (de) * 2004-10-02 2006-04-05 Trumpf Werkzeugmaschinen GmbH + Co. KG Optisches Element einer Laserbearbeitungsmaschine und Halterung des optischen Elements
ATE519560T1 (de) 2004-10-20 2011-08-15 Trumpf Werkzeugmaschinen Gmbh Optisches element eines laserbearbeitungskopfs
US7621044B2 (en) * 2004-10-22 2009-11-24 Formfactor, Inc. Method of manufacturing a resilient contact
DE102006038634A1 (de) * 2006-08-17 2008-02-21 Carl Zeiss Smt Ag Halteeinrichtung für ein optisches Element mit Stützkraftausgleich
US8441747B2 (en) 2006-09-14 2013-05-14 Carl Zeiss Smt Gmbh Optical module with minimized overrun of the optical element
DE102008000967B4 (de) 2008-04-03 2015-04-09 Carl Zeiss Smt Gmbh Projektionsbelichtungsanlage für die EUV-Mikrolithographie
CN102364370B (zh) * 2011-10-31 2013-08-28 北京空间机电研究所 一种高隔热效率小热应力影响的低温光学系统支撑装置
CN108469662B (zh) * 2017-02-23 2020-10-27 玉晶光电(厦门)有限公司 光学镜头、其组装方法及镜筒
DE102017209696A1 (de) * 2017-06-08 2018-12-13 Trumpf Laser Gmbh Schutzglas mit Transponder und Einbauhilfe sowie zugehöriges Laserwerkzeug
CN108492906B (zh) * 2018-04-28 2020-08-14 北京控制工程研究所 嵌套型掠入射聚焦光学镜头的镜片无应力调节装置及方法
CN111198465A (zh) * 2018-11-16 2020-05-26 三营超精密光电(晋城)有限公司 挡环及采用该挡环的镜头

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE204320C (enExample) *
GB846289A (en) * 1957-03-15 1960-08-31 Nat Res Dev Improvements in or relating to the manufacture of electromagnetic waveguides
DE2526318A1 (de) * 1975-06-12 1976-12-23 Siemens Ag Metallischer zwischentraeger zur halterung und kontaktierung eines halbleiterkoerpers
DD204320A1 (de) * 1981-10-30 1983-11-23 Volker Eberhardt Anordnung optischer bauelemente in mechanischen fuehrungen
SU1265679A1 (ru) * 1985-06-10 1986-10-23 Предприятие П/Я Р-6681 Юстировочное устройство
NL8800865A (nl) * 1988-04-05 1989-11-01 Stork X Cel Bv Metalen cilinderzeef gemaakt uit velvormig materiaal en werkwijze voor het vervaardigen van een dergelijke zeef.
US5162951A (en) * 1990-07-31 1992-11-10 Eastman Kodak Company Method for designing an optical system
US5058993A (en) * 1990-10-01 1991-10-22 Hughes Aircraft Company Lightweight optical bench and method of fabricating same
US5383168A (en) * 1993-04-01 1995-01-17 Eastman Kodak Company Actively athermalized optical head assembly
US5570238A (en) * 1995-03-31 1996-10-29 Lockheed Missiles & Space Company, Inc. Thermally compensating lens mount
US5953477A (en) * 1995-11-20 1999-09-14 Visionex, Inc. Method and apparatus for improved fiber optic light management
DE29603024U1 (de) * 1996-02-21 1996-04-18 Fa. Carl Zeiss, 89518 Heidenheim Spannungsfreie Lagerung
US5891317A (en) * 1997-02-04 1999-04-06 Avon Products, Inc. Electroformed hollow jewelry
DE19735831A1 (de) * 1997-08-18 1999-02-25 Zeiss Carl Fa Galvanoplastische Optik-Fassung

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