JPH11153734A - 電鋳光学系マウント部 - Google Patents
電鋳光学系マウント部Info
- Publication number
- JPH11153734A JPH11153734A JP10222703A JP22270398A JPH11153734A JP H11153734 A JPH11153734 A JP H11153734A JP 10222703 A JP10222703 A JP 10222703A JP 22270398 A JP22270398 A JP 22270398A JP H11153734 A JPH11153734 A JP H11153734A
- Authority
- JP
- Japan
- Prior art keywords
- optical system
- mount
- electroforming
- spring joint
- ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 30
- 238000005323 electroforming Methods 0.000 title claims abstract description 18
- 238000000034 method Methods 0.000 claims abstract description 19
- 239000007787 solid Substances 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- 238000005520 cutting process Methods 0.000 claims description 5
- 238000000227 grinding Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 3
- 230000003628 erosive effect Effects 0.000 claims description 2
- 238000005304 joining Methods 0.000 claims description 2
- 238000005498 polishing Methods 0.000 claims description 2
- 238000007514 turning Methods 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 claims 1
- 238000003801 milling Methods 0.000 claims 1
- 238000000465 moulding Methods 0.000 claims 1
- 238000003698 laser cutting Methods 0.000 abstract description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 238000009713 electroplating Methods 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 241000238631 Hexapoda Species 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 238000001393 microlithography Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/025—Mountings, adjusting means, or light-tight connections, for optical elements for lenses using glue
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/026—Mountings, adjusting means, or light-tight connections, for optical elements for lenses using retaining rings or springs
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Lens Barrels (AREA)
- Laser Beam Processing (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Micromachines (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19735831.4 | 1997-08-18 | ||
| DE19735831A DE19735831A1 (de) | 1997-08-18 | 1997-08-18 | Galvanoplastische Optik-Fassung |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11153734A true JPH11153734A (ja) | 1999-06-08 |
| JPH11153734A5 JPH11153734A5 (enExample) | 2005-11-04 |
Family
ID=7839358
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10222703A Pending JPH11153734A (ja) | 1997-08-18 | 1998-08-06 | 電鋳光学系マウント部 |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US6166868A (enExample) |
| EP (1) | EP0898189B1 (enExample) |
| JP (1) | JPH11153734A (enExample) |
| KR (1) | KR100557912B1 (enExample) |
| DE (2) | DE19735831A1 (enExample) |
| TW (1) | TW392084B (enExample) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6166868A (en) * | 1997-08-18 | 2000-12-26 | Carl-Zeiss-Stiftung | Galvanoplastic optical mounting |
| WO2003040785A1 (en) * | 2001-11-07 | 2003-05-15 | Nikon Corporation | Optical element, method of manufacturing the optical element, optical system, exposure device, and method of manufacturing micro device |
| JP2008518209A (ja) * | 2004-10-22 | 2008-05-29 | フォームファクター， インコーポレイテッド | 心棒上に作成された、他の表面に移動可能な電気鋳造バネ |
| CN108492906A (zh) * | 2018-04-28 | 2018-09-04 | 北京控制工程研究所 | 嵌套型掠入射聚焦光学镜头的镜片无应力调节装置及方法 |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6768599B2 (en) * | 1998-12-25 | 2004-07-27 | Olympus Corporation | Lens barrel |
| US20030210856A1 (en) * | 2002-05-10 | 2003-11-13 | Cormack Robert H. | Telecentric 1xN optical fiber switches |
| US6262853B1 (en) * | 1998-12-25 | 2001-07-17 | Olympus Optical Co., Ltd. | Lens barrel having deformable member |
| DE19930643C2 (de) * | 1999-07-02 | 2002-01-24 | Zeiss Carl | Baugruppe aus einem optischen Element und einer Fassung |
| DE10030495A1 (de) * | 2000-06-21 | 2002-01-03 | Zeiss Carl | Verfahren zum Verbinden einer Vielzahl von optischen Elementen mit einem Grundkörper |
| DE10136387A1 (de) | 2001-07-26 | 2003-02-13 | Zeiss Carl | Objektiv, insbesondere Objektiv für die Halbleiter-Lithographie |
| DE10158216A1 (de) * | 2001-11-28 | 2003-06-18 | Carlos Alberto Valenzuela | Spiegel, optisches Abbildungssystem und deren Verwendung |
| DE10219514A1 (de) | 2002-04-30 | 2003-11-13 | Zeiss Carl Smt Ag | Beleuchtungssystem, insbesondere für die EUV-Lithographie |
| JP2009514188A (ja) * | 2003-07-09 | 2009-04-02 | カール・ツァイス・エスエムティー・アーゲー | ファセットミラーおよび鏡面ファセットの製造方法 |
| DE10352820A1 (de) * | 2003-11-12 | 2005-06-23 | Carl Zeiss Smt Ag | Flanschbaugruppe eines optischen Systems |
| US7265917B2 (en) | 2003-12-23 | 2007-09-04 | Carl Zeiss Smt Ag | Replacement apparatus for an optical element |
| EP1643281A1 (de) * | 2004-10-02 | 2006-04-05 | Trumpf Werkzeugmaschinen GmbH + Co. KG | Optisches Element einer Laserbearbeitungsmaschine und Halterung des optischen Elements |
| EP1649967B1 (de) * | 2004-10-20 | 2011-08-10 | TRUMPF Werkzeugmaschinen GmbH + Co. KG | Optisches Element eines Laserbearbeitungskopfs |
| DE102006038634A1 (de) * | 2006-08-17 | 2008-02-21 | Carl Zeiss Smt Ag | Halteeinrichtung für ein optisches Element mit Stützkraftausgleich |
| US8441747B2 (en) | 2006-09-14 | 2013-05-14 | Carl Zeiss Smt Gmbh | Optical module with minimized overrun of the optical element |
| DE102008000967B4 (de) | 2008-04-03 | 2015-04-09 | Carl Zeiss Smt Gmbh | Projektionsbelichtungsanlage für die EUV-Mikrolithographie |
| CN102364370B (zh) * | 2011-10-31 | 2013-08-28 | 北京空间机电研究所 | 一种高隔热效率小热应力影响的低温光学系统支撑装置 |
| CN108469662B (zh) * | 2017-02-23 | 2020-10-27 | 玉晶光电(厦门)有限公司 | 光学镜头、其组装方法及镜筒 |
| DE102017209696A1 (de) * | 2017-06-08 | 2018-12-13 | Trumpf Laser Gmbh | Schutzglas mit Transponder und Einbauhilfe sowie zugehöriges Laserwerkzeug |
| CN111198465A (zh) * | 2018-11-16 | 2020-05-26 | 三营超精密光电(晋城)有限公司 | 挡环及采用该挡环的镜头 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE204320C (enExample) * | ||||
| GB846289A (en) * | 1957-03-15 | 1960-08-31 | Nat Res Dev | Improvements in or relating to the manufacture of electromagnetic waveguides |
| DE2526318A1 (de) * | 1975-06-12 | 1976-12-23 | Siemens Ag | Metallischer zwischentraeger zur halterung und kontaktierung eines halbleiterkoerpers |
| DD204320A1 (de) * | 1981-10-30 | 1983-11-23 | Volker Eberhardt | Anordnung optischer bauelemente in mechanischen fuehrungen |
| SU1265679A1 (ru) * | 1985-06-10 | 1986-10-23 | Предприятие П/Я Р-6681 | Юстировочное устройство |
| NL8800865A (nl) * | 1988-04-05 | 1989-11-01 | Stork X Cel Bv | Metalen cilinderzeef gemaakt uit velvormig materiaal en werkwijze voor het vervaardigen van een dergelijke zeef. |
| US5162951A (en) * | 1990-07-31 | 1992-11-10 | Eastman Kodak Company | Method for designing an optical system |
| US5058993A (en) * | 1990-10-01 | 1991-10-22 | Hughes Aircraft Company | Lightweight optical bench and method of fabricating same |
| US5383168A (en) * | 1993-04-01 | 1995-01-17 | Eastman Kodak Company | Actively athermalized optical head assembly |
| US5570238A (en) * | 1995-03-31 | 1996-10-29 | Lockheed Missiles & Space Company, Inc. | Thermally compensating lens mount |
| US5953477A (en) * | 1995-11-20 | 1999-09-14 | Visionex, Inc. | Method and apparatus for improved fiber optic light management |
| DE29603024U1 (de) * | 1996-02-21 | 1996-04-18 | Fa. Carl Zeiss, 89518 Heidenheim | Spannungsfreie Lagerung |
| US5891317A (en) * | 1997-02-04 | 1999-04-06 | Avon Products, Inc. | Electroformed hollow jewelry |
| DE19735831A1 (de) * | 1997-08-18 | 1999-02-25 | Zeiss Carl Fa | Galvanoplastische Optik-Fassung |
-
1997
- 1997-08-18 DE DE19735831A patent/DE19735831A1/de not_active Withdrawn
-
1998
- 1998-06-30 KR KR1019980025569A patent/KR100557912B1/ko not_active Expired - Fee Related
- 1998-07-13 TW TW087111266A patent/TW392084B/zh not_active IP Right Cessation
- 1998-07-13 EP EP98112971A patent/EP0898189B1/de not_active Expired - Lifetime
- 1998-07-13 DE DE59813054T patent/DE59813054D1/de not_active Expired - Fee Related
- 1998-07-30 US US09/126,934 patent/US6166868A/en not_active Expired - Fee Related
- 1998-08-06 JP JP10222703A patent/JPH11153734A/ja active Pending
-
2000
- 2000-09-01 US US09/653,660 patent/US6503383B1/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6166868A (en) * | 1997-08-18 | 2000-12-26 | Carl-Zeiss-Stiftung | Galvanoplastic optical mounting |
| WO2003040785A1 (en) * | 2001-11-07 | 2003-05-15 | Nikon Corporation | Optical element, method of manufacturing the optical element, optical system, exposure device, and method of manufacturing micro device |
| JP2008518209A (ja) * | 2004-10-22 | 2008-05-29 | フォームファクター， インコーポレイテッド | 心棒上に作成された、他の表面に移動可能な電気鋳造バネ |
| CN108492906A (zh) * | 2018-04-28 | 2018-09-04 | 北京控制工程研究所 | 嵌套型掠入射聚焦光学镜头的镜片无应力调节装置及方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| DE19735831A1 (de) | 1999-02-25 |
| TW392084B (en) | 2000-06-01 |
| EP0898189A1 (de) | 1999-02-24 |
| US6503383B1 (en) | 2003-01-07 |
| KR100557912B1 (ko) | 2007-12-04 |
| EP0898189B1 (de) | 2005-09-14 |
| US6166868A (en) | 2000-12-26 |
| KR19990023174A (ko) | 1999-03-25 |
| DE59813054D1 (de) | 2005-10-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A711 Effective date: 20040819 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20050808 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20050808 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20080902 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20090224 |