JPH11121696A5 - - Google Patents

Info

Publication number
JPH11121696A5
JPH11121696A5 JP1997286761A JP28676197A JPH11121696A5 JP H11121696 A5 JPH11121696 A5 JP H11121696A5 JP 1997286761 A JP1997286761 A JP 1997286761A JP 28676197 A JP28676197 A JP 28676197A JP H11121696 A5 JPH11121696 A5 JP H11121696A5
Authority
JP
Japan
Prior art keywords
dielectric
film
precursor film
dielectric capacitor
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1997286761A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11121696A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP9286761A priority Critical patent/JPH11121696A/ja
Priority claimed from JP9286761A external-priority patent/JPH11121696A/ja
Publication of JPH11121696A publication Critical patent/JPH11121696A/ja
Publication of JPH11121696A5 publication Critical patent/JPH11121696A5/ja
Pending legal-status Critical Current

Links

JP9286761A 1997-10-20 1997-10-20 誘電体キャパシタの製造方法および半導体記憶装置の製造方法 Pending JPH11121696A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9286761A JPH11121696A (ja) 1997-10-20 1997-10-20 誘電体キャパシタの製造方法および半導体記憶装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9286761A JPH11121696A (ja) 1997-10-20 1997-10-20 誘電体キャパシタの製造方法および半導体記憶装置の製造方法

Publications (2)

Publication Number Publication Date
JPH11121696A JPH11121696A (ja) 1999-04-30
JPH11121696A5 true JPH11121696A5 (https=) 2005-10-27

Family

ID=17708714

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9286761A Pending JPH11121696A (ja) 1997-10-20 1997-10-20 誘電体キャパシタの製造方法および半導体記憶装置の製造方法

Country Status (1)

Country Link
JP (1) JPH11121696A (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6436838B1 (en) 2000-04-21 2002-08-20 Applied Materials, Inc. Method of patterning lead zirconium titanate and barium strontium titanate
JP3921401B2 (ja) 2002-03-15 2007-05-30 松下電器産業株式会社 容量素子の製造方法
JP2005101512A (ja) * 2002-10-24 2005-04-14 Seiko Epson Corp 強誘電体膜、強誘電体メモリ、圧電素子、半導体素子、液体噴射ヘッド、プリンタ及び強誘電体膜の製造方法

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