JP4006099B2 - Coating device with a photometer - Google Patents

Description

【００２５】
上記式において、ｎ１は測長部５０と被測定物Ｍとの間の雰囲気の誘電率、ｎ２は透明誘電体８０の誘電率、ｄは透明誘電体の厚さ、つまり、第１および第２表面８０ａ、８０ｂ間の距離をそれぞれ示している。
【００２６】
更に、上記式を変形することで、光測長器１０の測長可能距離Ｄをｘだけ延ばすために必要な透明誘電体８０の誘電率ｎ２および厚さｄを次式のように求めることができる。
【００２７】
【数５】

【００２８】
上記のように構成された光測長器１０によれば、測長部５０と被測定物Ｍとの間に屈折率の異なる透明誘電体８０を設け測定光の光路を曲げることにより、レーザー光の入射角や波長を変更することなく、測長部の測長可能距離を長くすることができる。そのため、光測長器１０は設置上の制約が低減し、所望の測定装置を構成することができ、その結果、利用範囲の拡大を図ることができる。更に、既存の光測長器を大幅に変更することなく使用できるため、安価で高性能な測長装置を構成することが可能となる。
【００２９】
図２は、この発明の他の実施の形態に係る光測長器１０を示すもので、 この実施の形態によれば、測長部５０と被測定物Ｍとの間に設けられた透明誘電体８０の第１および第２表面８０ａ、８０ｂ上には、例えば、ＭｇＦ₂ あるいは氷晶石（Ｎａ₃ ＡｌＦ₆ ）からなる反射防止膜９０ａ、９０ｂがそれぞれ形成されている。この場合、これら反射防止膜９０ａ、９０ｂによって、第１および第２表面８０ａ、８０ｂでのレーザー光の反射を防止し、余分なレーザー光が受光素５０ｂに入射することを防止できる。これにより、受光素子５０ｂに十分な強度の光を導き、誤測定および測定不能を防止することができる。
【００３０】
次に、上記構成の光測長器１０を備えた接着剤塗布装置の実施の形態について説明する。
図３に示すように、接着剤塗布装置は基台８を備え、この基台８上には門型の支持フレーム１１および駆動手段として機能するＸ−Ｙステージ１２が設けられている。
【００３１】
Ｘ−Ｙステージ１２は、平板状のＹステージ１４およびＸステージ１６を有している。基台８の上面には、Ｙ軸方向に延びる一対のガイドレール１８が固定され、Ｙステージ１４はこれらのガイドレール１８に沿って移動自在に基台８上に支持されている。そして、Ｙステージ１４は、基台８上に設けられたステップモータ２０およびリードスクリュ２１を有するＹ軸駆動機構２２により、Ｙ軸方向に往復駆動される。
【００３２】
また、Ｙステージ１４上にはＸ軸方向に延びる一対のガイドレール２４が固定され、Ｘステージ１６はこれらのガイドレール２４に沿って移動自在にＹステージ１４上に支持されている。そして、Ｘステージ１６は、Ｙステージ１４上に設けられたステップモータ２６およびリードスクリュ２７を有するＸ軸駆動機構２８により、Ｘ軸方向に往復駆動される。
【００３３】
Ｘステージ１６の上面は水平に延びており、液晶表示パネルの製造に使用されるガラス基板Ｐを載置するための載置面１６ａを構成している。また、Ｘステージ１６には多数の吸引孔３０が形成され、Ｘステージ１６の載置面１６ａに開口している。これらの吸引孔３０は真空ライン３２を介して後述する真空ポンプ３３に連通している。従って、Ｘステージ１６上にガラス基板Ｐを載置した状態で真空ポンプ３３を作動させることにより、ガラス基板ＰをＸステージ１６の載置面１６ａ上に吸着固定することができる。そして、Ｘ−Ｙステージ１２を駆動するよことにより、後述する吐出ノズルに対してガラス基板Ｐを相対移動させることができる。
【００３４】
支持フレーム１１の中央部には支持ブロック３１が固定され、この支持ブロックには、互いに平行に配置された第１および第２のＺ方向駆動機構３４、３６が支持され、Ｘ−Ｙステージ１２の上方に位置している。
【００３５】
第１のＺ方向駆動機構３４は、第１のガイドレール３４ａと、この第１のガイドレール３４ａに沿ってＺ方向、つまり、Ｘステージ１６の載置面１６ａと直交する方向、にスライド自在に設けられた第１のスライダ３４ｂとを有している。第１のスライダ３４ｂにはＺ方向に延びるボールねじ３５が回転自在に噛合している。
【００３６】
ボールねじ３５は、第１のＺ方向駆動機構３４の上端部に取り付けられた第１のパルスモータ３７によって回転駆動されるようになっている。ボールねじ３５のピッチは２ｍｍであり、第１のパルスモータ３７はボールねじ３５の１ピッチを４０００パルスに分割して駆動する。
【００３７】
そして、図３ないし図６に示すように、第１のスライダ３４ｂには塗布剤としての接着剤が充填されたシリンジ３８が取り付けられ、シリンジの下端部には吐出ノズル４０が設けられている。また、シリンジ３８の上端には、給気パイプ４２を介して吐出ポンプ４３が接続されている。吐出ノズル４０は細長い円筒形状に形成され、Ｘステージ１６の載置面１６ａ上に載置されたガラス基板Ｐの表面に対して垂直に延びている。
【００３８】
そして、吐出ポンプ４３によってシリンジ３８に空気あるいは窒素等の圧縮気体を供給することにより、シリンジ内の接着剤が吐出ノズル４０の先端から吐出され、ガラス基板Ｐ上に塗布される。これらシリンジ３８、吐出ノズル４０、吐出ポンプ４３は、この発明における供給手段として機能する。
【００３９】
また、第１のＺ方向駆動機構３４を駆動してシリンジ３８および吐出ノズル４０を昇降させることにより、吐出ノズル４０先端とガラス基板Ｐ表面との隙間を調整することができるもので、第１のＺ方向駆動機構３４はこの発明における調整手段として機能する。
【００４０】
なお、シリンジ１５内に充填された接着剤としては、エポキシ樹脂系熱硬化性接着剤、例えば、ストラクトボンド（商品名）（三井東圧社製）を主体としたものが用いられている。
【００４１】
一方、図３および図４に示すように、第２のＺ方向駆動機構３６は、第１のＺ方向駆動機構３４と同様に構成され、第２のパルスモータ４４でボールねじ４５を回転させることにより、支持フレーム３１に取り付けられた第２のガイドレール３６ａに沿って第２のスライダ３６ｂをＺ方向へ駆動する。
【００４２】
そして、図３ないし図６に示すように、第２のスライダ３６ｂには、位置調整装置４８を介して光測長器１０が取り付けられている。この光測長器１０として、前述の図１あるいは図２に示した実施の形態と同様の構成を有する光測長器が用いられている。すなわち、光測長器１０はガラス基板Ｐ表面の凹凸を測定するために設けられ、測長部５０と透明誘電体８０とを備えている。そして、前述したように、測長部５０は、測定光としのレーザー光を出射する出射素子５０ａと、ガラス基板表面からの反射光を受光する受光素子５０ｂと、を備えている。
【００４３】
位置調整手段として機能する位置調整装置４８は、Ｘ−Ｙステージ１２とほぼ同一の構成を有している。つまり、位置調整装置４８は、第２のスライダ３６ｂにＹ軸方向に沿って移動自在に支持されたＹテーブル５２と、図示しないボールねじを介してＹテーブル５２をＹ軸方向に往復移動させるパルスモータ５３と、を備えている。また、光測長器１０はＹテーブル５２の下面側にＸ軸方向に沿って移動自在に支持され、ボールねじ５４を介してパルスモータ５６によりＸ軸方向に往復移動される。
【００４４】
そして、測長部５０は、位置調整装置４８によってほぼ水平に、つまり、ガラス基板Ｐ表面と平行に支持され、出射素子５０ａから出射されたレーザー光は、吐出ノズル４０と直交する水平面に沿って出射される。
【００４５】
また、透明誘電体８０は、その第１および第２表面８０ａ、８０ｂがそれぞれガラス基板Ｐ表面に対してほぼ垂直に延びるように配置され、かつ、第１表面８０ａが測長部５０の出射部５０ａおよび受光部５０ｂと対向して位置している。なお、第１および第２表面８０ａ、８０ｂには、前述した反射防止膜が設けられていてもよい。
【００４６】
更に、光測長器１０は、透明誘電体８０の第２表面８０ｂと対向して設けられた矩形板状の反射ミラー６０を備えている。反射板として機能する反射ミラー６０は、透明誘電体８０と共に、一対の支持アーム６２を介して測長部５０に固定され、測長部５０と一体に移動可能となっている。また、反射ミラー６０は、ガラス基板Ｐ表面に対して４５度傾斜した状態で固定されている。従って、反射ミラー６０の反射面６０ａは、４５度傾斜した状態で測長部５０に対して一定の位置に保持されている。
【００４７】
更に、反射ミラー６０のほぼ中央には透孔６４が形成され、この透孔を通って吐出ノズル４０が延びている。吐出ノズル４０に対して反射ミラー６０、透明誘電体８０、および測長部５０を移動できるように、透孔６４は吐出ノズル４０の外径よりも大きな径に形成されている。
【００４８】
測長部５０の出射素子５０ａから出射されたレーザー光は、吐出ノズル４０の軸と直交する水平面に沿って伝搬した後、透明誘電体８０内を通り、更に、反射ミラー６０によりガラス基板Ｐに向かって直角に偏向され、ガラス基板Ｐの表面と垂直な平面内を伝搬する。そして、レーザー光は、吐出ノズル４０の先端に隣接した位置でガラス基板Ｐ表面に入射する。
【００４９】
更に、レーザー光は、ガラス基板Ｐ表面で反射してガラス基板Ｐの表面と垂直な平面内を伝搬し、反射ミラー６０により直角に反射され、透明誘電体８０を通過した後、測長部５０の受光素子５０ｂに受光される。そして、測長部５０は、ガラス基板Ｐ表面からの反射光に基づいてガラス基板Ｐ表面の凹凸を測定する。
【００５０】
図６に示すように、塗布装置の制御系は、装置全体の動作を制御する制御部６６を備えている。そして、制御部６６には、Ｘ−Ｙステージ１２のステップモータ２０、２６を駆動するドライバ６７、第１および第２のＺ方向駆動機構３４、３６のパルスモータ３７、４４を駆動するドライバ６８、位置調整装置４８のパルスモータ５３、５６を駆動するドライバ７０が接続されている。
【００５１】
また、制御部６６には、測長部５０が接続されているとともに、真空ポンプ３３、吐出ポンプ４３が接続されている。更に、制御系は、装置全体の制御プログラムが格納されたＲＡＭ７２、オペレータによって制御データを入力するための操作パネル７３を有している。
【００５２】
次に、以上のように構成された接着剤塗布装置を用いて液晶表示パネル用のガラス基板Ｐに接着剤を塗布する動作について説明する。
まず、Ｘステージ１６の載置面１６ａ上の所定位置にガラス基板Ｐが自動搬送された後、真空ポンプ３３を作動させ、ガラス基板Ｐを載置面１６ａ上に吸着固定する。
【００５３】
この状態で、Ｘ−Ｙステージ１２を作動させ、ガラス基板Ｐの任意の塗布開始位置を吐出ノズル４０の先端部と対向させる。続いて、第１のＺ方向駆動機構３４を作動させ吐出ノズル４０を所定の塗布基準位置まで下降させる。それにより、吐出ノズル４０の先端面４０ｂはガラス基板Ｐ表面に対して所定の隙間おいた状態に対向する。
【００５４】
同時に、第２のＺ方向駆動機構３６を作動させて測長部５０を所定の測定基準高さ位置まで下降させる。そして、位置調整装置４８により、吐出ノズル４０に対する測長部５０、透明誘電体８０、および反射ミラー６０の位置を調整し、測長部５０の測定ポイント、つまり、測定光がガラス基板Ｐ表面に入射する位置を、吐出ノズル先端の近傍で、かつ、吐出ノズルの進行方向前方に設定する。
【００５５】
この状態で、測長部５０によりガラス基板Ｐ表面の高さおよび凹凸を測定し、塗布基準位置に待機している吐出ノズル４０先端面４０ｂとガラス基板Ｐ表面との間隔を制御部６６により演算する。そして、その演算結果に応じて、吐出ノズル４０先端面４０ｂがガラス基板表面に対して所定の隙間、例えば、１０μｍの隙間をおいて対向するように、第１のＺ方向駆動機構３４を作動させ、吐出ノズル４０の高さを調整する。
【００５６】
上述した凹凸の測定および高さ調整が終了した後、図７に示すように、吐出ノズル４０がガラス基板Ｐに対して所定の経路Ｒに沿って移動するように、Ｘ−Ｙステージ１２を駆動してガラス基板Ｐを移動させる。これと同時に、吐出ポンプ３０を作動させて所定の流量にて圧縮気体を給気し、給気パイプ４２を通してシリンジ３８に供給する。それにより、シリンジ３８内に充填されている接着剤Ａは、吐出ノズル４０の先端から吐出されガラス基板Ｐ上に塗布される。
【００５７】
Ｘ−Ｙステージ１２の駆動により吐出ノズル４０を経路Ｒに沿って移動する間、測長部５０および反射ミラー６０も同時に移動し、測長部５０はガラス基板Ｐ表面の凹凸を経路Ｒに沿って連続的に測定する。そして、制御部６６は、測定結果に応じて吐出ノズル４０先端面とガラス基板Ｐ表面との間隔を随時演算し、上記間隔が所定値（１０μｍ）を維持するように吐出ノズル４０の高さを随時調節する。
【００５８】
ここで、吐出ノズル４０および測長部５０の測定ポイントが塗布経路Ｒの角部を通過する際、Ｘ−Ｙステージ１２の移動方向はＸ方向からＹ方向へ、あるいは、Ｙ方向からＸ方向へ切換えられる。そして、制御部６６は、移動方向の切換え時、測長部５０の測定ポイントが吐出ノズル４０に対して常に吐出ノズルの進行方向前方に位置するように、位置調整装置４８により吐出ノズル４０に対する測長部５０および反射ミラー６０の位置を切換える。
【００５９】
更に、塗布経路Ｒの角部を通過する際、測長部５０の測定光が、ガラス基板Ｐ表面に既に塗布されている接着剤Ａと交差する場合がある。このような交差領域は、ＲＡＭ７２に予めプログラムされており、制御部６６は、測長部５０の測定光が上記交差領域を通過する間、測長部５０からの測定データを無視し、吐出ノズル４０の高さ調整を行わない。
【００６０】
そして、吐出ノズル４０が塗布経路Ｒに沿ってガラス基板上を１周した時点で、Ｘ−Ｙステージ１２の移動および接着剤の供給を停止するとともに、吐出ノズル４０および測長部５０を所定位置まで上方させガラス基板Ｐから離間させる。これにより、ガラス基板Ｐ表面には、接着剤Ａが塗布経路Ｒに沿って矩形状に塗布される。
【００６１】
なお、上述した各機構の駆動は、制御部６６の制御の下、ＲＡＭ７２に格納されているプログラムに応じて行われる。
その後、液晶表示パネルを製造する場合には、他方のガラス基板を接着剤Ａの塗布されたガラス基板Ｐに対して位置決めし、互いに貼り合わせる。そして、張り合わされた一対のガラス基板を接合方向に圧力をかけつつ加熱して接着剤を硬化させた後、塗布された接着剤Ａによって囲まれた領域Ｂ（図７）に液晶を封入する。
【００６２】
上記のように構成された接着剤塗布装置によれば、透明誘電体８０を備えた光測長器１０を用いることにより、光測長器の測長可能距離を自由に設定することができ、光測長器１０を所望の位置に配置することができる。同時に、市販のレーザー測長器を用いて、正確な測長が可能な接着剤塗布装置を開発することができる。
【００６３】
また、上記構成の接着剤塗布装置によれば、測長器５０から出射されたレーザー光は、反射ミラーにより吐出ノズル４０の近傍でガラス基板表面上に導かれる。そのため、測長部５０の測定ポイントを吐出ノズル４０の近傍に設定することが可能となり、吐出ノズルに連動して測長器を移動させた場合でも、測定ポイントがガラス基板の外側に位置することがなくなる。従って、吐出ノズル４０による塗布動作と測長部５０による測定動作とを同時に行うことができ、接着剤Ａの塗布作業を短時間で効率よく行うことが可能となる。
【００６４】
なお、この発明は上述した実施例に限定されるものではなく、発明の要旨を変更しない範囲で種々変形可能である。
例えば、使用する接着剤は上述したエポキシ樹脂系熱硬化性接着剤に限定されることなく、必要に応じて変更可能である。また、反射ミラーは、ガラス基板表面に対して４５度傾斜して設ける構成としたが、この傾斜角度は、測長器からの測定光の出射方向と併せて、必要に応じて変更可能である。
【００６５】
また、上記実施の形態では、ガラス基板側をＸＹ方向に駆動して塗布する構成としたが、シリンジ、吐出ノズルおよび測長器側をＸＹ方向に駆動する構成としても良い。シリンジと吐出ノズルとは一体的に上下移動するよう設けられているが、シリンジと吐出ノズルとを可撓性チューブで接続し、吐出ノズルのみを上下駆動する構成としても良い。更に、吐出ノズルはステージに載置されたガラス基板の表面に対して垂直に限らず、傾斜して延出していてもよい。
【００６６】
【発明の効果】
以上詳述したように、この発明によれば、測長部と被測定物との間に透明誘電体を配置することにより、出射角や入射角、波長を変更することなく、測長可能距離を自由に設定可能な光測長器を提供することができる。また、上記光測長器を用いることにより、光測長器を所望の位置に配置でき、正確な測長が可能な塗布装置を提供することができる。
【図面の簡単な説明】
【図１】この発明の実施の形態に係る光測長器を示す側面図。
【図２】この発明の他の実施の形態に係る光測長器を示す側面図。
【図３】この発明の実施の形態に係る接着剤塗布装置全体を示す斜視図。
【図４】上記接着剤塗布装置の要部を概略的に示す側面図。
【図５】上記接着剤塗布装置の吐出ノズルおよび光測長器、反射ミラーを示す正面図および平面図。
【図６】上記接着剤塗布装置の制御系の構成を示すブロック図。
【図７】上記接着剤塗布装置による接着剤の塗布経路を示す斜視図。
【符号の説明】
１０…光測長器
１２…Ｘ−Ｙステージ
１６…Ｘステージ
１６ａ…載置面
３４…第１のＺ方向駆動機構
３６…第２のＺ方向駆動機構
３８…シリンジ
４０…吐出ノズル
４３…給気ポンプ
４８…位置調整装置
５０…測長部
５０ａ…出射素子
５０ｂ…受光素子
６０…反射ミラー
６０ａ…反射面
６４…透孔
６６…制御部
８０…透明誘電体
８０ａ…第１表面
８０ｂ…第２表面
９０ａ、９０ｂ…反射防止膜[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a coating apparatus provided with an optical length measuring device using light, for example, a coating apparatus for coating a paste-like coating agent on a substrate.
[0002]
[Prior art]
As an optical length measuring device, an optical length measuring device using a laser, in particular, is used in various manufacturing apparatuses because it can measure unevenness of an object surface in a non-contact manner. Usually, the optical length measuring device includes a laser light emitting element and a light receiving element, and the laser light emitted from the emitting element is reflected by the surface of the object to be measured and then enters the light receiving element. Then, the distance from the optical length measuring device to the object to be measured is measured based on the reflected light incident position on the light receiving element. When the distance to the object to be measured changes, the incident position of the reflected light with respect to the light receiving element also changes, and the distance to the object to be measured is detected according to this position change.
[0003]
As an example of a manufacturing apparatus using such an optical length measuring device, a sealant coating apparatus used for manufacturing a liquid crystal display device is known.
In order to keep the distance between the glass substrate and the tip of the coating nozzle constant, the sealant coating device measures the unevenness of the glass surface with a laser length measuring device and controls the height of the coating nozzle according to the measured unevenness. . The control accuracy is as high as 2 to 3 μm.
[0004]
However, in recent years, the thickness of the glass substrate has become extremely thin, from 1.1 mm to 0.7 mm, so that the reflected light from the back surface of the glass substrate can be easily picked up by the length measuring device. A malfunction may occur.
[0005]
As the liquid crystal display device, an active matrix driving type in which a thin film transistor (TFT) is formed on a glass substrate has become mainstream, and in order to achieve colorization, it is often used in combination with a color filter. However, when TFTs, color filters, metal wirings, and the like are provided on the glass surface in this way, the reflectance of the laser light emitted from the emitting element is reduced, and the reflected light intensity is reduced due to irregular reflection. For this reason, the intensity of the reflected light received by the light receiving element is reduced, and there is an increased possibility that the laser length measuring instrument malfunctions and cannot be measured.
[0006]
As a method for solving such a problem, the following method can be considered.
As a first method, in order to increase the reflectance of the laser beam, the wavelength of the laser beam is adjusted according to the film on the surface of the glass substrate. As a second method, the incident angle of the laser beam on the glass substrate surface is increased to increase the reflected light intensity.
[0007]
[Problems to be solved by the invention]
However, in the case of the first method described above, it is necessary to adjust the wavelength of the laser light in accordance with the type of film or the like formed on the glass substrate surface, and the operation becomes troublesome. In addition, the wavelength setting of the laser light often requires replacement of the laser length measuring device itself, and the selection range of the wavelength of the laser light is also small.
[0008]
In the case of the second method, when the incident angle of the laser beam is set to be large, the distance between the length measuring device and the object to be measured approaches, and the measurable distance (work distance) of the laser length measuring device becomes short. For this reason, there are cases where restrictions on installing the laser length measuring device are increased and a desired measuring apparatus cannot be configured.
[0009]
The present invention has been made in view of the above points, and an object thereof is to provide an optical length measuring device capable of obtaining a long measurable distance without changing the emission angle, incident angle, and wavelength of measurement light . It is to provide a coating apparatus.
[0016]
[Means for Solving the Problems]
A coating apparatus used for manufacturing a display device according to the present invention includes a stage having a mounting surface on which a substrate is mounted;
Extends substantially perpendicularly against the mounting surface of the substrate to the stage, having a discharge nozzle extending toward said substrate surface, a supply means for supplying the coating material to the substrate surface from the discharge nozzle,
An optical length measuring device for measuring irregularities on the surface of the substrate placed on the stage;
According to the measurement result of the optical length measuring device, the discharge nozzle is driven along a direction perpendicular to the substrate surface, and a nozzle adjusting means for adjusting the interval between the substrate surface and the discharge nozzle to a predetermined value;
Driving means for relatively moving the substrate placed on the stage and the discharge nozzle and the optical length measuring device;
The optical length measuring device includes a length measuring unit having an emission element that emits measurement light along a plane orthogonal to the axis of the discharge nozzle, and a light receiving element that receives the measurement light reflected on the substrate surface. When,
Together are found provided on the optical path of the measuring light between the measuring section and the substrate surface, a transparent having an index of refraction different from that of the atmosphere between the measuring section and the substrate surface A dielectric,
Provided between the transparent conductor and the substrate surface on the optical path of the measurement light emitted from the emission element, and the measurement light emitted from the emission element is orthogonal to the substrate surface placed on the stage A reflecting plate that is deflected in a plane to be guided to the surface of the substrate in the vicinity of the discharge nozzle and that guides the measurement light reflected on the surface of the substrate to the light receiving element;
Position adjusting means for moving the length measuring section, the transparent dielectric, and the reflecting plate in a direction perpendicular to the axis of the discharge nozzle, and adjusting the incident position of the measurement light with respect to the substrate surface in the vicinity of the discharge nozzle;
It is characterized by having.
[0017]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, an optical length measuring device according to an embodiment of the present invention will be described in detail with reference to the drawings.
As shown in FIG. 1, the optical length measuring device 10 includes a length measuring unit 50 and a transparent dielectric 80 disposed between the length measuring unit and the DUT M. The length measuring unit 50 includes an emission element 50a that emits laser light as measurement light toward the object to be measured M, and a light receiving element 50b that receives reflected light from the object M to be measured. The light receiving element is supported by a support 82.
[0018]
The transparent conductor 80 is formed in, for example, a rectangular parallelepiped shape from glass, and includes a first surface 80a facing the length measuring unit 50 and a second surface 80b facing parallel to the first surface. The transparent conductor 80 is arranged in a state where the first and second surfaces 80a and 80b are positioned substantially parallel to the surface of the object M to be measured.
[0019]
The emitting element 50a is provided at a predetermined angle so that the laser light is incident on the first surface 80a of the transparent dielectric 80 at an incident angle θ1. Similarly, the light receiving element 50b is provided at a predetermined angle so that laser light emitted from the first surface 80a at an angle θ1 is incident substantially perpendicularly.
[0020]
In the optical measuring instrument 10 configured as described above, the laser beam 84 emitted from the emission element 50a enters the first surface 80a of the transparent dielectric 80 at an incident angle θ1, refracts according to Snell's law, and then passes through the transparent dielectric. Propagates in the direction of angle θ2 with respect to the first surface. The laser beam 84 transmitted through the transparent dielectric 80 is refracted again by the second surface 80b, and then enters the surface of the object M to be measured at an incident angle θ1 and is reflected.
[0021]
The laser beam 85 reflected from the surface of the object to be measured M enters the transparent dielectric 80 from the second surface 80b at an incident angle θ1, and propagates in the direction of the angle θ2. The laser beam 85 transmitted through the transparent dielectric 80 is refracted again by the first surface 80a, propagates in the direction of the angle θ1 with respect to the first surface, and enters the light receiving element 50b of the length measuring unit 50 perpendicularly.
Then, the length measuring unit 50 measures the distance to the surface of the object to be measured M based on the laser light received by the light receiving element 50b.
[0022]
In such an optical length measuring device 10, when the transparent dielectric 80 is not provided, the laser light emitted from the emitting element 50a propagates straight without being refracted as indicated by a broken line 86 in FIG. The measurable distance (work distance) of the object to be measured is relatively short as indicated by D.
[0023]
On the other hand, according to the optical length measuring device 10 according to the present embodiment, the transparent dielectric 80 is disposed between the length measuring unit 50 and the DUT M, and is expressed by the following formula. The measurable distance can be extended by the distance x.
[0024]
[Expression 4]

[0025]
In the above equation, n1 is the dielectric constant of the atmosphere between the length measurement unit 50 and the DUT M, n2 is the dielectric constant of the transparent dielectric 80, and d is the thickness of the transparent dielectric, that is, the first and second The distances between the surfaces 80a and 80b are shown.
[0026]
Further, by modifying the above equation, the dielectric constant n2 and the thickness d of the transparent dielectric 80 necessary for extending the measurable distance D of the optical length measuring device 10 by x can be obtained as follows. it can.
[0027]
[Equation 5]

[0028]
According to the optical length measuring device 10 configured as described above, a laser beam is obtained by providing the transparent dielectric 80 having a different refractive index between the length measuring unit 50 and the DUT M and bending the optical path of the measurement light. Without changing the incident angle or wavelength, the length measurement possible distance of the length measurement unit can be increased. For this reason, the optical length measuring instrument 10 can be reduced in installation restrictions and can constitute a desired measuring apparatus, and as a result, the range of use can be expanded. Furthermore, since an existing optical length measuring device can be used without drastically changing, an inexpensive and high-performance length measuring device can be configured.
[0029]
FIG. 2 shows an optical length measuring device 10 according to another embodiment of the present invention. According to this embodiment, a transparent dielectric provided between the length measuring section 50 and the device under test M is shown. On the first and second surfaces 80a and 80b of the body 80, antireflection films 90a and 90b made of, for example, MgF ₂ or cryolite (Na ₃ AlF ₆ ) are formed, respectively. In this case, the antireflection films 90a and 90b can prevent the laser light from being reflected from the first and second surfaces 80a and 80b, and can prevent excess laser light from entering the light receiving element 50b. Thereby, light of sufficient intensity can be guided to the light receiving element 50b, and erroneous measurement and measurement inability can be prevented.
[0030]
Next, an embodiment of an adhesive application device provided with the optical length measuring device 10 having the above configuration will be described.
As shown in FIG. 3, the adhesive application device includes a base 8 on which a gate-type support frame 11 and an XY stage 12 that functions as drive means are provided.
[0031]
The XY stage 12 has a flat Y stage 14 and an X stage 16. A pair of guide rails 18 extending in the Y-axis direction are fixed to the upper surface of the base 8, and the Y stage 14 is supported on the base 8 movably along these guide rails 18. The Y stage 14 is reciprocally driven in the Y-axis direction by a Y-axis drive mechanism 22 having a step motor 20 and a lead screw 21 provided on the base 8.
[0032]
A pair of guide rails 24 extending in the X-axis direction are fixed on the Y stage 14, and the X stage 16 is supported on the Y stage 14 so as to be movable along these guide rails 24. The X stage 16 is reciprocated in the X-axis direction by an X-axis drive mechanism 28 having a step motor 26 and a lead screw 27 provided on the Y stage 14.
[0033]
The upper surface of the X stage 16 extends horizontally and constitutes a placement surface 16a for placing a glass substrate P used for manufacturing a liquid crystal display panel. A number of suction holes 30 are formed in the X stage 16 and open to the placement surface 16 a of the X stage 16. These suction holes 30 communicate with a vacuum pump 33 described later via a vacuum line 32. Accordingly, by operating the vacuum pump 33 with the glass substrate P placed on the X stage 16, the glass substrate P can be sucked and fixed onto the placement surface 16 a of the X stage 16. And by driving the XY stage 12, the glass substrate P can be relatively moved with respect to the discharge nozzle mentioned later.
[0034]
A support block 31 is fixed to the central portion of the support frame 11, and the first and second Z-direction drive mechanisms 34 and 36 arranged in parallel to each other are supported on the support block. Located above.
[0035]
The first Z-direction drive mechanism 34 is slidable in the Z direction along the first guide rail 34a, that is, in the direction orthogonal to the placement surface 16a of the X stage 16, along the first guide rail 34a. And a first slider 34b provided. A ball screw 35 extending in the Z direction is rotatably engaged with the first slider 34b.
[0036]
The ball screw 35 is rotationally driven by a first pulse motor 37 attached to the upper end portion of the first Z-direction drive mechanism 34. The pitch of the ball screw 35 is 2 mm, and the first pulse motor 37 is driven by dividing one pitch of the ball screw 35 into 4000 pulses.
[0037]
As shown in FIGS. 3 to 6, a syringe 38 filled with an adhesive as a coating agent is attached to the first slider 34b, and a discharge nozzle 40 is provided at the lower end of the syringe. A discharge pump 43 is connected to the upper end of the syringe 38 via an air supply pipe 42. The discharge nozzle 40 is formed in an elongated cylindrical shape, and extends perpendicularly to the surface of the glass substrate P placed on the placement surface 16 a of the X stage 16.
[0038]
Then, by supplying a compressed gas such as air or nitrogen to the syringe 38 by the discharge pump 43, the adhesive in the syringe is discharged from the tip of the discharge nozzle 40 and applied onto the glass substrate P. The syringe 38, the discharge nozzle 40, and the discharge pump 43 function as supply means in the present invention.
[0039]
Further, by driving the first Z-direction drive mechanism 34 to raise and lower the syringe 38 and the discharge nozzle 40, the gap between the tip of the discharge nozzle 40 and the surface of the glass substrate P can be adjusted. The Z direction drive mechanism 34 functions as the adjusting means in the present invention.
[0040]
As the adhesive filled in the syringe 15, an epoxy resin thermosetting adhesive, for example, an adhesive mainly composed of struct bond (trade name) (manufactured by Mitsui Toatsu) is used.
[0041]
On the other hand, as shown in FIGS. 3 and 4, the second Z-direction drive mechanism 36 is configured in the same manner as the first Z-direction drive mechanism 34, and rotates the ball screw 45 by the second pulse motor 44. Thus, the second slider 36b is driven in the Z direction along the second guide rail 36a attached to the support frame 31.
[0042]
As shown in FIGS. 3 to 6, the optical length measuring device 10 is attached to the second slider 36 b via the position adjusting device 48. As this optical length measuring device 10, an optical length measuring device having the same configuration as that of the embodiment shown in FIG. 1 or FIG. 2 is used. In other words, the optical length measuring device 10 is provided for measuring irregularities on the surface of the glass substrate P, and includes a length measuring unit 50 and a transparent dielectric 80. As described above, the length measuring unit 50 includes the emitting element 50a that emits laser light as measurement light and the light receiving element 50b that receives reflected light from the surface of the glass substrate.
[0043]
The position adjustment device 48 that functions as position adjustment means has substantially the same configuration as the XY stage 12. In other words, the position adjusting device 48 has a pulse that reciprocates the Y table 52 in the Y-axis direction via a Y table 52 that is supported by the second slider 36b so as to be movable along the Y-axis direction, and a ball screw (not shown). And a motor 53. The optical length measuring device 10 is supported on the lower surface side of the Y table 52 so as to be movable along the X-axis direction, and is reciprocated in the X-axis direction by a pulse motor 56 via a ball screw 54.
[0044]
The length measuring unit 50 is supported substantially horizontally by the position adjusting device 48, that is, in parallel with the surface of the glass substrate P, and the laser light emitted from the emitting element 50 a is along a horizontal plane orthogonal to the ejection nozzle 40. Emitted.
[0045]
Further, the transparent dielectric 80 is disposed such that the first and second surfaces 80a and 80b extend substantially perpendicular to the surface of the glass substrate P, respectively, and the first surface 80a is the emitting portion of the length measuring unit 50. 50a and the light-receiving part 50b. The first and second surfaces 80a and 80b may be provided with the above-described antireflection film.
[0046]
Further, the optical length measuring device 10 includes a rectangular plate-like reflection mirror 60 provided to face the second surface 80 b of the transparent dielectric 80. The reflection mirror 60 functioning as a reflection plate is fixed to the length measuring unit 50 through a pair of support arms 62 together with the transparent dielectric 80, and can move integrally with the length measuring unit 50. Further, the reflection mirror 60 is fixed in a state inclined by 45 degrees with respect to the surface of the glass substrate P. Therefore, the reflection surface 60a of the reflection mirror 60 is held at a fixed position with respect to the length measuring unit 50 in a state where it is inclined 45 degrees.
[0047]
Further, a through hole 64 is formed in the approximate center of the reflection mirror 60, and the discharge nozzle 40 extends through this through hole. The through hole 64 is formed to have a larger diameter than the outer diameter of the discharge nozzle 40 so that the reflection mirror 60, the transparent dielectric 80, and the length measuring unit 50 can be moved with respect to the discharge nozzle 40.
[0048]
The laser light emitted from the emitting element 50a of the length measuring unit 50 propagates along a horizontal plane orthogonal to the axis of the discharge nozzle 40, passes through the transparent dielectric 80, and further onto the glass substrate P by the reflecting mirror 60. It is deflected at a right angle toward the surface and propagates in a plane perpendicular to the surface of the glass substrate P. The laser light is incident on the surface of the glass substrate P at a position adjacent to the tip of the discharge nozzle 40.
[0049]
Further, the laser light is reflected on the surface of the glass substrate P, propagates in a plane perpendicular to the surface of the glass substrate P, is reflected at a right angle by the reflecting mirror 60, passes through the transparent dielectric 80, and then the length measuring unit 50. The light receiving element 50b receives the light. The length measuring unit 50 measures the unevenness on the surface of the glass substrate P based on the reflected light from the surface of the glass substrate P.
[0050]
As shown in FIG. 6, the control system of the coating apparatus includes a control unit 66 that controls the operation of the entire apparatus. The control unit 66 includes a driver 67 that drives the step motors 20 and 26 of the XY stage 12, a driver 68 that drives the pulse motors 37 and 44 of the first and second Z-direction drive mechanisms 34 and 36, A driver 70 for driving the pulse motors 53 and 56 of the position adjusting device 48 is connected.
[0051]
In addition, a length measuring unit 50 is connected to the control unit 66, and a vacuum pump 33 and a discharge pump 43 are connected. The control system further includes a RAM 72 that stores a control program for the entire apparatus, and an operation panel 73 for inputting control data by an operator.
[0052]
Next, the operation of applying an adhesive to the glass substrate P for a liquid crystal display panel using the adhesive application device configured as described above will be described.
First, after the glass substrate P is automatically transported to a predetermined position on the placement surface 16a of the X stage 16, the vacuum pump 33 is operated to attract and fix the glass substrate P on the placement surface 16a.
[0053]
In this state, the XY stage 12 is operated, and an arbitrary application start position of the glass substrate P is opposed to the tip of the discharge nozzle 40. Subsequently, the first Z-direction drive mechanism 34 is operated to lower the discharge nozzle 40 to a predetermined application reference position. Thereby, the front end surface 40b of the discharge nozzle 40 is opposed to the glass substrate P surface with a predetermined gap.
[0054]
At the same time, the second Z-direction drive mechanism 36 is operated to lower the length measuring unit 50 to a predetermined measurement reference height position. Then, the position adjusting device 48 adjusts the positions of the length measuring unit 50, the transparent dielectric 80, and the reflection mirror 60 with respect to the discharge nozzle 40, and the measurement point of the length measuring unit 50, that is, the measurement light is applied to the surface of the glass substrate P. The incident position is set in the vicinity of the tip of the discharge nozzle and in the forward direction of the discharge nozzle.
[0055]
In this state, the height measuring unit 50 measures the height and unevenness of the surface of the glass substrate P, and the controller 66 calculates the distance between the discharge nozzle 40 front end surface 40b waiting at the application reference position and the surface of the glass substrate P. To do. Then, according to the calculation result, the first Z-direction drive mechanism 34 is operated so that the front end surface 40b of the discharge nozzle 40 faces the glass substrate surface with a predetermined gap, for example, a gap of 10 μm. The height of the discharge nozzle 40 is adjusted.
[0056]
After the measurement of the unevenness and the height adjustment described above are completed, the XY stage 12 is driven so that the discharge nozzle 40 moves along the predetermined path R with respect to the glass substrate P as shown in FIG. Then, the glass substrate P is moved. At the same time, the discharge pump 30 is operated to supply compressed gas at a predetermined flow rate, and supplied to the syringe 38 through the supply pipe 42. Thus, the adhesive A filled in the syringe 38 is discharged from the tip of the discharge nozzle 40 and applied onto the glass substrate P.
[0057]
While the ejection nozzle 40 is moved along the path R by driving the XY stage 12, the length measuring unit 50 and the reflection mirror 60 are also moved simultaneously. The length measuring unit 50 causes the irregularities on the surface of the glass substrate P along the path R. Measure continuously. Then, the controller 66 calculates the interval between the tip surface of the discharge nozzle 40 and the surface of the glass substrate P as needed according to the measurement result, and adjusts the height of the discharge nozzle 40 so that the interval maintains a predetermined value (10 μm). Adjust as needed.
[0058]
Here, when the measurement points of the discharge nozzle 40 and the length measuring unit 50 pass through the corners of the application path R, the movement direction of the XY stage 12 is from the X direction to the Y direction, or from the Y direction to the X direction. Switched. The control unit 66 measures the discharge nozzle 40 with the position adjusting device 48 so that the measurement point of the length measuring unit 50 is always located in front of the discharge nozzle 40 in the traveling direction when the moving direction is switched. The positions of the long portion 50 and the reflection mirror 60 are switched.
[0059]
Furthermore, when passing through the corner of the application path R, the measurement light from the length measuring unit 50 may intersect the adhesive A that has already been applied to the surface of the glass substrate P. Such an intersecting region is pre-programmed in the RAM 72, and the control unit 66 ignores the measurement data from the length measuring unit 50 while the measurement light from the length measuring unit 50 passes through the intersecting region, and discharge nozzles. 40 height adjustment is not performed.
[0060]
When the discharge nozzle 40 makes a round on the glass substrate along the coating path R, the movement of the XY stage 12 and the supply of the adhesive are stopped, and the discharge nozzle 40 and the length measuring unit 50 are placed at predetermined positions. And is separated from the glass substrate P. As a result, the adhesive A is applied to the surface of the glass substrate P in a rectangular shape along the application path R.
[0061]
The above-described mechanisms are driven according to a program stored in the RAM 72 under the control of the control unit 66.
Then, when manufacturing a liquid crystal display panel, the other glass substrate is positioned with respect to the glass substrate P with which the adhesive A was apply | coated, and it bonds together. Then, the paired glass substrates are heated while applying pressure in the bonding direction to cure the adhesive, and then liquid crystal is sealed in a region B (FIG. 7) surrounded by the applied adhesive A.
[0062]
According to the adhesive applicator configured as described above, by using the optical length measuring device 10 provided with the transparent dielectric 80, the distance that can be measured by the optical length measuring device can be freely set, The optical length measuring device 10 can be disposed at a desired position. At the same time, it is possible to develop an adhesive coating apparatus capable of accurate length measurement using a commercially available laser length measuring device.
[0063]
Moreover, according to the adhesive coating device having the above-described configuration, the laser light emitted from the length measuring device 50 is guided onto the glass substrate surface in the vicinity of the discharge nozzle 40 by the reflection mirror. Therefore, the measurement point of the length measuring unit 50 can be set in the vicinity of the discharge nozzle 40, and the measurement point is located outside the glass substrate even when the length measuring device is moved in conjunction with the discharge nozzle. Disappears. Accordingly, the application operation by the discharge nozzle 40 and the measurement operation by the length measuring unit 50 can be performed at the same time, and the application operation of the adhesive A can be performed efficiently in a short time.
[0064]
In addition, this invention is not limited to the Example mentioned above, A various deformation | transformation is possible in the range which does not change the summary of invention.
For example, the adhesive to be used is not limited to the above-described epoxy resin thermosetting adhesive, and can be changed as necessary. In addition, the reflection mirror is provided so as to be inclined by 45 degrees with respect to the glass substrate surface. However, the inclination angle can be changed as necessary in combination with the emission direction of the measurement light from the length measuring device. .
[0065]
In the above embodiment, the glass substrate side is driven and applied in the XY direction, but the syringe, discharge nozzle, and length measuring device side may be driven in the XY direction. The syringe and the discharge nozzle are provided so as to move up and down integrally, but the syringe and the discharge nozzle may be connected by a flexible tube, and only the discharge nozzle may be driven up and down. Furthermore, the discharge nozzle is not limited to being perpendicular to the surface of the glass substrate placed on the stage, but may be inclined and extended.
[0066]
【The invention's effect】
As described above in detail, according to the present invention, by disposing a transparent dielectric material between the length measuring unit and the object to be measured, the distance that can be measured without changing the emission angle, the incident angle, and the wavelength. Can be provided freely. Further, by using the above optical length measuring device, it is possible to provide a coating apparatus that can arrange the optical length measuring device at a desired position and can perform accurate length measurement.
[Brief description of the drawings]
FIG. 1 is a side view showing an optical length measuring device according to an embodiment of the present invention.
FIG. 2 is a side view showing an optical length measuring device according to another embodiment of the present invention.
FIG. 3 is a perspective view showing the entire adhesive application device according to the embodiment of the present invention.
FIG. 4 is a side view schematically showing a main part of the adhesive application device.
FIG. 5 is a front view and a plan view showing a discharge nozzle, an optical length measuring device, and a reflection mirror of the adhesive application device.
FIG. 6 is a block diagram illustrating a configuration of a control system of the adhesive application device.
FIG. 7 is a perspective view showing an adhesive application path by the adhesive application device.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 ... Optical length measuring device 12 ... XY stage 16 ... X stage 16a ... Mounting surface 34 ... 1st Z direction drive mechanism 36 ... 2nd Z direction drive mechanism 38 ... Syringe 40 ... Discharge nozzle 43 ... Supply air Pump 48 ... Position adjusting device 50 ... Length measuring unit 50a ... Emitting element 50b ... Light receiving element 60 ... Reflecting mirror 60a ... Reflecting surface 64 ... Through hole 66 ... Control unit 80 ... Transparent dielectric 80a ... First surface 80b ... Second surface 90a, 90b ... antireflection film

Claims (4)

A stage having a mounting surface on which a substrate is mounted;
Extends substantially perpendicularly against the mounting surface of the substrate to the stage, having a discharge nozzle extending toward said substrate surface, a supply means for supplying the coating material to the substrate surface from the discharge nozzle,
An optical length measuring device for measuring irregularities on the surface of the substrate placed on the stage;
According to the measurement result of the optical length measuring device, the discharge nozzle is driven along a direction perpendicular to the substrate surface, and a nozzle adjusting means for adjusting the interval between the substrate surface and the discharge nozzle to a predetermined value;
A drive means for relatively moving the substrate placed on the stage and the discharge nozzle and the optical length measuring device;
The optical length measuring device has a length measuring unit having an emission element that emits measurement light along a plane orthogonal to the axis of the discharge nozzle, and a light receiving element that receives the measurement light reflected on the substrate surface ,
Together are found provided on the optical path of the measuring light between the measuring section and the substrate surface, a transparent having an index of refraction different from that of the atmosphere between the measuring section and the substrate surface A dielectric,
Provided between the transparent conductor and the substrate surface on the optical path of the measurement light emitted from the emission element, and the measurement light emitted from the emission element is orthogonal to the substrate surface placed on the stage A reflecting plate that is deflected in a plane to be guided to the surface of the substrate in the vicinity of the discharge nozzle, and guides measurement light reflected on the surface of the substrate to the light receiving element
Position adjusting means for moving the length measuring section, the transparent dielectric, and the reflecting plate in a direction perpendicular to the axis of the discharge nozzle, and adjusting the incident position of the measurement light with respect to the substrate surface in the vicinity of the discharge nozzle;
A coating apparatus used for manufacturing a display device. The refractive index of the atmosphere between the length measuring unit and the substrate surface is n1, the incident angle of the measurement light with respect to the transparent dielectric and the emission angle of the measurement light toward the light receiving element from the transparent dielectric are θ1, When the thickness of the transparent dielectric is d and the amount of increase in the length that can be measured by the length measurement unit is x, the refractive index n2 of the transparent conductor is

The coating device used for manufacturing the display device according to claim 1, wherein The transparent dielectric includes a first surface facing the length measurement unit, a second surface facing the first surface in parallel, an antireflection film formed on each of the first and second surfaces, The coating apparatus used for display apparatus manufacture of Claim 1 or 2 characterized by the above-mentioned . The description used for manufacturing a display device according to claim 1, wherein the reflection plate is provided so as to intersect with the discharge nozzle, and includes a through-hole through which the discharge nozzle is inserted with a gap. Coating device.

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