JPH1043654A - Liquid agent coating apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a liquid agent coating apparatus capable of automatically altering the parameter exerting effect on the state of a coated liquid agent pattern so as to obtain a desired value by measuring the line width, film thickness and cross-sectional area of the coated liquid pattern and the positions of the coating start point and final point of the pattern and the cross-sectional area thereof. SOLUTION: The optimum coating conditions are calculated from the data measured by a measuring means consisting of a slit light source 1, a camera 2, a luminare 3 and a half mirror 4 by an operational processing means 5. The liquid agent emitting control means 6 emits the liquid agent charged in the nozzle 7 on the basis of the set coating conditions. A table 10 is driven by a table driving mechanism 9 to draw and apply liquid agent patterns on the material 11 to be coated placed on the table 10.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid material applying apparatus for applying a liquid material onto an object to be coated such as a liquid crystal panel substrate from a needle at a tip of a nozzle. The present invention relates to a liquid application apparatus for directly applying and drawing on a liquid.

[0002]

2. Description of the Related Art A liquid application device is a device for discharging a viscous liquid material having fluidity from a needle and applying an arbitrary liquid material pattern on an object to be coated. For example, a seal material for bonding a liquid crystal panel is formed. Used for

As shown in FIG. 13, a conventional liquid application apparatus discharges a liquid filled in a nozzle 51 from a needle 52 onto an object 54 mounted on a table 53 while the needle 52 is covered with the needle 52. An arbitrary liquid pattern 55 is applied onto the object 54 by moving the table 53 relative to the needle 52 while keeping the distance to the object 54 constant. The table 53 has a structure capable of moving in the X and Y directions.

When it is necessary to form a plurality of liquid material patterns 55 having the same shape on the same object 54,
The method of applying the liquid agent with the book nozzle 51 requires a considerable amount of time and is not practical. For this reason, as shown in FIG. 14, a method of using a plurality of nozzles 51 to reduce the application time of the liquid agent has been proposed.

[0005] In the method using a plurality of nozzles 51 shown in FIG. 14, the liquid medicine filled in the nozzles 51 is discharged from the needles 52 onto the object 54 placed on a table 53 while the needles 52 By keeping the distance to the object 54 constant and moving the table 53 relatively to the needle 52, an arbitrary liquid material pattern 55 is applied onto the object 54. Has a structure capable of moving in the X and Y directions.

[0006]

A problem with a liquid coating apparatus using a plurality of nozzles is that the dispersion of the liquid between the nozzles and the object to be coated may cause the liquid coating apparatus to be in an ideal liquid coating state. The thickness of the pattern varies.

Further, even if the thickness of the applied liquid pattern is appropriate, the line width and cross-sectional area of the applied liquid pattern vary due to the processing tolerance of the needle and the influence of the viscosity and the thixo ratio of the liquid. .

Further, the line width of the applied liquid agent pattern,
Even if the film thickness and cross-sectional area are appropriate, the following problems occur at the application start point and end point of the liquid agent due to the processing tolerance of the needle and the influence of the viscosity and thixo ratio of the liquid agent.

At the starting point, the liquid material adhering to the tip of each needle is suctioned with a negative pressure and then the liquid material is applied. If the suction by the negative pressure is insufficient,
If the cross-sectional area of the applied liquid agent pattern becomes large and the suction by the negative pressure is performed excessively, the ejection of the liquid agent is delayed, and the liquid agent pattern becomes short.

At the end point, if the timing of finishing the application of the liquid material is early, the liquid material pattern becomes short, and if the timing of finishing the application of the liquid material is late, the cross-sectional area of the liquid material pattern becomes large.

As described above, when the line width, the film thickness, the cross-sectional area of the liquid material pattern applied between the nozzles and the positions and the cross-sectional areas of the application start point and the end point are varied, the subsequent steps are adversely affected. It will be.

As a method of correcting the above-mentioned problem, the setting of parameters that affect the state of the applied liquid material pattern is determined by trial and error based on human intuition and experience based on measurement results using a cross-sectional area measuring device or the like. This requires time and effort, and requires a certain level of proficiency for the operator.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned conventional problems, and has been made in consideration of the line width, film thickness, and cross-sectional area of the applied liquid agent pattern, and the positions and cross-sectional areas of the coating start and end points. It is an object of the present invention to provide a liquid coating apparatus which can automatically change parameters affecting the state of a liquid pattern applied so that a desired value can be obtained by measurement.

[0014]

According to a first aspect of the present invention, there is provided a liquid material applying apparatus which applies a liquid material onto a body to be coated from a needle at a tip end portion of a nozzle. In a liquid material coating apparatus for forming a pattern, a measuring means for measuring the liquid material pattern applied on the object to be coated, and an optimum coating condition are calculated based on data obtained from the measuring means, and set as the coating condition. Arithmetic processing means.

According to a second aspect of the present invention, there is provided a liquid coating apparatus.
The liquid coating apparatus according to the above, characterized in that the measurement of the liquid pattern by the measuring unit and the calculation and setting of the optimum coating conditions by the arithmetic processing unit are repeated until a liquid pattern in an optimum coating state is obtained. I have.

According to a third aspect of the present invention, there is provided a liquid material applying apparatus.
In the liquid material applying apparatus described above, the liquid material pattern is applied under a plurality of application conditions, each of the liquid material patterns is measured by the measuring means, and a liquid material pattern in an optimal application state is selected by the arithmetic processing means. I have.

According to the liquid coating apparatus of the present invention, in the liquid coating apparatus for applying a liquid preparation from the needle at the tip of the nozzle onto the object to form an arbitrary liquid preparation pattern, Automatic setting of the optimum coating condition by having a measuring means for measuring the liquid material pattern and an arithmetic processing means for calculating the optimum coating condition based on the data obtained from the measuring means and setting the coating condition. be able to.

Further, when a plurality of nozzles are provided, the application conditions for each nozzle can be automatically set to different conditions for each nozzle, so that a plurality of liquid agent patterns having the same shape are simultaneously formed. be able to.

Further, the measurement of the liquid material pattern by the measuring means and the calculation and setting of the optimum application condition by the arithmetic processing means are repeated until a liquid material pattern in an optimum application state is obtained, thereby allowing the operator to perform the measurement. It is possible to obtain an optimal liquid application pattern regardless of the proficiency.

Further, the liquid material pattern is applied under a plurality of application conditions, each of the liquid material patterns is measured by the measuring means, and the optimally applied liquid material pattern is selected by the arithmetic processing means. It is possible to obtain an optimal liquid application pattern regardless of the proficiency.

[0021]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described with reference to FIGS.

Referring to FIG. 1, the configuration of the liquid agent application device of the present invention will be described. FIG. 1 is a conceptual view showing a liquid agent application device according to the present invention.

From the data measured by the measuring means consisting of the slit light source 1, the camera 2, the illumination 3 and the half mirror 4, the optimum processing conditions are calculated by the processing means 5 and the processing means 5 Set application conditions.

The liquid material discharge control means 6 discharges the liquid material filled in the nozzle 7 from the needle 8 based on the set application conditions. Then, the table 10 is driven by the table driving mechanism 9, and a liquid material pattern 12 is applied by drawing on an object 11 such as a liquid crystal panel substrate placed on the table 10.

Next, the measuring means will be described. The line width, the film thickness, and the cross-sectional area of the liquid material pattern 12 are obtained by capturing a light-cut image of the liquid material pattern 12 with the camera 2 using the slit light source 1. Instead of the camera 2, the line width, the film thickness, and the cross-sectional area of the liquid material pattern 12 may be obtained by using an optical distance meter.

With respect to the position of the liquid material pattern 12, an image is captured by the camera 2 using the illumination 3 and the half mirror 4, and the position of the liquid material pattern 12 is obtained. Camera 2
The measurement of the line width, the film thickness, and the cross-sectional area of the liquid material pattern 12 and the measurement of the position may be shared, or may be provided separately. As the camera 2, the illumination 3 and the half mirror 4, a coaxial epi-illuminated camera with illumination may be used.

The optimum processing conditions are calculated and set by the processing means 5 from the data measured by the measuring means as described above. The following parameters which influence the coating state of the liquid material pattern 12 are as follows. No.

The line width, film thickness, and cross-sectional area of the liquid material pattern 12 include the distance between the needle 8 and the object 11 and the liquid material discharge pressure. There is a needle-applied liquid material suction pressure and a needle-applied liquid material suction time, and there is an application end timing for the position and cross-sectional area of the application end point.

These parameters are not independent of each other, and if one of the parameters is changed, they affect each other. Therefore, when setting the coating conditions, the order of setting is important. In one step, parameters that affect the line width, film thickness and cross-sectional area of the liquid material pattern 12 are set, in the second step parameters that affect the coating end point are set, and in the third step parameters that affect the coating start point are set. It is necessary to make settings through three steps of doing so.

(Embodiment 1) The relationship between the application state of the liquid material pattern 12 in the first stage and each parameter will be described.
This will be described with reference to FIGS. FIG. 2 is a plan view for explaining an applied state of the liquid material pattern 12 in the first stage, and FIG.
FIG. 3 is a sectional view taken along line AA in FIG. 2.

The parameters affecting the line width, film thickness and cross-sectional area of the liquid material pattern 12 are determined by the needle 8 and the object 11 to be coated.
The relative speed between the table 10 and the needle 8, that is, the application speed, is usually fixed in production, and is excluded from the parameters.

When each parameter has an optimum value, the liquid material pattern 12 is applied as shown in FIG. When the distance between the needle 8 and the object to be coated 11 is long, the film thickness of the liquid material pattern 12 becomes large as shown by b, and when the distance between the needle 8 and the object to be coated 11 is short, the liquid material pattern 12 is formed as shown by c. The film thickness becomes thin. Even when the distance between the needle 8 and the object to be coated 11 is an appropriate value, when the liquid discharge pressure is low, the line width becomes thin as shown by d, and when the liquid discharge pressure is high, the line width becomes thick as shown by e. Become.

The method for setting the optimum coating conditions in the first stage will be described with reference to FIG. FIG. 4 is a flowchart for explaining a method for setting the optimum application conditions in the first embodiment in the first embodiment. S in the figure means a step.

The distance between the needle 8 and the object 11 and the liquid ejection pressure are initialized (step S101), and the liquid material pattern 12 is applied on the object 11 (step S10).
2). “Initialization” refers to setting to a value that is considered to be the optimum application condition.

When the line width of the liquid material pattern 12 is equal to the outer diameter of the needle 8, it is known that the thickness of the liquid material pattern 12 accurately indicates the distance between the needle 8 and the object 11. Then, the line width of the liquid material pattern 12 is measured (step S103).

The line width of the liquid material pattern 12 is measured at a portion where a stable liquid material pattern 12 can be obtained other than the coating start point and the end point, for example, a coating middle point.

The optimum value of the line width of the liquid material pattern 12 set in advance by the arithmetic processing means 5 and the step S
The deviation from the line width of the liquid material pattern 12 measured in 103 is determined (step S104). If there is a deviation, the liquid processing pressure is corrected by the arithmetic processing means 5 using automatic control theory (step S105). It returns to S102.

When the line width of the liquid material pattern 12 is larger than the optimum value, the liquid material discharge pressure is set low and the liquid material pattern 12
Is smaller than the optimum value, the liquid ejection pressure is set high.

Since the liquid discharge pressure cannot be corrected in real time, the liquid application, the line width measurement of the liquid pattern 12 and the liquid discharge pressure correction are repeated, and the line width of the liquid pattern 12 becomes larger than the outer diameter of the needle 8. Steps S102 to S105 are performed until ± 10 μm is satisfied.

In step S104, step S1
If the line width of the liquid material pattern 12 applied in 02 satisfies ± 10 μm with respect to the outer diameter of the needle 8, the liquid material pattern 12 for correcting the film thickness of the liquid material pattern 12 is applied under the same conditions (step S106). The thickness of the liquid material pattern 12 is measured by the measuring means (step S107).

The optimum value of the film thickness of the liquid material pattern 12 set in advance by the arithmetic processing means 5 and the step S
A deviation from the film thickness of the liquid material pattern 12 measured in 107 is obtained (Step S108). If there is a deviation, the distance between the needle 8 and the object 11 is corrected by the arithmetic processing means 5 (Step S109). It returns to step S106.

When the film thickness of the liquid material pattern 12 is larger than the optimum value, the distance between the needle 8 and the object 11 is set short, and when the film thickness of the liquid material pattern 12 is smaller than the optimum value,
The distance between the needle 8 and the object 11 is set to be long. For example, when the optimal value of the film thickness of the liquid material pattern 12 is 30 μm and the film thickness of the liquid material pattern 12 measured in step S107 is 25 μm, the distance between the needle 8 and the object 11 is shorter by 5 μm.

Since the distance between the needle 8 and the object 11 cannot be corrected in real time,
The measurement of the thickness of the liquid material pattern 12 and the correction of the distance between the needle 8 and the object 11 are repeated, and Steps S106 to S109 are performed until the film thickness of the liquid material pattern 12 satisfies ± 1 μm with respect to a preset optimum value. .

In step S108, step S1
If the film thickness of the liquid material pattern 12 applied in step 06 satisfies ± 1 μm with respect to the preset optimum value, the liquid material pattern 12 for correcting the cross-sectional area of the liquid material pattern 12 is applied under the same conditions (step S110). The cross-sectional area of the liquid material pattern 12 is measured by the measuring means (Step S11)
1).

The arithmetic processing means 5 obtains a deviation between the preset optimal value of the cross-sectional area of the liquid material pattern 12 and the cross-sectional area of the liquid material pattern 12 measured in step S111 (step S112). Then, the liquid material discharge pressure is corrected by the arithmetic processing means 5 using automatic control theory (step S113), and the process returns to step S110.

When the sectional area of the liquid pattern 12 is larger than the optimum value, the liquid discharge pressure is set low, and when the sectional area of the liquid pattern 12 is smaller than the optimum value, the liquid discharge pressure is set high.

Since the liquid material discharge pressure cannot be corrected in real time, the liquid material application, the measurement of the cross-sectional area of the liquid material pattern 12 and the correction of the liquid material discharge pressure are repeated, and the cross-sectional area of the liquid material pattern 12 is set in advance. Till satisfying ± 5% of the optimum value of the cross-sectional area of 12.
Steps S110 to S113 are performed.

In step S112, step S1
If the cross-sectional area of the liquid material pattern 12 applied in step 10 satisfies ± 5% with respect to an optimum value set in advance, the liquid material discharge pressure and the distance between the needle 8 and the object 11 are calculated. And set as production conditions (step S114), and the setting of the optimal application conditions in the first stage is completed.

In the second and third steps, the parameters which affect the position and cross-sectional area of the coating start and end points are set. When setting the optimum coating conditions in the second and third steps, Is based on the premise that the setting of the optimal application conditions in the first stage has been completed.

Since the setting of the optimal coating conditions in the first stage has been completed, the line width, film thickness and cross-sectional area of the liquid material pattern 12 are constant at portions other than the coating start point and end point, and the second In addition, since the setting of the optimum coating condition in the third stage is not adversely affected, it is only necessary to correct the position and the cross-sectional area of the coating start point and the end point, and the setting of the optimum coating condition can be performed smoothly. .

The relationship between the application state of the liquid material pattern 12 in the second stage and each parameter will be described with reference to FIGS. FIG. 5 is a plan view illustrating the application state of the liquid material pattern 12 in the second and third stages, and FIG. 6 is a cross-sectional view taken along line BB of FIG. The BB line in FIG. 5 shows the vicinity of the application end point of the liquid material pattern 12.

A parameter that affects the position and cross-sectional area of the application end point of the liquid material pattern 12 is the application end timing, and the relative speed between the table 10 and the needle 8, that is, the application speed is usually fixed in production. Therefore, it is excluded from the parameters.

When the application end timing is the optimum value, the application state of the liquid material pattern 12 as shown by f is obtained. When the application end timing is early, the application ends without the liquid material pattern 12 being applied to the set position as in i, and when the application end timing is late, the cross-sectional area of the application end point of the liquid material pattern 12 increases as in j.

The method of setting the optimum coating conditions in the second stage will be described with reference to FIG. FIG. 7 is a flowchart illustrating a method for setting the optimum application condition in the first embodiment in the second stage. S in the figure means a step.

The application end timing is initialized (step S201), and the liquid material pattern 12 is applied on the object 11 (step S202). “Initialization” refers to setting to a value that is considered to be the optimum application condition.

The end point of the liquid material pattern 12 is measured by the measuring means (step S203). Then, the arithmetic processing means 5 compares the preset position of the end point position of the liquid material pattern 12 with the end point position of the liquid material pattern 12 measured in step S203 (step S204). If there is no, the set position and the liquid material pattern 1
The application end timing is delayed based on the distance from the end point No. 2 (step S205), and the process returns to step S202.

Since the application end timing cannot be corrected in real time, the liquid material application and the liquid material pattern 1
2 is repeated and the application end timing correction is repeated, and the end point position of the liquid material pattern 12 is ±
Step S202 to Step S
205 is performed.

In step S204, step S2
If the end point position of the liquid material pattern 12 applied in 02 is ± 30 μm with respect to the set position, the cross-sectional area of the application end point is measured by the measuring means (step S206).

The position for measuring the cross-sectional area of the coating end point is as follows:
It is desirable to measure a position about 300 μm away from the end point of application, but it is not limited to 300 μm, but may be any part that is affected by transient characteristics at the end of application.

The optimum value of the cross-sectional area of the application end point of the liquid material pattern 12 set in advance by the arithmetic processing means 5 is compared with the cross-sectional area of the application end point of the liquid material pattern 12 measured in step S206 (step S207). If the cross-sectional area at the application end point is small, the process returns to step S205, where the arithmetic processing unit 5 delays the application end timing based on the deviation from the optimum value, and returns to step S202. If the cross-sectional area of the application end point is large, the arithmetic processing means 5 advances the application end timing based on the deviation from the optimum value (step S208), and proceeds to step S2.
Return to 02.

The application end timing cannot be corrected in real time.
Step S202 to Step S208 are repeated until the cross-sectional area of the end point of Step 2 and the application end timing correction are repeated until the cross-sectional area of the end point of the liquid material pattern 12 satisfies ± 5% of the optimum value.

In step S207, step S2
If the cross-sectional area of the application end point of the liquid material pattern 12 applied in 02 satisfies ± 5% with respect to an optimal value set in advance, the application end timing is copied to the application data file of the production pattern, and the production condition is set as the production condition. The setting is performed (step S209), and the setting of the optimum application condition in the second stage is completed.

The relationship between the application state of the liquid material pattern 12 in the third stage and each parameter will be described with reference to FIGS. FIG. 8 is a sectional view taken along line CC of FIG. 5 indicates the vicinity of the application start point of the liquid material pattern 12.

The parameters that affect the position and the cross-sectional area of the application start point of the liquid material pattern 12 are the application start timing, the needle-applied liquid material suction pressure and the needle-applied liquid material suction time, and the relative speed between the table 10 and the needle 8. That is, since the application speed is usually fixed in production, it is excluded from the parameters.

Among the parameters affecting the position of the application start point and the cross-sectional area, the application start timing and the suction time of the liquid material adhering to the needle are set in advance for each viscosity and thixo ratio of the liquid material to be used and for each production pattern. Once set in accordance with the optimum value, the fixed value can be fixed. Therefore, only the suction pressure of the liquid agent adhering to the needle need be corrected and set.

When the liquid material suction pressure at the needle tip is the optimum value, the liquid material pattern 12 is applied as indicated by f. When the suction pressure of the liquid at the needle tip is low, the liquid at the needle tip cannot be completely sucked. Since the air is sucked into the needle 8 together with the liquid material, the liquid material pattern 12 is not applied to the application start point as shown by h.

The method of setting the optimum coating conditions in the third stage will be described with reference to FIG. FIG. 9 is a flowchart illustrating a method for setting the optimum application conditions in the third stage. S in the figure means a step.

The suction pressure of the liquid material adhering to the needle is initialized (step S301), and the liquid material pattern 12 is applied to the object 1 to be coated.
1 (Step S302). “Initialization” refers to setting to a value that is considered to be the optimum application condition.

The starting point position of the liquid material pattern 12 is measured by the measuring means (step S303). Then, the arithmetic processing means 5 compares the preset position of the start point position of the liquid material pattern 12 with the start point position of the liquid material pattern 12 measured in step S303 (step S304), and places the liquid material in the set position. If there is no pattern 12, the arithmetic processing means 5 lowers the liquid suction pressure on the needle tip based on the distance between the set position and the start point position of the liquid material pattern 12 (step S305), and returns to step S302.

Since the liquid suction pressure applied to the needle cannot be corrected in real time, the application of the liquid material, the measurement of the start point position of the liquid material pattern 12 and the correction of the suction pressure applied to the needle are repeated, and the start point position of the liquid pattern 12 is changed. Step S until it becomes ± 30 μm with respect to the set position.
Steps 302 to S305 are performed.

In step S304, step S3
If the start point position of the liquid material pattern 12 applied in 02 is ± 30 μm with respect to the set position, the measuring unit measures the cross-sectional area of the application start point (step S30).
6).

It is desirable to measure the cross-sectional area of the coating start point at a position about 300 μm away from the coating start point, but it is not limited to 300 μm, and the influence of the transient characteristics at the start of coating is desirable. Any part that receives it is acceptable.

The optimum value of the cross-sectional area of the application start point of the liquid material pattern 12 set in advance by the arithmetic processing means 5 is compared with the cross-sectional area of the application start point of the liquid material pattern 12 measured in Step S306 (Step S306). S307) If the cross-sectional area of the application start point is small, step S305
Returning to step S302, the suction pressure of the liquid adhering to the needle is lowered based on the deviation from the optimum value, and the process returns to step S302. If the cross-sectional area of the application start point is large, the arithmetic processing means 5 increases the suction pressure of the liquid adhering to the needle based on the deviation from the optimum value (step S308), and step S30.
Return to 2.

Since the liquid suction pressure applied to the needle cannot be corrected in real time, application of the liquid, measurement of the cross-sectional area of the starting point of the liquid pattern 12 and correction of the suction pressure applied to the needle are repeated, and the starting point of the liquid pattern 12 is repeated. Steps S302 to S308 are performed until the cross-sectional area satisfies ± 5% of the optimum value.

In step S307, step S3
If the cross-sectional area of the application start point of the liquid material pattern 12 applied in 02 satisfies ± 5% with respect to the preset optimum value, the liquid suction pressure of the needle tip is copied to the application data file of the production pattern, and the production is performed. (Step S309), the setting of the optimum coating condition in the third stage is completed, and the setting of all the coating conditions is completed.

The liquid material pattern 12 at the time of setting the optimum coating conditions in the first stage is preferably a pattern having the same coating speed as that at the time of production and including a large number of linear portions using all the nozzles 7. It is not necessary to use a pattern that fills in the pattern, and it is sufficient to apply a simple pattern such as a straight line in order to repeatedly apply and correct the pattern.

As for the liquid material pattern 12 for setting the optimum coating conditions in the second stage, the coating speed is equal to that in the production, and all the nozzles 7
A pattern including a large number of straight lines using a pattern is desirable, and need not be a pattern that fills the entire object 11 to be coated. A simple pattern such as a straight line is used because the pattern is repeatedly applied and corrected many times. It is sufficient to apply.

It is difficult to use a simple pattern such as a straight line as the first and second steps for the liquid material pattern 12 when setting the optimum application conditions in the third step.

If the moving time of the nozzle 7 from the coating end point to the next coating start point is different, the amount of the liquid material adhering to the tip of the needle 8 is different. This is because, when the production pattern is applied using a simple pattern, the suction pressure of the liquid adhering to the needle tip is not set to the optimum value.

For this reason, the liquid material pattern 12 for setting the optimum application conditions in the third stage is a simple one in which the moving time of the nozzle 7 from the application end point to the next application start point is completely equal to the production pattern. It is desirable to use a simple pattern or a production pattern.

When setting the optimum coating conditions in the first to third stages, the liquid material pattern 12
Is applied on the object 11, the liquid material pattern 12 may protrude from the object 11.

Therefore, it is necessary to perform the following coating pretreatment. This pre-coating process will be described with reference to FIG. FIG. 10 is a flowchart illustrating a method of the pre-coating process.

Using the measuring means, the position of the liquid material pattern 12 on the object 11 is measured (step S401), and the arithmetic processing means 5 determines whether or not the next liquid material pattern 12 can be applied on the object 11. (Step S402).

In step S402, the object to be coated 11
When it is determined that the next liquid material pattern 12 can be applied thereon, the pre-application processing ends.

On the other hand, if it is determined in step S402 that the next liquid material pattern 12 cannot be applied onto the object 11, the processing means 5 requests another new object 11 (step S403). It is checked whether or not the new object 11 has been set (step S404).

If another new object to be coated 11 is not set in step S404, the process proceeds to step S40.
Returning to 3, another new object 11 is requested again, and if another new object 11 is set, the pre-application processing is ended.

(Embodiment 2) The relationship between the application state of the liquid material pattern 12 in the first stage and each parameter is as described in Embodiment 1 with reference to FIGS.

The method for setting the optimum coating conditions in the first stage will be described with reference to FIG. FIG. 11 is a flowchart for explaining a method for setting the optimum application condition in the second embodiment in the first stage. S in the figure means a step.

The distance between the needle 8 and the object 11 and the setting range of the liquid material discharge pressure are manually set (step S5).
01), a large number of liquid material patterns 12 are applied under as many conditions as possible within the range (step S502).

The line width, the film thickness and the cross-sectional area of the large number of applied liquid material patterns 12 are measured by the measuring means (step S 503), and the liquid material pattern 12 closest to the preset optimum value is calculated by the arithmetic processing means 5. It is detected (step S504).

Then, the liquid material pattern 1 closest to the optimum value
2 is ±± with respect to the outer diameter of the needle 8 having the optimum line width.
The arithmetic processing means 5 determines whether or not the film thickness satisfies the production standard value of 10 μm, the film thickness ± 1 μm with respect to the optimum value, and the cross-sectional area ± 5% with respect to the optimum value (Step S50)
5).

In step S505, if the liquid material pattern 12 does not satisfy the production reference value, the process proceeds to step S5.
Returning to step 01, the distance between the needle 8 and the object 11 and the setting range of the liquid discharge pressure are manually narrowed, and steps S501 to S505 are performed until the liquid pattern 12 satisfies the production reference value.

On the other hand, in step S505, when the liquid material pattern 12 satisfies the production reference value, the distance between the needle 8 and the object 11 and the liquid material discharge pressure are copied to a production pattern application data file, and The condition is set (step S506), and the setting of the optimal application condition in the first stage is completed.

The relationship between the application state of the liquid material pattern 12 in the second stage and each parameter is as described in the first embodiment with reference to FIGS.

A method for setting the optimum coating conditions in the second stage will be described with reference to FIG. FIG. 12 is a flowchart illustrating a method for setting the optimum application conditions in the second stage in the second embodiment. S in the figure means a step.

The setting range of the application end timing is manually set (step S601), and a large number of liquid material patterns 12 are applied under as many conditions as possible within the range (step S602).

The end point position and the cross-sectional area of the end point of the many applied liquid material patterns 12 are measured by the measuring means (step S603), and the liquid material pattern 12 closest to the preset optimum value is detected by the arithmetic processing means 5. (Step S604).

Then, the liquid material pattern 1 closest to the optimum value
2, the arithmetic processing means 5 determines whether or not the end point position satisfies the production reference value of ± 30 μm with respect to the set position and the cross-sectional area of the end point ± 5% with respect to the optimum value (step S605).

In step S605, if the liquid material pattern 12 does not satisfy the production reference value, step S6
Returning to step 01, the setting range of the coating end timing is manually narrowed, and steps S601 to S605 are performed until the liquid material pattern 12 satisfies the production reference value.

On the other hand, if the liquid material pattern 12 satisfies the production reference value in step S605, the application end timing is copied to the application data file of the production pattern and set as production conditions (step S60).
6), the setting of the optimal application conditions in the second stage is completed.

The relationship between the application state of the liquid material pattern 12 in the third stage and each parameter is as described in the first embodiment with reference to FIGS.

The method for setting the optimum coating conditions in the third stage is performed as described in the first embodiment with reference to FIG. This is because a simple pattern such as a straight line is sufficient for setting the optimum coating conditions in the first and second stages, but in setting the optimum coating conditions in the third stage, the next coating start from the coating end point is started. Since it is desirable to use a simple pattern or a production pattern in which the movement time of the nozzle 7 to the point is completely equal to the production pattern,
This is because it becomes difficult to apply a large number of liquid agent patterns 12 on the object 11.

In the second embodiment as well, it is necessary to perform the pre-coating process, which is performed as described in the first embodiment with reference to FIG.

[0104]

As described above, according to the liquid medicine applying apparatus of the present invention, a liquid medicine applying apparatus for applying a liquid medicine onto a body to be coated from a needle at the tip of a nozzle to form an arbitrary liquid medicine pattern. Measuring means for measuring the liquid agent pattern applied on the object to be applied, by calculating the optimal coating conditions by data obtained from the measuring means, by having an arithmetic processing means to set the coating conditions, Since the optimal application conditions can be automatically set, even an operator with a low level of skill can set the optimal application conditions without requiring time and labor.

Further, when a plurality of nozzles are provided, a plurality of liquid agent patterns having the same shape can be simultaneously formed, so that the throughput can be improved.

Further, the measurement of the liquid material pattern by the measuring means and the calculation and setting of the optimum application conditions by the arithmetic processing means are repeated until a liquid material pattern in an optimum application state is obtained, whereby the operator's work is performed. It is possible to obtain an optimal liquid application pattern regardless of the proficiency.

Further, the liquid material pattern is applied under a plurality of application conditions, each liquid material pattern is measured by the measuring means, and the liquid material pattern in an optimum applied state is selected by the arithmetic processing means. It is possible to obtain an optimal liquid application pattern regardless of the proficiency.

[Brief description of the drawings]

FIG. 1 is a conceptual diagram showing a liquid agent application device according to the present invention.

FIG. 2 is a plan view illustrating an applied state of a liquid material pattern in a first stage.

FIG. 3 is a cross-sectional view taken along line AA of FIG.

FIG. 4 is a flowchart illustrating a method for setting optimal coating conditions in a first stage in the first embodiment.

FIG. 5 is a plan view for explaining an application state of a liquid material pattern in second and third stages.

FIG. 6 is a sectional view taken along line BB in FIG. 5;

FIG. 7 is a flowchart illustrating a method for setting optimum coating conditions in the first embodiment in the second stage.

FIG. 8 is a cross-sectional view taken along line CC of FIG.

FIG. 9 is a flowchart illustrating a method for setting optimal coating conditions in a third stage.

FIG. 10 is a flowchart illustrating a method of a coating pretreatment.

FIG. 11 is a flowchart illustrating a method for setting optimal coating conditions in Embodiment 2 in a first stage.

FIG. 12 is a flowchart illustrating a method for setting optimum coating conditions in a second stage in the second embodiment.

FIG. 13 is a perspective view showing a main part of a conventional liquid agent application device.

FIG. 14 is a perspective view showing a main part of a conventional liquid material applying apparatus using a plurality of nozzles.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Slit light source 2 Camera 3 Lighting 4 Half mirror 5 Arithmetic processing means 6 Liquid discharge control means 7 Nozzle 8 Needle 9 Table drive mechanism 10 Table 11 Coating object 12 Liquid material pattern 51 Nozzle 52 Needle 53 Table 54 Coating object 55 Liquid material pattern

Claims (3)

[Claims] 1. A liquid medicine applying apparatus for applying a liquid medicine on an object to be coated from a needle at a tip of a nozzle to form an arbitrary liquid agent pattern, and a measuring means for measuring the liquid agent pattern applied on the object to be applied. And a calculation processing means for calculating an optimum application condition based on data obtained from the measurement means and setting the application condition. 2. The method according to claim 1, wherein the measurement of the liquid material pattern by the measuring means and the calculation and setting of the optimum application condition by the arithmetic processing means are repeated until a liquid material pattern in an optimum application state is obtained. Item 6. The liquid applying apparatus according to Item 1. 3. The liquid material pattern is applied under a plurality of application conditions, each of the liquid material patterns is measured by the measuring means, and the liquid material pattern in an optimum application state is selected by the arithmetic processing means. Item 6. The liquid applying apparatus according to Item 1.