JPH11239751A - Method and apparatus for applying coating liquid on uneven substrate, method and apparatus for producing plasma display - Google Patents

Abstract

PROBLEM TO BE SOLVED: To apply a coating liquid precisely in the extension direction of the recessed part of a substrate by detecting the stripe direction of the uneven substrate and the position of the discharge hole of a coating liquid discharge device and positioning the position of the opening part of the coating liquid discharge device in the recessed part of the substrate in pursuit of the relative position of the discharge hole to the recessed part of the substrate. SOLUTION: A table 6 and a nozzle 20 in which numbers of discharge holes 44 are formed in the lower part are to a prescribed position on a Y-axis coordinate, the hole 44 in the terminal part of the nozzle 20 is brought just above a camera. Next, after a position change quantity from a camera standard position by imaging treatment, each actuation part in an applicator is restored to an original point, and the table 6 and nozzle 20 are moved to respective standard positions of X-Z axes. After that, a lift pin is brought down, after an uneven substrate 4 being positioned on the upper surface of the table 6, mounted, and fixed, the table 6 is moved with a camera 72 until the application start part (recessed part) of the substrate reaches a position just under a height sensor 40, and a coating liquid is applied in the extension direction of the recessed part of the substrate.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plasma display panel having a specific pattern of concavities and convexities formed on a substrate, in particular, a plasma display panel having fixed-shaped partition walls arranged at equal pitches,
Apparatus and method for applying a coating liquid to a concavo-convex substrate, which can be applied to the application of a constant pattern on the inner surface of a panel of a color picture tube of a stripe type black matrix type, a plasma display manufacturing apparatus using these apparatuses and methods, and It relates to improvement of a manufacturing method.

[0002]

2. Description of the Related Art In recent years, displays have become increasingly diversified in their system. One of the things that are currently attracting attention is a plasma display that is larger, thinner and lighter than conventional cathode ray tubes. That is, stripe-shaped uneven portions are formed on a glass substrate by partition walls extending in one direction at a constant pitch, and the concave portions of the uneven portions are filled with red (R), green (G), and blue (B) phosphors. Then, an arbitrary portion is caused to emit light by ultraviolet rays to achieve a predetermined color pattern.

The structure in which the phosphors are formed in a stripe shape also has a striped black matrix type color picture tube panel.

In order to manufacture such a structure with high productivity and high quality, it is important to apply phosphors in a predetermined pattern.

Usually, after a partition pattern is formed,
As shown in JP-A-144375, a phosphor of one color is screen-printed on the entire surface, and only a necessary portion is left by photolithography so that a highly accurate pattern can be obtained. However, in this method, R, G, B
In order to form each of the phosphor patterns described above, it is necessary to repeat the steps of coating, exposing, developing, and drying each color three times, which is costly and has a disadvantage that productivity is extremely poor.

As another method of simply forming a striped colored pattern on a glass substrate, there is a method described in Japanese Patent Application Laid-Open Nos. 5-1105 and 5-142407 using a nozzle. Since three colors are simultaneously applied to a substrate having a flat surface by a nozzle having a flat tip, this technique cannot be used as it is for a substrate having a surface having irregularities.

Further, Japanese Patent Application Laid-Open No. 52-134368,
JP-A-54-13250, JP-A-54-1325
No. 1 Publication and the like discloses a control device for preventing meandering or the like as a method of applying a predetermined phosphor to a concave portion between convex black matrices on the inner surface of a panel of a striped black matrix type color picture tube. It has been shown to use an improved nozzle arrangement having However, since a single nozzle is used, the method cannot be applied to a method of simultaneously applying to a plurality of uneven portions on the surface, and there is a problem that it takes time to apply using a single nozzle.

Japanese Patent Laid-Open No. 9-92134 discloses a technique of forming partition walls in a stripe pattern on a flat substrate using a nozzle.
Although it is disclosed in Japanese Patent Application Laid-Open Publication No. H10-157, it is difficult to employ a process in which a coating liquid is applied with high accuracy along a concave portion of the uneven portion because the uneven portion is already formed on the substrate.

That is, in the present invention, a coating liquid is applied to a concave portion of an uneven base material having uneven portions formed at a constant pitch in a stripe shape in one direction on the surface by a nozzle having a plurality of openings (discharge holes). It is premised that the coating is performed in a striped shape with high accuracy, but in particular, with a nozzle having such a plurality of discharge holes, along the concave portion of the uneven substrate, that is,
There is no disclosure of a technique for accurately applying a coating liquid while maintaining a predetermined positional relationship between a direction of a concave portion (a direction of a stripe) of a concave-convex substrate and a relative positional relationship with the concave portion.

[0010] In an industrial manufacturing process of a plasma display or the like that involves such coating, the coating is repeatedly performed. First, a coating liquid is trial-coated in a stripe shape, and the coating liquid is then applied. If it can be used as a reference for positioning for repeated application, positioning of the concave portion of the concave and convex base material during mass production and relative positioning between the nozzle opening and the concave portion of the concave and convex base material can be performed extremely easily and efficiently. There is a possibility, but no such proposal has been made.

Further, since the height of the projections of the uneven substrate actually fluctuates by a considerable amount, it is difficult to stably apply only the recesses unless the nozzle position is raised or lowered correspondingly. However, no specific technical means effective for long-term production is disclosed.

[0012]

SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a concave portion of an irregular base material having irregularities formed at a constant pitch in one direction on the surface, such as a partition of a plasma display, Apparatus and method for applying a coating liquid to an uneven substrate, and a plasma display, which can be easily and accurately applied uniformly along the extending direction of the substrate, thereby realizing high productivity and high quality. To provide a manufacturing apparatus and a manufacturing method.

[0013]

In order to solve the above-mentioned problems, an apparatus for applying a coating solution to an uneven substrate according to the present invention has uneven portions formed on a surface thereof at a constant pitch in a stripe shape in one direction. A table for fixing the uneven substrate, a coating liquid ejection device having a plurality of openings facing the uneven portions of the uneven substrate, supply means for supplying the coating liquid to the coating liquid ejection device, a table and the coating liquid ejection A coating liquid applying apparatus for applying a coating liquid to an uneven base material, comprising a moving means for relatively moving the apparatus three-dimensionally; a stripe direction detecting means for directly or indirectly detecting a stripe direction of the uneven base material; An opening detecting means for directly or indirectly detecting the position of the opening of the apparatus, a relative position detecting means for detecting a relative position of the opening of the coating liquid discharging device with respect to the concave portion of the uneven substrate, and a coating liquid discharging device. The position of the opening is in the recess of the uneven substrate And control means for controlling the opening of the coating liquid ejection device to move relative to the concave portion of the uneven substrate along the detected stripe direction of the uneven substrate. Consisting of (first
Equipment).

Further, according to the present invention, there is provided an apparatus for applying a coating liquid onto an uneven base material, comprising: a table for fixing an uneven base material having uneven portions formed on a surface thereof in one direction in a stripe shape at a constant pitch; A coating liquid discharge device having a plurality of openings facing the concave and convex portions of the material, supply means for supplying the coating liquid to the coating liquid discharge device, and moving means for relatively moving the table and the coating liquid discharge device three-dimensionally In a device for applying a coating liquid to an uneven base material having: a stripe direction detecting means for directly or indirectly detecting the stripe direction of the uneven base material, and the position of the opening of the coating liquid discharging device being directly or indirectly detected. And a correcting means for correcting the installation position of the uneven substrate so that the detected stripe direction is parallel to the application direction of the coating liquid, and a concave portion of the uneven substrate at the opening of the coating liquid discharge device. Relative position to detect relative position A location detection means, consisting of those and having a control means for positioning the concave portion of the uneven substrate the position of the opening of the coating liquid discharge apparatus (second apparatus).

Further, the apparatus for applying a coating liquid to an uneven substrate according to the present invention comprises a table for fixing an uneven substrate having uneven portions formed on the surface thereof in one direction in a stripe pattern at a constant pitch, A coating liquid discharge device having a plurality of openings facing the concave and convex portions of the material, supply means for supplying the coating liquid to the coating liquid discharge device, and moving means for relatively moving the table and the coating liquid discharge device three-dimensionally In a coating apparatus for applying a coating liquid to an uneven base material provided with a coating liquid, the coating liquid is once discharged from a coating liquid discharging apparatus onto a smooth substrate having a flat surface to form a coating liquid stripe. A coating liquid stripe detecting means for detecting the direction, and a stripe direction matching means for substantially matching the detected stripe direction of the coating liquid with the stripe direction of the uneven portion of the uneven base material ( Third device).

In the third apparatus, further, a coating liquid stripe position detecting means for detecting the position of the coating liquid stripe, and a control means for matching an arbitrary concave portion of the uneven substrate with the detected coating liquid stripe position. It is preferable to have

Further, in the first to third devices, furthermore, a means for detecting a height direction position of the concave bottom surface of the concave-convex base material, and a height from the concave bottom surface to the convex top of the concave-convex substrate. Calculating means for adding the height position of the detected bottom surface of the concave portion, and gap control means for controlling the gap between the top position of the convex portion of the base material and the opening surface of the coating liquid discharge device based on the calculated value. It is desirable to have.

The method of applying a coating liquid to an uneven substrate according to the present invention comprises the steps of: forming an uneven substrate having a surface on which uneven portions are formed in a stripe at a constant pitch in one direction; The coating liquid discharge device having a plurality of openings is relatively moved, and the coating liquid is supplied to the coating liquid discharge device and the coating liquid is discharged from the openings. A coating method for directly applying the stripe direction of the uneven substrate directly or indirectly, and directly or indirectly detecting the position of the opening of the coating liquid ejecting apparatus, and forming an uneven base on the opening position. While positioning the concave portion of the material, and detecting the relative position of the opening of the coating liquid discharge device with respect to the concave portion of the uneven substrate, the opening of the coating liquid discharging device is aligned with the uneven substrate along the detected stripe direction of the uneven substrate. Apply in such a way as to move relatively It consists wherein (first method).

Further, the method for applying a coating liquid to an uneven substrate according to the present invention comprises the steps of: forming an uneven substrate having a surface on which uneven portions are formed at a constant pitch in a stripe in one direction; And relatively moving the coating liquid discharge device having a plurality of openings facing the same, and discharges the coating liquid from the openings by supplying the coating liquid to the coating liquid discharge device, and into the concave portions of the uneven substrate. A coating method of applying a predetermined thickness, wherein the stripe direction of the uneven substrate is directly or indirectly detected, and the position of the opening of the coating liquid ejection device is directly or indirectly detected, and the detected stripe direction is detected. The position of the uneven base material is corrected so that is parallel to the application direction, and the relative position of the opening of the coating liquid ejection device with respect to the concave portion of the uneven base material is detected. From the method characterized by positioning and applying That (second method).

Further, the method of applying a coating liquid to an uneven substrate according to the present invention comprises the steps of: forming an uneven substrate having a surface on which uneven portions are formed at a constant pitch in a stripe shape in one direction; And relatively moving the coating liquid discharge device having a plurality of openings facing the same, and discharges the coating liquid from the openings by supplying the coating liquid to the coating liquid discharge device, and into the concave portions of the uneven substrate. A coating method of applying a predetermined thickness, wherein a coating liquid is once discharged from a coating liquid discharge device to form a stripe of the coating liquid on a smooth base material having a flat surface, and the stripe direction of the coating liquid is detected. ,
The third method is characterized in that the application direction is such that the stripe direction of the coating liquid and the stripe direction of the uneven portion of the uneven substrate are substantially coincident with each other (third method).

In the third method, after forming a stripe of the coating liquid, the position of an arbitrary stripe of the coating liquid is detected, and an arbitrary concave portion of the uneven substrate is placed at the detected stripe position of the coating liquid. It is preferable to apply the same.

In the first to third methods,
Furthermore, the height direction position of the concave bottom surface of the concave-convex base material is detected, and the detected vertical position of the concave bottom surface is added to the height from the concave bottom surface to the convex top of the concave-convex base material. It is preferable that the gap be kept constant between the top of the convex portion of the base material and the opening surface of the coating liquid ejection device based on the value.

In the plasma display manufacturing apparatus according to the present invention, the coating liquid is a paste containing a phosphor powder that emits light of any one of red, green and blue colors. It is characterized by using a coating device.

Further, in the method of manufacturing a plasma display according to the present invention, the coating liquid is a paste containing a phosphor powder that emits any one of red, green and blue colors. The method is characterized by using a coating method.

By using the first apparatus and method, the position of the opening of the coating liquid discharge device (nozzle) is detected, and also the direction of the stripes of the uneven portion of the base material is detected. The nozzle opening is relatively accurately moved along the stripe while the relative positional relationship with the concave portion of the uneven substrate is maintained in a predetermined relationship. Accordingly, a predetermined coating accuracy and a coating state are always maintained during the coating, and a high-precision coating can be performed only on the concave portions of the uneven substrate, and a desired high-quality coated substrate can be obtained.

By using the second apparatus and method, the position of the opening of the coating liquid discharge device (nozzle) can be detected, and the stripe direction of the uneven portion of the substrate can be detected. The substrate is positioned so as to be parallel to the running direction of the nozzle or the substrate. Therefore, if the coating is started or continued in this state, the opening of the nozzle and the concave portion of the concave-convex base material are accurately moved relative to each other along the stripe direction. Can be applied, and a desired high-quality coated substrate can be obtained.

Further, by using the third apparatus and method, a flat substrate is once subjected to trial coating and its stripe direction is detected, and thereafter the position of the uneven substrate in the stripe direction and width direction is adjusted. As a result, the initial reference position is clarified, and it becomes possible to easily perform subsequent positioning of the base material and the like with respect to the initial reference position, while ensuring a highly accurate coating state. In particular, production during mass production is facilitated.

By manufacturing a plasma display using such an apparatus and method, it is possible to apply the coating liquid to the concave portions of the uneven substrate accurately, uniformly, and stably. A quality plasma display can be stably manufactured without any trouble.

[0029]

Preferred embodiments of the present invention will be described below with reference to the drawings. 1 to 4 and 7
Shows a coating apparatus according to an embodiment of the present invention,
1 is an overall perspective view of the coating apparatus, FIG. 2 is a schematic view around the table 6 and the nozzle 20 of FIG. 1, and FIG. 3 is a nozzle 20 of FIG.
FIG. 4 is a plan view of a positioning unit provided in the coating apparatus, and FIG. 7 is a table rotating mechanism provided in the coating apparatus.

First, the configuration of the entire coating apparatus will be described with reference to FIGS. 1 to 3, and then position control using a positioning unit as shown in FIG. 4 will be described.

FIG. 1 shows a coating apparatus applied to manufacture of a plasma display panel according to the present invention. This coating apparatus includes a base 2. A pair of guide groove rails 8 is provided on the base 2, and a table 6 is arranged on the guide groove rails 8. A plurality of suction holes 7 are provided on the upper surface of the table 6 so that the substrate 4 having the surface formed with stripes in one direction at a constant pitch can be fixed to the table surface by vacuum suction. ing. The base material 4 is moved up and down on the table 6 by lift pins (not shown). Further, the table 6 is reciprocally movable in the X-axis direction on the guide groove rail 8 via the slide legs 9.

A feed screw 10 constituting a feed screw mechanism shown in FIG. 2 is provided between the pair of guide groove rails 8.
Nut-shaped connector 11 fixed to the lower surface of table 6
Extends through it. Both ends of the feed screw 10 are rotatably supported by bearings 12, and an AC servomotor 16 is connected to one end.

As shown in FIG. 1, above the table 6, a nozzle 20, which is a coating liquid discharge device, is connected via a holder 22 to an elevating mechanism 30 and a width direction moving mechanism 36. The elevating mechanism 30 includes an elevating bracket 28 that can be moved up and down, and is attached to a pair of guide rods inside the casing of the elevating mechanism 30 so as to be able to move up and down. A feed screw (not shown) composed of a ball screw is also rotatably disposed in the casing between the guide rods, and is connected to the lifting bracket 28 via a nut-type connector. Further, an AC servomotor (not shown) is connected to the upper end of the feed screw, and the lifting bracket 28 can be arbitrarily moved up and down by rotation of the AC servomotor.

Further, the elevating mechanism 30 is moved by a width-direction moving mechanism 36 via a Y-axis moving bracket 32 (actuator).
It is connected to the. The width direction moving mechanism 36 is for moving the Y-axis moving bracket 32 reciprocally in the width direction of the nozzle 20, that is, in the Y-axis direction. The guide rod, feed screw, nut-type connector, AC servomotor, etc. necessary for the operation are provided with a lifting mechanism 3 inside the casing.
It is arranged in the same way as 0. The width direction moving mechanism 36 is fixed on the base 2 by the columns 34.

With these configurations, the nozzle 20 can be freely moved in the Z-axis and Y-axis directions.

The nozzle 20 extends horizontally in the direction orthogonal to the reciprocating direction of the table 6, that is, in the Y-axis direction.
A U-shaped holder 22 for directly holding the holder is rotatably supported in an elevating bracket 28, and can freely rotate in a vertical direction in the direction of the arrow in the figure.

A horizontal bar 24 is also fixed to the lifting bracket 28 above the holder 22. This horizontal bar 2
4 are electromagnetically actuated linear actuators 2 at both ends.
6 is attached. This linear actuator 2
Numeral 6 has telescopic rods projecting from the lower surface of the horizontal bar 24, and these telescopic rods can regulate the rotation angle of the holder 22 by contacting both ends of the holder 22. The degree can be set arbitrarily.

Still referring to FIG. 1, an inverted L-shaped sensor support 38 is fixed to the upper surface of the base 2, and the position (height) of the bottom surface of the concave portion of the base material 4 on the table 6 is provided at the tip.
Is mounted. The height sensor 40 can be set so as to be able to measure the top of the convex portion of the base material 4. However, in many cases, the bottom surface of the concave portion is wider than the top of the convex portion, so that the measurement is easy. Instead,
It is necessary to make the overall controller 60 remember the difference between the height of the bottom of the concave portion and the height of the top of the convex portion (partition height) in advance. Next to the height sensor 40, a camera 72 for detecting the position of the concave portion between the partition walls of the base material 4 is attached to the column 70. As shown in FIG. 2, the camera 72 is electrically connected to the image processing device 74, and when the base material 4 moves in the X direction, the base material width direction (X direction) of the concave position between the predetermined partition walls. Can be determined quantitatively. That is, by this, the concave portion Y of the predetermined partition wall at which the coating starts.
The direction position Ys is obtained, and the inclination of the concave portion with respect to the X direction, that is, the direction of the concave portion can be calculated.

Further, at one end of the table 6, a sensor 66 for detecting the vertical position of the lower end surface (opening surface) of the nozzle 20 with respect to the table 6, via a sensor bracket 64, and the nozzle 20. A camera 82 for detecting the position of the opening is attached. The camera 82 is also electrically connected to the image processing device 74,
An opening position of 0 is quantitatively determined in the Y direction.

Since the camera 72 and the camera 82 are fixed at a fixed distance, the relative distance between the position of the opening of the nozzle 20 and the position of the concave portion of a predetermined partition can be obtained. If the cameras 72, 82 are configured to move,
Measuring means for indicating how much these have moved with respect to the reference position, such as a linear scale and an encoder, are required.

As shown in FIG. 2, the nozzle 20 has a manifold 41 filled with a coating liquid 42, and an ejection hole 44, which is an opening, is arranged in a straight line in the longitudinal direction on the opening end surface 45. (See FIG. 3). And this discharge hole 4
4, the coating liquid 42 is discharged. A supply hose 46 is connected to the nozzle 40.
8, a supply unit 50, a suction hose 52, an electromagnetic switching valve for suction 54, and a coating liquid tank 56. The coating liquid 42 is stored in the coating liquid tank 56. The coating liquid 42
It is composed of a paste containing a phosphor powder that emits light of any of red, green and blue colors.

Specific examples of the supply unit 50 include a piston, a constant volume pump such as a diaphragm type, a tubing pump, a gear pump, a mono pump, and a pressure feed controller for pushing out a liquid by gas pressure. In response to a control signal from the supply device controller 58, the supply unit 50 and each of the electromagnetic switching valves are operated to suck the coating liquid 42 from the coating liquid tank 56 and supply the coating liquid 42 to the nozzle 20. be able to. In order to stabilize the suction operation of the coating liquid 42 from the coating liquid tank 56 to the constant volume pump, pressure may be applied to the coating liquid tank 56 with a gas such as air or nitrogen. The magnitude of the pressure is preferably 0.01 to 1 MPa, particularly preferably 0.02 to 0.5 MPa.

The feeder controller is further electrically connected to the general controller 60. All the control information such as the motor controller 62, the electric input of the height sensor 40, the information from the image processing device 74 of the cameras 72 and 82, the height of the partition wall, and the like are electrically connected to the general controller 60. And can control the entire sequence. The general controller 60 may be a computer, a sequencer, or any controller having a control function.

The motor controller 62 includes the AC servomotor 16 for driving the table 6 and the lifting mechanism 30.
And each actuator 7 of the width direction moving mechanism 36
6, 78 (for example, an AC servomotor), a signal from a position sensor 68 for detecting the moving position of the table 6, and a linear sensor (not shown) for each of the Y and Z axes for detecting the operating position of the nozzle 20. Is input. Instead of using the position sensor 68, an encoder may be incorporated in the AC servomotor 16 and the position of the table 6 may be detected based on a pulse signal output from the encoder. Motor controller 6
2 is also controlled under the control of the overall controller 60. For example, based on information from the image processing device 74 of the camera 82, the overall controller 60 determines the position in the Y direction for aligning the opening of the nozzle 20 with the recess of the predetermined partition, and the X of the recess.
The position of the nozzle 20 in the Y direction when the base material is moved in the X direction for coating is calculated from the inclination angle with respect to the direction, and a command is sent to the motor controller 62 so that the operation can be realized.

Next, a method of applying a coating liquid using the configuration of the coating apparatus described above will be described. First, as a preparatory operation, the table 6 and the nozzle 20 are moved to the position of the Y-axis coordinate Ya so that the end of the discharge hole 44 of the nozzle 20 is directly above the camera 82. Then, the position change amount lc from the camera reference point is obtained by image processing. This operation only needs to be performed once when the nozzle 20 is attached to the holder 22. Upon completion, the table 6 and the nozzle 20 are respectively returned to the origin.

Next, when the origins of the respective operating parts in the coating apparatus are returned, the table 6 and the nozzle 20 are moved to the X axis and the Y
Move to the preparation position of the axis and Z axis. At this time, the coating liquid tank 5
The coating liquid has already been filled from No. 6 to Nozzle 20, and the discharge electromagnetic switching valve 48 is opened and the suction electromagnetic switching valve 54 is closed. Then, lift pins (not shown) rise on the surface of the table 6, and the base material 4, whose partitions are formed in a stripe pattern at a constant pitch, is placed on the lift pins from a loader (not shown).

Next, the lift pins are lowered to place the substrate 4 on the upper surface of the table 6, and after positioning on the table 6 with reference to the end surface of the substrate 4 by an alignment device (not shown), To adsorb.

Next, the table 6 is moved until the partition (bottom of the concave portion) serving as a coating start portion of the base material 4 is located immediately below the camera 72 and the height sensor 40, and is stopped. The position of the camera 72 is adjusted in advance so as to project the end of the Y-direction partition on the base material 4 positioned on the table 6, and the position of the endmost concave portion is detected by image processing, and the position of the camera 72 from the camera reference point is detected. The position change amount la is obtained. On the other hand, the reference point of the camera 72 and the nozzle 2 at the predetermined Y-axis coordinate position Ya
Since the length lb between the reference points of the camera 82 for measuring the position between the discharge holes 44 located at the extreme end of 0 is measured at the time of advance adjustment and input to the overall controller 60 as information, When the position change amount la of the partition recess from the reference point of the camera 72 is transmitted from the device 74, the Y-axis coordinate value at which the discharge hole 44 located at the end of the nozzle 20 is directly above the recess at the partition end. Yc is calculated (for example, Yc = Ya +
(Lc + lb-la)), the nozzle 20 is moved to that position. Note that the camera 72 includes the nozzle 20 and the holder 22.
The same function can be obtained even if it is attached to

Next, the substrate 4 starts moving in the X direction so that the coating start portion is located immediately below the discharge hole 44 of the nozzle 20, but the camera 72 continues to detect the position of the concave portion. Since the position of the concave portion changes, each time the Y-axis coordinate value Yc is calculated as described above, the nozzle 20 is moved to the Y-axis coordinate value Yc in accordance with the position of the base member 4 in the X direction. Let it. By the above operation, the ejection holes 44 of the nozzle 20 can be moved in accordance with the direction of the concave portion of the partition wall (stripe direction). Normally, since the concave portion of the partition wall is straight, measuring the position of the partition concave portion at two fixed points in the X direction of the base material 4 allows the inclination angle of the partition concave portion with respect to the X direction to be calculated. Calculated), the Y-axis coordinate value Yc at which the nozzle 20 is arranged may be calculated from the tilt angle. In this case, the measurement of the position of the partition wall concave portion requires only two points, so that the control can be simplified.

The means for detecting the position of the opening described above is indirect, but it is also possible to measure the end of the nozzle 20 with a position sensor 100 as shown in FIG. . In this case, the sensor 100 and the camera 7
Since the relative position Yxc with respect to the reference point 2 and the distance b from the nozzle end to the right end of the opening can be obtained in advance, the sensor 100 measures the distance Yco from the sensor 100 to the right end surface of the nozzle 20. When the coordinate value Ync of the Y-axis direction moving unit of the nozzle 20 is obtained,
Can be brought to the position of the rightmost concave portion of the base material. When the position change la from the reference point of the camera 72 to the rightmost concave portion of the base material is obtained,
The Y-axis coordinate value Y _CI is given by Y _CI = Ync− (Yxc−Yco−
b-la). The position of the opening of the nozzle 20 need only be detected once after the nozzle 20 is attached.

On the other hand, during this time, the height sensor 40 detects the vertical position of the bottom surface of the partition recess of the base material 4 and calculates the height of the bottom surface of the partition recess of the base material 4 from the difference in position from the upper surface of the table 6. . The height of the partition wall (the difference between the bottom surface and the top portion) given in advance and the opening of the nozzle 20 to the substrate 4
, The value to be lowered on the Z-axis linear sensor of the nozzle 20 is calculated, and the nozzle is moved to that position. Thereby, even if the bottom position of the partition recess on the table 6 changes for each substrate, the gap between the opening of the nozzle 20 important for coating and the top of the partition on the substrate can always be kept constant. Since the above operation can be performed even after the substrate 4 starts moving, the gap between the opening of the nozzle 20 and the top of the partition on the substrate can be kept constant over the entire region of the substrate 4.

Next, the operation is started by directing the table 6 toward the nozzle 20, and the speed is increased to a predetermined coating speed before the coating start position of the base material 4 reaches just below the opening of the nozzle 20. . The distance between the operation start position of the table 6 and the application start position must be sufficiently ensured that the speed can be increased to the application speed.

Further, the application start position of the substrate 4 is
A position sensor 68 for detecting the position of the table 6 is disposed immediately below the opening of the table 6.
When this reaches this position, the operation of the supply unit 50 is started, and the supply of the coating liquid 42 to the nozzle 20 is started. In order for the coating liquid 42 discharged from the opening of the nozzle 20 to reach the base material 4, a time delay occurs by the gap between the base material and the nozzle opening. Therefore, by supplying the coating liquid 42 to the nozzle 20 in advance, a predetermined amount of the coating liquid 42 discharged from the nozzle 20 is applied to the substrate 4 when the coating start position of the base material 4 is just below the opening of the nozzle 20. , The application can be started with almost no thickness unevenness. The position where the supply of the coating liquid 42 is started can be adjusted by changing the installation location of the position sensor 68. This position sensor 6
When an encoder is connected to the motor or the feed screw or a linear sensor is attached to the table instead of 8, a similar operation can be performed even if the value is detected by the encoder or the linear sensor.

In the application, the application end position of the substrate 4 is
The process is performed until the position is just below the opening of 0. That is,
Since the base material 4 is always placed at a predetermined position on the table 6, the coating end position of the base material 4 is (a) 5 mm before, for example, just below the opening of the nozzle 20, or (b) just below. The position sensor and its encoder value are set in advance at the position of the table 6 corresponding to the position
When the table 6 comes to the position corresponding to (a), a stop command is issued from the general controller 60 to the supply device controller 58 to stop supplying the coating liquid 42 to the nozzle 20.
The squeegee coating is performed up to the position (b), and when the table 6 comes to the position corresponding to the position (b), the nozzle 20 is raised to completely turn off the coating liquid 42. When the coating liquid 42 is a liquid having a relatively high viscosity, it is difficult to stop the supply of the coating liquid from the opening of the nozzle 20 due to the residual pressure instantaneously simply by stopping the supply of the coating liquid. Therefore, when the supply of the coating liquid is stopped, the manifold 4 in the nozzle 20 is stopped.
When the pressure is set to atmospheric pressure, the discharge of the coating liquid from the opening can be stopped in a short time. Therefore, the supply unit may be provided with such a function, or the discharge electromagnetic switching valve 48 to the nozzle 20 of the supply unit may be provided. It is desirable to provide an atmosphere release valve between them.

The table 6 continues to operate even after passing the coating end position, and stops when it reaches the end position. At this time, if the portion to be applied still remains, the nozzle is moved by the application width (nozzle pitch × number of holes) in the Y-axis direction to the next start position to be applied, and then the table 6 is moved in the opposite direction. Coating is performed in the same procedure except that it is moved. Further, since the second and subsequent times, the inclination angles of the partition recesses with respect to the X direction are substantially the same, and thus may be obtained by measurement, or the measurement may be omitted, and the Y-axis coordinate at which the nozzle 20 is arranged using the first value will be omitted. The value Yc may be obtained. Table 6 same as the first time
If the coating is performed in the moving direction, the nozzle 20 moves in the Y-axis direction to the next start position to be applied, and the table 6 moves
Return to the axis ready position.

When the application step is completed, the table 6 is moved to a place where the substrate 4 is transferred by an unloader and stopped, and the suction of the substrate 4 is released, and the substrate 4 is released to the atmosphere. The material 4 is separated from the surface of the table 6 and lifted.

At this time, the lower surface of the substrate 4 is held by an unloader (not shown), and the substrate 4 is transported to the next step. When the substrate 4 is delivered to the unloader, the table 6 lowers the lift pins and returns to the original position.

At this time, the discharge electromagnetic switching valve 48 is closed,
With the suction electromagnetic switching valve 54 opened, the supply unit 5
0 is operated, and the coating liquid is supplied from the coating liquid tank 56 in an amount necessary for coating one substrate.

In the above-described coating process, in another embodiment, before coating, a table rotating mechanism as shown in FIG. 5 is used to adjust the stripe direction of the base material 4 and the traveling direction of the nozzle 20 so as to match. I do.

FIG. 5 shows that the suction table 6 can run in the X-axis direction and can rotate in the XY plane. The parallelism between the stripe direction of the substrate 4 and the traveling direction of the suction table 6 is shown. It can be easily modified. The suction table 6 is rotatably supported on the traveling base 111, and a well-known turntable mechanism is interposed therebetween. The control of the rotation angle of the turntable mechanism
It can be performed accurately using a servomotor or the like.

The stripe direction of the substrate 4 can be detected in the following manner, for example, in addition to the above. The camera 72 shown in FIGS. 1 and 2 is a camera that detects a concave portion at the end of the uneven base material 4 and an alignment mark attached to the end, and is electrically connected to the image processing device 74.
First, the suction table 6 is caused to travel from the top to the end of the base material 4 so as to pass below the camera 72. As a result, the position of the concave portion in the Y-axis direction is changed between the start and end portions. This is detected by image processing, and the inclination of the concave portion is obtained. Since the alignment mark is provided so as to be parallel to the concave portion, the difference between the positions of the alignment marks at the head and the end in the Y-axis direction may be detected by image processing to determine the inclination of the concave portion.

Also, as described above, the camera 8
The position of the end of the opening of the nozzle 20 obtained by image processing from the image captured in Step 2 can be known by the above-described means, and the distance between the reference points of the camera 72 and the camera 82 is known in advance. The leftmost opening can be aligned with the leftmost recess of the uneven substrate 4 at the top of the substrate in the Y-axis direction. When detecting the position of the alignment mark instead of the recess, the relative distance between the alignment mark and the recess is obtained in advance, so align the recess and the nozzle opening in the same way as directly measuring the recess. Can be.

When the direction of the stripe is known by calculating the inclination of the concave portion, the direction is determined by the traveling direction (X direction) of the suction table 6.
(The tilt angle is set to zero). The top position of the concave portion to be applied changes in the Y-axis direction due to the rotation of the suction table 6, and the position may be obtained by calculation or may be measured again by the camera 72. The positioning position Yc of the nozzle 20 in the Y-axis direction is corrected.

Here, the camera 82 and the sensor 100 for detecting the opening of the nozzle 20 are arranged not only at the left and right end portions of the nozzle 20 but also at a position where a predetermined central opening can be detected. You may. Further, the camera 72 may be arranged on the right side of the suction table 6 so as to detect the rightmost concave portion and the right alignment mark, or may be configured to detect a predetermined central concave portion.

Normally, the number of holes in the opening of the nozzle 20 is smaller than the number of recesses in the substrate 4, and once applied, the coating is moved to the next position by a predetermined pitch and the coating is repeated. Is measured and it is suction table 6
Once the rotation direction is corrected to match the traveling direction of, there is no need to perform the subsequent steps.

FIG. 6 shows an example in which the stripe direction of the uneven base material 4 is adjusted after the test coating using the flat base material. 121 and 122 are cameras. First,
The top of the flat base material 123 is suction-fixed in accordance with the mark 126 on the suction table 6, and the nozzle 20 performs test coating. Do not release the applied material from the suction table 6, and attach the cameras 121, 12
2 are aligned at an appropriate distance in the X direction. At this time, the line is aligned with the cross mark at the center of the camera.

Next, the base material 4 having irregularities is placed on the suction table 6, and the base material 4 is moved by hand so that the cross-section of the cameras 121 and 122 is aligned with the leftmost concave portion. At this time, the head of the base material 4 is also made to match the mark 126 of the suction table 6. Next, when the coating is performed, the coating can be performed only on the concave portions of the base material 4.

Instead of directly aligning with the concave portion, it may be aligned with the alignment mark of the uneven substrate 4. At this time,
For example, from the alignment mark to the leftmost concave portion, it is necessary to move the nozzle 20 to the right by that distance, but if this is done, it is possible to apply only the concave portion in exactly the same way as direct alignment. If the above means is used, a means for detecting the position of the opening of the nozzle 20 like the camera 82 is not required.

The suction table 6 can be further moved and rotated in the Y-axis, so that the concave and convex substrates 4 are sucked, and then the concave portions and the alignment marks are cross-shaped by the cameras 121 and 122. Can be more easily and accurately adjusted. Further, the camera 121,
This operation can also be performed automatically by electrically connecting 122 to the image processing apparatus.

The direction and position of the stripe in the test coating can be detected and measured by the camera 72 and image processing to determine the absolute position (in the Y direction). Since the position of the discharge port of the nozzle 20 can be known from the reverse, the camera 8
Even if there is no means for directly measuring the opening of the nozzle 20 as in 2, the absolute position of the nozzle 20 can be obtained.
From above this position, the discharge port of the nozzle 20 can be applied to the concave portion of the concave-convex substrate 4 moving in the X direction by the above-described method. At this time, the camera 121,
122 is unnecessary.

The positions and inclinations of the concave portions and the alignment marks of the base material 4 are measured by the camera 72, and the measured positions and inclinations are compared with the positions and directions of the previously measured test-coated stripes. The suction table 6 may be rotated and moved in the Y-axis direction, or the suction table 6 may be rotated.
The nozzle 20 may be positioned at a predetermined position and applied to the concave portion of the substrate 4.

In the above-described overall configuration of the coating liquid application apparatus, the height sensor 40 is of a non-contact measurement type using a laser, an ultrasonic wave or the like, or a contact measurement using a dial gauge, a differential transformer, or the like. Any type of measurable principle such as a type may be used.

Further, in the above embodiment, an application example in which the substrate moves in the X-axis direction and the nozzle moves in the Y-axis and Z-axis directions has been described, but the nozzle 20 and the substrate 4 are relatively moved. The table and the nozzle may be moved in any manner as long as the structure and the form can be moved three-dimensionally.

In the above-described embodiment, the application is performed by moving the table and moving the unevenness in the pitch direction by moving the nozzle. However, the application is performed by moving the nozzle and moving the unevenness in the pitch direction. May be performed by moving the table.

Further, as the substrate in the present invention, other than a glass plate, an iron plate, an aluminum plate or the like may be used as long as it is a single-sheet type. Further, the case where one type of coating liquid is applied has been described in detail, but the present invention can be applied to a case where phosphors of three colors such as red, blue, and green are applied simultaneously.

[0076]

As described above in detail, according to the apparatus and method for applying a coating liquid to an uneven substrate according to the present invention, a plurality of discharge holes of a nozzle can be precisely formed in a stripe-shaped concave portion of the uneven substrate. Positioning can be performed, and the direction of the relative movement between the stripe direction and the nozzle, and the gap between the opening surface of the nozzle and the top of the partition wall can also be accurately adjusted. It has become possible to apply the solution with high accuracy and uniformity. As a result, the yield is not reduced by applying a portion other than the portion to be applied, so that a high yield can be realized, the productivity can be improved, and the cost can be reduced.

[Brief description of the drawings]

FIG. 1 is an overall perspective view of a coating liquid application apparatus according to an embodiment of the present invention.

FIG. 2 is a schematic diagram showing a configuration around a table 6 and a nozzle 20 of the apparatus shown in FIG.

FIG. 3 is an enlarged plan view of a nozzle 20 in the apparatus of FIG. 1 as viewed from below.

FIG. 4 is a front view of a means for indirectly measuring the opening of the nozzle 20;

FIG. 5 is a schematic perspective view showing a table rotating mechanism in the apparatus shown in FIG. 1;

FIG. 6 is a schematic plan view of a positioning / stripe direction aligning means according to another embodiment of the present invention.

[Explanation of symbols]

 2 Base 4 Base 6 Table 8 Guide groove rail 10 Feed screw 16 AC servomotor 20 Nozzle 26 Linear actuator 30 Lifting mechanism 36 Width moving mechanism 40 Height sensor 42 Coating liquid 44 Opening (discharge hole) 45 Opening surface Reference Signs List 50 supply unit 56 coating liquid tank 58 supply device controller 60 general controller 66 sensor 72 camera 82 camera 100 sensor 111 traveling base 121, 122 camera 123 flat base material 126 mark of suction table 6

Claims (12)

[Claims] 1. A coating liquid having a table for fixing an uneven base material having uneven portions formed on the surface thereof in one direction in a stripe pattern at a constant pitch, and a plurality of openings facing the uneven portions of the uneven substrate. In an apparatus for applying a coating liquid to an uneven substrate, comprising: a discharge device, a supply unit that supplies the coating liquid to the coating liquid discharge device, and a moving unit that relatively moves the table and the coating liquid discharge device three-dimensionally. Stripe direction detecting means for directly or indirectly detecting the stripe direction of the uneven substrate, opening detecting means for directly or indirectly detecting the position of the opening of the coating liquid discharging device, and opening of the coating liquid discharging device Relative position detecting means for detecting a relative position of the concave and convex base material with respect to the concave portion, and positioning the position of the opening of the coating liquid discharge device in the concave portion of the concave and convex base material and applying the coating along the detected stripe direction of the concave and convex base material. Liquid discharge device opening And having a control means for controlling to move relative concave portions of the concavo-convex substrate, a coating solution of a coating apparatus to uneven substrates. 2. A coating liquid having a table for fixing an irregular substrate having irregularities formed on the surface thereof in one direction in a stripe pattern at a constant pitch, and a plurality of openings facing the irregularities of the irregular substrate. In an apparatus for applying a coating liquid to an uneven substrate, comprising: a discharge device, a supply unit that supplies the coating liquid to the coating liquid discharge device, and a moving unit that relatively moves the table and the coating liquid discharge device three-dimensionally. Stripe direction detecting means for directly or indirectly detecting the stripe direction of the uneven substrate; opening detecting means for directly or indirectly detecting the position of the opening of the coating liquid discharge device; and the detected stripe direction being the coating liquid. Correction means for correcting the installation position of the uneven substrate so as to be parallel to the application direction of the coating liquid, relative position detecting means for detecting the relative position of the opening of the coating liquid discharge device with respect to the concave portion of the uneven liquid substrate, and the coating liquid discharge device The position of the opening And having a control means for positioning the concave portion of the timber, the coating liquid of the coating apparatus to uneven substrates. 3. A coating liquid having a table for fixing an uneven base material having uneven portions formed on the surface thereof in one direction in a stripe pattern at a constant pitch, and a plurality of openings facing the uneven portions of the uneven base material. In an apparatus for applying a coating liquid to an uneven substrate, comprising: a discharge device, a supply unit that supplies the coating liquid to the coating liquid discharge device, and a moving unit that relatively moves the table and the coating liquid discharge device three-dimensionally. A coating liquid stripe is formed by discharging the coating liquid from a coating liquid discharge device once onto a flat substrate having a flat surface, and a coating liquid stripe detecting means for detecting a stripe direction of the coating liquid; An apparatus for applying a coating liquid onto an uneven base material, comprising: a stripe direction matching means for making a stripe direction and a stripe direction of an uneven portion of the uneven base material substantially match. 4. The apparatus according to claim 1, further comprising a coating liquid stripe position detecting means for detecting the position of the coating liquid stripe, and a control means for matching an arbitrary concave portion of the uneven substrate with the detected coating liquid stripe position. 3. An apparatus for applying a coating liquid to the uneven base material. 5. A means for detecting the position of the bottom surface of the concave portion of the concave-convex base material in the height direction, and the position of the bottom surface of the concave portion detected from the bottom surface of the concave-convex substrate to the top of the convex portion. And a gap control means for controlling a gap between the top of the convex portion of the base material and the opening surface of the coating liquid discharge device based on the calculated value. 5. The apparatus for applying a coating liquid to the uneven substrate according to any one of the above items 4 to 4. 6. An uneven substrate having an uneven portion formed on a surface thereof at a constant pitch in a stripe shape in one direction, and a coating liquid discharging apparatus having a plurality of openings facing the uneven portion of the uneven substrate. A coating method of relatively moving, and supplying a coating liquid to the coating liquid discharging apparatus, discharging the coating liquid from an opening, and applying a predetermined thickness to a concave portion of the concave and convex base material, Directly or indirectly detects the direction, and directly or indirectly detects the position of the opening of the coating liquid discharge device, and positions the concave portion of the uneven substrate at the opening position, and detects the opening of the coating liquid discharge device. The coating is performed such that the opening of the coating liquid discharge device moves relatively to the uneven substrate along the detected stripe direction of the uneven substrate while detecting the relative position of the uneven surface of the uneven substrate to the recess. A method for applying a coating liquid to an uneven substrate. 7. An uneven base material having uneven portions formed on a surface thereof in a stripe pattern at a constant pitch in one direction, and a coating liquid discharge device having a plurality of openings facing the uneven portions of the uneven substrate. A coating method of relatively moving, and supplying a coating liquid to the coating liquid discharging apparatus, discharging the coating liquid from an opening, and applying a predetermined thickness to a concave portion of the concave and convex base material, Directly or indirectly detects the direction, and directly or indirectly detects the position of the opening of the coating liquid ejection device, and adjusts the installation position of the uneven substrate so that the detected stripe direction is parallel to the coating direction. Correcting and detecting the relative position of the opening of the coating liquid discharge device with respect to the concave portion of the uneven substrate, positioning the concave portion of the uneven substrate at the position of the opening, and coating the uneven liquid. How to apply the coating liquid. 8. An uneven substrate having an uneven portion formed on a surface thereof in a stripe pattern at a constant pitch in one direction, and a coating liquid discharge device having a plurality of openings facing the uneven portion of the uneven substrate. A coating method for relatively moving and supplying a coating liquid to the coating liquid discharge device and discharging the coating liquid from an opening to apply a predetermined thickness to a concave portion of the uneven substrate, wherein the surface is flat and smooth. After forming a stripe of the coating liquid by once discharging the coating liquid from the coating liquid discharge device on the substrate, the stripe direction of the coating liquid is detected,
It is characterized in that the application is performed with the stripe direction of the coating liquid and the stripe direction of the uneven portion of the uneven substrate substantially coincide with each other.
A method for applying a coating liquid to an uneven substrate. 9. After forming a stripe of the coating liquid, the position of an arbitrary stripe of the coating liquid is detected, and an arbitrary concave portion of the uneven substrate is applied to the detected stripe position of the coating liquid. The method for applying a coating liquid to the uneven substrate according to claim 8. 10. A height-direction position of the bottom surface of the concave portion of the concave-convex base material is detected, and the detected height position of the bottom surface of the concave portion is added to a height from the bottom surface of the concave portion to the top of the convex portion. The method according to any one of claims 6 to 9, wherein the coating is performed while maintaining a constant gap between the position of the top of the convex portion of the base material and the opening surface of the coating liquid discharge device based on the added value. A method for applying a coating liquid to the uneven substrate according to the above. 11. A coating solution containing a phosphor powder emitting light of any one of red, green and blue colors, wherein the coating solution coating apparatus according to any one of claims 1 to 5 is used. An apparatus for manufacturing a plasma display, comprising: 12. A method for applying a coating liquid according to claim 6, wherein the coating liquid is a paste containing a phosphor powder that emits light of any one of red, green and blue colors. A method for manufacturing a plasma display, comprising: