JPH1046345A - 加熱処理装置 - Google Patents

加熱処理装置

Info

Publication number
JPH1046345A
JPH1046345A JP8203849A JP20384996A JPH1046345A JP H1046345 A JPH1046345 A JP H1046345A JP 8203849 A JP8203849 A JP 8203849A JP 20384996 A JP20384996 A JP 20384996A JP H1046345 A JPH1046345 A JP H1046345A
Authority
JP
Japan
Prior art keywords
chamber
heat treatment
transfer
preheating
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP8203849A
Other languages
English (en)
Japanese (ja)
Other versions
JPH1046345A5 (enExample
Inventor
Soichi Naganuma
壮一 長沼
Toshimichi Ishida
敏道 石田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP8203849A priority Critical patent/JPH1046345A/ja
Publication of JPH1046345A publication Critical patent/JPH1046345A/ja
Publication of JPH1046345A5 publication Critical patent/JPH1046345A5/ja
Withdrawn legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP8203849A 1996-08-01 1996-08-01 加熱処理装置 Withdrawn JPH1046345A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8203849A JPH1046345A (ja) 1996-08-01 1996-08-01 加熱処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8203849A JPH1046345A (ja) 1996-08-01 1996-08-01 加熱処理装置

Publications (2)

Publication Number Publication Date
JPH1046345A true JPH1046345A (ja) 1998-02-17
JPH1046345A5 JPH1046345A5 (enExample) 2004-08-12

Family

ID=16480722

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8203849A Withdrawn JPH1046345A (ja) 1996-08-01 1996-08-01 加熱処理装置

Country Status (1)

Country Link
JP (1) JPH1046345A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010534940A (ja) * 2007-07-24 2010-11-11 アプライド マテリアルズ インコーポレイテッド 薄膜ソーラー製造中に基板温度を制御する装置及び方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010534940A (ja) * 2007-07-24 2010-11-11 アプライド マテリアルズ インコーポレイテッド 薄膜ソーラー製造中に基板温度を制御する装置及び方法

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