JPH1099760A - Coating device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To effectively coat pasty liquid. SOLUTION: Above a glass substrate P mounted on an X stage 16, a discharge nozzle 40 for feeding an adhesive agent onto the surface of the glass substrate and a measuring device 50 for measuring the unevenness of the surface of the glass substrate are installed. A reflection mirror 60 is connected to the measuring device, opposite to the emitting part of the measuring device. The reflection mirror is installed, inclined 45 deg. to the glass substrate, and also it has a hole 64 into which the discharge nozzle is inserted. Measuring light emitted from the measuring device is deflected toward the glass substrate to lead it onto the glass substrate near the tip of the discharge nozzle, and also reflected light reflected on the surface of the glass substrate is led to the measuring device.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a coating apparatus for coating a paste-like coating agent on a substrate, for example, in a manufacturing process of a liquid crystal display panel, a sealing adhesive for sealing a liquid crystal on a glass substrate. The present invention relates to a coating device.

[0002]

2. Description of the Related Art In recent years, coating apparatuses for applying a paste-like coating agent have been used in various industrial fields, for example, as an apparatus for applying an adhesive to a substrate of a liquid crystal display panel.

In the manufacture of a liquid crystal display panel, electrodes,
There is a step in which a pair of glass substrates on which an alignment film or the like is formed are attached to each other to define a space in which liquid crystal is sealed. In this step, an adhesive for sealing a liquid crystal is applied to one of the pair of glass substrates.

In this adhesive application step, first, one glass substrate is placed on a stage of an adhesive application device, and then a discharge nozzle connected to a syringe filled with the adhesive is attached to the glass substrate. On the other hand, it is moved along a predetermined path on the glass substrate while maintaining a predetermined gap.
At the same time, a certain amount of discharge air is supplied to the syringe, and the adhesive is applied by discharging from the discharge nozzle.

[0005] Subsequently, beads or the like as spacers are sprayed on a region of the surface of the other glass substrate corresponding to the region partitioned by the seal adhesive, and then the other glass substrate is coated with an adhesive. And bonded to each other. Thereafter, these glass substrates are heated while applying pressure in the bonding direction to cure the adhesive.

Usually, the gap between a pair of substrates is set to about 5 μm, and it is necessary that the gap be uniform over the entire surface of the substrates. Therefore, when applying the adhesive on the substrate, it is necessary to sufficiently control the width and the application amount of the adhesive. For this purpose, it is necessary to apply the adhesive while maintaining a constant gap between the tip of the discharge nozzle and the substrate surface.

Therefore, in a conventional coating apparatus, an optical length measuring device is provided beside the discharge nozzle, and the optical length measuring device measures unevenness on the substrate surface. Then, by applying while adjusting the height of the ejection nozzle according to the measured unevenness, the gap between the tip of the ejection nozzle and the substrate surface is kept constant, and a constant application amount is secured.

However, in the coating apparatus having the above structure, for example, when the adhesive is applied to the edge of the substrate, the measuring point of the length measuring instrument jumps out of the substrate, and it is difficult to measure the length of the substrate surface. Become.

[0009]

As a method of solving such a problem, first, it is conceivable to separately perform the length measuring operation and the coating operation. That is, the area on the substrate surface to which the adhesive is applied is scanned by the length measuring device, and the unevenness of this area is measured in advance. Next, the adhesive is applied by the discharge nozzle, and at this time, the application operation is performed while adjusting the height of the discharge nozzle based on the data measured previously.

However, in this case, it is necessary to scan the length measuring device and the discharge nozzle for two rounds along the adhesive application area of the substrate, which requires a long time for the application operation and lowers the efficiency.

As a second method, it is conceivable to provide a pair of length measuring devices on both sides of the discharge nozzle and perform measurement using one of the length measuring devices for selection. That is, the surveying is started by one length measuring device, and when the length measuring device is located outside the substrate, the measurement is switched to the other length measuring device to perform the length measurement.

According to such a method, the length measuring operation and the coating operation can be performed simultaneously, and the working time can be reduced. However, the length measuring device is expensive and two units are used. In this case, the cost of the entire apparatus increases, and the configuration of the control system becomes complicated.

Further, as a third method, it is conceivable to bend the discharge nozzle into a crank shape and make its tip end substantially coincide with the optical axis of the length measuring device. In this case, the measuring point of the length measuring device does not lie outside the substrate, and the length measuring operation and the coating operation can be performed simultaneously.

However, since the shape of the discharge nozzle is special, air bubbles are easily generated in the paste-like liquid to be applied, which causes poor application. Further, cleaning after using the discharge nozzle becomes difficult.

On the other hand, the adhesive applied to the substrate surface of the liquid crystal display panel by the application device is usually applied sufficiently thicker than the final gap between the substrates. Then, after bonding the pair of substrates, the substrates are pressed in the bonding direction to crush the adhesive, thereby obtaining a predetermined gap.

However, when the applied adhesive is crushed, the glass substrate or the adhesive may be displaced, and sufficient management is required to crush the adhesive to a uniform thickness, which makes the operation troublesome. The present invention has been made in view of the above points, and an object of the present invention is to provide an inexpensive coating apparatus that can efficiently apply a paste-like liquid.

[0017]

In order to achieve the above object, a coating apparatus according to a first aspect of the present invention includes a stage having a mounting surface on which a substrate is mounted, and a stage mounted on the stage. A supply unit that has a discharge nozzle extending toward the surface of the substrate and supplies the coating agent to the substrate surface from the discharge nozzle, and a measurement unit that measures unevenness of the substrate surface mounted on the stage, Adjusting means for adjusting the distance between the substrate surface and the discharge nozzle to a predetermined value according to the measurement result of the measuring means, and relative movement of the substrate mounted on the stage, the discharge nozzle and the measuring means Driving means for causing the measuring means to emit measurement light, the light receiving means being provided in the vicinity of the discharge nozzle, and measuring light emitted from the emission means in the vicinity of the discharge nozzle. With above substrate With deflecting the surface, and the reflected light from the substrate surface is characterized in that and a reflector leading to the light receiving means.

According to a second aspect of the present invention, there is provided a coating apparatus including a stage having a mounting surface on which a substrate is mounted, a syringe filled with a coating agent, and a stage connected to the syringe. A discharge nozzle extending toward the surface of the substrate placed on the stage, supply means for supplying a coating agent from the discharge nozzle to the surface of the substrate, and irregularities on the surface of the substrate placed on the stage Measuring means for measuring the distance, an adjusting means for adjusting the interval between the substrate surface and the discharge nozzle to a predetermined value according to the measurement result of the measuring means, and the discharge nozzle and the measuring means were mounted on the stage Driving means for moving along a predetermined path with respect to the substrate, comprising, the measuring means is provided in the vicinity of the discharge nozzle, an emitting means for emitting measurement light, a light receiving means, the discharge nozzle,
A reflective plate that deflects the measurement light emitted from the emission unit toward the substrate surface in the vicinity of the discharge nozzle, and guides the reflected light from the substrate surface to the light receiving unit. I have.

According to the invention, the emission means of the measurement means emits the measurement light in a direction substantially perpendicular to the axis of the discharge nozzle, and the reflection plate emits the measurement light from the emission means. The measurement light is arranged to be deflected also in a plane orthogonal to the surface of the substrate mounted on the stage.

According to a seventh aspect of the present invention, there is provided a coating apparatus comprising: a stage having a mounting surface on which a substrate is mounted; a syringe filled with a coating agent; and a stage connected to the syringe. A discharge nozzle extending toward the surface of the substrate placed on, and supply means for supplying and applying a coating agent to the substrate surface from the discharge nozzle,
Driving means for moving the discharge nozzle along a predetermined path with respect to the substrate mounted on the stage,
When the discharge nozzle is moved along a predetermined path by the driving unit while supplying the coating agent from the discharge nozzle by the supply unit, the discharge nozzle crushes the coating agent supplied to the substrate surface to a predetermined thickness. The ratio of the inner diameter to the outer diameter of the discharge nozzle at the front end surface is such that the width ratio (width / height) to the height of the coating agent applied to the substrate surface is 10%. It is characterized in that it is set so as to be as described above.

In the above-mentioned coating apparatus, the outer diameter of the discharge nozzle at the front end face is formed to be at least twice the inner diameter, and preferably at least six times. According to the coating apparatus configured as described above, for example, the discharge nozzle is moved along a predetermined path in a state where the discharge nozzle faces the glass substrate of the liquid crystal display panel, and at the same time, the paste-like coating agent is moved from the discharge nozzle. For example, by supplying an adhesive, the adhesive is applied on the glass substrate along the predetermined path.

During the coating operation, the measuring means measures the irregularities on the surface of the glass substrate near the discharge nozzle, and adjusts the distance between the tip of the discharge nozzle and the surface of the glass substrate to a predetermined value according to the measurement result.

Further, according to the coating apparatus having the above structure, the adhesive supplied from the discharge nozzle onto the glass substrate is crushed by the distal end face of the discharge nozzle, and is applied with a predetermined width and thickness.

[0024]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of an adhesive applying apparatus according to an embodiment of the present invention. As shown in FIG.
The base 10 is provided with a gate-shaped support frame 11 and an XY stage 12 functioning as a driving means.

The XY stage 12 has a flat Y stage 14 and an X stage 16. A pair of guide rails 18 extending in the Y-axis direction are fixed to the upper surface of the base 10, and the Y stage 14
And is supported on a base 10 so as to be movable along. The Y stage 14 is reciprocated in the Y-axis direction by a Y-axis drive mechanism 22 having a step motor 20 and a lead screw 21 provided on the base 10.

On the Y stage 14, a pair of guide rails 24 extending in the X-axis direction is fixed.
6 is supported on the Y stage 14 movably along these guide rails 24. And X stage 1
6 is a step motor 2 provided on the Y stage 14
X-axis drive mechanism 28 having 6 and lead screw 27
, Thereby reciprocatingly driving in the X-axis direction.

The upper surface of the X stage 16 extends horizontally, and forms a mounting surface 16a on which a glass substrate P used for manufacturing a liquid crystal display panel is mounted. Also, X
A large number of suction holes 30 are formed in the stage 16, and open on the mounting surface 16 a of the X stage 16. These suction holes 30 are connected to a vacuum pump 3 described later through a vacuum line 32.
It communicates with 3. Therefore, by operating the vacuum pump 33 with the glass substrate P placed on the X stage 16, the glass substrate P is placed on the mounting surface 16 of the X stage 16.
a. Then, by driving the XY stage 12, the glass substrate P can be relatively moved with respect to a discharge nozzle described later.

A support block 31 is fixed to the center of the support frame 11, and the support block 31 has first and second Z-direction drive mechanisms 34, 3 arranged in parallel with each other.
6 is supported and located above the XY stage 12.

The first Z-direction drive mechanism 34 has a first guide rail 34a and a Z-direction along the first guide rail 34a, that is, a direction orthogonal to the mounting surface 16a of the X stage 16. And a first slider 34b slidably provided. A ball screw 35 extending in the Z direction is rotatably meshed with the first slider 34b.

The ball screw 35 is connected to a first pulse motor 37 mounted on the upper end of the first Z-direction driving mechanism 34.
Is driven to rotate. The pitch of the ball screw 35 is 2 mm.
Is driven by dividing one pitch of the ball screw 35 into 4000 pulses.

As shown in FIGS. 1 to 3, a syringe 38 filled with an adhesive as a coating agent is attached to the first slider 34b, and a discharge nozzle 40 is provided at the lower end of the syringe. ing. In addition, syringe 3
8 has a discharge pump 43 through an air supply pipe 42.
Is connected. The discharge nozzle 40 is formed in an elongated cylindrical shape, and extends perpendicular to the surface of the glass substrate P mounted on the mounting surface 16a of the X stage 16.

Then, by supplying a compressed gas such as air or nitrogen to the syringe 38 by the discharge pump 43, the adhesive in the syringe is discharged from the tip of the discharge nozzle 40 and applied on the glass substrate P. The syringe 38, the discharge nozzle 40, and the discharge pump 43 function as supply means in the present invention.

By driving the first Z-direction drive mechanism 34 to raise and lower the syringe 38 and the discharge nozzle 40, the gap between the tip of the discharge nozzle 40 and the surface of the glass substrate P can be adjusted. The first Z-direction driving mechanism 34 functions as an adjusting unit in the present invention.

As the adhesive filled in the syringe 15, an epoxy resin-based thermosetting adhesive, for example, an adhesive mainly composed of Stract Bond (trade name) (manufactured by Mitsui Toatsu Co., Ltd.) is used. I have.

The discharge nozzle 40 will be described in more detail. As shown in FIG. 4, the discharge nozzle 40 is formed in a cylindrical shape, and the adhesive A is supplied through an inner hole 40a. The tip surface 40b of the discharge nozzle 40 is formed flat and faces the surface of the glass substrate P in parallel.

On the front end face 40b, the inner diameter D1 of the discharge nozzle 40 is 300 μm and the outer diameter D2 is 1,000 μm.
m. That is, the outer diameter D2 is set to be at least twice the inner diameter D1, and preferably at least six times. In particular, the ratio between the inner diameter D1 and the outer diameter D2 is set such that the ratio (width / height) of the width and height of the adhesive applied to the surface of the glass substrate P by the discharge nozzle 40 is 10 or more, Preferably, the ratio is set to be 50 to 100.

The inner diameter D1, outer diameter D2, discharge nozzle 4
0, the gap g between the tip surface 40b and the glass substrate P, and
It is desirable that the sectional area S of the applied adhesive is set so as to satisfy the following relationship. D1 · g <S <D2 · g On the other hand, as shown in FIGS. 1 and 2, the second Z-direction drive mechanism 36 is configured in the same manner as the first Z-direction drive mechanism 34, and the second pulse motor By rotating the ball screw 45 at 44, the second slider 36b is moved along the second guide rail 36a attached to the support frame 31.
Is driven in the Z direction.

As shown in FIGS. 1 to 3, an optical length measuring device 50 is attached to the second slider 36b via a position adjusting device 48. Length measuring device 50
A function as a measuring means for measuring the unevenness of the surface of the glass substrate P, an emission unit 50a for emitting measurement light, a light receiving unit 50b for receiving light reflected from the surface of the glass substrate,
It has.

The position adjusting device 48 functioning as position adjusting means has substantially the same configuration as the XY stage 12. That is, the position adjustment device 48
6b, a Y table 52 movably supported along the Y axis direction, and a Y table 5 via a ball screw (not shown).
And a pulse motor 53 that reciprocates 2 in the Y-axis direction. The length measuring device 50 is movably supported on the lower surface side of the Y table 52 along the X-axis direction, and is reciprocated in the X-axis direction by a pulse motor 56 via a ball screw 54.

The length measuring device 50 includes a position adjusting device 48.
Thus, the measurement light from the emission part 50a is emitted in a direction along the horizontal direction and orthogonal to the axis of the discharge nozzle 40.

On the other hand, a rectangular plate-shaped reflecting mirror 60 is provided so as to face the emitting section 50a and the light receiving section 50b of the length measuring device 50. Reflecting mirror 60 functioning as a reflecting plate
Is fixed to the length measuring device 50 via a pair of support arms 62, and can be moved integrally with the length measuring device 50. Also,
The reflection mirror 60 is fixed in a state of being inclined at 45 degrees with respect to the surface of the glass substrate P. Therefore, the reflection mirror 60
Is held at a fixed position with respect to the length measuring device 50 in a state of being inclined by 45 degrees.

Further, a through hole 64 is formed substantially at the center of the reflection mirror 60, and the discharge nozzle 40 extends through the through hole. The through hole 64 is formed to have a diameter larger than the outer diameter of the discharge nozzle 40 so that the reflection mirror 60 and the length measuring device 50 can be moved with respect to the discharge nozzle 40.

The measuring light emitted from the emitting portion 50a of the length measuring device 50 propagates horizontally along the direction orthogonal to the axis of the discharge nozzle 40, and then is reflected by the reflecting mirror 60 onto the glass substrate P.
And propagates in a plane perpendicular to the surface of the glass substrate P. Then, the measurement light is applied to the discharge nozzle 4
The light is incident on the glass substrate surface at a position adjacent to the front end of the zero.

Further, the measuring light is reflected on the surface of the glass substrate, propagates in a plane perpendicular to the surface of the glass substrate P, is reflected at right angles by the reflecting mirror 60, and is reflected by the light receiving section 50 of the length measuring device 50.
b. And the length measuring device 50 is a glass substrate P
The unevenness of the glass substrate surface is measured based on the light reflected from the surface.

As shown in FIG. 5, the control system of the coating apparatus comprises:
A control unit 66 for controlling the operation of the entire apparatus is provided. The controller 66 includes a driver 67 for driving the step motors 20 and 26 of the XY stage 12, a pulse motor 37 for the first and second Z-direction driving mechanisms 34 and 36,
A driver 68 for driving the motor 44 and a driver 70 for driving the pulse motors 53 and 56 of the position adjusting device 48 are connected.

The control unit 66 is connected to the length measuring device 50 and the vacuum pump 33 and the discharge pump 43.
Is connected. Further, the control system has a RAM 72 in which a control program for the entire apparatus is stored, and an operation panel 73 for inputting control data by an operator.

Next, the operation of applying an adhesive to the glass substrate P for a liquid crystal display panel using the adhesive applying apparatus configured as described above will be described. First, X stage 1
After the glass substrate P is automatically conveyed to a predetermined position on the mounting surface 16a, the vacuum pump 33 is operated, and the glass substrate P
On the mounting surface 16a.

In this state, the XY stage 12 is operated to move the arbitrary application start position of the glass substrate P to the discharge nozzle 4.
0. Subsequently, the first Z-direction driving mechanism 34 is operated to lower the discharge nozzle 40 to a predetermined application reference position. As a result, the distal end surface 40b of the discharge nozzle 40 faces the surface of the glass substrate P with a predetermined gap.

At the same time, the second Z-direction drive mechanism 36 is operated to lower the length measuring device 50 to a predetermined measurement reference height position. Then, the position adjusting device 48 causes the discharge nozzle 4
By adjusting the positions of the length measuring device 50 and the reflecting mirror 60 with respect to 0, the measurement point of the length measuring device 50, that is, the position where the measuring light is incident on the surface of the glass substrate P is set near the tip of the discharge nozzle and the discharge nozzle. Set forward in the direction of travel.

In this state, the height and unevenness of the surface of the glass substrate P are measured by the length measuring device 50, and the distance between the tip surface 40b of the discharge nozzle 40 waiting at the application reference position and the surface of the glass substrate P is controlled by the control unit. The calculation is performed by 66. Then, the first Z-direction driving mechanism 34 is moved in accordance with the calculation result such that the tip end face 40b of the discharge nozzle 40 faces the glass substrate surface with a predetermined gap, for example, a gap of 10 μm.
Is operated to adjust the height of the discharge nozzle 40.

After the above-described measurement of the unevenness and the height adjustment are completed, as shown in FIG. 6, the discharge nozzle 40 is moved with respect to the glass substrate P along a predetermined path R so as to move.
-The glass substrate P is moved by driving the Y stage 12. At the same time, the discharge pump 30 is operated to supply compressed gas at a predetermined flow rate, and is supplied to the syringe 38 through the supply pipe 42. Thereby, the adhesive A filled in the syringe 38 is discharged from the tip of the discharge nozzle 40 and is applied onto the glass substrate P.

In this case, as shown in FIG. 4, the adhesive A is supplied onto the surface of the glass substrate P from the inner hole 40a of the discharge nozzle 40, and is applied to the surface of the glass substrate as the discharge nozzle moves. At this time, the adhesive A supplied to the surface of the glass substrate P is applied to the surface of the glass substrate in a state of being crushed to a predetermined width and thickness by the tip end surface 40b of the discharge nozzle 40.

For example, the inner diameter of the distal end surface 40b of the discharge nozzle 40 is 300 μm, the outer diameter is 1,000 μm, and the moving speed of the discharge nozzle 40 with respect to the glass substrate P is 25 to 3 μm.
0 mm / s, the supply amount of the adhesive A was 1.65 × 10 ⁸ μm ³
/ S, the adhesive applied to the surface of the glass substrate has a width of about 550 μm and a height of 10 μm.

While the discharge nozzle 40 is moved along the path R by driving the XY stage 12, the length measuring device 50 is moved.
The reflecting mirror 60 also moves at the same time, and the length measuring device 50 continuously measures irregularities on the surface of the glass substrate P along the route R. Then, the control unit 66 calculates the interval between the tip surface 40b of the discharge nozzle 40 and the surface of the glass substrate P as needed according to the measurement result, and adjusts the height of the discharge nozzle 40 so that the above-mentioned interval maintains a predetermined value (10 μm). Adjust from time to time.

Here, the discharge nozzle 40 and the length measuring device 50
When the measuring point passes through the corner of the coating route R, X-
The moving direction of the Y stage 12 is switched from the X direction to the Y direction or from the Y direction to the X direction. Then, the control unit 66 measures the position of the discharge nozzle 40 by using the position adjustment device 48 such that the measurement point of the length measuring device 50 is always located in front of the discharge nozzle 40 in the traveling direction of the discharge nozzle 40 when the movement direction is switched. The positions of the long device 50 and the reflection mirror 60 are switched.

Further, when passing through the corner of the coating path R, the measuring light of the length measuring device 50 may intersect the adhesive A already applied to the surface of the glass substrate P. Such an intersecting region is programmed in the RAM 72 in advance, and the control unit 66 ignores the measurement data from the length measuring device 50 while the measurement light of the length measuring device 50 passes through the intersecting region, and discharges the ejection nozzle. No height adjustment of 40 is performed.

When the discharge nozzle 40 makes one round on the glass substrate along the coating path R, the XY stage 1
The movement of No. 2 and the supply of the adhesive are stopped, and at the same time, the discharge nozzle 40 and the length measuring device 50 are raised to a predetermined position and separated from the glass substrate P. Thereby, the glass substrate P
The adhesive A is applied to the surface in a rectangular shape along the application path R.

The driving of each mechanism described above is performed by the control unit 6.
The control is performed in accordance with the program stored in the RAM 72 under the control of No. 6. Thereafter, when manufacturing a liquid crystal display panel, the other glass substrate is positioned with respect to the glass substrate P on which the adhesive A has been applied, and bonded together.
Then, the pair of bonded glass substrates is heated while applying pressure in the bonding direction to cure the adhesive, and then the liquid crystal is sealed in a region B (FIG. 5) surrounded by the applied adhesive A.

According to the adhesive coating apparatus configured as described above, the reflection mirror 60 is provided to face the length measuring device 50 for measuring the unevenness of the surface of the glass substrate, and the measuring light emitted from the length measuring device is provided. Is guided onto the glass substrate surface in the vicinity of the discharge nozzle 40 by the reflection mirror. Therefore, the length measuring device 50
Can be set near the discharge nozzle 40, and even when the length measuring device is moved in conjunction with the discharge nozzle, the measurement point is not located outside the glass substrate. Therefore, the application operation by the discharge nozzle 40 and the measurement operation by the length measuring device 50 can be performed simultaneously, and the application operation of the adhesive A can be performed efficiently in a short time.

In this case, the measuring operation can be performed by one length measuring device 50 without adding a length measuring device, and the discharge nozzle 40 does not need to have a special shape. Can be provided.

Further, according to the above-mentioned adhesive applying apparatus,
By setting the size of the tip end face 40b of the discharge nozzle 40 to a predetermined value, that is, the ratio of the inner diameter to the outer diameter at the tip end face is set to be 10% of the width of the coating material applied to the glass substrate surface. By setting as follows, the adhesive supplied from the discharge nozzle 40 can be applied while being crushed to a predetermined width and height by the distal end surface 40b of the discharge nozzle.

Accordingly, when manufacturing the liquid crystal display panel by bonding the other glass substrate thereafter, it is not necessary to significantly crush the applied adhesive, and the pressing operation of the glass substrate can be simplified and the adhesive can be simplified. Can be prevented from being displaced between the glass substrates due to crushing.

The present invention is not limited to the above-described embodiment, but can be variously modified without changing the gist of the invention. For example, the adhesive to be used is not limited to the above-described epoxy resin-based thermosetting adhesive, and can be changed as needed. In addition, the reflection mirror is configured to be inclined at 45 degrees with respect to the surface of the glass substrate. However, the inclination angle can be changed as necessary in accordance with the emission direction of the measurement light from the length measuring device. .

In the above-described embodiment, the glass substrate is driven in the XY directions to apply the liquid. However, the syringe, the discharge nozzle, and the length measuring device may be driven in the XY directions. Although the syringe and the discharge nozzle are provided so as to move up and down integrally, it is also possible to connect the syringe and the discharge nozzle with a flexible tube and drive only the discharge nozzle up and down. Furthermore, the discharge nozzle is not limited to be perpendicular to the surface of the glass substrate placed on the stage, and may extend obliquely.

[0065]

As described above in detail, according to the present invention, it is possible to measure the unevenness of the substrate surface near the discharge nozzle by using the measuring means without using a special discharge nozzle. And an inexpensive coating device capable of efficiently applying the liquid.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an entire adhesive coating apparatus according to an embodiment of the present invention.

FIG. 2 is a side view schematically showing a main part of the adhesive application device.

FIG. 3 is a front view and a plan view showing a discharge nozzle and a reflection mirror of the adhesive application device.

FIG. 4 is an enlarged cross-sectional view showing a tip portion of the discharge nozzle.

FIG. 5 is a block diagram showing a configuration of a control system of the adhesive application device.

FIG. 6 is a perspective view showing an adhesive application path by the adhesive application device.

[Explanation of symbols]

 12 XY stage 16 X stage 16a Mounting surface 34 First Z-direction drive mechanism 36 Second Z-direction drive mechanism 38 Syringe 40 Discharge nozzle 40b Tip surface 43 Air supply pump 48 ... Position adjusting device 50 ... Length measuring device 50a ... Emission part 50b ... Light receiving part 60 ... Reflection mirror 60a ... Reflection surface 64 ... Transparent hole 66 ... Control part

Claims (10)

[Claims] A stage provided with a mounting surface on which the substrate is mounted; and a discharge nozzle extending toward a surface of the substrate mounted on the stage, wherein the discharge nozzle extends from the discharge nozzle to the surface of the substrate. Supply means for supplying the coating agent; measuring means for measuring the unevenness of the surface of the substrate mounted on the stage; and a distance between the substrate surface and the discharge nozzle according to a measurement result of the measuring means to a predetermined value. Adjusting means for adjusting; and driving means for relatively moving the substrate mounted on the stage, the discharge nozzle and the measuring means, wherein the measuring means comprises: an emitting means for emitting measuring light; Means for reflecting the measurement light emitted from the emission means on the substrate surface in the vicinity of the emission nozzle, and the reflection light from the substrate surface to the light receiving means, provided near the emission nozzle. Board , Coating apparatus, characterized in that it comprises a. 2. A stage provided with a mounting surface on which a substrate is mounted, a syringe filled with a coating agent, and connected to the syringe and facing a surface of the substrate mounted on the stage. Supply means for supplying a coating agent from the discharge nozzle to the substrate surface, measurement means for measuring irregularities on the surface of the substrate placed on the stage, and measurement means Adjusting means for adjusting the distance between the substrate surface and the discharge nozzle to a predetermined value in accordance with the measurement result of the above, relative to the substrate mounted on the stage along the predetermined path with respect to the discharge nozzle and the measurement means A driving unit for moving the measuring unit, wherein the measuring unit is provided near the emitting nozzle for emitting the measuring light, the light receiving unit, and the discharging nozzle, and the measuring nozzle for emitting the measuring light emitted from the emitting unit to the discharging nozzle. Guides on the substrate surface in the vicinity, the reflected light from the substrate surface coating apparatus characterized by comprising: a reflection plate for guiding to the light receiving means. 3. The emission means emits measurement light in a direction substantially orthogonal to the axis of the discharge nozzle, and the reflector carries the measurement light emitted from the emission means on the stage. The coating apparatus according to claim 1, wherein the coating apparatus is disposed so as to be deflected in a plane orthogonal to the substrate surface. 4. The reflection plate according to claim 1, wherein the reflection plate is provided so as to intersect with the discharge nozzle, and has a through hole through which the discharge nozzle is inserted with a gap. The coating device according to claim 1 or 2. 5. A position adjusting means for adjusting the positions of the measuring means and the reflecting plate with respect to the discharge nozzle, and a measuring light from the measuring means is incident on the surface of the substrate in a moving direction of the discharge nozzle. The coating apparatus according to any one of claims 1 to 4, further comprising control means for controlling the position adjusting means. 6. The coating apparatus according to claim 5, wherein said reflection plate is supported by said measuring means and is movable integrally with said measuring means. 7. A stage having a mounting surface on which a substrate is mounted, a syringe filled with an application agent, and a syringe connected to the syringe and facing a surface of the substrate mounted on the stage. Supply means for supplying and applying a coating agent from the discharge nozzle to the substrate surface, and a predetermined path for the discharge nozzle relative to the substrate placed on the stage. And a driving unit for moving the discharge nozzle along a predetermined path by the driving unit while supplying the coating agent from the discharge nozzle by the supply unit. A tip surface that moves while crushing the applied coating material to a predetermined thickness, wherein the ratio of the inner diameter to the outer diameter of the tip surface of the discharge nozzle is the height of the coating material applied to the substrate surface. Against A coating apparatus characterized in that the width ratio (width / height) is set to be 10 or more. 8. The coating apparatus according to claim 7, wherein the outer diameter of the discharge nozzle at the tip end surface is formed to be at least twice the inner diameter. 9. The coating apparatus according to claim 7, wherein the outer diameter of the discharge nozzle at the tip end surface is formed to be at least six times the inner diameter. 10. A measuring means for measuring irregularities on the surface of a substrate mounted on the stage, and an adjusting means for adjusting a distance between the substrate surface and a discharge nozzle to a predetermined value according to a measurement result of the measuring means. Wherein the measuring means is provided in the vicinity of the discharge nozzle, the emitting means for emitting the measuring light, the light receiving means, and the substrate is provided in the vicinity of the discharging nozzle for the measuring light emitted from the emitting means. The coating apparatus according to any one of claims 7 to 9, further comprising: a reflector that guides light reflected from the substrate surface to the light receiving unit while guiding the light on the surface.