JPH11150198A5 - - Google Patents

Info

Publication number
JPH11150198A5
JPH11150198A5 JP1997333453A JP33345397A JPH11150198A5 JP H11150198 A5 JPH11150198 A5 JP H11150198A5 JP 1997333453 A JP1997333453 A JP 1997333453A JP 33345397 A JP33345397 A JP 33345397A JP H11150198 A5 JPH11150198 A5 JP H11150198A5
Authority
JP
Japan
Prior art keywords
region
nonvolatile memory
impurity
drain region
active region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP1997333453A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11150198A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP9333453A priority Critical patent/JPH11150198A/ja
Priority claimed from JP9333453A external-priority patent/JPH11150198A/ja
Priority to US09/192,745 priority patent/US6686623B2/en
Publication of JPH11150198A publication Critical patent/JPH11150198A/ja
Priority to US10/694,477 priority patent/US7535053B2/en
Publication of JPH11150198A5 publication Critical patent/JPH11150198A5/ja
Priority to US12/427,140 priority patent/US8222696B2/en
Priority to US13/549,914 priority patent/US8482069B2/en
Withdrawn legal-status Critical Current

Links

JP9333453A 1997-11-18 1997-11-18 不揮発性メモリ及び電子機器 Withdrawn JPH11150198A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP9333453A JPH11150198A (ja) 1997-11-18 1997-11-18 不揮発性メモリ及び電子機器
US09/192,745 US6686623B2 (en) 1997-11-18 1998-11-16 Nonvolatile memory and electronic apparatus
US10/694,477 US7535053B2 (en) 1997-11-18 2003-10-27 Nonvolatile memory and electronic apparatus
US12/427,140 US8222696B2 (en) 1997-11-18 2009-04-21 Semiconductor device having buried oxide film
US13/549,914 US8482069B2 (en) 1997-11-18 2012-07-16 Nonvolatile memory and electronic apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9333453A JPH11150198A (ja) 1997-11-18 1997-11-18 不揮発性メモリ及び電子機器

Publications (2)

Publication Number Publication Date
JPH11150198A JPH11150198A (ja) 1999-06-02
JPH11150198A5 true JPH11150198A5 (https=) 2005-06-23

Family

ID=18266262

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9333453A Withdrawn JPH11150198A (ja) 1997-11-18 1997-11-18 不揮発性メモリ及び電子機器

Country Status (1)

Country Link
JP (1) JPH11150198A (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4919549B2 (ja) * 2000-07-21 2012-04-18 株式会社半導体エネルギー研究所 不揮発性メモリ及び半導体装置
US6724037B2 (en) 2000-07-21 2004-04-20 Semiconductor Energy Laboratory Co., Ltd. Nonvolatile memory and semiconductor device
TWI606512B (zh) * 2012-12-27 2017-11-21 三菱綜合材料股份有限公司 電漿蝕刻裝置用矽構件及電漿蝕刻裝置用矽構件之製造方法

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