JPH1062802A - Liquid crystal display device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a transverse electric field liquid crystal display device which is free from gradation inversion, is good in visual angle characteristics, allows the utilization of low-voltage driving ICs and is high in response speed by specifying the inter-electrode distance between a liquid crystal driving electrode and a common electrode to the inter-electrode distance which is not completely uniform within one pixel but is the combination of >=2 kinds of the inter-electrode distances. SOLUTION: The inter-electrode distance of the liquid crystal driving electrode 4 and the common electrode 3 is composed of the inter-electrode distance which is not completely uniform within one pixel but is the combination of >=2 kinds of the inter-electrode distances. The inter-electrode distances include, for example, two kinds; a, b and the inter-electrode distances a, b are arranged symmetrically to the center line. When the number of the electrodes increases, the inter-electrode distances include the combinations of, for example, two kinds and the combinations of three kinds. Since liquid crystal molecules are liable to receive the influence of the electric fields from video signal wirings 2, the crosstalks of the direction aligned to the video signal wirings 2 are decreased by arranging the video signal wirings 2 so as to hold these wirings with the common electrodes 3. The inter-electrode distance (a) nearest to the video signal wirings 2 is recommended to be set at the largest value in order to further improve the effect thereof.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a large screen active matrix type liquid crystal display device having a wide viewing angle and high image quality.

[0002]

2. Description of the Related Art A method of applying an electric field to a liquid crystal composition layer using a comb-like electrode pair formed on one substrate of a conventional active matrix type liquid crystal display device is disclosed in, for example, Japanese Patent Application Laid-Open No.
-36058, JP-A-7-159786, JP-A-6-159786
It has been proposed by JP-A-160878. Hereinafter, a display method in which the main electric field direction applied to the liquid crystal composition layer is substantially parallel to the substrate interface is referred to as a horizontal electric field method. 1 and 2 show examples of a conventional in-plane switching method. The liquid crystal drive electrode, which is a comb-shaped pixel electrode, and the common electrode are linearly arranged in parallel, and the distance a between the electrodes is the same.

[0003]

As shown in FIG. 3, the transmittance characteristic of a horizontal electric field type liquid crystal cell with respect to the driving voltage is such that the luminance decreases when a voltage higher than a certain voltage is applied.
If the video signal voltage is slightly too high, the gradation of the image will be inverted. In the gray scale display characteristics, this gray scale inversion is a very serious problem, resulting in an extremely unnatural image display.

In the liquid crystal display device of the horizontal electric field type, the liquid crystal driving voltage tends to be higher than that of the conventional TN liquid crystal display device of the vertical electric field type, and a driving IC having a high voltage output is required. There was a problem.

Further, a combination of an alignment film and a liquid crystal used in a liquid crystal display device of a horizontal electric field type requires a pretilt angle of 1 degree or less, and a combination of about 4 degrees to 7 degrees used in a conventional TN liquid crystal display device. The alignment film cannot be used. For this reason, when a horizontal electric field type liquid crystal display device is manufactured on a conventional TN liquid crystal display device manufacturing line, it is necessary to change the material of the alignment film and the liquid crystal material, which causes a problem that the production efficiency is reduced.

On the other hand, a conventional T filter is used for a color filter substrate.
Since there is no transparent conductive film on the entire surface as in the N liquid crystal display device, it is susceptible to the influence of static electricity, and there is a problem that poor alignment is caused when charged up.

The processing of the pixel electrodes used in the liquid crystal display device of the horizontal electric field method is often performed by wet etching, and the distance between the electrodes cannot be made very small.
Therefore, the response speed of the liquid crystal is slower than that of the conventional TN liquid crystal, and it is difficult to handle moving images.

An object of the present invention is to solve these problems. An object of the present invention is to provide a horizontal electric field which has no visual inversion, has good viewing angle characteristics, can use a low-voltage driving IC, and has a high response speed. It is to provide a liquid crystal display device. Another object is to increase the degree of freedom in selecting usable liquid crystal compositions and alignment film materials, improve the yield of the liquid crystal process, and reduce costs.

[0009]

Means for Solving the Problems In order to solve the above problems and achieve the above object, the present invention uses the following means. A thin film transistor formed on the substrate at each intersection of the scanning signal wiring, the video signal wiring, the scanning signal wiring and the video signal wiring, a liquid crystal driving electrode connected to the thin film transistor, and at least a part of the liquid crystal driving electrode A liquid crystal display device comprising: an active matrix substrate having a common electrode formed to face an electrode; a counter substrate facing the active matrix substrate; and a liquid crystal layer sandwiched between the active matrix substrate and the counter substrate. [Means 1] The inter-electrode distance between the liquid crystal driving electrode and the common electrode is not uniform within one pixel, but is a combination of two or more types of inter-electrode distance.

[Means 2] In the means 1, there are two or more kinds of electrode distances between the liquid crystal drive electrode and the common electrode within one pixel. Alternatively, they are arranged vertically symmetrically.

[Means 3] The common electrodes are connected in the direction in which the video signal wiring extends, and in the effective display screen, the common electrodes are not connected to each other across the video signal wiring.

[Means 4] In the means 3, the common electrodes connected in the direction in which the video signal wiring extends are separated into an odd group and an even group, and the common electrodes of the odd group and the even group are synchronized with the period of the scanning signal. A drive system in which voltage waveforms of opposite phases are applied to the electrodes, and a video signal waveform of a phase opposite to that of the common electrodes is applied to the liquid crystal drive electrodes facing the common electrodes of the odd and even groups, respectively. Liquid crystal display device.

[Means 5] In the liquid crystal driving electrode of the horizontal electric field type, the liquid crystal driving electrode and the scanning signal wiring are more connected than the additional capacitance formed by overlapping the liquid crystal driving electrode and the common electrode via the insulating film. However, the structure was such that the additional capacitance formed by being superposed through the insulating film became larger.

[Means 6] In the means 5, the potential of the common electrode is fixed, and the positive and negative video signal voltages with respect to the common electrode potential are alternately written on the liquid crystal drive electrode in accordance with the period of the scanning signal. In order to further increase the voltage applied to the liquid crystal composition layer, a capacitive coupling drive method is used in which a voltage signal waveform is also applied to a scanning signal line superimposed on a liquid crystal drive electrode via an insulating film. Liquid crystal display.

[Means 7] In a liquid crystal display device of an in-plane switching mode, a thin film semiconductor layer is doped with an impurity, activated and reduced in resistance to form a liquid crystal drive electrode.

[Means 8] In the means 7, the video signal wiring and the pixel electrode may be set at ± 1 degrees to ±
The structure was bent at an angle of 45 degrees.

[Means 9] In the means 7, the scanning signal wiring and the pixel electrode are arranged at an angle of ± 1 degree to ± 1 degree with respect to the liquid crystal alignment direction.
The structure was bent at an angle of 45 degrees.

[Means 10] In the means 7, the video signal wiring and the pixel electrode are arranged so as to be bent in a range from 45 degrees to 135 degrees except 90 degrees with respect to the liquid crystal alignment direction.

[Means 11] In the means 7, the scanning signal wiring and the pixel electrode are arranged so as to be bent from 45 degrees to 135 degrees except 90 degrees with respect to the liquid crystal alignment direction.

[Means 12] In an in-plane switching mode liquid crystal display device, a high resistance material (10 ⁹ Ω · c) is applied to the overcoat layer covering the color filter layer formed on the opposite substrate.
m to 10 ¹¹ Ω · cm).

[Means 13] In the means 12, the sum of the thicknesses of the color filter layer, the overcoat layer and the liquid crystal layer is at least twice the distance between the liquid crystal drive electrode and the common electrode. Liquid crystal display device.

[Means 14] In an in-plane switching mode liquid crystal display device, an insulating film is used as an overcoat layer covering a color filter layer formed on a counter substrate, and R, G, B
A conductive or semiconductor electrode was formed as a black mask on the overcoat insulating film at the boundary of the color filter.

[Means 15] In the manufacturing process of the liquid crystal display device of the horizontal electric field type, an alignment film for aligning the liquid crystal is applied, and after baking, the alignment film is subjected to UV irradiation treatment or He, N
The liquid crystal pretilt angle was reduced to 1 degree or less by performing rubbing processing after performing ion implantation processing or plasma processing of e, Ar, N ₂ , O _{2, and the} like.

[Means 16] In the means 3, the common electrode connected in the direction in which the video signal wiring extends is divided into an odd group and an even group, and the video signal wiring is vertically divided into two at the center of the screen. .

[Means 17] In the means 16, the scanning signal lines divided into two groups at the center of the screen, the upper and lower groups, are simultaneously driven by the upper and lower groups. By applying a video signal voltage waveform of the opposite phase to the group, and applying the voltage waveform of the video signal wiring and the common electrode drive waveform of the opposite phase to the odd and even groups of the common electrodes, A liquid crystal display device characterized by a driving method in which different video signals are written in two upper and lower horizontal lines.

[0026]

The liquid crystal driving electrode is provided as described in the above means 1 and 2.
When the distance between the electrodes and the common electrode is not uniform in one pixel and is configured by combining two or more kinds of distances between the electrodes, as shown in FIG. Even when the gradation is inverted, since the inversion does not occur at the place where the distance between the electrodes is wide, the gradation inversion is determined to be small in the whole pixel. As shown in FIG. 5, FIG. 6, FIG. 8, and FIG. 10, when the distance between the electrodes is symmetrically arranged left and right or vertically symmetric with respect to the center of the pixel, the scanning signal wiring and the image By increasing the distance between the electrodes closest to the signal wiring, a uniform image with less crosstalk can be obtained.

The above means 3 and 4 make it possible to reduce the video signal driving voltage of the dot inversion driving method to less than half even in the liquid crystal display device of the horizontal electric field method. Since a video signal driving IC driven by 5 V can be used, the cost can be reduced. As shown in FIG. 16 and FIG. 17, in the dot inversion drive, horizontal crosstalk and horizontal crosstalk hardly occur, so that good image quality can be obtained. Further, as shown in FIG.
By completely covering the FT portion, light can be prevented from entering the TFT, so that the black mask on the color filter side can be omitted and the cost of the color filter can be reduced. By eliminating the CF-side black mask, a liquid crystal panel having a high aperture ratio and a high luminance can be manufactured.

By means 5 and 6, even in the liquid crystal display device of the horizontal electric field system, the video signal driving voltage of the horizontal line inversion driving system can be reduced to half or less. FIG.
As shown in FIGS. 27 and 29, in order to form a large capacitance on the liquid crystal driving electrode and the scanning signal wiring via the insulating film, and to control the potential of the liquid crystal driving electrode using this capacitance,
It is not necessary to apply a special drive signal waveform to the common electrode.
That is, the common electrode potential may be fixed at a potential close to the median value of the video signal voltage. In the conventional horizontal line inversion driving method, since the entire common electrode is driven with a voltage waveform having a phase opposite to that of the video signal waveform in accordance with the period of the scanning signal wiring, the resistance value of the common electrode must be reduced. There was no freedom. The entire common electrode has a large area that overlaps with the video signal wiring and a large overall capacitance, so that there is a problem that power consumption increases when driving. In order to avoid this, there are driving methods as shown in FIGS. 60 and 61, but there is a problem that the number of lead terminals for individually driving the common electrodes increases. The increase in the number of lead terminals causes an increase in the number of drive ICs, an increase in IC cost, and an increase in connection failure. By driving the in-plane switching mode liquid crystal by capacitive coupling horizontal line inversion driving as in the present invention, the ultra-large liquid crystal display device can be manufactured at low cost and with minimal increase in power consumption. Can be realized. In the case of the horizontal electric field method, unlike the conventional vertical electric field method, it can be formed larger than the capacitance formed by the scanning signal wiring and the liquid crystal drive electrode. For this reason, as shown in FIG. 41, the driving voltage amplitude V ^* of the scanning signal wiring can be reduced, so that the bias voltage applied to the TFT is also reduced, and the characteristic shift of the TFT can be reduced. This makes it possible to lower the formation temperature of the gate insulating film of a thin film transistor (TFT), thereby shortening the tact time when manufacturing a large-sized substrate, reducing the heat distortion and thermal shrinkage of the substrate, and reducing the manufacturing cost. Becomes

According to the means 7, the liquid crystal drive electrode can be formed simultaneously with the formation of the drain electrode of the thin film transistor (TFT). Since a dry etching method is used for processing the thin film silicon layer, miniaturization and processing accuracy can be greatly improved as compared with a conventional processing method using wet etching. FIG.
As shown in FIGS. 43, 44 and 57, by forming the liquid crystal driving electrode at the same time as the drain electrode, the problem of poor contact between the drain electrode and the liquid crystal driving electrode does not occur. The processing accuracy of the inter-electrode distance is also increased, so that the occurrence of luminance unevenness on the entire screen is reduced. By processing both the liquid crystal drive electrode and the common electrode by dry etching, the distance between the electrodes can be reduced, so that the liquid crystal drive voltage can be reduced and the response speed of the liquid crystal can be increased at the same time.

By using the means 7, 8, 9, 10, and 11, a horizontal electric field is applied within the pixel electrode (the liquid crystal drive electrode and a part of the common electrode) as shown in FIGS. In this case, the liquid crystal molecules undergo two kinds of rotational movements, left rotation and right rotation, inside the pixel electrode. In the conventional in-plane switching method shown in FIG. 51, since only one rotational movement is performed, when the pretilt angle is large, the characteristics of the viewing angle are partially separated as shown in FIG. Inside one pixel, left rotation and right rotation
When the liquid crystal molecules have the same rotational motion, even if the pre-tilt angle is large, there is no difference in the viewing angle characteristics. From this, in the in-plane switching mode liquid crystal display device using the structure of the present invention, since the pretilt angle is not restricted, the degree of freedom in selecting the alignment film and the liquid crystal is increased. Since the same materials used in the conventional vertical-field liquid crystal cell process, such as the sealing material, alignment film, and injection port sealing material used in the liquid crystal process can be used, production efficiency and investment efficiency can be increased. . Since the effective utilization rate of the polarizing plate is increased, the cost can be reduced. Gradation inversion can also be prevented.

By using the above means 12, 13, and 14, even if the transparent conductive film (ITO) is not provided on the entire surface of the color filter, static electricity is not charged up in the liquid crystal cell process, and adhesion of particles is reduced. The same as the present invention for the alignment film (10 ⁹ Ω · cm to 10 ¹¹ Ω · cm)
By increasing the resistance, the effect is increased. FIG.
5, FIG. 46, FIG. 47, FIG.
35 ▼, ３６36 ▼, ４２42 ▼, and ４０40 ▼ are prepared by using ITO or a stacked layer of metal or metal oxide and metal, metal silicide, or a semiconductor layer activated by impurity doping. Can completely prevent electrostatic damage. By using an overcoat layer of a high-resistance layer, an inexpensive electrodeposition color filter can be used for a horizontal electric field type liquid crystal, so that a liquid crystal panel with good flatness, no cell gap unevenness, and good contrast can be manufactured at low cost. It becomes possible.

By means of the means 15, the characteristics of the alignment film having a pretilt angle of about 3 to 6 degrees used in a conventional vertical electric field type liquid crystal display device can be changed to a pretilt angle of 1 degree or less. As shown in FIG. 50, by reducing the pretilt angle to 1 degree or less, the viewing angle characteristics of the in-plane switching mode liquid crystal cell can be significantly improved. By using the manufacturing method of the present invention, the alignment film conventionally used in the vertical electric field type liquid crystal cell process can be used without being changed, so that any one of the UV irradiation device, the ion implantation device, and the plasma surface treatment device can be used. A horizontal electric field type liquid crystal display device can be manufactured simply by introducing the table into a conventional liquid crystal cell production line. Production efficiency and investment efficiency can be improved. 54 and FIG.
As described in No. 5, by using the masking process, two or more types of pretilt angles can be set within one pixel, and thus the control of the viewing angle characteristics becomes free. Gradation inversion can also be prevented.

Even in the case of ultra-high-definition display (SXGA or UXGA) in which the frame frequency and the scanning signal wiring increase in the above means 16, 17, the scanning signal wiring address time can be doubled, so that the amorphous thin film transistor with slow electron transfer. However, it is possible to respond sufficiently. Even when the image is further enlarged, the length of the video signal wiring is reduced to と and the number of intersections between the scanning signal wiring and the video signal wiring is also reduced to で, so that the problem of the resistance of the video signal wiring is solved. . That is, since a metal material used conventionally can be used, there is no need to change the process. Since it can be made by the same process as conventional VGA and SVGA display devices, production efficiency and
Increases investment efficiency. According to the present invention, for ultra-high definition display,
Since dot inversion driving can be introduced and a low-voltage driving IC can be used, low-cost, high-quality images without display unevenness can be realized using amorphous silicon thin film transistors.

[0034]

【Example】

Embodiment 1 FIGS. 4 and 5 are a sectional view and a plan view of a unit pixel according to the present invention. The scanning signal wiring (gate electrode) was formed on the glass substrate (10). The scanning signal wiring is Al
Metals that can be subjected to a positive oxidation treatment, such as G, Mo, T
Pure metals or alloys such as i, W, and TaNb may be used. A two-layer structure, a three-layer structure, and the like of Cu having a low electric resistance value and the refractory metal are used in an ultra-large liquid crystal display device. After forming a gate insulating film on the scanning signal wiring, an amorphous silicon (a-Si) film (T) is formed to be an active active layer of the transistor. A video signal wiring and a drain electrode (D) are formed so as to overlap a part of the amorphous silicon. In the case of FIG. 4, the drain electrode (D) and the liquid crystal drive electrode are simultaneously formed of the same metal material. A protective insulating film made of an S: N film or an S: O ₂ film is formed so as to cover all of them. Next, a common electrode is formed. An alignment film made of polyimide was formed on the surface of an active matrix substrate in which the above unit pixels were arranged in a matrix, and the surface was subjected to a rubbing treatment. Counter substrate having an alignment film on the surface similarly rubbed on the surface.
1) and a liquid crystal composition containing rod-like liquid crystal molecules was sealed between the active matrix substrates, and polarizing plates (12) and (13) were arranged on the outer surfaces of the two substrates. FIG.
As shown in FIG. 5, there are two types of distances between the common electrode and the liquid crystal drive electrode, a and b. In FIG.
Are arranged symmetrically. 6, 8, and 10, the number of electrodes is increasing, and the distance between the electrodes is also a combination of a and b and a combination of a, b, and c. Tidy. Although the combination is considered so as to have a symmetrical arrangement as in FIG. 5, symmetry is not necessarily required. As shown in FIG. 58, the types of the inter-electrode distance between the common electrode and the liquid crystal drive electrode are also a, b, and c.
It is possible to introduce not only the three types but also more types.

In FIGS. 5, 6, 8, and 10, since the liquid crystal molecules are easily affected by the electric field from the video signal wiring, the common electrode is interposed between the liquid crystal molecules to arrange the video signal wiring. It is conventionally known that crosstalk in a direction along the direction can be reduced. In order to further improve the effect, it is preferable to set the inter-electrode distance a closest to the video signal wiring to the largest value. That is, a> b ≧
If the distance between the electrodes is arranged under the condition of c or a> c ≧ b, the crosstalk can be further reduced.

The problem of grayscale inversion occurs when the video signal voltage is too large. In particular, when the liquid crystal pretilt angle is large, grayscale inversion is more caused when tilting the liquid crystal alignment direction than in the front direction. It will be easier. To improve this,
There are also methods of giving two or more types of pretilt angles to the orientation direction and giving positive and negative pretilt angles,
The simplest is to set the pretilt angle to 0 (zero) degree. However, in the orientation method by rubbing treatment used in mass production, the pretilt angle cannot be completely set to zero degree, and a pretilt angle of about 0.5 degree is inevitably generated. As a method for preventing grayscale inversion when viewed from the front and tilt, in a horizontal electric field type liquid crystal display device, two or more types of values of the distance between electrodes within one pixel are set as in the present invention. Is particularly effective. When the liquid crystal is driven by normal 5V driving, the electrodes may be arranged in a combination of the distance between the electrodes at which the transmittance becomes maximum at 5V or less and the distance between the electrodes at which the transmittance becomes maximum at 5V or more. According to the characteristics shown in FIG. 3, in the case of 5V driving, it is preferable to set the distance between the electrodes to two types of 5 μm and 7.5 μm.

[Embodiment 2] FIGS. 13 and 64 show that the common electrode is connected to the video signal wiring in the same direction, and the common electrode is not connected to each other across the video signal wiring inside the effective display screen. It is a top view of the unit pixel in the case. FIG.
In this case, the connection part of the common electrode covers the upper part of the thin film transistor. In this case, even if the color filter of the opposite substrate does not have a black mask (BM), light enters the semiconductor layer (T) of the thin film transistor. Therefore, there is no increase in leakage current when the thin film transistor is turned off. FIGS. 18, 19, 20, 21, 22, and 23 are plan views in which these unit pixels are arranged in a stripe arrangement or a delta arrangement. In FIGS. 20, 22, and 23, the pixel electrode is parallel to the scanning signal wiring, but the connection direction of the common electrode is in the same direction as the video signal wiring. In order to realize such a planar arrangement, in the conventional cross-sectional structure as shown in FIG. 1, the scanning signal wiring and the common electrode are short-circuited.
4, a cross-sectional structure as shown in FIG. 57 is required. In these cross-sectional structures, the common electrode is formed above the substrate, and the protective insulating film and the upper insulating film below the common electrode (14)
In addition, an oxide insulating film or an organic insulating film having a small dielectric constant can be used. Therefore, it is possible to minimize an increase in load when driving the scanning signal wiring.

Third Embodiment FIGS. 14 and 15 show a second embodiment.
FIG. 10 is a plan view in which common electrodes connected in the same direction to the above-described video signal wiring are connected and separated into odd groups and even groups outside the effective display screen. FIG. 15 shows two common electrodes as one set. It is also possible to consider three as one set and connect and separate them into an odd group and an even group. FIG. 59 shows the odd group connection electrode 4
FIG. 4 is a plan view of a structural arrangement surrounding an entire effective display screen with 4 </ b> ▼ and even-number group connection electrodes 45. Each common connection electrode is connected to the scanning signal wiring and the video signal wiring by a non-linear resistance element for countermeasures against static electricity. With this structure, it is possible to remarkably reduce the problem of static electricity failure in the liquid crystal cell process. FIG. 40 shows a liquid crystal in which opposite-phase voltage signal waveforms are applied to a common electrode separated into an odd-numbered group and an even-numbered group in accordance with the period of a scanning signal, and opposing the odd-numbered and even-numbered common electrodes. FIG. 7 is a drive voltage waveform diagram for applying a video signal waveform having a phase opposite to that of the common electrode to the drive electrodes. FIGS. 16 and 17 are polar diagrams showing how a video signal voltage is written to the pixels having the structural arrangements of FIGS. 14 and 15 according to the present invention. It is divided into plus and minus based on the common electrode potential. Such a write drive method is called a dot inversion drive method.
With this drive method, horizontal crosstalk does not occur and good images can be obtained. By applying a voltage having a phase opposite to that of the video signal waveform to the common electrode, a large voltage can be applied to the liquid crystal phase, so that the amplitude of the video signal drive is smaller than that of the conventional dot inversion drive in which the potential of the common electrode is fixed. / 2 or less. As a result, an inexpensive IC driven at 5 V can be used, so that the cost can be reduced.

[Embodiment 4] FIGS. 24, 27 and 29 show
The additional capacitance formed by overlapping the liquid crystal driving electrode and the scanning signal wiring via the insulating film is more than the additional capacitance formed by overlapping the liquid crystal driving electrode and the common electrode via the insulating film. It is a top view of a unit pixel when (16) is larger. FIG. 30, FIG. 31, FIG. 32, FIG.
3, FIG. 34 and FIG. 35 are plan views in which these unit pixels are arranged in a stripe arrangement or a delta arrangement. In order to realize these planar structures with good yield, FIGS.
A cross-sectional structure as shown in FIGS. 6, 28, 42, 44, 57, and 65 is desirable. In order to further increase the additional capacitance formed by the liquid crystal drive electrode and the scanning signal wiring, FIG.
6 is preferably used. The overlap area between the liquid crystal drive electrode and the common electrode should be as small as possible.

Fifth Embodiment FIG. 41 is a timing chart of a scanning signal voltage waveform and a video signal voltage waveform for driving the in-plane switching mode liquid crystal display panel of the fourth embodiment. The scanning signal has a quaternary waveform. The common electrode potential is fixed at a potential close to the center value of the video signal waveform. A capacitive coupling drive system in which a scanning signal voltage Vr (-) or Vr (+) is applied to a liquid crystal composition through an additional capacitor formed by overlapping a liquid crystal driving electrode and a scanning signal line via an insulating film. Is used.
In a horizontal electric field type liquid crystal display device, the capacitance between pixel electrodes formed between a liquid crystal driving electrode and a common electrode via a liquid crystal composition is much smaller than in a conventional vertical electrode type. The effect of the additional capacity of
The voltage amplitude of r (-) and Vr (+) can be small. Therefore, the bias voltage applied to the scanning signal wiring (gate electrode) and the drain electrode of the thin film transistor is also reduced, so that the characteristic shift of the thin film transistor is also reduced. In the horizontal electric field method, since the intersection area between the liquid crystal driving electrode and the common electrode can be reduced, the horizontal line inversion driving method as in the present invention has an advantage that the horizontal stroke can be reduced.
Since the signal amplitude of the video signal wiring drive IC can also be reduced, an inexpensive 5V power supply IC can be used. This is effective in cost down.

[Embodiment 6] FIGS. 42, 43, 44, 57, 64, 65 and 24 show an example in which the thin film semiconductor layer is doped with an impurity, activated to reduce the resistance, and used as a liquid crystal drive electrode. It is sectional drawing and a top view of a unit pixel of an example. A scanning signal wiring (gate electrode) is formed on a glass substrate (10), a gate insulating film is formed so as to cover the scanning signal wiring (gate electrode), and then an amorphous silicon film is formed. A film BP is continuously formed.
At this time, the amorphous silicon film preferably has a thickness of about 300 ° to 700 °. A back channel protective edge film of about 2000 ° is sufficient. Except for the back channel protective insulating film {BP}, the surface of the amorphous silicon film etched with a hydrofluoric acid based etchant is exposed. About 10 ¹⁵ / cm ^{2 of} amorphous silicon is doped with phosphorus by ion shower doping based on PH ₃ gas without removing a positive resist. After that, an activation process is performed by an excimer laser. Instead of ion shower doping, phosphorus may be adsorbed on the surface of the amorphous silicon layer by plasma discharge treatment using PH ₃ gas, and then, when the silicon layer is melted by excimer laser, the phosphorus may be melt-diffused and activated. . A region irradiated with the laser by these processes becomes a polysilicon layer having a low resistance. After removing the positive resist, the next step is to simultaneously form the thin film transistor source and drain electrodes (32) and the liquid crystal drive electrode (S) by dry etching. The advantage of forming the liquid crystal drive electrode with a resistive silicon film is that fine pattern processing by dry etching is possible. It has been pointed out that the response speed of the in-plane switching type liquid crystal display device is slow. However, when the distance between the liquid crystal drive electrode and the common electrode is reduced to about 3 μm, the response speed also increases, and the moving image becomes higher. It is possible to cope with it. If it is up to about 3 μm, it can be processed by conventional wet etching, but the precision of line width control is not sufficient in wet etching. In this regard, in dry etching, reproducibility of processing accuracy has already been proven by IC. Polysilicon doped with impurities is a material that is easy to dry-etch, and is therefore the most suitable electrode material for large-screen liquid crystal display devices. Next, after forming the video signal wiring, it is completely covered with a protective insulating film. The common electrode is formed last, and the common electrode is also formed by using a material that can be processed by dry etching (a high melting point metal such as Mo, Ti, Nb, Ta and an alloy thereof, or a silicide compound thereof). A responsive in-plane switching liquid crystal display can be produced.

In FIG. 44, Mo is thinly formed on the drain electrode activated by doping impurities and laser-activated by sputtering or ion plating to further reduce the resistance, and MoS is formed by a surface reaction.
ix (molybdenum silicide). FIG. In FIG. 57, after an amorphous silicon film doped with an impurity is formed on the amorphous silicon film by a plasma CVD method, the impurity amorphous silicon layer is changed to a low-resistance impurity polysilicon layer by excimer laser. It is sectional drawing in the case. Molybdenum silicide is also one of the materials that is easy to dry-etch. M
Similar silicide is formed by sputtering not only o but also other refractory metals.

Seventh Embodiment FIGS. 52, 19, 21, 31, and 33 show a video signal wiring and a pixel electrode (a liquid crystal driving electrode and a part of a common electrode facing the liquid crystal driving electrode). Is a plan view in the case of a structure bent at an angle of ± 1 degree to ± 45 degrees with respect to the liquid crystal alignment direction. The dielectric anisotropy of the liquid crystal molecules is positive. As shown in FIG. 52, when a voltage is applied to the common electrode and the liquid crystal drive electrode (S) and an electric field is generated between the electrodes, the liquid crystal molecules rotate in two ways, left and right, at the bent portion. do. Since two kinds of rotational movements can be performed inside the unit pixel, the angle of the viewing angle characteristic does not occur regardless of the magnitude of the pretilt angle.

[Embodiment 8] FIGS. 52, 20, 22, 23, 32, 34, and 35 show that the scanning signal wiring and the pixel electrode are at ± 1 degrees with respect to the liquid crystal alignment direction. It is a top view in the case of the structure bent in the angle range of ± 45 degrees. The dielectric anisotropy of the liquid crystal molecules is positive. As in the case of the seventh embodiment, two kinds of liquid crystal molecule rotational movements, that is, left rotation and right rotation occur inside the unit pixel. The viewing angle characteristic is no longer generated regardless of the magnitude of the pretilt angle.

[Embodiment 9] FIGS. 53, 19, 21, 31, and 33 show that the video signal wiring and the pixel electrode are in the range of 45 ° to 135 ° except 90 ° with respect to the liquid crystal alignment direction. It is a top view in the case of a bent structure. The dielectric anisotropy of the liquid crystal molecules is negative. As shown in FIG. 53, when a voltage is applied to the common electrode and the liquid crystal drive electrode {S} and an electric field is generated between the electrodes, the liquid crystal molecules {22} are rotated leftward and rightward at the bent portion. Make a street rotation. Since two kinds of rotational movements are possible inside the unit pixel, the viewing angle characteristic is not generated regardless of the magnitude of the pretilt angle.

Embodiment 10 FIG. 53, FIG. 20, FIG.
FIG. 23, FIG. 32, FIG. 34 and FIG. 35 show that the scanning signal wiring and the pixel electrode
It is a top view in the case of the structure bent in the range of 135 degrees from 135 degrees. The dielectric anisotropy of the liquid crystal molecules is negative. As in the ninth embodiment, two kinds of liquid crystal molecule rotational movements, that is, left rotation and right rotation occur inside the unit pixel. Irrespective of the magnitude of the pretilt angle, the viewing angle characteristic is no longer generated.

Embodiment 7, Embodiment 8, Embodiment 9, Embodiment 1
In both cases, the rubbing treatment is performed so that the alignment of the liquid crystal molecules at the interface with the upper and lower substrates is substantially parallel to each other. The polarizing axis (optical axis) of the polarizing plate is arranged so as to be substantially perpendicular to both the upper and lower sides, and a normally black mode in which light does not pass from the pixel when no electric field is applied is used. The black mask used for these color filters is shown in FIG.
6. As shown in FIGS. 37, 38, and 39, at the same angle as the angle at which the video signal wiring and the scanning signal wiring are bent,
The feature is that a part of M is bent.

[Embodiment 11] FIGS. 45, 46 and 47 are sectional views of a color filter substrate of an in-plane switching mode liquid crystal display device. R, G, and B color filters are formed on the glass substrate (11). Next, an organic or inorganic high-resistance material (10 ⁹ Ω · cm to 10 ¹¹ Ω · cm) is formed for flattening and preventing electrostatic charging during the liquid crystal process. As shown in FIG. 56, in the lateral electric field method, the liquid crystal specific resistance is 10
There is an experimental result that the voltage holding ratio hardly decreases even when the voltage drops to about ⁹ Ω · cm. 45 and 46,
After forming the transparent ITO on the entire surface, R, G, B
Is formed. In this case,
The sum of the thickness of the high resistance material, the thickness of the color filter layer, and the thickness of the liquid crystal layer is required to be at least twice the distance between the liquid crystal drive electrode and the common electrode. If the total thickness is at least twice the distance between the electrodes, the electric field generated between the liquid crystal drive electrode and the common electrode is largely affected by the transparent conductive film (ITO) formed on the color filter side. Instead, a horizontal electric field can be generated in a direction parallel to the substrate.

[Embodiment 12] FIGS. 48 and 49 are cross-sectional views of a color filter substrate of an in-plane switching mode liquid crystal display device. R, G, and B color filters are formed on the glass substrate (11). In this state, various problems occur due to static electricity generated in the liquid crystal process. Therefore, a black mask (42) for removing static electricity is formed on the insulating film (41). When a resin black mask has already been formed as shown in FIG. 49, the transparent conductive electrode (40) may be formed in the same pattern as the black mask.

As in the eleventh and twelfth embodiments, if any conductive electrode is not formed on the color filter substrate side, the in-plane switching mode liquid crystal display device is affected by an electric field due to external static electricity. The big problem that cannot be done arises. As shown in FIG. 67, the transparent conductive film
There is also a method of forming ▼, but in this case, static electricity generated during the liquid crystal process in the highly insulating color filter layer or flattening film may not be able to be removed while trapped, which may cause poor alignment. ,not good.

[Thirteenth Embodiment] As shown in FIGS. 50 and 51, if the liquid crystal driving electrode and the common electrode are simply arranged in parallel with each other, the viewing angle characteristic is not larger than that of the liquid crystal when the pretilt angle of the liquid crystal is large. Will happen. The pretilt angle of the alignment film used in the conventional vertical electric field type liquid crystal display device is 3
Since the pretilt angle is as large as 7 ° to 7 °, the viewing angle characteristic is inevitably generated from one side. As a method of reducing the pretilt angle to 1 degree or less using the same alignment film, after baking the polyimide alignment film, UV irradiation treatment, He, Ne, Ar,
A method of ionizing a gas such as N ₂ or O ₂ to perform an ion plantation process has been developed. The same effect is obtained by plasma processing using an O ₂ gas using a reactive ion etching apparatus. By performing the rubbing alignment treatment after performing these treatments, the pretilt angle can be reduced to 1 degree or less, and the liquid crystal molecules can be uniaxially oriented. As shown in FIGS. 54 and 55, the UV treatment, the ion plantation treatment, and the plasma treatment can be limited to half of one pixel by using a photomask or a mask using a photoresist. By using this embodiment,
Even if the conventionally used alignment film is used for a liquid crystal display device of a horizontal electric field type, it does not occur more than a piece of viewing angle characteristics.

[Embodiment 14] FIG. 62 shows that the common electrode is connected to the video signal wiring in the same direction as in the second embodiment. Are not connected to each other. The common electrode is
The odd-numbered group and the even-numbered group are separated from each other, and the odd-numbered groups and the even-numbered groups are connected to each other outside the effective display screen. The difference from the second embodiment is that the video signal wiring is vertically divided into two at the center. I for driving the video signal wiring
The terminals to be joined to C are also divided into two upper and lower portions, respectively, and the number of terminals is doubled. SXGA for OA
When the number of scanning signal lines is greatly increased, as in the case of UXGA or UXGA, the structure of this embodiment reduces the resistance of the video signal wiring and reduces the number of intersections with the scanning signal lines by half. Since the coupling capacitance is reduced, the driving load of the video signal wiring is greatly reduced.

[Embodiment 15] FIG. 63 shows a drive voltage waveform for driving the in-plane switching mode liquid crystal display having the structure of the embodiment 14. Two scanning signal lines are simultaneously operated in the upper half region and the lower half region. Since the common electrode is connected in the upper half region and the lower half region, it is driven by a method in which the polarity is inverted in accordance with the driving cycle of the scanning signal wiring. The common electrode is divided into an odd group and an even group and connected to common connection electrodes (44) and (45), respectively. Opposite-phase voltages having different polarities are applied to the odd-numbered group and the even-numbered group in reverse according to the period of the scanning signal wiring. The video signal wiring is divided into an odd-numbered group and an even-numbered group, and opposite-phase signal voltages having polarities different from those of the corresponding odd-numbered group and even-numbered group common electrodes are applied. The odd-numbered group and the even-numbered group of video signal wirings are divided into an upper half and a lower half, and different video signals having the same phase are applied. This is a two-scan line simultaneous access dot inversion drive system. In the case of a display device for OA such as a computer, a frame memory is provided, so that image data for two scanning signal wirings may be simultaneously extracted from the frame memory. SXG
When the number of scanning signal lines and the frame frequency are greatly increased as in A and UXGA, the selection time of the scanning signal lines is 10 μsec if the conventional one-scan signal line access method is used.
c or less. If the time is less than 10 μsec, the driving capability of the amorphous silicon thin film transistor is approached and the video signal voltage cannot be accurately transmitted to the liquid crystal driving electrode. According to the two-scanning-line simultaneous access dot inversion driving method of the present invention, the selection time is twice as long as that of the conventional method, so that a sufficient video signal writing time can be shortened even with an amorphous silicon thin film transistor. The degree of freedom of the material for the video signal wiring is greatly increased.

[0054]

According to the present invention, firstly, it is possible to obtain an image having good viewing angle characteristics without reversing the gradation of the image. Secondly, an inexpensive 5 VIC can be used for the video signal driving IC and a conventional liquid crystal member can be used, so that a highly reliable image display device with low cost can be provided. Third, a horizontal electric field liquid crystal display device capable of operating at high speed and capable of responding to moving images without being affected by static electricity from the outside can be manufactured. Fourth, an ultra-high-definition, large-screen liquid crystal display device can be realized using amorphous silicon thin film transistors.

[Brief description of the drawings]

FIG. 1 is a sectional view of a unit pixel of a conventional in-plane switching mode liquid crystal display device.

FIG. 2 is a plan view of a unit pixel of a conventional in-plane switching mode liquid crystal display device.

FIG. 3 is a graph showing transmittance and driving voltage characteristics depending on a distance between electrodes of a lateral electric field liquid crystal display device.

FIG. 4 is a sectional view of a unit pixel of the in-plane switching mode liquid crystal display device of the present invention.

FIG. 5 is a plan view of a unit pixel of the in-plane switching mode liquid crystal display device of the present invention.

FIG. 6 is a plan view of a unit pixel of the in-plane switching mode liquid crystal display device of the present invention.

FIG. 7 is a layout combination diagram of the distance between electrodes in the in-plane switching method according to the present invention.

FIG. 8 is a plan view of a unit pixel of the in-plane switching mode liquid crystal display device of the present invention.

FIG. 9 is a layout combination diagram of the distance between electrodes in the in-plane switching method according to the present invention.

FIG. 10 is a plan view of a unit pixel of the in-plane switching mode liquid crystal display device of the present invention.

FIG. 11 is a layout combination diagram of the distance between electrodes in the in-plane switching method according to the present invention.

FIG. 12 is a cross-sectional view of a unit pixel of the in-plane switching mode liquid crystal display device of the present invention.

FIG. 13 is a plan view of a unit pixel of the in-plane switching mode liquid crystal display device of the present invention.

FIG. 14 is a plan view of a pixel array of the in-plane switching mode liquid crystal display device of the present invention.

FIG. 15 is a plan view of a pixel array of the in-plane switching mode liquid crystal display device of the present invention.

FIG. 16 is a plan view of a polarity arrangement of video signal data of pixels of the in-plane switching display device of the present invention.

FIG. 17 is a plan view of the polarity arrangement of video signal data of pixels of the in-plane switching display device of the present invention.

FIG. 18 is a plan view of a lateral electric field type pixel array of the present invention.

FIG. 19 is a plan view of a lateral electric field type pixel array of the present invention.

FIG. 20 is a plan view of a lateral electric field type pixel array of the present invention.

FIG. 21 is a plan view of a horizontal electric field type pixel array of the present invention.

FIG. 22 is a plan view of a lateral electric field type pixel array of the present invention.

FIG. 23 is a plan view of a lateral electric field type pixel array of the present invention.

FIG. 24 is a plan view of a unit pixel of the in-plane switching mode liquid crystal display device of the present invention.

FIG. 25 is a plan view of a polarity arrangement of video signal data of pixels of the in-plane switching display device of the present invention.

FIG. 26 is a sectional view of a unit pixel of the in-plane switching mode liquid crystal display device of the present invention.

FIG. 27 is a plan view of a unit pixel of the in-plane switching mode liquid crystal display device of the present invention.

FIG. 28 is a sectional view of a unit pixel of the in-plane switching mode liquid crystal display device according to the present invention.

FIG. 29 is a plan view of a unit pixel of the in-plane switching mode liquid crystal display device of the present invention.

FIG. 30 is a plan view of a horizontal electric field type pixel array of the present invention.

FIG. 31 is a plan view of a lateral electric field type pixel array of the present invention.

FIG. 32 is a plan view of a lateral electric field type pixel array of the present invention.

FIG. 33 is a plan view of a lateral electric field type pixel array of the present invention.

FIG. 34 is a plan view of a lateral electric field type pixel array of the present invention.

FIG. 35 is a plan view of a lateral electric field type pixel array of the present invention.

FIG. 36 is an arrangement plan view of a color filter black mask (BM) of the in-plane switching mode liquid crystal display device of the present invention.

FIG. 37 is an arrangement plan view of a color filter black mask (BM) of the in-plane switching mode liquid crystal display device of the present invention.

FIG. 38 is an arrangement plan view of a color filter black mask (BM) of the in-plane switching mode liquid crystal display device of the present invention.

FIG. 39 is an arrangement plan view of a color filter black mask (BM) of the in-plane switching mode liquid crystal display device of the present invention.

FIG. 40 shows a driving voltage waveform of the in-plane switching mode liquid crystal display device of the present invention.

FIG. 41 shows a driving voltage waveform of the in-plane switching mode liquid crystal display device of the present invention.

FIG. 42 is a sectional view of a unit pixel of the in-plane switching mode liquid crystal display device of the present invention.

FIG. 43 is a plan view of a unit pixel of the in-plane switching mode liquid crystal display device of the present invention.

FIG. 44 is a sectional view of a unit pixel of the in-plane switching mode liquid crystal display device of the present invention.

FIG. 45 is a cross-sectional view of a color filter for an in-plane switching mode liquid crystal display device according to the present invention.

FIG. 46 is a cross-sectional view of a color filter for an in-plane switching mode liquid crystal display device according to the present invention.

FIG. 47 is a cross-sectional view of a color filter for an in-plane switching mode liquid crystal display device according to the present invention.

FIG. 48 is a cross-sectional view of a color filter for an in-plane switching mode liquid crystal display device according to the present invention.

FIG. 49 is a cross-sectional view of a color filter for an in-plane switching mode liquid crystal display device according to the present invention.

FIG. 50 is a distribution diagram of pretilt angles and viewing angle characteristics of liquid crystal molecules of an in-plane switching mode liquid crystal display device.

FIG. 51 is an orientation view of a positive dielectric anisotropic liquid crystal in a lateral electric field type pixel electrode.

FIG. 52 is a view showing an orientation direction of a positive dielectric anisotropic liquid crystal in a bent pixel electrode of an in-plane switching method according to the present invention.

FIG. 53 is a view showing an orientation direction of a negative dielectric anisotropy liquid crystal in a bent pixel electrode of an in-plane switching method according to the present invention.

FIG. 54 is a plan view of a pixel array obtained by subjecting a polyimide alignment film of the in-plane switching display according to the present invention to a local UV irradiation process;

FIG. 55 is a plan view of a pixel array obtained by subjecting a polyimide alignment film of the in-plane switching mode display device to local UV irradiation processing.

FIG. 56 is a characteristic diagram of a liquid crystal specific resistance value and a voltage holding ratio of an in-plane switching mode liquid crystal display device.

FIG. 57 is a sectional view of a unit pixel of the in-plane switching mode liquid crystal display device of the present invention.

FIG. 58 is a plan view of a unit pixel of the in-plane switching mode liquid crystal display device of the present invention.

FIG. 59 is a plan view showing the arrangement of pixels and connection electrodes for driving a common electrode in the in-plane switching mode liquid crystal display device of the present invention.

FIG. 60 is a plan view showing the arrangement of pixels and a terminal portion for driving a common electrode of an in-plane switching mode liquid crystal display device.

FIG. 61 shows a driving voltage waveform of an in-plane switching mode liquid crystal display device.

FIG. 62 is a plan view showing the arrangement of pixels and connection electrodes for driving a common electrode in the in-plane switching mode liquid crystal display device of the present invention.

FIG. 63 shows a driving voltage waveform of the in-plane switching mode liquid crystal display device of the present invention.

FIG. 64 is a plan view of a unit pixel of the in-plane switching mode liquid crystal display device of the present invention.

FIG. 65 is a sectional view of a unit pixel of the in-plane switching mode liquid crystal display device of the present invention.

FIG. 66 is a cross-sectional view of a unit pixel storage capacitor forming portion of the in-plane switching mode liquid crystal display device of the present invention.

FIG. 67 is a cross-sectional view of a conventional color filter for an in-plane switching mode liquid crystal display device.

[Explanation of symbols]

1-scanning signal wiring 2-video signal wiring 3-common electrode 4-liquid crystal drive electrode 5-gate insulating film 6-protective insulating film 7-liquid crystal alignment film (TFT substrate side) 8-liquid crystal alignment film (opposite substrate side ... color 9-Liquid crystal molecules (positive dielectric anisotropy liquid crystal) 10-TFT side glass substrate 11-Opposite glass substrate 12-TFT substrate side polarizing plate 13-Opposite substrate side polarizing plate 14-Upper insulating film 15- Drain through hole 16-Storage capacitance forming area 17-Anodized film 18-Common electrode (center line) formed simultaneously with the same material as scanning signal wiring 19-Common electrode through hole 20-Common electrode through common electrode (center) Lines and,
Contacting pixel electrode 21-Black mask of color filter 22-Liquid crystal molecule (negative dielectric anisotropy liquid crystal) 23-Scan signal wiring drive waveform 24-Odd number video signal waveform 25-Even number video signal waveform 26- Odd-numbered common electrode drive waveform 27-even-numbered common electrode drive waveform 28- (n-1) -th scan signal wiring drive waveform 29-n-th scan signal wiring drive waveform 30-video signal waveform 31-common electrode potential 32-impurity ion Polysi drain electrode activated after implantation and reduced in resistance 33-polys activated after implantation of impurity ions
i-Drain electrode with metal silicide formed on semiconductor layer 34-Semiconductor drain electrode doped with impurities on non-doped amorphous silicon layer 35-Black mask with anti-reflection film 36-Transparent conductive film layer 37-Color filter layer 38 -High resistance flattening film 39-Resin black mask 40-Black mask electrode with anti-reflection film for antistatic 41-Flattening insulating film 42-Black mask electrode for antistatic 43-Electrostatic countermeasure element 44-Odd number common electrode drive Connection electrode 45-Connection electrode for driving even-numbered common electrode 46-Connection electrode for preventing static electricity 47-Nth common electrode drive waveform 48-Upper half area nth scan signal wiring drive waveform 49-Lower half area nth scan signal wiring Drive waveform 50-Upper half area M-th video signal waveform 51-Lower half area M-th video signal waveform 52-M common Electrode drive waveform 53-Upper half area video signal wiring 54-Lower half area video signal wiring 55-Upper half area scanning signal wiring 56-Lower half area scanning signal wiring 57-Additional capacitance contact through hole A-P type liquid crystal molecule alignment The angle at which the direction intersects with the pixel electrode (common electrode and liquid crystal drive electrode) The angle at which the alignment direction of the BN type liquid crystal molecules intersects with the pixel electrode (common electrode and liquid crystal drive electrode) BP—back channel side protective insulating film P— The orientation direction of liquid crystal molecules and the polarization axis direction (optical axis) of the polarizing plate Q-The polarization axis direction (optical axis) of the polarizing plate D-Transistor / drain electrode formed simultaneously with video signal wiring S-Laser after ion implantation of impurities Poly-si liquid crystal drive electrode activated and reduced in resistance by annealing T-semiconductor layer U-alignment film irradiated with UV and rubbed to reduce pretilt Region J-Liquid crystal drive electrode with metal silicide formed on impurity semiconductor layer poly-si-formed by laser annealing after ion implantation of impurity K-Semiconductor liquid crystal drive electrode with impurity doped on non-doped amorphous silicon layer a- The distance between the common electrode and the liquid crystal drive electrode b-The distance between the common electrode and the liquid crystal drive electrode c-The distance between the common electrode and the liquid crystal drive electrode sc-The additional capacitance electrode for liquid crystal drive formed simultaneously with the video signal wiring

Claims (17)

[Claims] 1. A thin film transistor formed on a substrate at each intersection of a scanning signal wiring, a video signal wiring, the scanning signal wiring and the video signal wiring, a liquid crystal drive electrode connected to the thin film transistor, and at least a part thereof. An active matrix substrate having a common electrode formed to face the liquid crystal driving electrode, a counter substrate facing the active matrix substrate, and a liquid crystal layer sandwiched between the active matrix substrate and the counter substrate. Wherein the distance between the liquid crystal drive electrode and the common electrode is not uniform within one pixel but is formed by a combination of two or more types of electrode distance. Display device. 2. The method according to claim 1, wherein two or more types of electrode distances are provided between the liquid crystal drive electrode and the common electrode within one pixel, and different electrode distances are symmetrical at the center of the pixel. Alternatively, a liquid crystal display device, which is vertically symmetrically arranged. 3. At least one of a scanning signal wiring and a video signal wiring on a substrate, a thin film transistor formed at each intersection of the scanning signal wiring and the video signal wiring, and a liquid crystal driving electrode connected to the thin film transistor. An active matrix substrate having a common electrode formed so as to face the liquid crystal driving electrode, a counter substrate facing the active matrix substrate, and a liquid crystal layer sandwiched between the active matrix substrate and the counter substrate. A liquid crystal display device according to claim 1, wherein the common electrode is connected to the video signal wiring in that direction, and the common electrode is not connected to each other across the video signal wiring inside the effective display screen. 4. The method according to claim 3, wherein the common electrode connected to the video signal wiring in the direction is divided into an odd group and an even group, and the odd group and the even group are synchronized with the period of the scanning signal. To apply a voltage waveform having a phase opposite to that of the common electrode, and apply a video signal waveform having a phase opposite to that of the common electrode to the liquid crystal drive electrodes facing the common electrodes of the odd and even groups. A liquid crystal display device characterized by the above-mentioned. 5. At least one of a scanning signal wiring and a video signal wiring on a substrate, a thin film transistor formed at each intersection of the scanning signal wiring and the video signal wiring, and a liquid crystal driving electrode connected to the thin film transistor. An active matrix substrate having a common electrode formed so as to face the liquid crystal drive electrode, a counter substrate facing the active matrix substrate, a liquid crystal layer sandwiched between the active matrix substrate and the counter substrate, In the liquid crystal display device, the liquid crystal drive electrode and the scanning signal wiring are disposed between the liquid crystal drive electrode and the scanning signal wiring via the insulating film, rather than the additional capacitance formed by overlapping the liquid crystal drive electrode and the common electrode via the insulating film. A liquid crystal display device characterized in that the additional capacitance formed by superimposing the liquid crystal and the liquid crystal is larger. 6. A liquid crystal driving electrode according to claim 5, wherein the common electrode potential is fixed, and the liquid crystal drive electrode is supplied with a positive or negative video signal voltage with respect to the common electrode potential in accordance with the period of the scanning signal. , And a voltage signal waveform is also applied to a scanning signal line superimposed on a liquid crystal driving electrode via an insulating film so that a voltage applied to the liquid crystal composition layer is further increased. Liquid crystal display device using the system. 7. A thin film transistor formed on a substrate at each intersection of a scanning signal wiring, a video signal wiring, the scanning signal wiring and the video signal wiring, and at least one liquid crystal driving electrode connected to the thin film transistor. An active matrix substrate having a common electrode formed to face the liquid crystal driving electrode, a counter substrate facing the active matrix substrate, the active matrix substrate, and a liquid crystal layer sandwiched by the counter substrate. A liquid crystal display device comprising: a thin film semiconductor layer doped with an impurity, activated to reduce the resistance, and used for a liquid crystal drive electrode. 8. The liquid crystal display device according to claim 7, wherein the video signal wiring and the pixel electrode (the liquid crystal driving electrode and a part of the common electrode facing the liquid crystal driving electrode) are arranged with respect to the liquid crystal alignment direction. A liquid crystal display device characterized by a bent structural arrangement in an angle range of 1 degree to ± 45 degrees. 9. The structure according to claim 7, wherein the scanning signal wiring and the pixel electrode are bent at an angle of ± 1 ° to ± 45 ° with respect to the liquid crystal alignment direction. Liquid crystal display device. 10. The liquid crystal display device according to claim 7, wherein the video signal wiring and the pixel electrode are positioned at 90 degrees with respect to a liquid crystal alignment direction.
A liquid crystal display device characterized by a bent structural arrangement in a range of 45 degrees to 135 degrees except for the degree. 11. The liquid crystal display device according to claim 7, wherein the scanning signal wiring and the pixel electrode are arranged at a distance of 9 with respect to a liquid crystal alignment direction.
A liquid crystal display device characterized by a bent structural arrangement in a range from 45 degrees to 135 degrees except for 0 degree. 12. A thin film transistor formed at each intersection of a scanning signal wiring, a video signal wiring, the scanning signal wiring, and the video signal wiring on a substrate, and at least one liquid crystal driving electrode connected to the thin film transistor. An active matrix substrate having a common electrode formed so as to face the liquid crystal driving electrode, a counter substrate facing the active matrix substrate, and a liquid crystal layer sandwiched between the active matrix substrate and the counter substrate. In the liquid crystal display device, a high resistance material (10 ⁹ Ω · cm to 10 ¹¹ Ω · cm) is used for an overcoat layer covering the color filter layer formed on the counter substrate. Display device. 13. The method according to claim 12, wherein the total thickness of the color filter layer, the overcoat layer, and the liquid crystal layer is at least twice the distance between the liquid crystal drive electrode and the common electrode. A liquid crystal display device characterized by the above-mentioned. 14. An insulating film is used as an overcoat layer overlying the color filter layer formed on the counter substrate, and a conductive or semiconductor film is formed on the overcoat insulating film at the boundary between the R, G, and B color filters. A liquid crystal display device, wherein the electrodes are formed as black masks. 15. A thin film transistor formed on a substrate at each intersection of a scanning signal wiring, a video signal wiring, the scanning signal wiring and the video signal wiring, a liquid crystal driving electrode connected to the thin film transistor, and at least a part thereof. A liquid crystal display comprising: an active matrix substrate having a common electrode formed to face the liquid crystal drive electrode; a counter substrate facing the active matrix substrate; and a liquid crystal layer sandwiched between the active matrix substrate and the counter substrate. In the process of manufacturing the device, an alignment film for aligning the liquid crystal is applied, and after firing, the alignment film is subjected to UV irradiation treatment or H
A manufacturing process characterized in that a liquid crystal pretilt angle is reduced to 1 degree or less by performing rubbing treatment after performing ion implantation treatment or plasma treatment of e, Ne, Ar, N ₂ , O _{2, and the} like. 16. A device according to claim 3, wherein the common electrode connected in the direction to the video signal wiring is separated into an odd group and an even group, and the video signal wiring is vertically divided into two at the center of the screen. A liquid crystal display device characterized in that: 17. The scanning signal wiring according to claim 16, wherein the scanning signal wiring divided into two groups at the center of the screen is divided into an upper group and a lower group at the same time, and the upper and lower video signal wirings are provided with an odd group. By applying video signal voltage waveforms of opposite phase to the even group and the odd group and even group of common electrodes, the voltage waveform of the video signal wiring and the common electrode driving waveform of opposite phase are applied to the screen simultaneously. A liquid crystal display device characterized in that different video signals are written in two upper and lower horizontal lines.