TW201328789A - Nozzle - Google Patents

Abstract

Disclosed herein is a nozzle, which is optimized in shape to shape an upper surface of a coating material applied to a substrate into a plane that is parallel to the upper surface of the substrate.

Description

nozzle

The present invention relates to a nozzle for use in an coating apparatus for coating a coating material mixed with a frit.

In the process of manufacturing a flat panel display such as an OLED display, a liquid crystal display, a plasma display, or a field emission display, in order to maintain a predetermined interval between a pair of substrates while hermetically sealing the internal space between the substrates, the coating of the glass frit is mixed. The cloth material is applied to any of the pair of substrates, and then the substrates are attached to each other.

Such a coating material is in the form of a paste in which a glass phase of a powder phase frit is mixed with an organic solvent and applied to the periphery of the upper surface of the substrate. Next, when the substrate coated with the coating material is subjected to a drying and heating process, the organic solvent in the coating material evaporates, and as a result, the glass frit remains on the substrate. The adhesive is applied to the outer portion of the predetermined interval from the frit pattern in which the frit is present, and the pair of substrates are joined together by an adhesive. Further, if the bonded substrate is heated at a high temperature or the frit is irradiated with a laser beam, the frit melts and then hardens, and the pair of substrates are bonded and tightly seals the internal space between the pair of substrates. Thereafter, in the region where the substrate is bonded, the region coated with the adhesive is cut, and a product having a hardened glass frit between the pair of substrates is completed.

One of the most important factors in such a process for manufacturing a flat panel display is to keep the spacing between the pair of substrates constant. The spacing between the pair of substrates depends on the cross-sectional shape of the coating material, such as the width and height of the coating material applied to the substrate. Therefore, in order to keep the interval between the pair of substrates fixed, it is necessary to apply the coating. The material is applied to the substrate while maintaining its cross-sectional shape fixed.

Meanwhile, in order to apply the coating material to the substrate, a coating device having a nozzle is used, and a discharge port of the nozzle is formed at the end facing the substrate. The coating device moves the nozzle in the horizontal direction with respect to the substrate while discharging the coating material through the discharge port of the nozzle, thereby applying the coating material to the substrate.

However, the conventional coating apparatus has a problem in that the shape of the coating material discharged through the nozzle discharge is changed depending on the shape of the nozzle end portion, and thus is not fixed, and the sectional shape of the coating material applied to the substrate is not fixed.

Accordingly, the present invention has been made in view of the problems occurring in the prior art, and an object of the present invention is to provide a nozzle capable of coating a coating material having a fixed cross-sectional shape to a substrate, thereby maintaining a constant interval between the pair of bonding substrates.

In order to achieve the above object, the present invention provides a nozzle having a discharge port for discharging a coating material to an upper surface of a substrate, the nozzle including a plane portion formed adjacent to the discharge port and parallel to the substrate The upper surface is in contact with the coating material, wherein the area of the planar portion is equal to or larger than the area of the coating material that is in contact with the planar portion.

Furthermore, the present invention provides a nozzle having a discharge port for discharging a coating material to an upper surface of the substrate, the nozzle including a flat portion formed adjacent to the discharge port and parallel to the upper surface of the substrate and coated The material is in contact, wherein a width of the flat portion in a direction perpendicular to a coating direction of the coating material is equal to or greater than The width of the surface of the coating material applied to the substrate in a direction perpendicular to the coating direction of the coating material.

Furthermore, the present invention provides a nozzle including a concave portion formed at an end facing the substrate and opened in a coating direction of the coating material, wherein the planar portion is formed in the concave portion in parallel On the upper surface of the substrate and in contact with the coating material.

As apparent from the above description, the nozzle according to the present invention is configured to optimize the shape of the coating material applied to the substrate, and the upper surface of the coating material is formed into a plane parallel to the upper surface of the substrate, whereby the substrate can be A frit pattern having a fixed cross-sectional shape and a flat upper surface is formed thereon. Therefore, the present invention is advantageous in that the pair of substrates can be firmly joined together and the interval between the bonding substrates can be kept fixed.

Hereinafter, the nozzle of the preferred embodiment of the present invention will be described with reference to the accompanying drawings.

First, as shown in FIG. 1, a coating apparatus having a nozzle according to a first embodiment of the present invention includes a stage 10 on which a substrate S is mounted, and a coating head unit support frame provided above the pallet 20. (dispensing-head-unit-support frame) 20. A coating head unit 30 movably provided on the coating head unit support frame 20 and having a nozzle 70, and a control unit for controlling a coating operation of the coating material (not shown) ).

The pallet moving unit 40 is provided below the pallet 10 and moves in a direction (Y-axis direction) perpendicular to the extending direction (X-axis direction) of the coating head unit support frame 20. Pallet 10. The coating head unit moving unit 50 is provided on the coating head unit support frame 20 while moving the coating head unit 30 in the X-axis direction. This configuration allows the pallet 10 to be moved in the Y-axis direction by the pallet moving unit 40, and the coating material is applied to the substrate S in the Y-axis direction while the coating head unit 30 is moved by the coating head unit. The unit 50 is moved in the X-axis direction, and the coating material is applied to the substrate S in the X-axis direction. Various linear movement mechanisms can be used as the pallet moving unit 40 and the coating head unit moving unit 50, such as a linear motor or a ball screw including an electromagnet and a permanent magnet. Meanwhile, the embodiment of the present invention proposes a configuration in which the pallet 10 moves in the Y-axis direction and the coating head unit 30 moves in the X-axis direction. However, the present invention is not limited to such a configuration, but may be configured such that the pallet 10 moves in the X-axis direction and the Y-axis direction, or the coating head unit 30 moves in the X-axis direction and the Y-axis direction. In order to move the pallet 10 in the X-axis direction and the Y-axis direction, two linear movement mechanisms can be attached below the pallet 10, and the pallet 10 is moved in the X-axis direction and the Y-axis direction, respectively. In order to move the coating head unit 30 in the Y-axis direction, a linear movement mechanism for moving the coating head unit support frame 20 in the Y-axis direction may be connected to the coating head unit support frame 20. In this manner, the coating device can apply the coating material to the substrate S by moving the pallet 10 and the coating head unit 30 is maintained stationary or by moving the coating head unit 30 and the pallet 10 is fixed. Thereafter, the relative movement between the pallet 10 and the coating head unit 30 is defined as the movement of the nozzle 70 relative to the substrate S.

The coating head unit 30 includes a syringe 31, a nozzle 70, a distance sensor 33, a Y-axis driving unit 34, and a Z-axis driving unit 35. The syringe 31 contains a coating material. The nozzle 70 communicates with the syringe 31 and discharges the coating material. The distance sensor 33 is disposed adjacent to the nozzle 70 to measure the interval between the nozzle 70 and the substrate S. The Y-axis driving unit 34 acts on the moving nozzle 70 and the distance sensor 33 in the Y-axis direction. The Z-axis driving unit 35 acts on the moving nozzle 70 and the distance sensor 33 Vertical direction (Z-axis direction).

The syringe 31 contains a predetermined amount of coating material. The coating material contained in the syringe 31 is in the form of a paste, which is prepared by mixing a powder phase frit with an organic solvent. The syringe 31 can be connected to a pressure source (not shown), and the coating material contained in the syringe 31 can be discharged to the substrate S through the nozzle 70 with the pressure source supplying the pressure to the inside of the syringe 31. The syringe 31 can be integrated with the nozzle 70 or can be provided separately from the nozzle 70 and connected to the nozzle 70 by an additional path.

The distance sensor 33 includes a light emitting part 331 that emits a laser beam toward the substrate S, and a light receiving part 332 that is spaced apart from the light emitting part 331 by a predetermined distance and received from the light receiving part 331 Light reflected from the upper surface of the substrate S. The distance sensor 33 is configured to measure the distance between the substrate S and the nozzle 70 in response to the electrical signal, wherein the electrical signal is based on an image forming position at which the laser beam reflected from the upper surface of the substrate S forms an image at the light receiving portion 332. .

As shown in FIG. 2, a path 71 is formed in the nozzle 70 to communicate with the syringe 31, and a discharge port 72 is formed at the end of the nozzle 70 facing the substrate S to communicate with the path 71. This configuration allows the coating material P contained in the syringe 31 to flow along the path 71 with the supply pressure to the inside of the syringe 31, and then discharged to the substrate S through the discharge port 72.

Further, the flat portion 73 is formed to be adjacent to the discharge port 72 at the end of the nozzle 70 facing the substrate S, and is parallel to the upper surface of the substrate S. The discharge port 72 and the flat portion 73 are formed on the same plane. According to this configuration, when the nozzle 70 moves relative to the substrate S, the coating material P is discharged from the discharge port 72, and the coating material P is applied to the base. Board S. During such a procedure, the coating material P comes into contact with the flat portion 73 of the nozzle 70. Therefore, the coating material P is leveled by the flat portion 73 of the nozzle 70, and as shown in FIG. 3, the upper surface of the coating material P applied to the substrate S is formed into a plane parallel to the upper surface of the substrate S.

Regarding the coating material P applied to the substrate S, the height Hp is a height calculated from the upper surface of the substrate S, and the width Wp is the moving direction of the upper surface of the coating material P with respect to the nozzle 70 with respect to the substrate S (coating) The coating direction of the material P) the width in the vertical direction, the height Hp and the width Wp are preset depending on the size or shape of the substrate S to be applied to the product.

Here, the driving of the Z-axis driving unit 35 is controlled by the pitch between the substrate S and the nozzle 70 measured based on the use of the distance sensor 33, and by adjusting the pitch of the substrate S and the nozzle 70 in the vertical direction, The procedure of adjusting the height Hp of the coating material P is performed.

Further, depending on the predetermined width Wp of the upper surface of the coating material P, the plane portion 73 of the nozzle 70 is set to be perpendicular to the moving direction of the nozzle 70 with respect to the substrate S (the coating direction of the coating material P). The width Wn of the upper surface and the area of the flat portion 73 are adjusted to adjust the width Wp of the upper surface of the coating material P.

When the width Wn of the flat portion 73 is smaller than the predetermined width Wp of the surface above the coating material P, as shown in FIG. 4, the coating material P may climb along the side of the nozzle 70 during coating, and may be applied An irregular groove is formed on the upper surface of the coating material P of the substrate S. Therefore, due to such a problem, when a pair of substrates S are joined together, it is difficult to keep the interval between the substrates S fixed, and the bubbles are disadvantageously Formed between the pair of substrates S. Therefore, as shown in FIG. 2, the width Wn of the flat portion 73 of the nozzle 70 is preferably equal to or larger than the predetermined width Wp of the upper surface of the coating material P. That is, preferably, the area of the flat portion 73 of the nozzle 70 is equal to or larger than the area of the coating material P in contact with the flat portion 73.

Further, as shown in FIG. 2, the width Wn of the flat portion 73 is larger than the inner diameter of the discharge port 72, and the flat portion 73 can be effectively leveled corresponding to the flow rate of the discharge of the coating material P from the discharge port 72. The upper surface of the coating material P applied to the substrate S. Preferably, the width Wn of the flat portion 73 is at least 1.5 times larger than the inner diameter of the discharge port 72.

As shown in FIGS. 5 to 7, when the coating material P is applied to the substrate S in a closed form, the coating material P is first discharged. The coating operation starts from the coating start point SP at which the nozzle 70 starts moving relative to the substrate S, and is performed in a predetermined pattern. After the nozzle 70 is returned to the coating start point SP again, the coating operation is completed.

Preferably, if the position at which the coating operation is completed is defined as the coating end point EP, the coating end point EP is located behind the coating start point SP in the moving direction of the nozzle 70 with respect to the substrate S, and is discharged from the discharge port 72. The operation of the cloth material P is completed before the coating start point SP. That is, the nozzle 70 is returned to the coating start point SP and then the coating operation is completed, and the operation of discharging the coating material P from the discharge port 72 is completed before the nozzle 70 is positioned at the coating start point SP, after which the nozzle 70 is brought into contact with the substrate S. The manner in which the pitch in the vertical direction is kept fixed reaches the coating end point EP by the coating start point SP. Therefore, in a state where the coating operation of discharging the coating material from the discharge port 72 is completed, the coating material P under the nozzle 70 and the coating material which has been applied to the coating start point and continuously moved to the coating end point EP of the nozzle 70 are applied. P is united. At this time, the flat portion 73 is complete Flat coating material. Therefore, application of the coating material P is prevented from being repeated in the region where the coating starting point SP and the coating end point EP are encountered, and the upper surface of the coating material P is formed into a flat surface.

Meanwhile, as shown in FIG. 6, when the nozzle 70 has been positioned at the coating end point EP, the nozzle 70 is moved in the horizontal direction while being gradually moved upward in the vertical direction to be separated from the coating material P. Compared with the case where the nozzle 70 is only moved in the vertical direction at the coating end point EP, the above case avoids the upper surface of the coating material P applied to the substrate S because the coating material P sticks to the end of the nozzle 70 and is along with the nozzle 70. Move to become an irregular shape.

Meanwhile, as shown in FIGS. 5 and 6, when the nozzle 70 hits the coating material P that has been applied to the coating start point SP, in order to prevent the applied coating material P from coming into contact with the side surface of the nozzle 70 and then moving upward, The tapered portion 74 is preferably formed at an end of the nozzle 70 facing the substrate S by a predetermined inclination by being tapered. The tapered portion 74 can be a linear shape or a curved shape.

According to this configuration, as shown in Fig. 6, even when the nozzle 70 passes through the coating starting point SP and then moves, the coating material P applied to the coating start point SP is positioned at the flat portion of the nozzle 70 by the tapered portion 74. 73 below. Therefore, even in the range where the coating starting point SP hits the coating end point EP, the entire upper surface of the coating material P can maintain the planar form.

As shown in FIG. 7, when the operation of applying the coating material P to the substrate S is completed, the substrate S coated with the coating material P is subjected to a drying and heating process. Thereby, the organic solvent in the coating material P evaporates, and only the glass frit F remains on the substrate S. This case The upper surface of the pattern of the frit F is maintained as a plane parallel to the upper surface of the substrate S. Further, as shown in Fig. 8, the adhesive A is applied to the outer side portion of the substrate S on which the glass frit F exists and which is spaced apart from the frit pattern by a predetermined interval. Further, as shown in FIG. 9, the substrate S having the electronic device E (for example, a semiconductor device or a light-emitting device) is bonded to the substrate S having the glass frit F and coated with the adhesive A. Further, as shown in FIG. 10, if the bonded substrate is heated at a high temperature or the frit is irradiated with laser light, the frit melts and then hardens again, and the pair of substrates are tightly joined together. Further, as shown in FIG. 11, in the region where the substrate is bonded, the region coated with the adhesive A is cut, and the product having the pair of substrates joined by the glass frit F is completed.

Meanwhile, as shown in FIG. 12, the upper surface of the frit F pattern formed on the substrate S is parallel to the lower surface of the substrate S on which the electronic device E is formed. Therefore, in the process of joining the pair of substrates S together, the lower surface of the substrate S can closely contact the upper surface of the frit F pattern.

As described above, the shape of the nozzle 70 of the first embodiment of the present invention is optimized, and the upper surface of the coating material P containing the glass frit F is formed into a plane parallel to the upper surface of the substrate S. As a result, an advantage of the present invention is that the nozzle 70 of the first embodiment of the present invention can be used to form a pattern of the glass frit F having a flat upper surface on the substrate S, thereby enabling the pair of substrates S to be firmly joined together, and The interval between the bonded substrates S is kept constant.

Hereinafter, a nozzle 80 according to a second embodiment of the present invention will be described with reference to Figs. Elements common to the first embodiment and the second embodiment will have the same reference numerals, and detailed description thereof will be omitted herein.

First, as shown in Fig. 13, a nozzle 80 according to a second embodiment of the present invention is mounted on a coating head unit 30 to be rotated about a vertical axis (Z-axis). To this end, the rotating unit 32 is provided on the coating head unit 30 to rotate the nozzle 80 about the Z axis. The rotating unit 32 can use an electric motor. The configuration in which the nozzle 80 is rotated has been proposed in the second embodiment of the present invention. However, the configuration in which the nozzle 80 will rotate can also be replaced by a configuration in which the pallet 10 will rotate. In order to rotate the pallet 10, a rotating unit such as an electric motor can be coupled to the lower portion of the pallet 10.

According to this configuration, the nozzle 80 or the substrate S is rotated. Therefore, the nozzle 80 simultaneously performs movement and rotation with respect to the substrate S. Thereby, the direction of the nozzle 80 can be changed while moving along the coating pattern of the coating material P. Here, the front and rear portions of the nozzle 80 can be defined in the moving direction of the nozzle 80.

The path 81 is formed in the nozzle 80 to communicate with the syringe 31, and the discharge port 82 is formed at the end of the nozzle 80 facing the substrate S to communicate with the path 81. This configuration allows the coating material P in the syringe 31 to flow along the path 81 under the supply pressure to the inside of the syringe 31, and then discharged to the substrate S through the discharge port 82.

Further, the flat portion 83 is formed to be adjacent to the discharge port 82 at the end of the nozzle 80 facing the substrate S, and is parallel to the upper surface of the substrate S. The discharge port 82 and the flat portion 83 are formed on the same plane. According to this configuration, when the nozzle 80 is moved relative to the substrate S, the coating material P is discharged from the discharge port 82, and the coating material P is applied onto the substrate S. During such a procedure, the coating material P comes into contact with the flat portion 83 of the nozzle 80. Therefore, the coating material P is leveled by the flat portion 83 of the nozzle 80, and the upper surface of the coating material P applied to the substrate S is formed into a plane parallel to the upper surface of the substrate S.

As shown in FIGS. 14 and 15, the tapered portion 84 is formed at a front portion of the nozzle 80 with a predetermined inclination by being tapered, and a flattening member 85 having a predetermined width is formed at the rear portion of the nozzle 80. The tapered portion 84 can be a linear shape or a curved shape. The lower surface of the leveling member 85 is in the same plane as the flat portion 83. Thereby, in the coating process, the lower surface of the leveling member 85 comes into contact with the upper surface of the coating material P. The leveling member 85 can be integrated with the nozzle 80 or can be provided separately from the nozzle 80 and then coupled to the side surface of the nozzle 80.

As with the first embodiment described above, when the nozzle 80 hits the coating material P that has been applied to the coating start point SP, the tapered portion 84 prevents the coating material P from being along the side surface of the nozzle 80 after contacting the side surface of the nozzle 80. Climb.

According to this configuration, as shown in Fig. 15, even when the nozzle 80 passes through the coating starting point SP and then moves, the coating material P which has been applied to the coating start point SP is positioned at the flat portion of the nozzle 80 by the tapered portion 84. 83 below. Therefore, even in the range where the coating start point SP hits the coating end point EP, the entire upper surface of the coating material P can maintain a planar shape.

Further, the flattening member 85 presses and flattens the upper surface of the coating material P overflowing from the rear of the nozzle 80, and the upper surface of the coating material P applied to the substrate S is formed to be parallel to the upper surface of the substrate S. The plane. The flattening member 85 increases the area of the upper surface of the coating material P, and the upper surface of the coating material P is formed by the flattening member 85 and the flat portion 83 of the nozzle 80 to be parallel to the upper surface of the substrate S. The plane.

As described above, in the nozzle 80 according to the second embodiment of the present invention, the tapered portion 84 is formed at the front portion of the nozzle 80 in the moving direction thereof, and the flattening member 85 is provided at the rear portion of the nozzle 80 to be applied to the substrate S. The upper surface of the coating material may be formed into a plane parallel to the upper surface of the substrate S. As a result, the present invention has an advantage in that the nozzle 80 of the second embodiment of the present invention can be used to form a pattern of the glass frit F having a flat upper surface on the substrate S, thereby enabling the pair of substrates S to be firmly joined together and The interval between the bonded substrates S is kept constant.

Hereinafter, a nozzle according to a third embodiment of the present invention will be described with reference to Figs. 16 to 18 . The same reference numerals are used to denote elements common to the first to third embodiments, and a detailed description thereof is omitted herein.

As shown in FIG. 16, the nozzle 90 according to the third embodiment of the present invention is configured such that the concave portion 96 is formed at the end of the nozzle 90 facing the substrate S, and in the moving direction of the nozzle 90 with respect to the substrate S (coating material P The coating direction is opened, and the flat portion 93 is formed in the concave portion 96 while being in parallel with the upper surface of the substrate S and in contact with the coating material P in the coating process. Further, the discharge port 92 is formed on the same plane as the flat portion 93 to discharge the coating material P, and the discharge port 92 communicates with the syringe 31 via the path 91 defined in the nozzle 90.

Here, the discharge port 92 and the flat portion 93 are formed on the same plane. According to this configuration, when the nozzle 90 is moved relative to the substrate S, the coating material P is discharged from the discharge port 92, and the coating material P is applied onto the substrate S. During such a procedure, the coating material P comes into contact with the flat portion 93 of the nozzle 90. Therefore, the flat portion 93 of the nozzle 90 flattens the coating material P, and the upper surface of the coating material P applied to the substrate S is formed into a plane parallel to the upper surface of the substrate S.

The recess 96 can be formed by extending a pair of extension portions 97 downward from the end of the nozzle 90. Here, in order to keep the shape of the coating material P applied to the substrate S constant, the angle between the plane of the flat portion 93 and the surface of the extending portion 97 hitting the flat portion 93 preferably forms a right angle or an obtuse angle.

According to this configuration, as shown in FIGS. 17 and 18, when the nozzle 90 is moved relative to the substrate S to apply the coating material P to the substrate S in a predetermined pattern, the coating material applied to the substrate S may have a corresponding The shape of the flat portion 93 and the concave portion 96.

Therefore, the upper surface of the coating material P applied to the substrate S may be formed into a plane parallel to the upper surface of the substrate S according to the shape of the flat portion 93, and the side surface of the coating material P applied to the substrate S may be depending on the concave portion 96. The shape is smoothly modified.

Further, since the side surface shape of the coating material P in the coating process is controlled by the pair of extending portions 97, the width Wp of the upper surface of the coating material P applied to the substrate S is the same as the width Wn of the flatness. Therefore, the width Wp of the upper surface of the coating material P can have a correct preset width.

Meanwhile, the nozzle 90 according to the third embodiment of the present invention may also include a tapered portion and a leveling member as in the second embodiment.

As a result, the nozzle 90 according to the third embodiment of the present invention has an advantage in that it has a shape corresponding to the shape of the coating material P applied to the substrate S, so that the upper surface of the coating material P applied to the substrate S is accurately A plane parallel to the upper surface of the substrate S is formed.

The ideas described in the various embodiments of the invention may be implemented separately or in combination. Furthermore, the configuration of the nozzle of the present invention can also be applied to various coating devices, such as a coating device for coating a coating material containing a glass frit in a flat panel display program, and for coating in a semiconductor manufacturing process. A coating device for a cloth resin and a coating device for applying an adhesive to an electronic component to mount an electronic component.

10‧‧‧Terminal

20‧‧‧ Coating head unit support frame

30‧‧‧ Coating head unit

31‧‧‧Syringe 31

32‧‧‧Rotating unit

33‧‧‧Distance sensor

34‧‧‧Y-axis drive unit

35‧‧‧Z-axis drive unit

40‧‧‧Trolley mobile unit

50‧‧‧Coating head unit mobile unit

70‧‧‧ nozzle

71‧‧‧ Path

72‧‧‧Exporting

73‧‧‧Flat Department

74‧‧‧ Gradual

80‧‧‧ nozzle

81‧‧‧ Path

82‧‧‧Exporting

83‧‧‧Flat Department

84‧‧‧ Gradual

85‧‧‧ Flattening members

90‧‧‧ nozzle

92‧‧‧Exporting

93‧‧‧Flat Department

96‧‧‧ recess

97‧‧‧Extension

331‧‧‧Light Emitter

332‧‧‧Light Receiving Department

A‧‧‧Adhesive

E‧‧‧Electronic device

EP‧‧‧ coating end point

F‧‧‧Frit

Hp‧‧‧ Coating material height

P‧‧‧ Coating materials

S‧‧‧Substrate

SP‧‧‧ Coating starting point

Wn‧‧‧ flat section width

Wp‧‧‧ Coating material width

The above and other objects, features and advantages of the present invention will become more <RTIgt; A schematic cross-sectional view of a nozzle coated to a substrate according to a first embodiment of the present invention; FIG. 3 is a perspective view showing a shape of a coating material applied to a substrate by a nozzle according to a first embodiment of the present invention; and FIG. 4 is a view showing a coating material. FIG. 5 and FIG. 6 are schematic cross-sectional views showing a state in which the nozzle of the first embodiment of the present invention is coated on the substrate while moving relative to the substrate; FIG. 7 to FIG. A schematic view showing a substrate bonding process using a frit; FIG. 12 is a schematic cross-sectional view showing a shape of a frit in a process of joining a pair of substrates together; and FIG. 13 is a view showing a coating device having a nozzle according to a second embodiment of the present invention. FIG. 14 and FIG. 15 are diagrams showing the nozzle of the second embodiment of the present invention relative to the substrate A schematic cross-sectional view showing a state in which coating is performed on a substrate while moving; FIG. 16 is a schematic cross-sectional view showing a nozzle applied to a substrate according to a third embodiment of the present invention; and FIGS. 17 and 18 are views showing a third embodiment of the present invention. A perspective schematic view of a state in which a coating is performed on a substrate while the nozzle is moved relative to the substrate.

70‧‧‧ nozzle

71‧‧‧ Path

72‧‧‧Exporting

73‧‧‧Flat Department

P‧‧‧ Coating materials

S‧‧‧Substrate

Wn‧‧‧ flat section width

Wp‧‧‧ Coating material width

Claims (5)

A nozzle having a discharge port for discharging a coating material to an upper surface of a substrate, comprising: a flat portion formed adjacent to the discharge port and parallel to the upper surface of the substrate and coated The material is contacted, wherein an area of the planar portion is equal to or greater than an area of the coating material that is in contact with the planar portion. A nozzle having a discharge port for discharging a coating material to an upper surface of a substrate, comprising: a flat portion formed adjacent to the discharge port and parallel to the upper surface of the substrate and the coating material Making contact, wherein a width of the flat portion in a direction perpendicular to a coating direction of one of the coating materials is equal to or greater than an upper surface of the coating material applied to the substrate at the coating with the coating material The width in the direction perpendicular to the direction. A nozzle having a discharge port for discharging a coating material to an upper surface of a substrate, comprising: a recess formed at one end facing the substrate to be opened in a coating direction of one of the coating materials One of the planar portions is formed in the recess and parallel to the upper surface of the substrate and in contact with the coating material. A nozzle according to any one of claims 1 to 3, wherein a tapered portion is formed at one end of the nozzle. The nozzle of any one of claims 1 to 3, wherein a flattening member provides a rear portion in a moving direction of one of the nozzles to make contact with the coating material, thereby leveling the coating One of the materials on the upper surface.